Development of a sub-nano positioning system with long stroke by minimizing error factors of the system
Project/Area Number |
20686011
|
Research Category |
Grant-in-Aid for Young Scientists (A)
|
Allocation Type | Single-year Grants |
Research Field |
Production engineering/Processing studies
|
Research Institution | Tokyo Institute of Technology |
Principal Investigator |
YOSHIOKA Hayato Tokyo Institute of Technology, 精密工学研究所, 准教授 (90361758)
|
Project Period (FY) |
2008 – 2009
|
Project Status |
Completed (Fiscal Year 2009)
|
Budget Amount *help |
¥25,350,000 (Direct Cost: ¥19,500,000、Indirect Cost: ¥5,850,000)
Fiscal Year 2009: ¥13,000,000 (Direct Cost: ¥10,000,000、Indirect Cost: ¥3,000,000)
Fiscal Year 2008: ¥12,350,000 (Direct Cost: ¥9,500,000、Indirect Cost: ¥2,850,000)
|
Keywords | 位置決め / 超精密 / レーザ干渉計 / リニアモータ / サブナノメートル / レーザ計測 / 誤差要因 / 熱変形抑制 |
Research Abstract |
In this study, to realize a sub-nano positioning system with a long stroke the ideal structure of the positioning system was investigated. All components of the positioning system were designed and determined to eliminate their error factors. Actual experimental results confirmed that the newly developed positioning table system has a sub-nano meter positioning resolution in a wide travel range.
|
Report
(3 results)
Research Products
(9 results)