Development of fast scanning laser probe system for RF acoustic wave devices.

• Project/Area Number: 20560317
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electron device/Electronic equipment
• Research Institution: Chiba University
• Principal Investigator: OMORI Tatsuya Chiba University, 大学院・工学研究科, 助教 (60302527)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000); Fiscal Year 2010: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2009: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2008: ¥3,250,000 (Direct Cost: ¥2,500,000、Indirect Cost: ¥750,000)
• Keywords: 弾性波デバイス / 可視化 / 計測 / 圧電応用 / 電子デバイス・機器 / 弾性波 / 計測工学

Research Abstract

This work aimed at development of high-speed laser probing system for RF acoustic wave devices. The newly developed system realized extremely fast data sampling by a skillfully applied delay compensation mechanism. It was also shown how the proposed system is effective in designing and analyzing SAW/BAW devices.

Research Products

• [Journal Article] A laser probe based on a Sagnac interferometer with fast mechanical scan for RF surface and bulk acoustic wave devices (2011)
  • Author(s): K.Hashimoto, K.Kashiwa, N.Wu, T.Omori, M.Yamaguchi, O.Takano, S.Meguro, K.Akahane
  • Journal Title: IEEE Trans. Ultrason. Ferroelectr. Freq.Contr 58 Pages: 187-194
  • Peer Reviewed
• [Journal Article] A laser probe based on a Sagnac interferometer with fast mechanical scan for RIP surface and bulk acoustic wave devices (2011)
  • Author(s): K.Hashimoto, K.Kashiwa, N.Wu, , TOmori, M.Yamaguchi O.Takano, S.Meguro, K.Akahane
  • Journal Title: IEEE Trans.Ultrason.Ferroelectr.Freq.Contr. Volume: 58 Pages: 187-194
  • Peer Reviewed
• [Journal Article] Quantitative analysis of power leakage in an film bulk acoustic resonator device at antiresonance frequency (2010)
  • Author(s): F.Thalmayr, K.Hashimoto, M.Ueda, T.Omori, M.Yamaguchi
  • Journal Title: Japan Journal of applied physics 49
  • Peer Reviewed
• [Journal Article] A multiple-scan focusing method for radio-frequency bulk acoustic wave devices observation by laser probe system (2010)
  • Author(s): N.Wu, K.Hashimoto, T.Omori, M.Yamaguchi
  • Journal Title: Japan Journal of applied physics 49
  • Peer Reviewed
• [Journal Article] Quantitative analysis of power leakage in an film bulk acoustic resonator device at antiresonance frequency (2010)
  • Author(s): F.Thalmayr, K.Hashimoto, M.Ueda, T.Omori, M.Yamaguchi
  • Journal Title: Japan Journal of applied phisics Volume: 49
  • Peer Reviewed
• [Journal Article] A multiple-scan focusing method for radio-frequency bulk acoustic wavedevices observation by laser probe system (2010)
  • Author(s): N.Wu, K.Hashimoto, T.Omori, M.Yamaguchi
  • Journal Title: Japan Journal of applied physics Volume: 49
  • Peer Reviewed
• [Journal Article] Integrated software for image processing in radio frequency surface and bulk acoustic wave laser probe system (2009)
  • Author(s): N.Wu, K.Hashimoto K.Kashiwa, T.Omori, M.Yamaguchi
  • Journal Title: Japan Journal of applied physics 48
  • Peer Reviewed
• [Journal Article] Focus adjustment system of laser robe for radio frequency surface and bulk acoustic wave devices (2009)
  • Author(s): N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi
  • Journal Title: Japan Journal of applied physics 48
  • Peer Reviewed
• [Journal Article] 弾性波可視化装置を用いたFBARにおけるエネルギー漏洩の解析 (2009)
  • Author(s): 呉楠,柏景介,大森達也,橋本研也,山口正恆
  • Journal Title: 超音波テクノ 22 Pages: 41-45
• [Journal Article] Time-delay compensation in detection electronics of fast scanning 2DSAW/BAW laser probe (2009)
  • Author(s): T.Omori, K.Kashiwa, K.Hashimoto, M.Yamaguchi
  • Journal Title: Proc. 2009 IEEE Intl. Ultrasonics symp. Pages: 1644-1647
  • Peer Reviewed
• [Journal Article] Integrated software for image processing in radio frequency surface and bulk acoustic wave laser probe system (2009)
  • Author(s): 呉楠, 橋本研也, 柏景介, 大森達也, 山口正恆
  • Journal Title: Japan Journal of applied physics 48
  • Peer Reviewed
• [Journal Article] Focus adjustment system of laser probe for radio frequency surface and bulk Acoustic wave devices (2009)
  • Author(s): 呉楠, 橋本研也, 柏景介, 大森達也, 山口正恆
  • Journal Title: Japan Journal of applied physics 48
  • Peer Reviewed
• [Journal Article] 弾性波可視化装置を用いたFBARにおけるエネルギー漏洩の解析 (2009)
  • Author(s): 呉楠, 柏景介, 大森達也, 橋本研也, 山口正恆
  • Journal Title: 超音波テクノ 22 Pages: 41-45
• [Journal Article] AIN/ダイヤモンド構造SHF帯SAWデバイス (2009)
  • Author(s): 大森達也・小林篤史・高木裕也・橋本研也・山口正恆
  • Journal Title: 超音波テクノ 21(掲載予定)
• [Journal Article] Study on the frequency dependence of lateral energy leakage in RF BAW devices by fast-scanning laser probe system (2008)
  • Author(s): N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi
  • Journal Title: Proc. 2008 IEEE Intl. Ultraonics symp. Pages: 94-97
  • Peer Reviewed
• [Journal Article] Fabrication of SHF range SAW devices on AIN/Diamond-Substrate (2008)
  • Author(s): T. Omori, A. Kobayashi, Y. Takagi, K. Hashimoto, M. Yamaguchi
  • Journal Title: Proc. 2008 IEEE Ultrasonics Symp. Pages: 196-200
  • Peer Reviewed
• [Journal Article] Study on the frequency dependence of lateral energy leakage in RF BAW devices by fast-scanning laser probe system (2008)
  • Author(s): Wu Nan, K. Hashimoto, K. Kashiwa T. Omori, M. Yamaguchi
  • Journal Title: Proc. 2008 IEEE Ultrasonics Symp. Pages: 94-97
  • Peer Reviewed
• [Presentation] 広帯域SAW 共振子の導波路解析 (2011)
  • Author(s): 巣山、島田、大森、橋本、山口
  • Organizer: 弾性波素子技術第150委員会第120回研究会
  • Place of Presentation: 東京
  • Year and Date: 2011-01-25
• [Presentation] 広帯域SAW共振子の導波路解析-不要横モード抑圧への応用- (2011)
  • Author(s): 巣山、島田、大森、橋本、山口
  • Organizer: 弾性波素子技術第150委員会第120回研究会
  • Place of Presentation: 東京
  • Year and Date: 2011-01-25
• [Presentation] 広帯域ラダー型SAWフィルタの動的温度補償の検討 (2010)
  • Author(s): 中村、小松、大森、橋本、山口
  • Organizer: 第39回EMシンポジウム
  • Place of Presentation: 東京
  • Year and Date: 2010-05-20
• [Presentation] Recent progress in phase-sensitive and fast-scanning laser probe system for RF BAW/SAW laser probe (2010)
  • Author(s): N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi
  • Organizer: 4th Intl. Symp. On acoustics wave devices forfuture mobile communication systems
  • Place of Presentation: 千葉
  • Year and Date: 2010-03-03
• [Presentation] (招待)Recent progress in phase-sensitive and fast-scanning laser probe system for RF SAW/BAW devices (2010)
  • Author(s): Nan Wu, K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi
  • Organizer: 4^<th> Intl.Symp.On acoustics wave devices for future mobile communication systems
  • Place of Presentation: 千葉
  • Year and Date: 2010-03-03
• [Presentation] Time-delay compensation in detection electronics of fast scanning 2D SAW/BAW laser probe (2009)
  • Author(s): T.Omori, K.Kashiwa, K.Hashimoto, M.Yamaguchi
  • Organizer: 2009 IEEE Intl. Ultrasonics symp.
  • Place of Presentation: Rome, Italy
  • Year and Date: 2009-09-21
• [Presentation] Fast scanning laser probing system with graphic user interface for surface ad bulk acoustic wave devices (2008)
  • Author(s): N.Wu, K.Hashimoto, K.Kashiwa, T.Omori, M.Yamaguchi
  • Organizer: 2008 Joint Japan-USA international meeting on acoustic wave devices
  • Place of Presentation: Florida, USA
  • Year and Date: 2008-12-10
• [Presentation] Fast-scanning laser probing system with graphic user interface for surface and bulk acoustic wave devices (2008)
  • Author(s): Wu Nan, K. Hashimoto, K. Kashiwa T. Omori, M. Yamaguchi
  • Organizer: 2008 Joint Japan-USA international meeting on acoustic wave devices
  • Place of Presentation: Florida, USA