Non-volatile resonant frequency control of vibratory MEMS structures using ferroelectric polarization
Project/Area Number |
20560299
|
Research Category |
Grant-in-Aid for Scientific Research (C)
|
Allocation Type | Single-year Grants |
Section | 一般 |
Research Field |
Electronic materials/Electric materials
|
Research Institution | Kyoto Institute of Technology |
Principal Investigator |
YAMASHITA Kaoru Kyoto Institute of Technology, 工芸科学研究科, 准教授 (40263230)
|
Co-Investigator(Kenkyū-buntansha) |
FUJITA Takayuki 兵庫県立大学, 工学研究科, 准教授 (50336830)
NODA Minoru 京都工芸繊維大学, 工芸科学研究科, 教授 (20294168)
|
Project Period (FY) |
2008 – 2010
|
Project Status |
Completed (Fiscal Year 2010)
|
Budget Amount *help |
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2010: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2009: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2008: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
|
Keywords | 圧電体 / 強誘電体 / 分極 / MEMS / 共振 / 応力 |
Research Abstract |
Frequency control technique of resonant MEMS (micro-electro-mechanical systems) structures using piezoelectric materials has been proposed. The role of a static deflection of the piezoelectric diaphragm structure has been clarified in the relationship between the piezoelectrically generated stress and the resonant behavior. The results have led a novel ultrasonic measurement technique with much higher accuracy than a conventional one.
|
Report
(4 results)
Research Products
(22 results)