| Budget Amount *help |
¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2010: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2009: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2008: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
|
|---|
| Research Abstract |
An inchworm-type actuator, which was operated by the adhesion of electromagnets and deformation of piezoelectric elements, was developed. Flexible motion could be realized by six combined piezoelectric elements. Six-DOF motion was realized by the principle of a parallel mechanism and three-DOF displacement was realized by the principle of an inchworm. The position of the actuator was measured by the use of laser light sources and position sensitive detectors, which were installed on the actuator. The position was measured by the position of the light sources and the output of the detectors. The accuracy was about a few microns.
|
