Development of a novel ultra light-weight and high angular resolution space X-ray telescope based on micromachining technologies

• Project/Area Number: 20684006
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Astronomy
• Research Institution: Tokyo Metropolitan University
• Principal Investigator: EZOE Yuichiro Tokyo Metropolitan University, 理工学研究科, 助教 (90462663)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥15,340,000 (Direct Cost: ¥11,800,000、Indirect Cost: ¥3,540,000); Fiscal Year 2010: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000); Fiscal Year 2009: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000); Fiscal Year 2008: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
• Keywords: X線γ線天文学 / X線望遠鏡 / X線天文学 / マイクロマシン技術

Research Abstract

High performance and light-weight space X-ray telescopes are now recognized as a key technology for next generation X-ray astronomy satellites. We are developing a novel ultra light-weight X-ray optics based on micromachining technologies. For the first time in the world, we have succeeded to verify X-ray reflection using Si and Ni X-ray mirrors fabricated by our method and to verify X-ray imaging using a test Si optics.

Research Products

• [Journal Article] Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray potics (2010)
  • Author(s): Ikuyuki Mitsuishi、Yuichiro Ezoe, ほか10名
  • Journal Title: IEEE J.Quantum Electron. 46 Pages: 1309-1309
  • Peer Reviewed
• [Journal Article] Simulation-based study of MEMS X-ray optics for Microanalysis (2010)
  • Author(s): Yuichiro Ezoe, ほか5名
  • Journal Title: IEEE J.Quantum Electron. 46 Pages: 1295-1295
  • Peer Reviewed
• [Journal Article] Development of an alternating magnetic field assisted finishing process for MEMS micropore X-ray optics (2010)
  • Author(s): Raul E.Riveros、Yuichiro Ezoe, ほか8名
  • Journal Title: Applied Optics 49 Pages: 3511-3511
  • Peer Reviewed
• [Journal Article] Magnetic field assisted finishing for micro-pore X-ray focusing mirrors fabricated by deep reactive ion etching (2010)
  • Author(s): Hitomi Yamaguchi, Yuichiro Ezoe, ほか6名
  • Journal Title: CIRP Annals 59 Pages: 351-351
  • Peer Reviewed
• [Journal Article] Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for Space X-ray Telescope (2010)
  • Author(s): Yuichiro Ezoe, ほか15名
  • Journal Title: Microsystem Technologies 16 Pages: 1633-1633
  • Peer Reviewed
• [Journal Article] Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for Space X-ray Telescopes (2010)
  • Author(s): Y.Ezoe, et al.
  • Journal Title: Microsystem Technologies Volume: 16 Pages: 1633-1641
  • Peer Reviewed
• [Journal Article] Magnetic field assisted finishing for micro-pore X-ray focusing mirrors fabricated by deep reactive ion etching (2010)
  • Author(s): H.Yamaguchi, et al.
  • Journal Title: CIRP Annual Manufacturing Technologies Volume: 59 Pages: 351-354
  • Peer Reviewed
• [Journal Article] Simulation-based study of MEMS X-ray optics for Microanalysis (2010)
  • Author(s): Y.Ezoe, et al.
  • Journal Title: IEEE Journal of Quantum Electronics Volume: 46 Pages: 1295-1300
  • Peer Reviewed
• [Journal Article] Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics (2010)
  • Author(s): I.Mitsuishi, et al.
  • Journal Title: IEEE Journal of Quantum Electronics Volume: 46 Pages: 1309-1312
  • Peer Reviewed
• [Journal Article] Development of an alternating magnetic field assisted finishing process for MEMS micro- pore X-ray optics (2010)
  • Author(s): R.E.Riveros, et al.
  • Journal Title: Applied Optics Volume: 49 Pages: 3511-3521
  • Peer Reviewed
• [Journal Article] Magnetic Field Assisted Finishing of Silicon MEMS Micro-pore X-ray Optics (2010)
  • Author(s): R.E.Raveros, et al.
  • Journal Title: Prceeedings of ASME 2010(査読付の国際会議収録論文)
  • Peer Reviewed
• [Journal Article] Magnetic field assisted finishing of ultra-lightweight and high-resolution MEMS X-ray micro- pore optics (2009)
  • Author(s): Raul E.Riveros、Yuichiro Ezoe, ほか7名
  • Journal Title: Proceedings of SPIE 7360 Pages: 736042-736042
• [Journal Article] Novel ultra-lightweight and high-resolution MEMS X-ray optics (2009)
  • Author(s): Ikuyuki Mitsuishi、Yuichiro Ezoe, ほか13名
  • Journal Title: Proceedings of SPIE 7360 Pages: 736049-736049
• [Journal Article] Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for Space X-ray Telescopes
  • Author(s): Y.Ezoe, et al.
  • Journal Title: Microsystem Technologies (In press)
  • Peer Reviewed
• [Journal Article] Magnetic field assisted finishing for micro-pore X-ray focusing mirrors fabricated by deep reactive ion etching
  • Author(s): H.Yamaguchi, et al.
  • Journal Title: CIRP Annual Manufacturing Technologies (In press)
  • Peer Reviewed
• [Journal Article] Simulation-based study of MEMS X-ray optics for Microanalysis
  • Author(s): Y.Ezoe, et al.
  • Journal Title: IEEE Journal of Quantum Electronics (In press)
  • Peer Reviewed
• [Journal Article] Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics
  • Author(s): I.Mitsuishi, et al.
  • Journal Title: IEEE Journal of Quantum Electronics (In press)
  • Peer Reviewed
• [Presentation] Recent progress in MEMS X-ray Optics (2011)
  • Author(s): Y.Ezoe, et al.
  • Organizer: International Workshop on Astronomical X-ray Optics
  • Place of Presentation: Chez(招待)
  • Year and Date: 2011-12-09
• [Presentation] Study on Fabrication of Ni Mirror Chip for Space X-ray Telescopes Utilizing LIGA Process (2010)
  • Author(s): M.Horade, et al.
  • Organizer: MHS 2010
  • Place of Presentation: Nagoya
  • Year and Date: 2010-11-09
• [Presentation] MEMS-Based X-ray Optics for Future Astronomical Missions (2010)
  • Author(s): Y.Ezoe, et al.
  • Organizer: Optical MEMS
  • Place of Presentation: Sapporo
  • Year and Date: 2010-08-12
• [Presentation] X-Ray Imaging Test for a Single-stage MEMS X-Ray Optical System (2010)
  • Author(s): I.Mitsuishi, et al.
  • Organizer: Optical MEMS
  • Place of Presentation: Sapporo
  • Year and Date: 2010-08-11
• [Presentation] LIGAプロセスを用いた人工衛星搭載用X線望遠鏡Niミラーチップの製作に関する研究 (2010)
  • Author(s): 洞出光洋, その他
  • Organizer: 立命館大学SRセンター報告会
  • Place of Presentation: 京都
  • Year and Date: 2010-06-12
• [Presentation] 宇宙X線望遠鏡への応用 (2010)
  • Author(s): 江副祐一郎
  • Organizer: JSPS結晶成長の科学と技術161委員会
  • Place of Presentation: 仙台(招待)
  • Year and Date: 2010-05-21
• [Presentation] 将来衛星に向けた超軽量・高分解能 新MEMS X線光学系の基礎開発(2) (2010)
  • Author(s): 高木うた子, その他
  • Organizer: 応用物理学会
  • Place of Presentation: 東海大学
  • Year and Date: 2010-03-19
• [Presentation] 超軽量・高角度分解能 MEMS X線光学系の開発 (2010)
  • Author(s): 三石郁之, その他
  • Organizer: 応用物理学会
  • Place of Presentation: JAXA宇宙研
  • Year and Date: 2010-03-10
• [Presentation] MEMS-Based X-ray Optics for Future Astronomy Missions (2010)
  • Author(s): Yuichiro Ezoe, ほか17名
  • Organizer: IEEE Optical MEMS
  • Place of Presentation: 札幌
• [Presentation] X-Ray Imaging Test for a Single-Stage MEMS X-Ray Optical System (2010)
  • Author(s): Ikuyuki Mitsuishi, ほか17名
  • Organizer: IEEE Optical MEMS
  • Place of Presentation: 札幌
• [Presentation] 宇宙X線望遠鏡への応用 (2010)
  • Author(s): 江副祐一郎
  • Organizer: JSPS結晶成長の科学と技術161委員会
  • Place of Presentation: JST 仙台(招待講演)
• [Presentation] 将来衛星に向けた超軽量、高分解能MEMS光学系の基礎開発(3) (2010)
  • Author(s): 右津健祐, その他
  • Organizer: 応用物理学会
  • Place of Presentation: 長崎
• [Presentation] マイクロマシン技術を用いた超軽量・高角度分解能X線光学系の開発 (2010)
  • Author(s): 森山鉄平, その他
  • Organizer: 第11回宇宙科学シンポジウム
  • Place of Presentation: 相模原
• [Presentation] 超軽量・高角度分解能 新MEMS X線光学系の開発 (2010)
  • Author(s): 三石郁之, その他
  • Organizer: 宇宙科学シンポジウム
  • Place of Presentation: JAXA宇宙研
• [Presentation] Recent development of light-weight & high-resolution X-ray optics in Japan (2009)
  • Author(s): Y.Ezoe(招待講演)
  • Organizer: International Workshop on Astronomical X-ray Optics
  • Place of Presentation: チェコ プラハ
  • Year and Date: 2009-12-07
• [Presentation] Micromachined Reflective X-ray Concentrator For Microanalysis (2009)
  • Author(s): Y.Ezoe, et al.
  • Organizer: IEEE Optical MEMS
  • Place of Presentation: アメリカ クリアウォーター
  • Year and Date: 2009-08-20
• [Presentation] Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optics (2009)
  • Author(s): I.Mitsuishi, et al.
  • Organizer: IEEE Optical MEMS
  • Place of Presentation: アメリカ クリアウォーター
  • Year and Date: 2009-08-20
• [Presentation] Ultra light-weight and high-resolution X-ray mirrors using DRIE and X-ray LIGA techniques for Space X-ray Telescopes (2009)
  • Author(s): Y.Ezoe, et al.
  • Organizer: IEEE HARMST
  • Place of Presentation: カナダ サスカツーン
  • Year and Date: 2009-06-27
• [Presentation] Magnetic field assisted finishing of ultra-lightweight and high-resolution MEMS X-ray micro-pore optics (2009)
  • Author(s): R.Riveros, et al.
  • Organizer: SPIE
  • Place of Presentation: チェコ プラハ
  • Year and Date: 2009-04-22
• [Presentation] Novel ultra-lightweight and high-resolution MEMS X-ray optics (2009)
  • Author(s): I.Mitsuishi, et al
  • Organizer: SPIE
  • Place of Presentation: チェコ プラハ
  • Year and Date: 2009-04-20
• [Presentation] 将来衛星に向けた超軽量・高分解能新MEMSX線光学系の基礎開発(1) (2009)
  • Author(s): 高木うた子, ほか
  • Organizer: 応用物理学会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-03-30
• [Presentation] 超軽量・高角度分解能新MEMSX線光学系の開発(1) (2009)
  • Author(s): 三石郁之, ほか
  • Organizer: 日本天文学会
  • Place of Presentation: 大阪府立大学
  • Year and Date: 2009-03-27
• [Presentation] Optical image analysis of the novel ultra-lightweight and high-resolution MEMS X-ray optic (2009)
  • Author(s): Ikyuki Mitsuishi, ほか8名
  • Organizer: IEEE Optical MEMS
  • Place of Presentation: フロリダ
• [Presentation] Micromachined Reflective X-ray Concentrator For Microanalysis (2009)
  • Author(s): Yuichiro Ezoe, ほか5名
  • Organizer: IEEE Optical MEMS
  • Place of Presentation: フロリダ
• [Presentation] 超軽量・高角度分解能 新MEMS X線光学系の開発 (2009)
  • Author(s): 三石郁之, その他
  • Organizer: X線結像光学シンポジウム
  • Place of Presentation: 筑波
• [Presentation] Development of ultra-light and high-resolution X-ray pore optics in Japan (2008)
  • Author(s): Y. Ezoe
  • Organizer: International Workshop on Astronomical X-ray Optics
  • Place of Presentation: Prague, Czech(招待講演)
  • Year and Date: 2008-12-03
• [Presentation] マイクロマシン技術を用いた宇宙X線望遠鏡の開発 (2008)
  • Author(s): 江副祐一郎
  • Organizer: 立命館大学SRセンター研究成果報告会
  • Place of Presentation: 立命館大 (招待講演)
• [Remarks] ホームページ等
• [Remarks] その他に出願中の特許3件
• [Patent(Industrial Property Rights)] X線光学系 (2010)
  • Inventor(s): 江副祐一郎、三石郁之、満田和久
  • Industrial Property Rights Holder: 江副祐一郎、三石郁之、満田和久
  • Industrial Property Number: 2010-179236
  • Filing Date: 2010-08-17
• [Patent(Industrial Property Rights)] 中性子光学系 (2010)
  • Inventor(s): 江副祐一郎, 高橋忠幸, 満田和久, 加藤昌浩
  • Industrial Property Rights Holder: 江副祐一郎, 高橋忠幸, 満田和久, 加藤昌浩
  • Industrial Property Number: 2010-236859
  • Filing Date: 2010-10-21
• [Patent(Industrial Property Rights)] X線光学系 (2010)
  • Inventor(s): 江副祐一郎, ほか
  • Industrial Property Rights Holder: 江副祐一郎, ほか
  • Filing Date: 2010
• [Patent(Industrial Property Rights)] 中性子光学系 (2010)
  • Inventor(s): 江副祐一郎, ほか
  • Industrial Property Rights Holder: 江副祐一郎, ほか
  • Filing Date: 2010
• [Patent(Industrial Property Rights)] X線反射装置 (2008)
  • Inventor(s): 満田和久、石田学、江副祐一郎、中嶋一雄
  • Industrial Property Rights Holder: 満田和久、石田学、江副祐一郎、中嶋一雄
  • Filing Date: 2008-07-18
• [Patent(Industrial Property Rights)] X線反射装置及びその製造方法 (2008)
  • Inventor(s): 満田和久、江副祐一郎、中嶋一雄、山口ひとみ
  • Industrial Property Rights Holder: 満田和久、江副祐一郎、中嶋一雄、山口ひとみ
  • Filing Date: 2008-10-01
• [Patent(Industrial Property Rights)] マイクロマシン技術を用いた高解像度X線集光・結像系 (2008)
  • Inventor(s): 満田和久、江副祐一郎、中嶋一雄、山口ひとみ
  • Industrial Property Rights Holder: 満田和久、江副祐一郎、中嶋一雄、山口ひとみ
  • Filing Date: 2008
• [Patent(Industrial Property Rights)] シリコンウェハを用いた高解像度X線集光・結像系 (2008)
  • Inventor(s): 満田和久、石田学、江副祐一郎、中嶋一雄
  • Industrial Property Rights Holder: 満田和久、石田学、江副祐一郎、中嶋一雄
  • Filing Date: 2008