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Sensing Based on Nanomechanical systems coupled with stochastic resonance

Research Project

Project/Area Number 20676001
Research Category

Grant-in-Aid for Young Scientists (S)

Allocation TypeSingle-year Grants
Research Field Applied physics, general
Research InstitutionTohoku University

Principal Investigator

ONO Takahito  東北大学, 大学院・工学研究科, 教授 (90282095)

Project Period (FY) 2008 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥100,880,000 (Direct Cost: ¥77,600,000、Indirect Cost: ¥23,280,000)
Fiscal Year 2012: ¥9,360,000 (Direct Cost: ¥7,200,000、Indirect Cost: ¥2,160,000)
Fiscal Year 2011: ¥22,880,000 (Direct Cost: ¥17,600,000、Indirect Cost: ¥5,280,000)
Fiscal Year 2010: ¥22,880,000 (Direct Cost: ¥17,600,000、Indirect Cost: ¥5,280,000)
Fiscal Year 2009: ¥23,920,000 (Direct Cost: ¥18,400,000、Indirect Cost: ¥5,520,000)
Fiscal Year 2008: ¥21,840,000 (Direct Cost: ¥16,800,000、Indirect Cost: ¥5,040,000)
Keywordsマイクロマシン / 確率共鳴 / 非線形性 / 振動子 / 結合振動子 / 高感度センサ / 熱量センサ / 細胞 / 演算素子 / 同期現象 / ナノ機械 / マイクロ電気機械 / 共振
Research Abstract

Bistable states of the vibration amplitude of micro/nano-resonators are realized using its mechanical nonlinearity. Those resonators exhibit stochastic resonance state by applying external noise, in addition, respond to external stimulus. It is shown that the resonators can be applicable to robust sensors. For same purpose, an array of resonators with self-sensing function has been developed. In addition, possibility of mechanical logic devices has been shown using mechanically coupled resonators.

Assessment Rating
Verification Result (Rating)

A

Report

(8 results)
  • 2013 Research Progress Assessment (Verification Result) ( PDF )
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report   Self-evaluation Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (81 results)

All 2013 2012 2011 2010 2009 2008 Other

All Journal Article (36 results) (of which Peer Reviewed: 33 results) Presentation (35 results) Book (6 results) Remarks (3 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Pico calorimeter for detection of heat produced in an individual brown fat cell2012

    • Author(s)
      N. Inomata, M. Toda, M. Sato, A. Ishijima, and T. Ono
    • Journal Title

      Applied Physics Letters

      Volume: 100 Issue: 15 Pages: 154104-154104

    • DOI

      10.1063/1.3701720

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Piezoresistive Silicon Microresonator for Measurements of Hydrogen Adsorption in Carbon Nanotubes2012

    • Author(s)
      Zhonglie An, Masayoshi Esashi, and Takahito Ono
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 51 Issue: 11R Pages: 116601-4

    • DOI

      10.1143/jjap.51.116601

    • NAID

      40019496248

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Hermetically Packaged Silicon Resonator on LTCC Substrate2012

    • Author(s)
      Nguyen Van TOAN, Hidetoshi MIYASHITA, Masaya TODA, Yusuke KAWAI, and Takahito ONO
    • Journal Title

      Microsystem technologies

      Volume: 23 Issue: 8 Pages: 1165-1175

    • DOI

      10.1007/s00542-012-1716-5

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Suspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquid2012

    • Author(s)
      Masaya Toda, Tomoyuki Otake, Hidetoshi Miyashita, Yusuke Kawai, Takahito Ono
    • Journal Title

      Microsystem technologies

      Volume: 19 Issue: 7 Pages: 1049-1054

    • DOI

      10.1007/s00542-012-1698-3

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of a Si-PZT hybrid XY-microstage with CNT-carbon hinges2012

    • Author(s)
      Liang He, Masaya Toda, Yusuke Kawai, Mohd Faizul Sarbi, Mamoru Omori, Toshiyuki Hashida, Takahito Ono
    • Journal Title

      電気学会論文誌E

      Volume: 132 Pages: 425-426

    • NAID

      10031120180

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] ナノ計測を可能にするツール2012

    • Author(s)
      小野崇人
    • Journal Title

      応用物理

      Volume: 81 Pages: 45-50

    • NAID

      10030158263

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Modeling and Experimental Analysis on the Nonlinearity of Single Crystal Silicon Cantilevered Microstructures2011

    • Author(s)
      Yonggang Jiang, Masayoshi Esashi, Takahito Ono
    • Journal Title

      電気学会論文誌E

      Volume: 131 Pages: 195-196

    • NAID

      10030532706

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Micro wishbone interferometer for Fourier transform infrared spectrometry2011

    • Author(s)
      Young-Min Lee, Masaya Toda, Masayoshi Esashi, Takahito Ono
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 21 Issue: 6 Pages: 065039-065039

    • DOI

      10.1088/0960-1317/21/6/065039

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Design issues of piezoresistive nanocantilever sensors with non-uniform nanoscale doping profiles2011

    • Author(s)
      Yonggang Jiang, Masayoshi Esashi, Takahito Ono
    • Journal Title

      電気学会論文誌E

      Volume: 131 Pages: 270-271

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Bimorph cantilevers actuated by focused laser from the side2011

    • Author(s)
      Masaya Toda, Naoki Inomata, Takahito Ono
    • Journal Title

      電気学会論文誌E

      Volume: 131 Pages: 327-331

    • NAID

      10030533007

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurements of the phase transition and the average length of the density fluctuation under supercritical fluid using micromechanical resonators2011

    • Author(s)
      Masaya Toda, Takashi Fujii, Atsushi Yoshida, Toshiyuki Hashida, Takahito Ono
    • Journal Title

      Applied Physics Letters

      Volume: 99 Issue: 7

    • DOI

      10.1063/1.3610942

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz2010

    • Author(s)
      Akihiro Takahashi, Masayoshi Esashi and Takahito Ono
    • Journal Title

      Nanotechnology

      Volume: 21 Issue: 40 Pages: 405502-405502

    • DOI

      10.1088/0957-4484/21/40/405502

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Mechanically coupled synchronized resonators for resonant sensing applications2010

    • Author(s)
      Jinyang Feng, Xiongying Ye, Masayoshi Esashi, and Takahito Ono
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 20

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Mechanically coupled synchronized resonators for resonant sensing applications2010

    • Author(s)
      Jinyang Feng, Xiongying Ye, Masayoshi Esashi, Takahito Ono
    • Journal Title

      Journal of Micromechanics and Microengineering 20

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz2010

    • Author(s)
      Akihiro Takahashi, Masayoshi Esashi, Takahito Ono
    • Journal Title

      Nanotechnology 21

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Design and fabrication of a scanning near-field microscopy probe with integrated zinc oxide photoconductive antennas2010

    • Author(s)
      Kentaro Iwami, Takahito Ono, Masayoshi Esashi
    • Journal Title

      Sensors and Materials

      Volume: 22 Pages: 135-142

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of biomaterial cantilever beam for heat sensing at atmospheric pressure2010

    • Author(s)
      Masaya Toda, Takahito Ono, Fei Liu, Ioana Voiculescu
    • Journal Title

      Review of Scientific Instruments

      Volume: 81

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electrostatic actuator with curved electrodes for time-of-flight scanning force microscopy2010

    • Author(s)
      Chuan-Yu Shao, Yusuke Kawai, Masayoshi Esashi, Takahito Ono
    • Journal Title

      Review of Scientific Instruments

      Volume: 81

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Quartz-crystal scanning probe microcantilevers with a silicon tip based on direct bonding of silicon and quartz2010

    • Author(s)
      Akihiro Takahashi, Masayoshi Esashi, Takahito Ono
    • Journal Title

      Nanotechnology

      Volume: 21

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Mechanically coupled synchronized resonators for resonant sensing applications2010

    • Author(s)
      Jinyang Feng, Xiongying Ye, Masayoshi Esashi, Takahito Ono
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 20

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Temperature-dependent mechanical and electrical properties of boron-doped2009

    • Author(s)
      Yonggang Jiang, Takahito Ono, and Masayoshi Esashi
    • Journal Title

      piezoresistive nanocantilevers, Journal of Micromechanics and Microengineering

      Volume: 19 Issue: 11 Pages: 65030-65030

    • DOI

      10.1088/0960-1317/20/11/115001

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Thermal imaging with tapping mode using a bimetal oscillator formed at the endof a cantilever2009

    • Author(s)
      Sang-Jin Kim, Takahito Ono, and Masayoshi Esashi
    • Journal Title

      Review of Scientific Instruments

      Volume: 80 Issue: 3

    • DOI

      10.1063/1.3095680

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Temperature-dependent mechanical and electrical properties of boron-doped, piezoresistive nanocantilevers2009

    • Author(s)
      Y. Jiang, T. Ono, M. Esashi
    • Journal Title

      Journal of Micromechanics and Microengineering 19

      Pages: 65030-65030

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Temperature-dependent mechanical and electrical properties of boron-doped, piezoresistive nanocantilevers2009

    • Author(s)
      蒋永剛, 小野崇人, 江刺正喜
    • Journal Title

      Journal of Micromechanics and Microengineering 19

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Modeling and Experimental validation of the performance of a silicon XY-microstage driven by PZT actuators2009

    • Author(s)
      Mohd Faizul, Mohd Sabri, 小野崇人, 江刺正喜
    • Journal Title

      Micromechanics and Microengineering 19

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] The fablication of metallic tip with silicon cantilever for probe-based ferroelectric data storage and their durability experiments2009

    • Author(s)
      Hirokazu Takahashi, Yasuhiro Mimura, Shuntaro Mori, Masahiro Ishimori, Atsushi Onoe, 小野崇人, 江刺正喜
    • Journal Title

      Nanotechnology 20

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 非線形ナノ・マイクロ振動子を用いたノイズ励起によるセンシング2009

    • Author(s)
      小野崇人、吉田祐介、蒋永剛、江刺正喜
    • Journal Title

      Nanotechnology 62

      Pages: 131-137

    • NAID

      40016697715

    • Related Report
      2009 Annual Research Report
  • [Journal Article]2009

    • Author(s)
      小野崇人(執筆分担)
    • Journal Title

      MEMS/NEMS工学全集(桑野博喜監修)、走査型プローブ顕微鏡(執筆分担)(テクノシステム)

      Pages: 74-7450

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Thermal imaging with tapping mode using a bimetal oscillator formed at the end of a cantilever2009

    • Author(s)
      Sang-Jin Kim, Takahito Ono, and Masavoshi Esashi
    • Journal Title

      Review of Scientific Instruments 80

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection2008

    • Author(s)
      Y. G. Jiang, T. Ono, and M. Esashi
    • Journal Title

      Measurement Science and Technology

      Volume: 19

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Noise-enhanced Sensing of Light and Magnetic Force Based on a Nonlinear Silicon Microresonator2008

    • Author(s)
      Takahito Ono, Yusuke Yoshida, Yong-Gang Jiang, and Masayoshi Esashi
    • Journal Title

      Applied Physics Express

      Volume: 1 Pages: 123001-123001

    • DOI

      10.1143/apex.1.123001

    • NAID

      10025083762

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Noise-enhanced Sensing of Light and Magnetic Force Based on a Nonlinear Silicon Microresonator2008

    • Author(s)
      T. Ono, Y. Yoshida, Y.-G. Jiang, M. Esashi
    • Journal Title

      Applied Physics Express 1

    • NAID

      10025083762

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Fabrication of piezoresistive nanocantilevers for ultra-sensitive force detection2008

    • Author(s)
      Y. G. Jiang, T. Ono, M. Esashi
    • Journal Title

      Measurement Science and Technology 19

    • Related Report
      2010 Self-evaluation Report
    • Peer Reviewed
  • [Journal Article] Fabrication of piezoresistive nanocantilevers for ultra-sensitive force de tection2008

    • Author(s)
      Y. G. Jiang, T. Ono, and M. E sashi
    • Journal Title

      Measurement Science and Technology 19

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] シリコンマイクロ振動子を用いた高感度熱機械変換素子2008

    • Author(s)
      小野崇人
    • Journal Title

      豊田研究報告 61

      Pages: 143-148

    • NAID

      40016102091

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Noise-enhanced Sensing of Light and Magnetic Force Based on a Nonl inear Silicon Microresonator2008

    • Author(s)
      T. Ono, Y. Yoshida, Y. -G. Jian g, and M. Esashi
    • Journal Title

      Applied Physics Express 1

    • NAID

      10025083762

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Fabrication and packaging process of silicon resonators capable of the integration of LSI for application of timing device2013

    • Author(s)
      Nguyen Van Toan, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
    • Organizer
      The IEEE International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2013-01-23
    • Related Report
      2012 Annual Research Report
  • [Presentation] Parametrically driven resonant micro-mirror scanner with tunable spring2013

    • Author(s)
      Jinhyeok Kim, Yusuke Kawai, Naoki Inomata and Takahito Ono
    • Organizer
      The IEEE International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2013-01-23
    • Related Report
      2012 Annual Research Report
  • [Presentation] Parametrically-Amplified Resonant Micro-mirror with Tunable Springs2012

    • Author(s)
      Jinhyeok Kim, Yusuke Kawai, Naoki Inomata, Takahito Ono
    • Organizer
      センサ・マイクロマシンと応用システム
    • Place of Presentation
      北九州市
    • Year and Date
      2012-10-23
    • Related Report
      2012 Annual Research Report
  • [Presentation] Design and fabrication of capacitive silicon resonator on LTCC substrate2012

    • Author(s)
      Toan Nguyen Van, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
    • Organizer
      International Conference on Micro and Nano Engineering (MNE)
    • Place of Presentation
      Toulouse, France
    • Year and Date
      2012-09-20
    • Related Report
      2012 Annual Research Report
  • [Presentation] Design and fabrication of capacitive silicon resonator on LTCC substrate2012

    • Author(s)
      Toan Nguyen Van, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, Takahito Ono
    • Organizer
      international Conference on Micro and Nano Engineering (MNE)
    • Place of Presentation
      Toulouse, France
    • Year and Date
      2012-09-20
    • Related Report
      2012 Annual Research Report
  • [Presentation] Microsystems based on Additive Micro/Nanofabrication Processes2012

    • Author(s)
      Takahito Ono
    • Organizer
      Solid-State Systems Symposium -VLSls & Semiconductor Related Technologies
    • Place of Presentation
      Ho Chi Minh City, Vietnam (Invited)
    • Year and Date
      2012-08-23
    • Related Report
      2012 Annual Research Report
  • [Presentation] Resonant Thermal Sensor for a living cell in liquid2012

    • Author(s)
      N. Inomata, M. Toda, M. Sato, A. Ishijima, and T. Ono
    • Organizer
      The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)
    • Place of Presentation
      Paris, France
    • Year and Date
      2012-04-01
    • Related Report
      2012 Final Research Report
  • [Presentation] Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling element2012

    • Author(s)
      Keitaro Tanno, Yusuke Kawai, and Takahito Ono
    • Organizer
      The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS2010)
    • Place of Presentation
      Paris, France
    • Year and Date
      2012-04-01
    • Related Report
      2012 Final Research Report 2011 Annual Research Report
  • [Presentation] Microchanneled resonant heat sonsor for a living cell2011

    • Author(s)
      Masaya Toda, Tomoyuki Otake, Naoki Inomata, Takahito Ono
    • Organizer
      Microprocess and Nanotechnology Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      2011-10-26
    • Related Report
      2012 Final Research Report
  • [Presentation] Coupled mechanical Si resonators and its entrainment condition2011

    • Author(s)
      Keitaro Tanno and Takahito Ono
    • Organizer
      Microprocess and Nanotechnology Conference
    • Place of Presentation
      Kyoto
    • Year and Date
      2011-10-25
    • Related Report
      2012 Final Research Report
  • [Presentation] Vacuum-packaged Resonant Thermal Sensor for Biological Cell in liquid2011

    • Author(s)
      N.Inomata, M.Toda, T.Ono
    • Organizer
      Microprocess and Nanotechnology Conference
    • Place of Presentation
      京都
    • Year and Date
      2011-10-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] Coupled mechanical Si resonators and its entrainment condition2011

    • Author(s)
      Keitaro Tanno, Takahito Ono
    • Organizer
      Microprocess and Nanotechnology Conference
    • Place of Presentation
      京都
    • Year and Date
      2011-10-25
    • Related Report
      2011 Annual Research Report
  • [Presentation] 結合機械的Si振動子とその同期条件2011

    • Author(s)
      丹野慶太朗, 小野崇人
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      東京
    • Year and Date
      2011-09-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] 液中における細胞熱計測のための真空封止マイクロカンチレバー型熱量センサ2011

    • Author(s)
      猪股直生, 戸田雅也, 小野崇人
    • Organizer
      センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      東京
    • Year and Date
      2011-09-26
    • Related Report
      2011 Annual Research Report
  • [Presentation] Assembling of three dimensional microstructures using clip mechanism of microspring2011

    • Author(s)
      Kyosuke Kotani, Yusuke Kawai, Chuan-Yu Shao, Takahito Ono
    • Organizer
      MEMS 2011
    • Place of Presentation
      Cancum, MEXICO
    • Year and Date
      2011-01-25
    • Related Report
      2010 Annual Research Report
  • [Presentation] Parallel array of noise-activated nonlinear micro-resonators with integrated actuators2011

    • Author(s)
      Yusuke Yoshida, Susuke Kawai, Takahito Ono
    • Organizer
      MEMS 2011
    • Place of Presentation
      Cancum, MEXICO
    • Related Report
      2010 Annual Research Report 2010 Self-evaluation Report
  • [Presentation] A Development of Automated Chemical-Solution-Deposition Machine for Micro Actuator with Multilayered PZT Thick Film2010

    • Author(s)
      Yusuke Kawai, Nobuyoshi Moriwaki, Takahito Ono, Masayoshi Esashi
    • Organizer
      IEEE Sensors
    • Place of Presentation
      Hawaii, USA
    • Year and Date
      2010-11-02
    • Related Report
      2010 Annual Research Report
  • [Presentation] A Development of automated multilayered sol-gel deposition machine for micro actuator with PZT thick film2010

    • Author(s)
      Yusuke Kawai, Nobuyoshi Moriwaki, Masayoshi Esashi, Takahito Ono
    • Organizer
      第27回センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2010-10-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Ultra-high sensitive bimorph cantilever for heat sensing2010

    • Author(s)
      Masaya Toda, Naoki Inomata, Takahito Ono
    • Organizer
      第27回センサ・マイクロマシンと応用システムシンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2010-10-14
    • Related Report
      2010 Annual Research Report
  • [Presentation] Nonlinear Micromechanical Bistable Resonator Capable of Vibration Switching by Thermomechanical Noise at Room Temperature2010

    • Author(s)
      Yusuke Yoshida and Takahito Ono
    • Organizer
      The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, Perth
    • Place of Presentation
      Western Australia
    • Year and Date
      2010-07-07
    • Related Report
      2012 Final Research Report
  • [Presentation] Nonlinear Micromechanical Bistable Resonator Capable of Vibration Switching by Thermomechanical Noise at Room Temperature2010

    • Author(s)
      Yusuke Yoshida, Takahito Ono
    • Organizer
      The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology
    • Place of Presentation
      Perth, Western Australia
    • Year and Date
      2010-07-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology2010

    • Author(s)
      Takahito Ono, Hidetoshi Miyashita, Masaya Toda, Yusuke Kawai, He Liang, Masayoshi Esashi
    • Organizer
      The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology
    • Place of Presentation
      Perth, Western Australia
    • Year and Date
      2010-07-07
    • Related Report
      2010 Annual Research Report
  • [Presentation] Micromechanically-Coupled Resonated System for Synchroniced Oscillation with Inproved phase noise2010

    • Author(s)
      Dong F Wang, Jinyang Feng, Takahito Ono, Masayoshi Esashi, Xiongying Ye
    • Organizer
      IEEE International Conference on Micro Electro Mechanical Systems
    • Place of Presentation
      Hong Kong
    • Year and Date
      2010-01-26
    • Related Report
      2009 Annual Research Report
  • [Presentation] Characterization of two beam-shaped cantilevers coupled with a micro mechanical element2009

    • Author(s)
      Dong F Wang, Jinyang Feng, Takahito Ono, Masayoshi Esashi
    • Organizer
      Microprocesses and Nanotechnology 2009
    • Place of Presentation
      札幌
    • Year and Date
      2009-11-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] Microsystems for Nanoscale Processing2009

    • Author(s)
      T.Ono
    • Organizer
      Second International Workshop on Nanotechnology and Application(IWNA 2009)
    • Place of Presentation
      Vun Tau, Vietnam
    • Year and Date
      2009-11-13
    • Related Report
      2009 Annual Research Report
  • [Presentation] Applications of NEMS devices2009

    • Author(s)
      T.Ono
    • Organizer
      The 6th Conference on Solid State Physics and Materials Science(SPMA-2009)
    • Place of Presentation
      Da Nang, Vietnam
    • Year and Date
      2009-11-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Noise-enhanced sensing using micromechanical nonlinear resonator2009

    • Author(s)
      Yusuke Yoshida, Takahito Ono
    • Organizer
      2009 International Conference on Solid State Devices and Materials
    • Place of Presentation
      仙台
    • Year and Date
      2009-10-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Noise-enhanced sensing using micromechanical nonlinear resonator2009

    • Author(s)
      Yusuke Yoshida and Takahito Ono
    • Organizer
      The 2009 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Sendai
    • Year and Date
      2009-10-07
    • Related Report
      2012 Final Research Report
  • [Presentation] Integration process of carbon nanotube piezoresistive elements into microstructure2009

    • Author(s)
      Naoki Oda, Takahito Ono, Masayoshi Esashi
    • Organizer
      Trends in Nanotechnology
    • Place of Presentation
      Barceloca, Spain
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Development of 100-nm-thick self-sensing nanocantilever and characterization of the temperaturedependence of the piezoresistivity and conductivity2009

    • Author(s)
      Yonggang Jiang, Takahito Ono, and Masayoshi Esashi
    • Organizer
      Proceeding of International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Denver, USA
    • Year and Date
      2009-06-24
    • Related Report
      2012 Final Research Report
  • [Presentation] Development of 100-nm-thick self-sensing nanocantilever and characterization of the temperature dependence of the piezoresistivity and conductivity2009

    • Author(s)
      Yonggang Jiang, Takahito Ono, Masayoshi Esashi
    • Organizer
      Proceeding of International Conference on Solid-State Sensors, Actuators and Microsystems
    • Place of Presentation
      Denver, USA
    • Year and Date
      2009-06-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] Micromechanical nonlinear bistable resonators for robust sensing2009

    • Author(s)
      Yusuke Yoshida, Takahito Ono, Masayoshi Esashi
    • Organizer
      International Workshop on Nanomechanical Cantilever Sensors
    • Place of Presentation
      Jeju, Korea
    • Year and Date
      2009-05-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] Synchronized mechanical elements for resonance sensing application2008

    • Author(s)
      Jinyang Feng
    • Organizer
      電気学会センサ・マイクロマシン部門総合研究会
    • Place of Presentation
      仙台
    • Related Report
      2008 Annual Research Report
  • [Presentation] Piezoresistive nanocantilevers with an ultra-shallow boron doped layer usine spin-on diffusion method for MRFM application2008

    • Author(s)
      Y. G. Jiang
    • Organizer
      The 4^<th> Asia Pacific Conference on Transducers and Micro/Nano Technologies
    • Place of Presentation
      台湾(台南市)
    • Related Report
      2008 Annual Research Report
  • [Presentation] Experimental investigation on nonlinearity of single crystal silicon nan ocantilevers2008

    • Author(s)
      Y. G. Jiang
    • Organizer
      The 2^<nd> IEEE Nanotechnology Materials and Dev ices Conference
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2008 Annual Research Report
  • [Book] Encyclopedia of Nanotechnology, Springer Science+Business Medhia B.V.2012

    • Author(s)
      Takahito Ono, Masayoshi Esashi
    • Publisher
      Microfabricated Probe Technology
    • Related Report
      2012 Final Research Report
  • [Book] ナノ計測を可能にするツール,応用物理81,12012

    • Author(s)
      小野崇人
    • Publisher
      日本応用物理学会
    • Related Report
      2012 Final Research Report
  • [Book] Microfabricated Probe Technology, Encyclopedia Of Nanotechno logy2012

    • Author(s)
      Takahito Ono
    • Publisher
      Springer
    • Related Report
      2012 Annual Research Report
  • [Book] アクチュエータ-研究開発の最前線-,集積化マイクロステージ2011

    • Author(s)
      小野崇人
    • Publisher
      エヌティーエス出版
    • Related Report
      2011 Annual Research Report
  • [Book] 近接場のセンシング・イメージング技術への応用-最新のバイオ・化学・デバイス分野への展開-,第4章MEMSプローブ2010

    • Author(s)
      小野崇人
    • Publisher
      シーエムシー出版
    • Related Report
      2010 Annual Research Report
  • [Book] 豊田研究報告(シリコンマイクロ振動子を用いた高感度熱機械変換素子)2008

    • Author(s)
      小野崇人
    • Related Report
      2010 Self-evaluation Report
  • [Remarks]

    • URL

      http://www.nme.mech.tohoku.ac.jp/

    • Related Report
      2012 Final Research Report
  • [Remarks]

    • URL

      http://www.nme.mech.tohoku.ac.jp/

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://www.nme.mech.tohoku.ac.jp/

    • Related Report
      2010 Self-evaluation Report
  • [Patent(Industrial Property Rights)] 赤外線検出センサ2008

    • Inventor(s)
      松岡元、小野崇人、江刺正喜
    • Industrial Property Rights Holder
      東北大学、住友精密工業
    • Filing Date
      2008-08-29
    • Related Report
      2010 Self-evaluation Report

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Published: 2008-04-01   Modified: 2019-07-29  

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