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Development of Acoustic Probe for Extreme Severe Environment

Research Project

Project/Area Number 20560402
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Measurement engineering
Research InstitutionShibaura Institute of Technology

Principal Investigator

KOIKE Yoshikazu  Shibaura Institute of Technology, 工学部, 教授 (30251672)

Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2008: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords超音波 / 洗浄機 / 超純水 / 音響出力 / 計測システム / キャピテーション / 高周波 / 音圧測定
Research Abstract

In this research, we develop acoustic probes for extreme severe environment in order to detect and to measure acoustic signal. The probe is applied to two extreme severe environments. One is high temperature circumferential and the other is immersion to ultra high pure water with acoustic cavitation. Three different acoustic probes are applied. First configuration of acoustic probe is a fused quartz tube with laser Doppler vibrometer(LDV). In the glass tube, the vibration displacement is measured by LDV. The second probe is a LDV in which acoustic pressure is measured by the optical path difference. The third configuration is a optical fiber in which reflection intensity at the fiber end is measured. Acoustic pressure of a spot shower type ultrasonic cleaning machine or a waveguide type is measured, which provides the ultra high pure water with acoustic cavitation. Third harmonic component can be detected. However, the calibration to the absolute value has not been achieved.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (20 results)

All 2010 2009 2008

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (14 results)

  • [Journal Article] 導波路モードを用いた超音波用振動子による次世代半導体ウェーハ洗浄2010

    • Author(s)
      鈴木一成,潘毅,岡野勝一,副島潤一郎,小池義和
    • Journal Title

      日本音響学会誌 Vol.66, No.9

      Pages: 440-448

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 導波路モードを用いた超音波用振動子による次世代半導体ウェーバ洗浄2010

    • Author(s)
      鈴木一成, 潘毅, 岡野勝一, 副島潤一郎, 小池義和
    • Journal Title

      日本音響学会誌

      Volume: 66 Pages: 440-448

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Novel Ultrasonic Cleaning Equipment Using Waveguide Mode2009

    • Author(s)
      K.Suzuki, K.Han, S.Okano, J.Soejima, Y.Koike
    • Journal Title

      Japanese Journal of Applied Physics Vol.48, No.7

    • NAID

      210000067177

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Application of Novel Ultrasonic Cleaning Equipment Using Waveguide mode for Post-Chemical-Mechanical-Planarization Cleaning2009

    • Author(s)
      K.Suzuki, K.Han, S.Okano, J.Soejima, Y.Koike
    • Journal Title

      Japanese Journal of Applied Physics Vol.48, No.7

    • NAID

      210000067176

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] A novel cleaning equipment using ultrasonic waveguide mode2009

    • Author(s)
      K.Suzuki, K.Han, S.Okano, J.Soejima, Y.Koike
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Application of a novel cleaning equipment using ultrasonic waveguide mode to the post CMP cleaning -Cleaning efficiency of spot type shower-2009

    • Author(s)
      K.Suzuki, K.Han, S.Okano, J.Soejima, Y.Koike
    • Journal Title

      Japanese Journal of Applied Physics 48

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] Application of Novel Ultrasonic Cleaning Equipment Using Waveguide Mode for Single-Wafer Cleaning Process2010

    • Author(s)
      K.Suzuki, Y.Imazeki, K.Han, S.Okano, J.Soejima, Y.Koike
    • Organizer
      Proc.of Admeta 2010
    • Place of Presentation
      東京
    • Related Report
      2010 Final Research Report
  • [Presentation] LDVを用いた導波路管型高周波超音波洗浄機の音圧測定2010

    • Author(s)
      巽敏之,小池義和,鈴木一成
    • Organizer
      日本音響学会2010年秋季研究発表講演論文集(1247-1248)
    • Related Report
      2010 Final Research Report
  • [Presentation] 導波路管型超音波洗浄機を用いたキャビテーション制御2010

    • Author(s)
      鈴木一成,潘毅,岡野勝一,副島潤一郎,小池義和
    • Organizer
      応用物理学会講演論文集(20p-C-4)
    • Place of Presentation
      神奈川
    • Related Report
      2010 Final Research Report
  • [Presentation] Application of Novel Ultrasonic Cleaning Equipment Using Waveguide Mode for Single-Wafer Cleaning Process2010

    • Author(s)
      K.Suzuki, Y.Imazeki, K.Han, S.Okano, J.Soejima, Y.Koike
    • Organizer
      Advanced Metallization Conference 2010 : 20th Asian Session
    • Place of Presentation
      Admeta 2010 (Tokyo)
    • Related Report
      2010 Annual Research Report
  • [Presentation] LDVを用いた導波路管型高周波超音波洗浄機の音圧測定2010

    • Author(s)
      巽敏之, 小池義和, 鈴木一成
    • Organizer
      日本音響学会
    • Place of Presentation
      日本音響学会2010年秋季研究発表会(関西大学)
    • Related Report
      2010 Annual Research Report
  • [Presentation] 導波路管型高周波超音波洗浄機によるCMP後洗浄2009

    • Author(s)
      鈴木一成, 潘毅, 岡野勝一, 副島潤一郎, 小池義和
    • Organizer
      電子情報通信学会技術研究報告書
    • Place of Presentation
      東京工業大学
    • Year and Date
      2009-06-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] 導波路管型超音波洗浄機用振動子の開発2009

    • Author(s)
      鈴木, 小池, 潘, 岡野, 副島
    • Organizer
      日本音響学会
    • Place of Presentation
      東京工業大学大岡山キャンパス
    • Year and Date
      2009-03-18
    • Related Report
      2008 Annual Research Report
  • [Presentation] 次世代半導体洗浄用超音波洗浄機2009

    • Author(s)
      小池義和,鈴木一成
    • Organizer
      日本機械学会流体工学部門講演会講演論文集(1806)
    • Place of Presentation
      名古屋(招待講演)
    • Related Report
      2010 Final Research Report
  • [Presentation] 任意位置に照射可能なチューブタイプ高周波超音波洗浄機によるCMP後洗浄2009

    • Author(s)
      鈴木一成,潘毅,岡野勝一,副島潤一郎,小池義和
    • Organizer
      応用物理学会講演論文集(1p-S-11)
    • Place of Presentation
      筑波
    • Related Report
      2010 Final Research Report
  • [Presentation] 導波路管型超音波洗浄機用振動子の開発2009

    • Author(s)
      鈴木一成,潘毅,岡野勝一,副島潤一郎,小池義和
    • Organizer
      平成21年 日本音響学会春季研究発表会講演論文集(1207-1208)
    • Place of Presentation
      東京
    • Related Report
      2010 Final Research Report
  • [Presentation] Application of a novel cleaning equipment using ultrasonic waveguide mode to the post CMP cleaning -Cleaning efficiency of spot type shower-2008

    • Author(s)
      K. Suzuki, K. Han, S. Okano, J. Soejima, Y. Koike
    • Organizer
      超音波エレクトロニクスシンポジウム
    • Place of Presentation
      仙台シルバーセンター
    • Year and Date
      2008-11-13
    • Related Report
      2008 Annual Research Report
  • [Presentation] A novel cleaning equipment using ultrasonic waveguide mode2008

    • Author(s)
      K. Suzuki, K. Han, S. Okano, J. Soejima, Y. Koike
    • Organizer
      超音波エレクトロニクスシンポジウム
    • Place of Presentation
      仙台シルバーセンター
    • Year and Date
      2008-11-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] A novel cleaning equipment using ultrasonic waveguide mode2008

    • Author(s)
      K.Suzuki, K.Han, S.Okano, J.Soejima, Y.Koike
    • Organizer
      Proc.of The 29th Ultrasonic Electronics Symp.(303-304)
    • Place of Presentation
      仙台
    • Related Report
      2010 Final Research Report
  • [Presentation] 導波路管型超音波洗浄機用振動子のCMP後洗浄への適用-スポット型振動子の評価-2008

    • Author(s)
      鈴木一成,潘毅,岡野勝一,副島潤一郎,小池義和
    • Organizer
      第29回超音波エレクトロニクスシンポジウム講演論文集(361-362)
    • Place of Presentation
      仙台
    • Related Report
      2010 Final Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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