A Deep-Trench Optical-Detector Integrated Early Vision Processor and an Application to Motion Detection

• Project/Area Number: 20686024
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Electron device/Electronic equipment
• Research Institution: The University of Tokyo
• Principal Investigator: MITA Yoshio 東京大学, 大学院・工学系研究科, 准教授 (40323472)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥25,350,000 (Direct Cost: ¥19,500,000、Indirect Cost: ¥5,850,000); Fiscal Year 2010: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000); Fiscal Year 2009: ¥9,230,000 (Direct Cost: ¥7,100,000、Indirect Cost: ¥2,130,000); Fiscal Year 2008: ¥9,490,000 (Direct Cost: ¥7,300,000、Indirect Cost: ¥2,190,000)
• Keywords: 電子デバイス・集積回路 / MEMS / マイクロ・ナノデバイス / 光物性 / 三次元形状検出 / スマートセンサ情報システム

Research Abstract

An integration scheme is proposed to provide active electron devices (such as diodes and transistors) integrated MEMS-fabricated vertical 3-D surfaces, which have long been used just as a mechanical structure. The team believes that integration of active devices is the key technology to provide much higher functionality to MEMS. A special attention has been paid to the special-DRIE-fabricated nanometric (100nm-class) surface-corrugated PN-junctions to obtain light polarization dependence. An extinction ratio 1:4 has been reported in the conference then ameliorated up to 1:20.

Research Products

• [Journal Article] Silicon sub-micron-gap deep trench Pirani vacuum gauge for operation at atmospheric pressure (2011)
  • Author(s): Masanori Kubota, Yoshio Mita, Masakazu Sugiyama
  • Journal Title: J.Micromech.Microeng. Volume: 21 Pages: 45034-45034
  • Peer Reviewed
• [Journal Article] Test Structure for Characterizing Low Voltage Coplanar EWOD System (2009)
  • Author(s): Yifan Li, Yoshio Mita, Leslie I. Haworth, William Parkes, Masanori Kubota, Anthony J. Walton
  • Journal Title: IEEE Transactions on Semiconductor Manufacturing, IEEE Transactions Volume: Vol. 22, No. 1 Pages: 88-95
• [Journal Article] Demonstration of a wireless driven MEMS pond skater that uses EWOD technology (2009)
  • Author(s): Yoshio Mita, Y. Li, M. Kubota, S. Morishita, W. Parkes, L.I. Haworth, B.W. Flynn, J.G. Terry, T.-B. Tang, A.D. Ruthven, S. Smith and A.J. Walton
  • Journal Title: Journal of Solid-State Electronics Volume: Vol. 53 Pages: 798-802
• [Journal Article] Demonstration of a wireless driven MEMS pond skater that uses EWOD technology (2009)
  • Author(s): Y.Mita, et.al
  • Journal Title: Journal of Solid-State Electronics Volume: Vol.53 Pages: 798-802
  • Peer Reviewed
• [Journal Article] Polarization transmissive photovoltaic film device consisting of Si photodiode wire-grid (2008)
  • Author(s): Kenichiro Hirose, Yoshio Mita, Yoshiaki Imai, Freederic Marty, Tarik Bourouina, Kunihiro Asada, Shuichi Sakai, Tadashi Kawazoe and Motoichi Ohtsu
  • Journal Title: Journal of Optics A: Pure Appl. Opt. Volume: 10 Pages: 44014-44014
• [Journal Article] Electric Ejection of Viscous Inks From MEMS Capillary Array Head for Direct Drawing of Fine Patterns (2008)
  • Author(s): Ryoichi Ohigashi, Katsunori Tsuchiya, Yoshio Mita, and Hiroyuki Fujita
  • Journal Title: Journal of Microelectromechanical Systems Volume: Vol. 17, No.2 Pages: 272-277
• [Journal Article] Polarization transmissive photovoltaic film device consisting of Siphotodiode wire-grid (2008)
  • Author(s): Kenichiro Hirose, Yoshio Mita, et.al.
  • Journal Title: J. Opt. A : Pure Appl. Opt. 10 Pages: 44014-44014
  • Peer Reviewed
• [Journal Article] Electric Ejection of Viscous Inks From MEMS Capillary Array Head for Direct Drawing of Fine Patterns (2008)
  • Author(s): R. Ohigashi, K. Tsuchiya, Yoshio Mita, and H. Fujita
  • Journal Title: Journal of Microelectromechanical Systems 17 Pages: 272-277
  • Peer Reviewed
• [Journal Article] Test Structure for Characterizing Low Voltage Coplanar EWOD System (2008)
  • Author(s): Yifan Li, Yoshio Mita et.al.
  • Journal Title: IEEE Transactions on Semiconductor Manufacturing 22 Pages: 88-95
  • Peer Reviewed
• [Presentation] A 50 nm-Wide 5 μm-Deep Copper Vertical Gap Formation Method by a Gap-Narrowing Post-Process with Supercritical Fluid Deposition for Pirani Gauge Operating over Atmospheric Puressure (2012)
  • Author(s): Masanori Kubota, Yoshio Mita, Takeshi Momose, Aiko Kondo, Yukihiro Shimogaki, Yoshiaki Nakano, Masakazu Sugiyama
  • Organizer: IEEE International Conference on Micro ElectroMechanical Systems (MEMS 2012)
  • Place of Presentation: Paris, France
• [Presentation] Integration of EWOD Pumping Device in Deep Microfluidic Channels using a Three-Dimensional Shadowmask (2012)
  • Author(s): Satoshi Morishita, Masanori Kubota, Yoshio Mita
  • Organizer: IEEE International Conference on MicroElectroMechanical Systems (MEMS 2012)
  • Place of Presentation: Paris, France
• [Presentation] A Blur-Range Test Structure of Collimation-Controller-Integrated Silicon Shadow Mask for Three-Dimensional Surface Patterning with Sputtering (2012)
  • Author(s): Satoshi Morishita, Masanori Kubota, Yoshio Mita
  • Organizer: 25th IEEE International Conference on Microelectronic Test Structures (ICMTS)
  • Place of Presentation: San Diego, CA, USA
• [Presentation] オンチップ光発電回路とMEMSの集積化研究動向 (2011)
  • Author(s): 三田吉郎
  • Organizer: 電子情報通信学会ソサイアティ大会
  • Place of Presentation: 札幌,北海道,日本(招待講演)
  • Year and Date: 2011-09-15
• [Presentation] Value-Added VLSI devices by MEMS technology (2011)
  • Author(s): Yoshio Mita, Satoshi Morishita, Isao Mori, and Masanori Kubota
  • Organizer: AWAD 2011
  • Place of Presentation: Daejeon, Korea(Invited)
• [Presentation] A Monolithically-Integrated, Batch Post-Processed 17.8 V Silicon Solar Cell for Remote MEMS Driving (2011)
  • Author(s): Isao Mori, Satoshi Morishita, Masanori Kubota, Kentaroh Watanabe, Yoshio Mita
  • Organizer: The 2011 International Conference on Solid State Devices and Materials
  • Place of Presentation: Nagoya, Japan
• [Presentation] MEMS-integrated VLSI Foundry Scheme in the University of Tokyo VDEC and its Application to Particle Sensor (2011)
  • Author(s): Yoshio Mita
  • Organizer: International Workshop on High Energy Geophysics 2011-Muon and Neutrino Radiography
  • Place of Presentation: Happon-en, Tokyo, Japan
• [Presentation] Methode d'lsolation a Posteriori des Composants Electronique Integre sur Puce Silicium (2010)
  • Author(s): Yoshio Mita, Satoshi Morishita, Isao Mori, Masanori Kubota, Frederic Marty, Kunihiro Asada
  • Organizer: Journee Francophone de la Recherche(フランス語による科学シンポジウム)
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2010-11-27
• [Presentation] A bulk micromachined vertical nano-gap Pirani wide-range pressure test structure for MEMS-integration (2010)
  • Author(s): Masanori Kubota, Yoshio Mita, Masakazu Sugiyama, and Yoshiaki Nakano
  • Organizer: 23^<rd> IEEE International Conference on Microelectronic Test Structures (ICMTS)
  • Place of Presentation: Hiroshima, Japan(pp.14-17)
• [Presentation] A Balanced-SeeSaw MEMS Swing Probe for Vertical Profilometry of Deep Micro Structures (2010)
  • Author(s): Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Agnes Tixier-Mita, Satoshi Morishita, and Takahisa Masuzawa
  • Organizer: 23rd IEEE International Conference on Microelectronic Test Structures (ICMTS)
  • Place of Presentation: Hiroshima, Japan(pp.58-63)
• [Presentation] More-than-VLSI Devices by MEMS Deep Etching Technology (2010)
  • Author(s): Yoshio Mita
  • Organizer: IEICE ICD symposium in Vietnam (ICDV)
  • Place of Presentation: Ho Chi Minh City, Vietnam(招待講演)
• [Presentation] A Bridge-Connected Isolated Silicon Islands Post-Processing Method for Fine-Grain-Integrated ±10V-Operating CMOS-MEMS by Standard 5V CMOS Process Technology (2010)
  • Author(s): Satoshi Morishita, Masanori Kubota, Isao Mori, Kunihiro Asada, Frederic Marty, and Yoshio Mita
  • Organizer: 21^<st> Workshop on Micromechanics and Microsystems Workshop, (MME 2010)
  • Place of Presentation: Enschede, Netherlands(A08 pp.48-51)
• [Presentation] Autonomous Distributed MEMS Robots as Technology Drivers (2010)
  • Author(s): Yoshio Mita
  • Organizer: Japan-France Frontiers of Engineering (JFFoE)
  • Place of Presentation: Grenoble, France(招待講演)
• [Presentation] "More-than-VLSI" Devices by MEMS Deep Etching Technology (2010)
  • Author(s): Yoshio Mita
  • Organizer: IEICE ICD symposium in Vietnam (ICDV)
  • Place of Presentation: Ho Chi Minh City, Vietnam(Invited)
• [Presentation] A Bridge-Connected Isolated Silicon Islands Post-Processing Method for Fine-Grain-Integrated±10V-Operating CMOS-MEMS by Standard 5V CMOS Process Technology (2010)
  • Author(s): Satoshi Morishita, Masanori Kubota, Isao Mori, Kunihiro Asada, Frederic Marty, Yosbio Mita
  • Organizer: Micromecanics and Microengineering Europe 2010
  • Place of Presentation: Enschede, Netherlands
• [Presentation] Autonomous Distributed MEMS Robots as Technology Drivers (2010)
  • Author(s): Yoshio Mita
  • Organizer: Japan-France Frontiers of Engineering (JFFoE)
  • Place of Presentation: Grenoble, France(Invited)
• [Presentation] A bulk micromachined vertical nano-gap Pirani wide-range pressure test structure for MEMS-integration (2010)
  • Author(s): Masanori KUBOTA, Yoshio MITA, Masakazu SUGIYAMA, Yashiaki NAKANO
  • Organizer: 23rd IEEE International Conference on Microelectronic Test Structures (ICMTS)
  • Place of Presentation: Hiroshima, Japan
• [Presentation] A Balanced-SeeSaw MEMS Swing Probe for Vertical Profilometry of Deep Micro Structures (2010)
  • Author(s): Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Agnes Tixier-Mita, Satoshi Morishita, Takahisa Masuzawa
  • Organizer: 23rd IEEE International Conference on Microelectronic Test Structures (ICMTS)
  • Place of Presentation: Hiroshima, Japan
• [Presentation] La Methode "Swing-Probing" Pour la Profilom\`etrie de Microtrous Tr\`es Profonds (2009)
  • Author(s): Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Shaojun Ma, Akio Higo, Agnes Tixier-Mita, Satoshi Morishita, Masakazu Sugiyama, et Takahisa Masuzawa
  • Organizer: Journee Francophone de laRecherche (フランス語による科学シンポジウム)
  • Place of Presentation: Maison Franco-Japonaise, Tokyo, Japon
  • Year and Date: 2009-11-14
• [Presentation] La Methode "Swing-Probing" Pour la Profilometrie de Microtrous Tres Profonds (2009)
  • Author(s): Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Shaojun Ma, Akio Higo, Agnes Tixier-Mita, Satoshi Morishita, Masakazu Sugiyama, et Takahisa Masuzawa
  • Organizer: Journee Francophone de la Recherche(フランス語による科学シンポジウム)
  • Place of Presentation: Tokyo, Japan
  • Year and Date: 2009-11-14
• [Presentation] A Three-Dimensional Silicon Shadowmask for Patterning On Trenches with Vertical Walls (2009)
  • Author(s): Satoshi Morishita, JunHyong Kim, Frederic Marty, Yifan Li, Anthony J. Walton, and Yoshio Mita
  • Organizer: The 15^<th> International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09)
  • Place of Presentation: Denver, USA(pp.1608-1611)
• [Presentation] A Curvature Controlled Flexible Silicon Micro Electrode Array to Wrap Neurons for Signal Analysis (2009)
  • Author(s): Jun-Hyoung Kim, Masanori Kubota, Akio Higo, Hideki Abe, Yoshitaka Oka, and Yoshio Mita
  • Organizer: The 15^<th> International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09)
  • Place of Presentation: Denver, USA(pp.1810-1813)
• [Presentation] A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner (2009)
  • Author(s): K. Takahashi, I. W. Jung, A. Higo, Yoshio Mita, H. Fujita, H. Toshiyoshi, and O. Solgaard
  • Organizer: IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2009)
  • Place of Presentation: (pp.77-78)
• [Presentation] 高機能ＭＥＭＳ三次元構造形成のためのプロセス技術 (2009)
  • Author(s): 三田吉郎
  • Organizer: 応用物理学会秋季全国大会
  • Place of Presentation: (招待講演)
• [Presentation] An Active Swing Probing Method for High Aspect Ratio Deep Hole Profiler (2009)
  • Author(s): Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Akio Higo, Shaojun Ma, Satoshi Morishita, Masakazu Sugiyama, and Takahisa Masuzawa
  • Organizer: 20^<th> Workshop on Micromachining, Micromechanics and Microsystems, (MME 2009)
  • Place of Presentation: Toulouse, France(D12)
• [Presentation] A Three-Dimensional Silicon Shadowmask for Patterning On Trenches with Vertical Walls", The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (2009)
  • Author(s): Satoshi Morishita, JunHyong Kim, Frederic Marty, Yifan Li, Anthony J.Walton, Yoshio Mita
  • Organizer: The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09)
  • Place of Presentation: Denver, USA
• [Presentation] A Curvature Controlled Flexible Silicon Micro Electrode Array to Wrap Neurons for Signal Analysis (2009)
  • Author(s): Jun-Hyoung Kim, Masanori Kubota, Akio Higo, Hideki Abe, Yoshitaka Oka, Yoshio Mita
  • Organizer: The 15th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers '09)
  • Place of Presentation: Denver, USA
• [Presentation] A CMOS Compatible Low Temperature Process for Photonic Crystal MEMS Scanner (2009)
  • Author(s): K.Takahashi, I.W.Jung, A.Higo, Y.Mita, H.Fujita, H.Toshiyoshi, O.Solgaard
  • Organizer: IEEE/LEOS International Conference On Optical MEMS and Their Applications (OMEMS 2009)
  • Place of Presentation: Florida, USA
• [Presentation] An Active Swing Probing Method for High Aspect Ratio Deep Hole Profiler (2009)
  • Author(s): Yoshio Mita, Jean-Bernard Pourciel, Masanori Kubota, Akio Higo, Shaojun Ma, Satoshi Morishita, Masakazu Sugiyama, Takahisa Masuzawa
  • Organizer: 20th Workshop on Micromachining, Micromechanics and Microsystems, (MME 2009)
  • Place of Presentation: Toulouse, France
• [Presentation] 高機能MEMS三次元構造形成のためのプロセス技術 (2009)
  • Author(s): 三田吉郎
  • Organizer: 応用物理学会秋季全国大会
  • Place of Presentation: Kumamoto, Japan(招待講演)
• [Presentation] Vision stereo pour la detection d'obstacles vulnerables: methode de 《recherche du voisin》 pour l'amelioration de la precision de mise en correspondance(仏語) (2008)
  • Author(s): Yoshio Mita, L.Bouraoui et M.Parent
  • Organizer: Journee Francophone de la Recherche(フランス語による化学シンポジウム)
  • Place of Presentation: 東京(日本)
  • Year and Date: 2008-11-28
• [Presentation] Vision stereo pour la d'etection d'obstacles vulnerables : methode de≪recherche du voisin≫pour l'amelioration de la precision de mise en corresnondance (2008)
  • Author(s): Yoshio Mita, L.Bouraou et M.Parent
  • Organizer: Journee Francophone de la Recherche
  • Place of Presentation: 東京(日本)
  • Year and Date: 2008-11-28
• [Presentation] 柔らかいシリコンマイクロ構造とその神経信号解析への応用 (2008)
  • Author(s): 金俊亨、久保田雅則、肥後昭男、三田吉郎
  • Organizer: 応用物理学会第二回集積化MEMS技術研究会
  • Place of Presentation: 東京大学(研究奨励賞受賞)
  • Year and Date: 2008-11-21
• [Presentation] Surface Corrugated P-N Junction on Deep Submicron Trenches for Polarization Detection With Improved Efficiency (2008)
  • Author(s): Yoshiaki Imai, Yoshio Mita, Kenichiro Hirose, Masanori Kubota and Tadashi Shibata
  • Organizer: Asia-Pacific Conference of Transducers (APCOT)
  • Place of Presentation: Taiwan
• [Presentation] Wireless Driven EWOD Technology for MEMS Pond Skater Application (2008)
  • Author(s): Yoshio Mita, Yifan Li, Masanori Kubota, William Parkes, Leslie I. Haworth, Brian W. Flynn, Jonathan G. Terry, T.B. Tang, Alec Ruthven, Stewart Smith, and Anthony J. Walton
  • Organizer: 38^<th> European Solid-State Device Research Conference (ESSDERC 2008)
  • Place of Presentation: Edinburgh, UK, (pp.306-309)
• [Book] ドライ・ウエットエッチング技術全集, 4章 9節, MEMSにおける高アスペクト、ノッチフリーのドライエッチング加工 (2009)
  • Author(s): 三田吉郎, 他(分担執筆)
  • Publisher: 技術情報協会
• [Book] ドライ・ウエットエッチング技術全集 (2009)
  • Author(s): 三田吉郎他(分担執筆)
  • Total Pages: 425
  • Publisher: 技術情報協会
• [Book] 最新機械・機器要素技術 2章 10節, センサー (2008)
  • Author(s): 吉川昌範(編著), 三田吉郎, 他(分担執筆)
  • Publisher: NGTコーポレーション
• [Book] 最新機械・機器要素技術 3章 15節, センサ・アクチュエータの加工(光学リソ含む) (2008)
  • Author(s): 吉川昌範(編著), 三田吉郎, 他(分担執筆)
  • Publisher: NGTコーポレーション