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Study on fabrication technology of high-density silicon nanocrystals and its application to photonics elements

Research Project

Project/Area Number 20560316
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionGunma University

Principal Investigator

HANAIZUMI Osamu  Gunma University, 大学院・工学研究科, 教授 (80183911)

Co-Investigator(Kenkyū-buntansha) MIURA Kenta  群馬大学, 大学院・工学研究科, 准教授 (40396651)
Co-Investigator(Renkei-kenkyūsha) YOSHIKAWA Masahito  独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究主幹 (40354948)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,680,000 (Direct Cost: ¥3,600,000、Indirect Cost: ¥1,080,000)
Fiscal Year 2010: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2009: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2008: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywordsシリコン / ナノ結晶 / イオン注入 / 発光 / フォトニック結晶 / 光デバイス / ナノ結晶シリコン / 紫外発光
Research Abstract

We observed ultraviolet (UV)-light emission from Si-ion-implanted fused-silica substrates under an implanting condition different from our previous work. A single UV-light photoluminescence (PL) peak has been achieved. The implantation energy was 80 keV, with the implantation dose 2 x 10^<17> ions/cm^2. The Si-ion-implanted samples were annealed in ambient air at 1100, 1150, 1200, and 1250℃ for 25 min. UV-PL spectra having peaks around a wavelength of 370 nm were observed from all samples at room temperature under excitation using a He-Cd laser (・=325 nm). The maximum intensity was observed after annealing at 1250℃, and the longer wavelength PL peak around 800 nm observed from the samples annealed at 1100 and 1150℃ disappeared by annealing above 1200℃. We have successfully obtained only the UV-light emission peaks by selecting the proper annealing temperatures. UV-light emitting materials are expected to be useful as light sources for next-generation optical-disk systems whose data densities are higher than Blu-ray Disc systems.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (85 results)

All 2011 2010 2009 2008

All Journal Article (26 results) (of which Peer Reviewed: 26 results) Presentation (59 results)

  • [Journal Article] Coupled-wave analysis of vector holograms. 2. Reflective gratings formed in photoanisotropic medium with uniaxial birefringence2011

    • Author(s)
      T.Sasaki, K.Miura, O.Hanaizumi, A.Emoto, H.Ono
    • Journal Title

      Applied Optics Vol.50,No.4

      Pages: 454-459

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] A novel thermoelectric system with conductive metal rods and its effective Seebeck coefficients2011

    • Author(s)
      T.Sasaki, Y.Kondoh, O.Hanaizumi, M.Goto
    • Journal Title

      Key Engineering Materials Vol.459

      Pages: 235-238

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Demonstration of light-emitting two-dimensional photonic crystals composed of silicon-rich silicon-dioxide thin films2011

    • Author(s)
      K.Miura, O. Hanaizumi
    • Journal Title

      Key Engineering Materials Vol.459

      Pages: 173-176

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design and fabrication of novel photonic crystal waveguide consisting of Si-ion implanted SiO_2 layers2011

    • Author(s)
      A.V.Umenyi, M.Honmi, S.Kawashiri, T.Shinagawa, K.Miura, O.Hanaizumi, S.Yamamoto, A.Inouye, M.Yoshikawa
    • Journal Title

      Key Engineering Materials Vol.459

      Pages: 168-172

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical analysis of photonic band gaps and defect modes of novel photonic crystal waveguides consisting of Si-ion implanted SiO_2 using the finite-difference time-domain method2011

    • Author(s)
      A.V.Umenyi, S.Kawashiri, K.Miura, O.Hanaizumi
    • Journal Title

      Key Engineering Materials Vol.459

      Pages: 162-167

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Mach-Zehnder type thermo-optic switch with antenna-coupled Y-junction fabricated by selective photobleaching of polysilane films2011

    • Author(s)
      O.Hanaizumi, K.Miura, Y.Hiratani, Y.Machida, M.Uehara
    • Journal Title

      Key Engineering Materials Vol.459

      Pages: 153-156

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Structural analysis of RF sputtered Er doped Ta_2O_5 films2011

    • Author(s)
      J.P.Bange, M.K.Singh, K.Kano, K.Miura, O.Hanaizumi
    • Journal Title

      Key Engineering Materials Vol.459

      Pages: 32-37

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Coupled-wave analysis of vector holograms. 2. Reflective gratings formed in photoanisotropic medium with uniaxial birefringence2011

    • Author(s)
      T.Sasaki
    • Journal Title

      Applied Optics

      Volume: Vol.50 Pages: 454-451

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A novel thermoelectric system with conductive metal rods and its effective Seebeck coefficients2011

    • Author(s)
      T.Sasaki
    • Journal Title

      Key Engineering Materials

      Volume: Vol.459 Pages: 235-238

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Demonstration of light-emitting two-dimensional photonic crystals composed of silicon-rich silicon-dioxide thin films2011

    • Author(s)
      K.Miura
    • Journal Title

      Key Engineering Materials

      Volume: Vol.459 Pages: 173-176

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design and fabrication of novel photonic crystal waveguide consisting of Si-ion implanted SiO_2 layers2011

    • Author(s)
      A.V.Umenyi
    • Journal Title

      Key Engineering Materials

      Volume: Vol.459 Pages: 168-172

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Theoretical analysis of photonic band gaps and defect modes of novel photoniccrystal waveguides consisting of Si-ion implanted SiO_2 using the finite-difference time-domain method2011

    • Author(s)
      A.V.Umenyi
    • Journal Title

      Key Engineering Materials

      Volume: Vol.459 Pages: 162-167

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mach-Zehnder type thermo-optic switch with antenna-coupled Y-junction fabricated by selective photobleaching of polysilane films2011

    • Author(s)
      O.Hanaizumi
    • Journal Title

      Key Engineering Materials

      Volume: Vol.459 Pages: 153-156

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structural analysis of RF sputtered Er doped Ta_2O_5 films2011

    • Author(s)
      J.P.Bange
    • Journal Title

      Key Engineering Materials

      Volume: Vol.459 Pages: 32-37

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Coupled-wave analysis of vector holograms : effects of modulation depth of anisotropic phase retardation2010

    • Author(s)
      T.Sasaki, K.Miura, O.Hanaizumi, A.Emoto, H.Ono
    • Journal Title

      Applied Optics Vol.49,No.28

      Pages: 5205-5211

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effects of recording wavelength on three-dimensional vector holograms in photoreactive liquid crystal composites2010

    • Author(s)
      T.Sasaki, O.Hanaizumi, T.Iwato, A.Emoto, N.Kawatsuki H.Ono
    • Journal Title

      Optics Communications Vol.283,No.4

      Pages: 528-531

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Coupled-wave analysis of vector holograms : effects of modulation depth of anisotropic phase retardation2010

    • Author(s)
      T.Sasaki
    • Journal Title

      Applied Optics

      Volume: Vol.49 Pages: 5205-5211

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Effects of recording wavelength on three-dimensional vector holograms in photoreactive liquid crystal composites2010

    • Author(s)
      T.Sasaki, O.Hanaizumi, T.Iwato, A.Emoto, N.Kawatsuki, H.Ono
    • Journal Title

      Optics Communications Vol 283

      Pages: 528-531

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Intense photoluminescence from erbium-doped tantalum oxide thin films deposited by sputtering2009

    • Author(s)
      M.K.Singh, G.Fusegi, K.Kano, J.P.Bange, K.Miura, O.Hanaizumi
    • Journal Title

      IEICE Electronics Express Vol.6,No.23

      Pages: 1676-1682

    • NAID

      130000140859

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Modified finite-difference time-domain method for triangular lattice photonic crystals2009

    • Author(s)
      A.V.Umenyi, K.Miura, O.Hanaizumi
    • Journal Title

      IEEE/OSA Journal of Lightwave Technology Vol.27,No.22

      Pages: 4995-5001

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Modified finite-difference time-domain method for triangular lattice photonic crystals2009

    • Author(s)
      A.V.Umenyi, K.Miura, O.Hanaizumi
    • Journal Title

      IEEE/OSA Journal of Lightwave Technology Vol.27

      Pages: 4995-5001

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Intense photoluminescence from erbium-doped tantalum oxide thin films deposited by sputtering2009

    • Author(s)
      M.K.Singh, G.Fusegi, K.Kano, J.P.Bange, K.Miura, O.Hanaizumi
    • Journal Title

      IEICE Electronics Express Vol.6

      Pages: 1676-1682

    • NAID

      130000140859

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observation of blue-light emission from tantalum oxide films deposited by radio-frequency magnetron sputtering2008

    • Author(s)
      K.Miura, H.Miyazaki, O.Hanaizumi
    • Journal Title

      IEICE Transactions on Electronics Vol.E91-C,No.10

      Pages: 1669-1672

    • NAID

      10026819907

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of ultraviolet-light emitting Si/SiO_2 multilayered films using radio-frequency magnetron sputtering and high-temperature annealing2008

    • Author(s)
      K.Miura, Y.Kato, H.Hoshino, O.Hanaizumi
    • Journal Title

      Thin Solid Films Vol.516,No.21

      Pages: 7732-7734

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of ultraviolet-light emitting Si/SiO2 multilayered films using radio-frequency magnetron sputtering and high-temperature annealing2008

    • Author(s)
      K. Miura, Y. Kato, H. Hoshino, and O. Hanaizumi
    • Journal Title

      Thin Solid Films 516

      Pages: 7732-7734

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observation of blue-light emission from tantalum oxide films deposited by radio-frequency magnetron sputtering2008

    • Author(s)
      K. Miura, H. Miyazaki, and O. Hanaizumi
    • Journal Title

      IEICE Transactions on Electronics E91-C

      Pages: 1669-1672

    • NAID

      10026819907

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] プロトンビーム描画による光導波路デバイス形成の基礎検討2010

    • Author(s)
      三浦健太
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      機械振興会館(東京都)
    • Year and Date
      2010-12-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication of polymer optical waveguides using proton beam writing2010

    • Author(s)
      Y.Machida, M.Uehara, K.Miura, O.Hanaizumi, Y.Ishii, T.Satoh, K.Takano, T.Ohkubo, A.Yamazaki, A.Inouye, M.Koka, A.Yokoyama, T.Kamiya, T.Kojima, H.Nishikawa
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2010-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Optically controlled light propagation in waveguides using dyedoped nematic liquid crystals with homogeneous alignment2010

    • Author(s)
      T.Sasaki, K.Miura, H.Ono, O.Hanaizumi
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010), 2P34
    • Place of Presentation
      Kiryu
    • Year and Date
      2010-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] The relationship between rubbing direction and refraction index that affect liquid crystals waveguide2010

    • Author(s)
      S.Hashimoto, C.Jing, X.Wei, S.Hajar, Y.Hayakawa, T.Sasaki, K.Miura, O.Hanaizumi
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010), 2P35
    • Place of Presentation
      Kiryu
    • Year and Date
      2010-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Design and analysis of single mode polymer waveguide using PBW technique2010

    • Author(s)
      J.P.Bange, Y.Machida, M.Uehara, A.V.Umenyi, K.Miura, O.Hanaizumi
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010), 2P36
    • Place of Presentation
      Kiryu
    • Year and Date
      2010-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Y-junction waveguides for 1.5-・m band fabricated by proton beam writing2010

    • Author(s)
      M.Uehara, H.Kiryu, K.Miura, O.Hanaizumi, T.Satoh, Y.Ishii, K.Takano, T.Ohkubo, M.Kohka, A.Yamazaki, W.Kada, A.Yokoyama, T.Kamiya, H.Nishikawa
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010), 2P37
    • Place of Presentation
      Kiryu
    • Year and Date
      2010-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Fabrication and evaluation of light-emitting SiO_2 substrates implanted with Ge ions2010

    • Author(s)
      T.Shinagawa, A.V.Umenyi, S.Kikuchi, M.Aiba, K.Inada, K.Miura, O.Hanaizumi, S.Yamamoto, K.Kawaguchi, M.Yoshikawa
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010), 2P38
    • Place of Presentation
      Kiryu
    • Year and Date
      2010-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Improvement of light-emitting properties of erbium-doped tantalum-oxide films deposited by sputtering2010

    • Author(s)
      Y.Arai, K.Kano, M.K.Singh, J.P.Bange, K.Miura, O.Hanaizumi
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010), 2P39
    • Place of Presentation
      Kiryu
    • Year and Date
      2010-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Ytterbium-doped tantalum oxide thin films deposited by radio-frequency sputtering2010

    • Author(s)
      K.Kanou, Y.Arai, J.P.Bange, K.Miura, O.Hanaizumi
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010), 2P40
    • Place of Presentation
      Kiryu
    • Year and Date
      2010-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Optically controlled light propagation in waveguides using dyedoped nematic liquid crystals with homogeneous alignment2010

    • Author(s)
      T.Sasaki
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010)
    • Place of Presentation
      桐生市市民文化会館(群馬県)
    • Year and Date
      2010-12-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] The relationship between rubbing direction and refraction index that affect liquid crystals waveguide2010

    • Author(s)
      S.Hashimoto
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010)
    • Place of Presentation
      桐生市市民文化会館(群馬県)
    • Year and Date
      2010-12-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Design and analysis of single mode polymer waveguide using PBW technique2010

    • Author(s)
      J.P.Bange
    • Organizer
      6th International Symposium on Silicon Scienbe and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010)
    • Place of Presentation
      桐生市市民文化会館(群馬県)
    • Year and Date
      2010-12-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Y-junction waveguides for 1.5-μm band fabricated by proton beam writing2010

    • Author(s)
      M.Uehara
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010)
    • Place of Presentation
      桐生市市民文化会館(群馬県)
    • Year and Date
      2010-12-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication and evaluation of light-emitting SiO_2 substrates implanted with Geions2010

    • Author(s)
      T.Shinagawa
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010)
    • Place of Presentation
      桐生市市民文化会館(群馬県)
    • Year and Date
      2010-12-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Improvement of light-emitting properties of erbium-doped tantalum-oxide films deposited by sputtering2010

    • Author(s)
      Y.Arai
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010)
    • Place of Presentation
      桐生市市民文化会館(群馬県)
    • Year and Date
      2010-12-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ytterbium-doped tantalum oxide thin films deposited by radio-frequency sputtering2010

    • Author(s)
      K.Kanou
    • Organizer
      6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2010)
    • Place of Presentation
      桐生市市民文化会館(群馬県)
    • Year and Date
      2010-12-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] 液晶材料中へ記録されたベクトルホログラムの結合波解析2010

    • Author(s)
      佐々木友之
    • Organizer
      Optics & Photonics Japan 2010
    • Place of Presentation
      中央大学(東京都)
    • Year and Date
      2010-11-10
    • Related Report
      2010 Annual Research Report
  • [Presentation] プロトンビーム描画によるY分岐PMMA光導波路の試作2010

    • Author(s)
      三浦健太
    • Organizer
      第71回応用物理学会学術講演会
    • Place of Presentation
      長崎大学(長崎県)
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] 厚い異方性格子における偏光回折特性の結合波解析2010

    • Author(s)
      佐々木友之
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      千歳アルカディアプラザ(北海道)
    • Year and Date
      2010-08-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] Silicon based novel photonic crystal waveguide fabrication and numerical characterization by Si-ion implantation and FDTD method2010

    • Author(s)
      A.V. Umenyi, M.Honmi, S.Kawashiri, T.Shinagawa, K.Miura, O.Hanaizumi, S.Yamamoto, A.Inouye, M.Yoshikawa
    • Organizer
      15th Optoelectronics and Communications Conference (OECC 2010), 9E3-3
    • Place of Presentation
      Sapporo
    • Year and Date
      2010-07-09
    • Related Report
      2010 Final Research Report
  • [Presentation] Silicon based novel photonic clystal waveguide fabrication and numerical characterization by Si-ion unplantation and FDTD method2010

    • Author(s)
      A.V.Umenyi
    • Organizer
      15th Optoelectronics and Communications Conference (OECC 2010)
    • Place of Presentation
      札幌コンベンションセンター(北海道)
    • Year and Date
      2010-07-09
    • Related Report
      2010 Annual Research Report
  • [Presentation] プロトンビーム描画による波長1.5μm帯用PMMA導波路の試作(II)2010

    • Author(s)
      三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      平塚
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] プロトンビーム描画による波長1.5μm帯用シングルモードPMMA導波路2009

    • Author(s)
      三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      東京
    • Year and Date
      2009-12-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication and optimization of green light emitting Er-TaO_x films, 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)2009

    • Author(s)
      M.K.Singh, G.Fusegi, K.Kano, J.P.Bange, K.Miura, O.Hanaizumi
    • Organizer
      2P25
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Structural analysis of RF sputtered Er doped Ta_2O_5 films2009

    • Author(s)
      J.P.Bange, M.K.Singh, K.Kano, K.Miura, O.Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009), 2P26
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Fabrication of polymer optical waveguides using proton beam writing2009

    • Author(s)
      Y.Machida, M.Uehara, K.Miura, O.Hanaizumi, Y.Ishii, T.Satoh, K.Takano, T.Ohkubo, A.Yamazaki, A.Inouye, M.Koka, A.Yokoyama, T.Kamiya, T.Kojima, H.Nishikawa
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009), 2P27
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Fabrication and evaluation of wavelength-conversion devices composed of zinc oxide thin films2009

    • Author(s)
      M.Tanaka, H.Miyazaki, K.Miura, O.Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009), 2P28
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Visible-light emitting tantalum-oxide films produced by radio-frequency sputtering2009

    • Author(s)
      K.Miura, K.Kano, G.Fusegi, M.K.Singh, O.Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009), 2P29
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2010 Final Research Report
  • [Presentation] Fabrication and optimization of green light emitting Er-TaO_x films2009

    • Author(s)
      M.K.Singh, G.Fusegi, K.Kano, J.P.Bange, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Structural analysis of RF sputtered Er doped Ta_2O_5 films2009

    • Author(s)
      J.P.Bange, M.K.Singh, K.Kano, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication and evaluation of wavelength-conversion devices composed of zinc oxide thin films2009

    • Author(s)
      M.Tanaka, H.Miyazaki, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Visible-light emitting tantalum-oxide films produced by radio-frequency sputtering2009

    • Author(s)
      K.Miura, K.Kano, G.Fusegi, M.K.Singh, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Application of Si/SiO_2 materials to photonic devices2009

    • Author(s)
      O.Hanaizumi, K.Miura
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009), 1IL01
    • Place of Presentation
      Kiryu(invited)
    • Year and Date
      2009-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Novel photonic crystal waveguides utilizing Si-ion implantation2009

    • Author(s)
      S.Kawashiri, M.Honmi, A.V.Umenyi, T.Shinagawa, K.Miura, O.Hanaizumi, S.Yamamoto, A.Inouye, M.Yoshikawa
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009), 1P19
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] FDTD analysis of fused-silica substrates fabricated by Si-ion implantation for photonic crystals devices2009

    • Author(s)
      A.V.Umenyi, S.Kawashiri, K.Miura, O. Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009), 1P20
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Study on fabrication and conversion-efficiency improvement of ZnO thin film solar cells2009

    • Author(s)
      N.Hirasawa, K.Miura, O.Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009), 1P26
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Application of Si/SiO_2 materials to photonic devices2009

    • Author(s)
      O.Hanaizumi, K.Miura
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Novel photonic crystal waveguides utilizing Si-ion implantation2009

    • Author(s)
      S.Kawashiri, M.Honmi, A.V.Umenyi, T.Shinagawa, K.Miura, O.Hanaizumi, S.Yamamoto, A.Inouye, M.Yoshikawa
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] FDTD analysis of fused-silica substrates fabricated by Si-ion implantation for photonic crystals devices2009

    • Author(s)
      A.V.Umenyi, S.Kawashiri, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Study on fabrication and conversion-efficiency improvement of ZnO thin film solar cells2009

    • Author(s)
      N.Hirasawa, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] TiO_2-doped SiO_2 films deposited by flame hydrolysis deposition system for waveguide applications2009

    • Author(s)
      J.P.Bange, O.Hanaizumi, L.S.Patil, D.K.Gautam
    • Organizer
      International Conference on Optics and Photonics (ICOP-2009), BIII-1.6
    • Place of Presentation
      Chandighar, India
    • Year and Date
      2009-10-31
    • Related Report
      2010 Final Research Report
  • [Presentation] TiO_2-doped SiO_2 films deposited by flame hydrolysis deposition system for waveguide applications2009

    • Author(s)
      J.P.Bange, O.Hanaizumi, L.S.Patil, D.K.Gautam
    • Organizer
      International Conference on Optics and Photonics(ICOP-2009)
    • Place of Presentation
      Chandighar, India
    • Year and Date
      2009-10-31
    • Related Report
      2009 Annual Research Report
  • [Presentation] UV and visible light emitting fused-silica substrates fabricated by Si-ion implantation2009

    • Author(s)
      A.V.Umenyi, M.Honmi, K.Miura, O.Hanaizumi, S.Yamamoto, A.Inouye, M.Yoshikawa
    • Organizer
      16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB2009), PA-24
    • Place of Presentation
      Tokyo
    • Year and Date
      2009-09-14
    • Related Report
      2010 Final Research Report
  • [Presentation] UV and visible light emitting fused-silica substrates fabricated by Si-ion implantation2009

    • Author(s)
      A.Umenyi, M.Honmi, K.Miura, O.Hanaizumi, S.Yamamoto, A.Inouye, M.Yoshikawa
    • Organizer
      The 16th International Conference on Surtace Modification of Materials by Ion Beams(SMMIB2009)
    • Place of Presentation
      Tokyo
    • Year and Date
      2009-09-14
    • Related Report
      2009 Annual Research Report
  • [Presentation] スパッタリング法で作製したEr:TaO_x薄膜の可視発光特性2009

    • Author(s)
      三浦健太, 狩野一総, 伏木厳穣, シンマヤンク, 花泉修
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] プロトンビーム描画による波長1.5μm帯用PMMA導波路の試作2009

    • Author(s)
      三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Light emission from Er-doped Ta-oxide films fabricated by RF-sputtering2009

    • Author(s)
      M.K.Singh, G.Fusegi, K.Kanou, K.Miura, O.Hanaizumi
    • Organizer
      The International Conference on Physics of Optical Materials and Devices (ICOM2009), Poster 166
    • Place of Presentation
      Herceg Novi, Montenegro
    • Year and Date
      2009-08-28
    • Related Report
      2010 Final Research Report
  • [Presentation] Light emission from Er-doped Ta-oxide films fabricated by RF-sputtering2009

    • Author(s)
      M.K.Singh, G.Fusegi, K.Kanou, K.Miura, O.Hanaizumi
    • Organizer
      The International Conference on Physics of Optical Materials and Devices(ICOM2009)
    • Place of Presentation
      Herceg Novi, Montenegro
    • Year and Date
      2009-08-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] Siイオン注入により発現する溶融石英基板からの紫外発光2009

    • Author(s)
      三浦健太, 本美勝史, 花泉修, 山本春也, 井上愛知, 吉川正人
    • Organizer
      第42回照明学会全国大会
    • Place of Presentation
      札幌
    • Year and Date
      2009-08-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] スパッタリング法によるErドープTaO_x薄膜の作製とその発光特性2009

    • Author(s)
      三浦健太, 狩野一総, 伏木厳穣, シンマヤンク, 花泉修
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      仙台
    • Year and Date
      2009-08-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] Simple finite-difference time-domain method for triangular lattice photonic crystals2009

    • Author(s)
      A.V.Umenyi, K.Miura, O.Hanaizumi
    • Organizer
      14th Optoelectronics and Communications Conference (OECC 2009), WS5
    • Place of Presentation
      Hong Kong
    • Year and Date
      2009-07-15
    • Related Report
      2010 Final Research Report
  • [Presentation] Simple finite-difference time-domain method for triangular lattice photonic crystals2009

    • Author(s)
      A.V.Umenyi, K.Miura, O.Hanaizumi
    • Organizer
      The 14th Optoelectronics and Communications Conference(OECC 2009)
    • Place of Presentation
      Hong Kong
    • Year and Date
      2009-07-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] A new approach to simple and easy FDTD method for triangular lattice photonic crystals2009

    • Author(s)
      アマラチュクウメイニ,三浦健太,花泉修
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      つくば
    • Year and Date
      2009-03-31
    • Related Report
      2008 Annual Research Report
  • [Presentation] Modified FDTD method for triangular lattice photonic crystals2008

    • Author(s)
      アマラチュクウメイニ,三浦健太,花泉修
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      東京
    • Year and Date
      2008-12-19
    • Related Report
      2008 Annual Research Report
  • [Presentation] Fabrication of blue-light emitting tantalum oxide films by radio-frequency sputtering2008

    • Author(s)
      K.Miura, H.Miyazaki, O.Hanaizumi
    • Organizer
      IEEE Photonics Global 2008, PA-04
    • Place of Presentation
      Singapore
    • Year and Date
      2008-12-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Fabrication of blue-light emitting tantalum oxide films by radio-frequency sputtering2008

    • Author(s)
      K. Miura, H. Miyazaki, and O.Hanaizumi
    • Organizer
      IEEE Photonics Global@Singapore
    • Place of Presentation
      Singapore
    • Year and Date
      2008-12-10
    • Related Report
      2008 Annual Research Report
  • [Presentation] SiO2媒質中に分散形成されたナノ結晶シリコンが実現する青色発光体2008

    • Author(s)
      三浦健太,花泉修,山本春也,高野勝昌,杉本雅樹,吉川正人
    • Organizer
      第3回高崎量子応用研究シンポジウム
    • Place of Presentation
      高崎
    • Year and Date
      2008-10-09
    • Related Report
      2008 Annual Research Report
  • [Presentation] Improvement of emission efficiency of Si:SiO_2 sputtered films by introducing two-dimensional periodic structures2008

    • Author(s)
      K.Miura, T.Hayakawa, O.Hanaizumi
    • Organizer
      6th International Conference on Optics-photonics Design and Fabrication (ODF'08), 10PS-089
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2008-06-10
    • Related Report
      2010 Final Research Report
  • [Presentation] Improvement of emission efficiency of Si:SiO2 sputtered films byintroducing two-dimensional periodic structures2008

    • Author(s)
      K. Miura, T. Hayakawa, and O. Hanaizumi
    • Organizer
      The 6th Intenational Conference on Optics-Photonics Design and Fabrication (ODF'08)
    • Place of Presentation
      Taipei
    • Year and Date
      2008-06-10
    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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