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Study on properties and functionalization of nonstoichiometric silicon-titanium nitride and oxide

Research Project

Project/Area Number 20560623
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionTohoku University

Principal Investigator

KASUKABE Yoshitaka  Tohoku University, 国際交流センター, 教授 (30194749)

Co-Investigator(Kenkyū-buntansha) SUTO Syouzo  東北大学, 理学研究科, 教授 (40171277)
Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2010: ¥390,000 (Direct Cost: ¥300,000、Indirect Cost: ¥90,000)
Fiscal Year 2009: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2008: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Keywords不定比化合物 / 窒化物 / 機能性材料 / イオン注入 / その場観察 / 透過電子顕微鏡 / 電子エネルギー損失分光 / 分子軌道計算
Research Abstract

In order to clarify atomistic growth processes of TiN_y films due to the implantation of nitrogen ions (N_2^+) with 62keV into Ti films, changes of the concentration of H and/or N atoms in Ti films, and of the crystallographic and electronic structures of the films by heating and by nitriding have been investigated by in-situ transmission electron microscope (TEM) equipped with electron energy loss spectroscopy (EELS), with the aid of molecular orbital calculations. By taking into account the bonding interaction of Ti sublattices with ligand N atoms, it is clarified that the TiN_y is epitaxially formed by the N-implantation into the hcp-Ti, through the epitaxial transformation of the hcp-Ti to fcc-Ti sublattice, partially inheriting the atomic arrangement of the hcp-Ti, and accompanying the occupation of O-sites of the transformed fcc-Ti by N atoms.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (13 results)

All 2011 2010 2009 2008 Other

All Journal Article (9 results) (of which Peer Reviewed: 9 results) Presentation (3 results) Remarks (1 results)

  • [Journal Article] In-situ Observation of Nitriding Processes of Deposited-Ti Thin Films due to Ion Implantation in an Analytical Transmission Electron Microscope2011

    • Author(s)
      Y.Kasukabe, Y.Chen, S.Yamamoto, M.Yoshikawa, Y.Fujino
    • Journal Title

      e-J. Surf. Sci. Nanotech. 9巻

      Pages: 191-198

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Behavior of N Atoms in Nitriding Processes of Evaporated-Ti Thin Filmsdue to Ion Implantation.2011

    • Author(s)
      Y.Kasukabe, Y.Watanabe, Y.Chen, S.Yamamoto, M.Yoshikawa
    • Journal Title

      JAEA-Review

      Volume: 2010-065 Pages: 137-137

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] In-situ Observation of Nitriding Prceesses of Deposited-Ti Thin Films due to Ion Implantation in an Analytical Transmission Electron Microscope.2011

    • Author(s)
      Y.Kasukabe, Y.Chen, S.Yamamoto, M.Yoshikawa, Y.Fujino
    • Journal Title

      e-J.Surf.Sci.Nanotech.

      Volume: 9 Pages: 191-198

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Heating and Nitriding Processes of Titanium Thin Films Grown on NaCl (001) Substrate Held at Room Temperature.2009

    • Author(s)
      Y.Kasukabe, Y.Watanabe, S.Yamamoto, M.Yoshikawa, Y.Fujino
    • Journal Title

      e-J. Surf. Sci. Nanotech. 7巻

      Pages: 625-632

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Heating and Nitriding Processes of Titanium Thin Films Grown on NaCl(001)Substrate Held at Room Temperature.2009

    • Author(s)
      Y.Kasukabe, Y.Watanabe, S.Yamamoto, M.Yoshikawa, Y.Fujino
    • Journal Title

      e-J.Surf.Sci.Nanotech. 7

      Pages: 625-632

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Heating and Nitriding Processes of Ti Thin Films Grown on NaCl Substrate Held at Room Temperature.2009

    • Author(s)
      Y.Kasukabe, Y.Watanabe, Y.Chen, S.Yamamoto, M.Yoshikawa
    • Journal Title

      JAEA-Review 2009-41

      Pages: 132-132

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Atomistic Nitriding Processes of Titanium Thin Films due to Nitrogen-Implantation.2008

    • Author(s)
      Y.Kasukabe, S.Nishida, S.Yamamoto, M.Yoshikawa, Y.Fujino
    • Journal Title

      Applied Surface Science 254巻

      Pages: 7942-7946

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Atomistic Nitriding Processes of Titanium Thin Films due to Nitrogen-Implantation2008

    • Author(s)
      Y. Kasukabe, S. Nishida, S. Yamamoto. M. Yoshikawa and Y. Fuiino
    • Journal Title

      Applied Surface Science 254

      Pages: 7942-7946

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Epitaxial Nitriding Processes of Titanium Thin Films due to N Implantation2008

    • Author(s)
      Y. Kasukabe, S. Yamamoto and M. Yoshikawa
    • Journal Title

      JAEA-Review 2008-055

      Pages: 139-139

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] In-situ Observation of Nitriding Processes of Evaporated-Ti Thin Films due to Ion Implantation in an Analytical Transmission Electron Microscope.2010

    • Author(s)
      Y.Chen, Y.Kasukabe, S.Yamamoto, M.Yoshikawa, Y.Fujino
    • Organizer
      The 6th International Workshop on Nano-Scale Spectroscopy and Nanotechnology (NSS6)
    • Place of Presentation
      神戸大学
    • Year and Date
      2010-10-26
    • Related Report
      2010 Final Research Report
  • [Presentation] In-situ Observation of Nitriding Prceesses of Evaporated-Ti Thin Films due to Ion Implantation in an Analytical Transmission Electron Microscope.2010

    • Author(s)
      Y.Chen, Y.Kasukabe,S.Yamamoto, M.Yoshikawa, Y.Fujino
    • Organizer
      The 6th International Workshop on Nano-Scale Spectroscopy and Nanotechnolagy (NSS6)
    • Place of Presentation
      Kobe
    • Year and Date
      2010-10-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] Characterization of Heating and Nitriding Processes of Titanium Thin Films Grown on NaCl (001) Substrate Held at Room Temperature.2008

    • Author(s)
      Y.Watanabe, Y.Kasukabe, S.Yamamoto, M.Yoshikawa, Y.Fujino
    • Organizer
      International Symposium on Surface Science and Nanotechnology (ISSS-5)
    • Place of Presentation
      早稲田大学
    • Year and Date
      2008-11-12
    • Related Report
      2010 Final Research Report
  • [Remarks] ホームページ等

    • Related Report
      2010 Final Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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