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High-Speed Defect Measurement of Next-Generation Semiconductor Wafer Using Active Control of Evanescent Light

Research Project

Project/Area Number 20569001
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Production engineering/Processing studies
Research InstitutionShizuoka University

Principal Investigator

USUKI Shin  Shizuoka University, 若手グローバル研究リーダー育成拠点, 特任助教 (60508191)

Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥3,830,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥630,000)
Fiscal Year 2010: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2009: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2008: ¥1,100,000 (Direct Cost: ¥1,100,000)
Keywords複数画像再構成 / 定在エバネッセント照明 / 空間変調照明 / エバネッセント光 / 欠陥計測 / 超解像 / ナノ計測 / 半導体表面計測 / 複数画像再構成演算
Research Abstract

First of all, the experimental apparatus was developed for fundamental verifications in generating and control of standing evanescent illumination, and in super-resolution microscopy based on multiple-image iterative reconstruction. As a result of experiments using scattered light imaging of discrete specimen, basic principles of the proposed method was confirmed. Furthermore, numerical simulations were performed to investigate the relationship between pixel size and resolving power in the proposed microscopic imaging technique. It was found that nano-scale displacements of standing evanescent illumination possibly provided us sub-pixel resolution (sub-pixel spatial sampling). Related works of this research were proposals and efficacy analyses of resolution improvement technique based on active shift of imaging path and wide-field three dimensional structured illumination generation technique using multiple-beam interference.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (32 results)

All 2011 2010 2009 2008 Other

All Journal Article (10 results) (of which Peer Reviewed: 10 results) Presentation (14 results) Remarks (8 results)

  • [Journal Article] High-Resolution Tolerance Against Noise Imaging Technique Based on Active Shift of Optical Axis2011

    • Author(s)
      S.Usuki, K.T.Miura
    • Journal Title

      International Journal of Automation Technology 5巻

      Pages: 206-211

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] High-Resolution Tolerance Against Noise Imaging Technique Based on Active Shift of Optical Axis2011

    • Author(s)
      S.Usuki, K.T.Miura
    • Journal Title

      International Journal of Automation Technology

      Volume: Vol.5 Pages: 206-211

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Simulation-Based Analysis of Influence of Error on Super-Resolution Optical Inspection2011

    • Author(s)
      R.Kudo, S.Usuki, S.Takahashi, K.Takamasu
    • Journal Title

      International Journal of Automation Technology

      Volume: Vol.5 Pages: 167-172

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift2010

    • Author(s)
      S.Usuki, H.Nishioka, S.Takahashi, K.Takamasu
    • Journal Title

      The International Journal of Advanced Manufacturing Technology 46巻

      Pages: 863-875

    • NAID

      120001893845

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift2010

    • Author(s)
      S.Usuki, H.Nishioka, S.Takahashi, K.Takamasu
    • Journal Title

      The International Journal of Advanced Manufacturing Technology Vol.46

      Pages: 863-875

    • NAID

      120001893845

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 定在エバネッセント波照明による超解像イメージング2009

    • Author(s)
      高橋哲, 臼杵深, 高増潔
    • Journal Title

      光学 38巻

      Pages: 364-372

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] 定在エバネッセント波照明による超解像イメージング2009

    • Author(s)
      高橋哲, 臼杵深, 高増潔
    • Journal Title

      光学 Vol.38

      Pages: 364-372

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Study on residual resist layer thickness measurement for Nanoimprint Lithography based on near-field optics2009

    • Author(s)
      S.Takahashi, S.Minamiguchi, T.Nakao, S.Usuki, K.Takamasu
    • Journal Title

      International Journal of Surface Science and Engineering Vol.3

      Pages: 178-194

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light2008

    • Author(s)
      S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu
    • Journal Title

      Measurement Science and Technology 19

      Pages: 84006-84006

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift2008

    • Author(s)
      S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu
    • Journal Title

      The International Journal of Advanced Manufacturing Technology (online)

    • NAID

      120001893845

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Resolution Improvement of Optical Imaging by Spatial Control of Light and Multi-Image Reconstruction2011

    • Author(s)
      臼杵深
    • Organizer
      International Symposium on Ultraprecision Engineering and Nanotechnology
    • Place of Presentation
      東洋大学(東京都)(Invited Paper)
    • Year and Date
      2011-03-15
    • Related Report
      2010 Final Research Report
  • [Presentation] Resolution Improvement of Optical Imaging by Spatial Control of Light and Multi-Image Reconstruction2011

    • Author(s)
      S.Usuki
    • Organizer
      International Symposium on Ultraprecision Engineering and Nanotechnology
    • Place of Presentation
      東洋大学白山キャンパス(東京都) 招待講演
    • Year and Date
      2011-03-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] サブピクセル光軸変位を用いた解像度向上に関する研究2010

    • Author(s)
      臼杵深, 三浦憲二郎
    • Organizer
      2010年度精密工学会秋季大会学術講演会
    • Place of Presentation
      名古屋大学土東山キャンパス(愛知県)
    • Year and Date
      2010-09-28
    • Related Report
      2010 Annual Research Report
  • [Presentation] Resolution Characteristics of Super-Resolution Optical Inspection Using Standing Wave Illumination2010

    • Author(s)
      R.Kudo, S.Usuki, S.Takahashi, K.Takamasu
    • Organizer
      10th International Symposium on Measurement and Quality Control
    • Place of Presentation
      Osaka University Convention Center (大阪府)
    • Year and Date
      2010-09-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] High-Resolution Imaging Technique Based on Active Shift of Optical Axis2010

    • Author(s)
      S.Usuki, K.T.Miura
    • Organizer
      10th International Symposium on Measurement and Quality Control
    • Place of Presentation
      Osaka University Convention Center (大阪府)
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] Multiple image reconstruction for high-resolution optical imaging using structured illumination2010

    • Author(s)
      臼杵深
    • Organizer
      SPIE Optics+Photonics 2010
    • Place of Presentation
      San Diego Convention Center(アメリカ)(Invited Paper)
    • Year and Date
      2010-08-03
    • Related Report
      2010 Final Research Report
  • [Presentation] Multiple image reconstruction for high-resolution optical imaging using structured illumination2010

    • Author(s)
      S.Usuki, R.Kudo, S.Takahashi, K.Takamasu
    • Organizer
      SPIE Optics+Photonics 2010
    • Place of Presentation
      San Diego Convention Center (カリフォルニア州) 招待講演
    • Year and Date
      2010-08-03
    • Related Report
      2010 Annual Research Report
  • [Presentation] High-Resolution Optical Imaging Technique Based on Active Control of Spatial Distribution of Structured Illumination2009

    • Author(s)
      S.Usuki, R.Kudo, S.Takahashi, K.Takamasu
    • Organizer
      The 12^<th> International Conference on Humans and Computers
    • Place of Presentation
      浜松市, 静岡大学
    • Year and Date
      2009-12-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Resolving Power Improvement for Optical Nano-Defect Measurement by using Sub-Pixel Sampling based on Structured Illumination Shift Method2009

    • Author(s)
      S.Usuki, R.Kudo, S.Takahashi, K.Takamasu
    • Organizer
      Asian Symposium for Precision Engineering and Nanotechnology
    • Place of Presentation
      北九州市, 小倉ステーションホテル (ASPEN会議会場)
    • Year and Date
      2009-11-12
    • Related Report
      2009 Annual Research Report
  • [Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査2009

    • Author(s)
      臼杵深
    • Organizer
      2009年度精密工学会春季大会学術講演会
    • Place of Presentation
      中央大学(東京都)
    • Year and Date
      2009-03-11
    • Related Report
      2010 Final Research Report
  • [Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査 (第8報) -CCDピクセルサイズと解像力の関係-2009

    • Author(s)
      臼杵深, 工藤良太, 高橋哲, 高増潔
    • Organizer
      2009年度精密工学会春季大会学術講演会
    • Place of Presentation
      東京都文京区, 中央大学
    • Year and Date
      2009-03-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] 定在波シフトによる半導体ウエハ表面の超解像光学式欠陥検査2009

    • Author(s)
      臼杵深
    • Organizer
      2009年度精密工学会春季大会学術講演会
    • Place of Presentation
      中央大学
    • Year and Date
      2009-03-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] 定在エバネッセント光を用いた超解像顕微法に関する研究2008

    • Author(s)
      臼杵深
    • Organizer
      2008年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学(宮城県)
    • Year and Date
      2008-09-17
    • Related Report
      2010 Final Research Report
  • [Presentation] 定在エバネッセント光を用いた超解像顕微法に関する研究2008

    • Author(s)
      臼杵深
    • Organizer
      2008年度精密工学会秋季大会学術講演会
    • Place of Presentation
      東北大学
    • Year and Date
      2008-09-17
    • Related Report
      2008 Annual Research Report
  • [Remarks] ホームページ等

    • URL

      http://www.shizuoka.ac.jp/tenure/

    • Related Report
      2010 Final Research Report
  • [Remarks]

    • URL

      http://ktmll.eng.shizuoka.ac.jp/profile/usuki/index.html

    • Related Report
      2010 Final Research Report
  • [Remarks] 静岡大学Realistic Modeling Laboratory

    • URL

      http://ktm11.eng.shizuoka.ac.jp/

    • Related Report
      2010 Annual Research Report
  • [Remarks] 東京大学精密機械工学専攻知的ナノ計測分野

    • URL

      http://www.nanolab.t.u-tokyo.ac.jp/

    • Related Report
      2010 Annual Research Report
  • [Remarks] 東京大学精密機械工学専攻知的ナノ計測分野

    • URL

      http://www.nanolab.t.u-tokyo.ac.jp/

    • Related Report
      2009 Annual Research Report
  • [Remarks] 静岡大学若手グローバル研究リーダー育成拠点

    • URL

      http://www.shizuoka.ac.jp/tenure/

    • Related Report
      2009 Annual Research Report
  • [Remarks] 東京大学精密機械工学専攻知的ナノ計測分野

    • URL

      http://www.nanolab.t.u-tokyo.ac.jp/

    • Related Report
      2008 Annual Research Report
  • [Remarks] 静岡大学若手グローバル研究リーダー育成拠点

    • URL

      http://www.shizuoka.ac.jp/tenure/

    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-11-18  

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