Development of a sub-nano positioning system with long stroke by minimizing error factors of the system

• Project/Area Number: 20686011
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Production engineering/Processing studies
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: YOSHIOKA Hayato Tokyo Institute of Technology, 精密工学研究所, 准教授 (90361758)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥25,350,000 (Direct Cost: ¥19,500,000、Indirect Cost: ¥5,850,000); Fiscal Year 2009: ¥13,000,000 (Direct Cost: ¥10,000,000、Indirect Cost: ¥3,000,000); Fiscal Year 2008: ¥12,350,000 (Direct Cost: ¥9,500,000、Indirect Cost: ¥2,850,000)
• Keywords: 位置決め / 超精密 / レーザ干渉計 / リニアモータ / サブナノメートル / レーザ計測 / 誤差要因 / 熱変形抑制

Research Abstract

In this study, to realize a sub-nano positioning system with a long stroke the ideal structure of the positioning system was investigated. All components of the positioning system were designed and determined to eliminate their error factors. Actual experimental results confirmed that the newly developed positioning table system has a sub-nano meter positioning resolution in a wide travel range.

Research Products

• [Journal Article] 超精密加工機「a ngel」の特徴と今後の展開 (2009)
  • Author(s): 吉岡勇人, 新野秀憲
  • Journal Title: 型技術 v24,n4 Pages: 103-106
• [Journal Article] 超精密加工機「ANGEL」の特徴と今後の展開 (2009)
  • Author(s): 吉岡勇人, 新野秀憲
  • Journal Title: 型技術 24 Pages: 103-106
  • NAID: 40016576140
• [Journal Article] A Newly Developed Long-Stroke Vertical Nano-Motion Platform with Gravity Compensator, Journal of Advanced Mechanical Design (2008)
  • Author(s): Takahashi, M., Yoshioka, H., Shinno, H.
  • Journal Title: Systems, and Manufacturing Vol.2,No.3 Pages: 356-365
  • Peer Reviewed
• [Journal Article] 完全非接触XY平面位置決めテーブルを用いた微細加工 (2008)
  • Author(s): 吉岡勇人
  • Journal Title: 日本機械学会誌 Vol.111,No.1071 Pages: 129-129
  • Peer Reviewed
• [Journal Article] A Newly Developed Long Stroke Vertical Nano-Motion Platform with Gravity Compensation (2008)
  • Author(s): M. Takahashi, H. Yoshioka, H. Shinno
  • Journal Title: Journal of Advanced Mechanical Design, Systems. and Manufacturing 2 Pages: 356-365
  • NAID: 130000080808
  • Peer Reviewed
• [Presentation] A Newly Developed X-Y Planar Nano-Motion Table System with Large Travel Ranges (2009)
  • Author(s): Yugo KURISAKI, Hiroshi SAWANO, Hayato YOSHIOKA, Hidenori Shinno
  • Organizer: The 5th International Conference on Leading Edge Manufacturing in 21st Century
  • Place of Presentation: Osaka, Japan
• [Presentation] Ultraprecision Machining System for Fabricating Nano-Devices, (poster session) (2009)
  • Author(s): Takahashi, M., Yoshioka, H., Shinno, H.
  • Organizer: Proceedings of the 9th International Conference of the euspen, San Sebastian
  • Place of Presentation: Spain
• [Presentation] Vertical Nano-Positioning System for Precision Machine (2008)
  • Author(s): H. Yoshioka, M. Takahashi and H. Shinno
  • Organizer: 8th euspen International Conference
  • Place of Presentation: スイス・チューリッヒ
  • Year and Date: 2008-05-20
• [Presentation] Vertical nano-positioning system for precision machine (2008)
  • Author(s): Yoshioka, H., Takahashi. M., Shinno, H.
  • Organizer: Proceedings of the 10th Anniversary International Conference of the euspen, Zurich
  • Place of Presentation: Switzerland