Research on Nano-scale Servo Control for Atomic Force Microscope and Positioning Stage

• Project/Area Number: 20686028
• Research Category: Grant-in-Aid for Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Control engineering
• Research Institution: Yokohama National University
• Principal Investigator: FUJIMOTO Hiroshi Yokohama National University, 大学院・工学研究院, 准教授 (20313033)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥25,350,000 (Direct Cost: ¥19,500,000、Indirect Cost: ¥5,850,000); Fiscal Year 2009: ¥15,470,000 (Direct Cost: ¥11,900,000、Indirect Cost: ¥3,570,000); Fiscal Year 2008: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
• Keywords: 制御機器 / 高速高精度位置決め制御 / ナノスケールサーボ / 走査プローブ顕微鏡 / 原子間力顕微鏡 / ナノステージ / 制御工学 / 超精密位置決め / 超高速位置決め / モーションコントロール

Research Abstract

The objective of this study is to develop the fundamental technology to realize nano-scale servo systems with high-speed and high performance positioning control systems. In order to contribute the progress of science, the advanced control method of nano-probe which is utilized in atomic force microscope. We also studied the novel design and fabrication of nano-scale multi-degree-of-freedom positioning stage.

Research Products

• [Journal Article] A Study on High-Speed and High-Precision Tracking Control of Large-Scale Stage Using Perfect Tracking Control Method Based on Multirate Feedforward Control (2010)
  • Author(s): Kazuaki Saiki, Atsushi Hara, Koichi Sakata, Hiroshi Fujimoto
  • Journal Title: IEEE Trans. on Industrial Electronics vol.57,no.4 Pages: 1393-1400
  • Peer Reviewed
• [Journal Article] マルチレートPWMに基づく単相アクティブフィルタの電流制御法 (2010)
  • Author(s): 佐藤公彦, 藤本博志
  • Journal Title: 電気学会論文誌D vol.130,no.2 Pages: 113-118
  • NAID: 10026229605
  • Peer Reviewed
• [Journal Article] A Study on High-Speed and High-Precision Tracking Control of Large-Scale Stage Using Perfect Tracking Control Method Based on Multirate Feedforward Control (2010)
  • Author(s): Kazuaki Saiki, Atsushi Hara, Koichi Sakata, Hiroshi Fujimoto
  • Journal Title: IEEE Trans. on Industrial Electronics 57 Pages: 1393-1400
  • Peer Reviewed
• [Journal Article] マルチレートPWMに基づく単相アクティブフィルタの電流制御法 (2010)
  • Author(s): 佐藤公彦, 藤本博志
  • Journal Title: 電気学会論文誌 130 Pages: 113-118
  • NAID: 10026229605
  • Peer Reviewed
• [Journal Article] 可変自然長ばねモデルと外乱オブザーバに基づくボールねじ駆動ステージの非線形摩擦補償 (2009)
  • Author(s): 浅海博圭, 藤本博志
  • Journal Title: 電気学会論文誌D vol.129,no.11 Pages: 1101-1108
  • NAID: 10025533428
  • Peer Reviewed
• [Journal Article] RRO Compensation of Hard Disk Drives with Multirate Repetitive Perfect Tracking Control (2009)
  • Author(s): Hiroshi Fujimoto
  • Journal Title: IEEE Trans. Industrial Electronics vol.56,no.10 Pages: 3825-3831
  • Peer Reviewed
• [Journal Article] ステージ駆動力と表面形状を用いた大型超精密スキャンステージのオートフォーカス/レベリング制御 (2009)
  • Author(s): 坂田晃一, 藤本博志, 大友剛, 佐伯和明
  • Journal Title: 電気学会論文誌D vol.129,no.6 Pages: 564-570
  • NAID: 10024776415
  • Peer Reviewed
• [Journal Article] Short-Span Seeking Control of Hard Disk Drives with Multirate Vibration Suppression PTC (2009)
  • Author(s): Hiroshi Fujimoto
  • Journal Title: EEJ Transactions on Electrical and Electronic Engineering vol.4,No.2(invited) Pages: 184-191
  • Peer Reviewed
• [Journal Article] 可変自然長ばねモデルと外乱オブザーバに基づくボールねじ駆動ステージの非線形摩擦補償 (2009)
  • Author(s): 浅海博圭, 藤本博志
  • Journal Title: 電気学会論文誌 129 Pages: 1101-1108
  • NAID: 10025533428
  • Peer Reviewed
• [Journal Article] RRO Compensation of Hard Disk Drives with Multirate Repetitive Perfect Tracking Control (2009)
  • Author(s): Hiroshi Fujimoto
  • Journal Title: IEEE Trans. Industrial Electronics 56 Pages: 3825-3831
  • Peer Reviewed
• [Journal Article] ステージ駆動力と表面形状を用いた大型超精密スキャンステージのオートフォーカス/レベリング制御 (2009)
  • Author(s): 坂田晃一, 藤本博志
  • Journal Title: 電気学会論文誌 129-D・6 Pages: 564-570
  • NAID: 10024776415
  • Peer Reviewed
• [Journal Article] マルチレート制御によるナノスケールサーボ (2009)
  • Author(s): 藤本博志
  • Journal Title: システム制御情報学会誌 53・6 Pages: 230-235
  • Peer Reviewed
• [Journal Article] マルチレートサンプリング制御とロボットへの応用 (2009)
  • Author(s): 藤本博志
  • Journal Title: 日本ロボット学会誌 27・4 Pages: 410-413
  • NAID: 10024790206
  • Peer Reviewed
• [Journal Article] RRO Compensation of Hard Disk Drives with Multirate Repetitive Perfect Tracking Control (2009)
  • Author(s): Hiroshi Fujimoto
  • Journal Title: IEEE Trans.Industrial Electronics 4-2 Pages: 3825-3831
  • Peer Reviewed
• [Journal Article] RRO Compensation of Hard Disk Drives with Multirate Renetitive Perfect Tracking Control (2009)
  • Author(s): Hiroshi Fujimoto
  • Journal Title: IEEE Trans. Industrial Electronics 56(掲載予定)
  • Peer Reviewed
• [Journal Article] ステージ駆動力と表面形状を用いた大型超精密スキャンステージのオートフォーカス/レベリング制御 (2009)
  • Author(s): 坂田晃一, 藤本博志
  • Journal Title: 電気学会論文誌 129-D・6(掲載予定)
  • NAID: 10024776415
  • Peer Reviewed
• [Journal Article] マルチレート制御によるナノスケールサーボ (2009)
  • Author(s): 藤本博志
  • Journal Title: システム制御情報学会誌 53・6(掲載予定)
  • Peer Reviewed
• [Journal Article] マルチレートサンプリング制御とロボットへの応用 (2009)
  • Author(s): 藤本博志
  • Journal Title: 日本ロボット学会誌 27・4(掲載予定)
  • NAID: 10024790206
  • Peer Reviewed
• [Journal Article] 繰り返し完全追従制御によるPMSMの高調波電流抑制 (2008)
  • Author(s): 中井孝洋, 藤本博志
  • Journal Title: 電気学会論文誌D vol.128,no.9 Pages: 1083-1089
  • NAID: 10024267371
  • Peer Reviewed
• [Journal Article] インターサンプリングを用いた単相インバータの任意波形指令値に対するマルチレート完全追従制御 (2008)
  • Author(s): 安部洋則, 藤本博志
  • Journal Title: 電気学会論文誌D vol.128,no.2 Pages: 110-116
  • NAID: 10021133393
  • Peer Reviewed
• [Journal Article] Short-Span Seeking Control of Hard Disk Drives with Multirate Vibration Sumression PTC (2008)
  • Author(s): Hiroshi Fujimoto
  • Journal Title: IEEJ Transactions on Electrical and Electronic Engineering 4・2(掲載予定)
  • Peer Reviewed
• [Journal Article] 繰り返し完全追従制御によるPMSMの高調波電流抑制 (2008)
  • Author(s): 中井孝洋, 藤本博志
  • Journal Title: 電気学会論文誌 128-D・9 Pages: 1083-1089
  • NAID: 10024267371
  • Peer Reviewed
• [Journal Article] 可変自然長ばねモデルと外乱オブザーバに基づくボールねじ駆動ステージの非線形摩擦補償
  • Author(s): 浅海博圭, 藤本博志
  • Journal Title: 電気学会論文誌 (条件付き採択)
  • NAID: 10025533428
  • Peer Reviewed
• [Presentation] Short-Span Seeking Control of Hard Disk Drive Based on Integral Type Learning PTC (2010)
  • Author(s): Hiroyuki Endo, Hiroshi Fujimoto
  • Organizer: International Workshop on Advanced Motion Control (AMC'10)
  • Place of Presentation: Niigata
  • Year and Date: 2010-03-24
• [Presentation] Short-Span Seeking Control of Hard Disk Drive Based on Integral Type Learning PTC (2010)
  • Author(s): Hiroyuki Endo(藤本研大学院生)
  • Organizer: IEEE International Workshop on Advanced Motion Control (AMC'10)
  • Place of Presentation: 新潟(長岡)
  • Year and Date: 2010-03-24
• [Presentation] Design Fabrication and Control of 4-DOF High-Precision Stage (2010)
  • Author(s): Koichi Sakata, Hiroshi Fujimoto
  • Organizer: International Workshop on Advanced Motion Control (AMC'10)
  • Place of Presentation: Niigata
  • Year and Date: 2010-03-23
• [Presentation] Design Fabrication and Control of 4-DOF High-Precision Stage (2010)
  • Author(s): Koichi Sakata(藤本研大学院生)
  • Organizer: IEEE International Workshop on Advanced Motion Control (AMC'10)
  • Place of Presentation: 新潟(長岡)
  • Year and Date: 2010-03-23
• [Presentation] Short-Span Seeking Control of Hard Disk Drive with Learning Based PTC in Acceleration and Deceleration Period (2009)
  • Author(s): Hiroyuki Endo, Hiroshi Fujimoto
  • Organizer: Proc. 35rd Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: Porto
  • Year and Date: 2009-11-04
• [Presentation] Short-Span Seeking Control of Hard Disk Drive with Learning Based PTC in Acceleration and Deceleration Period (2009)
  • Author(s): Hiroyuki Endo(藤本研大学院生)
  • Organizer: The 35th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: ポルトガル(ポルト)
  • Year and Date: 2009-11-04
• [Presentation] Proposal of Multirate PWM Positioning Control Considering Resonance Mode for Precision Stage (2009)
  • Author(s): Koichi Sakata, Hiroshi Fujimoto
  • Organizer: Proc. 35rd Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: Porto(invited)
  • Year and Date: 2009-11-03
• [Presentation] Positioning of Large-Scale High-Precision Viscoelastic Stage Based on Vibration Suppression PTC (2009)
  • Author(s): Kazuaki Saiki, Takachika Shimoyama, Koichi Sakata, Hiroshi Fujimoto
  • Organizer: Proc. 35rd Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: Porto(invited)
  • Year and Date: 2009-11-03
• [Presentation] Positioning of Large-Scale High-Precision Viscoelastic Stage Based on Vibration Suppression PTC (2009)
  • Author(s): Kazuaki Saiki(藤本研社会人大学院生)
  • Organizer: The 35th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: ポルトガル(ポルト)
  • Year and Date: 2009-11-03
• [Presentation] Proposal of Multirate PWM Positioning Control Considering Resonance Mode for Precision Stage (2009)
  • Author(s): Koichi Sakata(藤本研大学院生)
  • Organizer: The 35th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: ポルトガル(ポルト)
  • Year and Date: 2009-11-03
• [Presentation] High Speed and High Precision Motion Control for Machine Tools (2009)
  • Author(s): Hiroshi Fujimoto
  • Organizer: The 35th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: ポルトガル(ポルト)
  • Year and Date: 2009-11-02
• [Presentation] Torque Ripple Suppression Control for PM Motor with High Bandwidth Torque Meter (2009)
  • Author(s): Kento Nakamura(藤本研大学院生)
  • Organizer: IEEE ECCE 2009
  • Place of Presentation: 米国(サンノゼ)
  • Year and Date: 2009-09-23
• [Presentation] Torque Ripple Suppression Control for PM Motor with High Bandwidth Torque Meter (2009)
  • Author(s): Kento Nakamura, Hiroshi Fujimoto, Masami Fujitsuna
  • Organizer: Proc. IEEE ECCE 2009 Proceedings
  • Place of Presentation: San Jose
  • Year and Date: 2009-08-23
• [Presentation] Master-Slave Synchronous Position Control for Precision Stages Based on Multirate Control and Dead-time Compensation (2009)
  • Author(s): Koichi Sakata, Hiroshi Fujimoto
  • Organizer: Proc. IEEE/ASME International Conference on Advanced Intelligent Mechatronics
  • Place of Presentation: Singapore
  • Year and Date: 2009-07-15
• [Presentation] Master-Slave Synchronous Position Control for Precision Stages Based on Multirate Control and Dead-time Compensation (2009)
  • Author(s): Koichi Sakata(藤本研大学院生)
  • Organizer: IEEE/ASME International Conference on Advanced Intelligent Mechatronics
  • Place of Presentation: シンガポール
  • Year and Date: 2009-07-15
• [Presentation] RRO Compensation of HDD Based on RPTC Method with Re-Learning Scheme for Discreate Track Recording Media (2009)
  • Author(s): Hiroaki Nishina, Hiroshi Fujimoto
  • Organizer: Proc. 2009 American Control Conference
  • Place of Presentation: St. Louis
  • Year and Date: 2009-06-11
• [Presentation] RRO Compensation of HDD Based on RPTC Method with Re-Learning Scheme for Discreate Track Recording Media (2009)
  • Author(s): Hiroshi Fujimoto
  • Organizer: 2009 American Control Conference
  • Place of Presentation: 米国(St.Louis)
  • Year and Date: 2009-06-11
• [Presentation] Design Fabrication of High-Precision Stage and Ultrahigh-speed Nanoscale Positioning (2009)
  • Author(s): Koichi Sakata(藤本研大学院生)
  • Organizer: 2009 American Control Conference
  • Place of Presentation: 米国(St.Louis)
  • Year and Date: 2009-06-11
• [Presentation] Design Fabrication of High-Precision Stage and Ultrahigh-speed Nanoscale Positioning (2009)
  • Author(s): Koichi Sakata, Hiroshi Fujimoto, Atsushi Hara, Kazuaki Saiki
  • Organizer: Proc. 2009 American Control Conference
  • Place of Presentation: St. Louis(invited)
  • Year and Date: 2009-06-10
• [Presentation] High-Speed High-Precision Control of Atomic Force Microscope by Surface Topography Learning Observer (2009)
  • Author(s): Takayuki Shiraishi, Hiroshi Fujimoto
  • Organizer: Proc. 2009 American Control Conference
  • Place of Presentation: t. Louis(invited)
  • Year and Date: 2009-06-10
• [Presentation] High-Speed High-Precision Control of Atomic Force Microscope by Surface Topography Learning Observer (2009)
  • Author(s): Takayuki Shiraishi(藤本研大学院生)
  • Organizer: 2009 American Control Conference
  • Place of Presentation: 米国(St.Louis)
  • Year and Date: 2009-06-10
• [Presentation] 振幅変調型原子間力顕微鏡における非飽和型表面形状オブザーバの提案 (2009)
  • Author(s): 白石貴行(藤本研大学院生)
  • Organizer: 平成21年電気学会産業計測制御研究会
  • Place of Presentation: 東京
  • Year and Date: 2009-03-10
• [Presentation] 精密ステージの構造に基づくナノスケールサーボ-共振モードを考慮したマルチレートPWM位置制御の提案- (2009)
  • Author(s): 坂田晃一(藤本研学部生)
  • Organizer: 平成21年電気学会産業計測制御研究会
  • Place of Presentation: 東京
  • Year and Date: 2009-03-10
• [Presentation] 再学習機構を有する繰り返し完全追従制御に基づく磁気ディスク装置のRRO補償の高帯域化 (2009)
  • Author(s): 仁科裕章(藤本研大学院生)
  • Organizer: 平成21年電気学会産業計測制御研究会
  • Place of Presentation: 東京
  • Year and Date: 2009-03-10
• [Presentation] 加減速時の学習型PTCを用いた磁気ディスク装置におけるショートスパンシーク制御 (2009)
  • Author(s): 遠藤弘之(藤本研学部生)
  • Organizer: 平成21年電気学会産業計測制御研究会
  • Place of Presentation: 東京
  • Year and Date: 2009-03-10
• [Presentation] 非線形摩擦補償と制振PTCに基づくボールねじ駆動ステージの位置決め制御 (2009)
  • Author(s): 浅海博圭(藤本研大学院生)
  • Organizer: 平成21年電気学会業計測制御研究会
  • Place of Presentation: 東京
  • Year and Date: 2009-03-09
• [Presentation] 高帯域トルクメータを用いたPMモータのトルクリプル抑制制御法 (2009)
  • Author(s): 中村建太(藤本研大学院生)
  • Organizer: 平成21年電気学会半導体電力変換研究会
  • Place of Presentation: 大阪
  • Year and Date: 2009-01-24
• [Presentation] Observer Based Imaging and Feedforward Control for Atomic Force Microscope (2008)
  • Author(s): Takayuki Shiraishi, Hiroshi Fujimoto
  • Organizer: 16th International Colloquium on Scanning Probe Microscopy
  • Place of Presentation: Japan
  • Year and Date: 2008-12-13
• [Presentation] Observer Based Imaging and Feedforward Control for Atomic Force Microscope (2008)
  • Author(s): Takayuki Shiraishi(藤本研大学院生)
  • Organizer: 16th International Colloquium on Scanning Probe Microscopy
  • Place of Presentation: 静岡(日本)
  • Year and Date: 2008-12-13
• [Presentation] Contact-mode AFM Control with Modified surface Topography Learning Observer and PTC (2008)
  • Author(s): Hiroshi Fujimoto, Takashi Oshima
  • Organizer: The 34th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: Florida
  • Year and Date: 2008-11-12
• [Presentation] Basic Examination on Simultaneous Optimization of Mechanism and Control for High Precision Single Axis Stage and Experimental Verification (2008)
  • Author(s): Atsushi Hara, Saiki Kazuaki, Koichi Sakata, Hiroshi Fujimoto
  • Organizer: The 34th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: Florida
  • Year and Date: 2008-11-12
• [Presentation] Contact-mode AFM Control with Modified surface Topography Learning Observer and PTC (2008)
  • Author(s): Hiroshi Fujimoto
  • Organizer: The 34th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: フロリダ(アメリカ)
  • Year and Date: 2008-11-12
• [Presentation] Basic Examination on Simultaneous Optimization of Mechanism and Control for High Precision Single Axis Stage and Experimental Verification (2008)
  • Author(s): Atsushi Hara(藤本研共同研究者)
  • Organizer: The 34th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: フロリダ(アメリカ)
  • Year and Date: 2008-11-12
• [Presentation] High-Speed and High-Precision Tracking Control of Large-Scale Stage Using Perfect Tracking Control with Disturbance Observer (2008)
  • Author(s): Kazuaki Saiki, Kazuyuki Hirachi, Koichi Sakaata, Hiroshi Fujimoto
  • Organizer: The 34th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: Florida
  • Year and Date: 2008-11-11
• [Presentation] High-Speed and High-Precision Tracking Control of Large-Scale Stage Using Perfect Tracking Control with Disturbance Observer (2008)
  • Author(s): Kazuaki Saiki(藤本研社会人大学院生)
  • Organizer: The 34th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: フロリダ(アメリカ)
  • Year and Date: 2008-11-11
• [Presentation] Proposal of Current Control for Single-Phase Active Filter Based on Multirate PWM (2008)
  • Author(s): Kimihiko Sato, Hiroshi Fujimoto
  • Organizer: The 34rd Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: Florida
  • Year and Date: 2008-11-10
• [Presentation] Harmonic Current Suppression Method of SPM Motor Based on Repetitive Perfect Tracking Control with Speed Variation (2008)
  • Author(s): Takahiro Nakai, Hiroshi Fujimoto
  • Organizer: The 34th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: Florida
  • Year and Date: 2008-11-10
• [Presentation] High-speed Surface Topography Estimation and Reduction of Tracking Error for High-speed Atomic Force Microscope (2008)
  • Author(s): Takayuki Shiraishi, Hiroshi Fujimoto
  • Organizer: The 5th International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: Japan
  • Year and Date: 2008-11-10
• [Presentation] High-speed Surface Topography Estimation and Reduction of Tracking Error for High-speed Atomic Force Microscope (2008)
  • Author(s): Takayuki Shiraishi(藤本研大学院生)
  • Organizer: The 5th International Symposium on Surface Science and Nanotechnology
  • Place of Presentation: 東京(日本)
  • Year and Date: 2008-11-10
• [Presentation] Harmonic Current Suppression Method of SPM Motor Based on Repetitive Perfect Tracking Control with Sneed Variation (2008)
  • Author(s): Takahiro Nakai(藤本研元大学院生)
  • Organizer: The 34th Annual Conference of the IEEE Industrial Electronics Society
  • Place of Presentation: フロリダ(アメリカ)
  • Year and Date: 2008-11-10
• [Presentation] Xスキャナの非等速駆動による高速AFMの表面形状学習サンプル点間オブザーバ (2008)
  • Author(s): 白石貴行(藤本研大学院生)
  • Organizer: 平成20年電気学会産業計測制御研究会「ナノスケールサーボのための制御技術」
  • Place of Presentation: 東京
  • Year and Date: 2008-09-12
• [Presentation] RPTCを用いたディスクリートトラックメディアのための磁気ディスク装置におけるRRO補償 (2008)
  • Author(s): 仁科裕章(藤本研大学院生)
  • Organizer: 平成20年電気学会産業計測制御研究会「ナノスケールサーボのための制御技術」
  • Place of Presentation: 東京
  • Year and Date: 2008-09-12
• [Presentation] 多段可変自然長ばねモデルと外乱オブザーバに基づくボールねじステージの非線形摩擦補償 (2008)
  • Author(s): 浅海博圭(藤本研大学院生)
  • Organizer: 平成20年電気学会産業計測制御研究会「ナノスケールサーボのための制御技術」
  • Place of Presentation: 東京
  • Year and Date: 2008-09-12
• [Presentation] マルチレート制御とむだ時間補償に基づく精密実験ステージのマスタ・スレーブ同期位置制御 (2008)
  • Author(s): 坂田晃一(藤本研大学院生)
  • Organizer: 平成20年電気学会産業計測制御研究会「ナノスケールサーボのための制御技術」
  • Place of Presentation: 東京
  • Year and Date: 2008-09-12
• [Presentation] マルチレートオブザーバを用いたAFMの高速表面形状推定 (2008)
  • Author(s): 白石貴行(藤本研大学院生)
  • Organizer: 2008年秋季第69回応用物理学会学術講演会
  • Place of Presentation: 愛知
  • Year and Date: 2008-09-03
• [Presentation] 超精密ステージの設計製作および超高速ナノスケール位置決めの実験的検証 (2008)
  • Author(s): 坂田晃一(藤本研大学院生)
  • Organizer: 平成20年電気学会産業応用部門全国大会
  • Place of Presentation: 高知
  • Year and Date: 2008-08-29
• [Presentation] コンタクトモードAFMにおけるPTCに基づく表面形状オブザーバの提案と双方向型学習制御への適用 (2008)
  • Author(s): 白石貴行(藤本研大学院生)
  • Organizer: 平成20年電気学会産業応用部門全国大会
  • Place of Presentation: 高知
  • Year and Date: 2008-08-29
• [Presentation] 表面形状学習に基づく原子間力顕微鏡のナノスケールサーボ制御 (2008)
  • Author(s): 藤本博志
  • Organizer: 平成20年電気学会産業応用部門大会
  • Place of Presentation: 高知
  • Year and Date: 2008-08-28
• [Presentation] 繰り返し完全追従制御によるPMモータのトルクリプル抑制制御注の提案 (2008)
  • Author(s): 中村建太(藤本研大学院生)
  • Organizer: 平成20無電気学会産業応用部門全国大会
  • Place of Presentation: 高知
  • Year and Date: 2008-08-27
• [Presentation] Realization of High-Speed Measurement AM-AFM Using Surface Topography Learning Observers (2008)
  • Author(s): Takayuki Shiraishi, Hiroshi Fujimoto
  • Organizer: SICE Annual Conference 2008
  • Place of Presentation: Japan
  • Year and Date: 2008-08-21
• [Presentation] RRO Compensation of Hard Disk Drives with RPTC Considering Correlation of Adjacent Tracks (2008)
  • Author(s): Hiroaki Nishina, Hiroshi Fujimoto
  • Organizer: SICE Annual Conference 2008
  • Place of Presentation: Japan
  • Year and Date: 2008-08-21
• [Presentation] Proposal on nonlinear friction compensation based on variable natural length spring model (2008)
  • Author(s): Hiroyoshi Asaumi, Hiroshi Fujimoto
  • Organizer: SICE Annual Conference 2008
  • Place of Presentation: Japan
  • Year and Date: 2008-08-21
• [Presentation] Realization of High-Speed Measurement AM-AFM Using Surface Topography Learning Observers (2008)
  • Author(s): Takayuki Shiraishi(藤本研大学院生)
  • Organizer: SICE Annual Conference 2008
  • Place of Presentation: 東京(日本)
  • Year and Date: 2008-08-21
• [Presentation] RRO Compensation of Hard Disk Drives with RPTC Considering Correlation of Adjacent Tracks (2008)
  • Author(s): Hiroaki Nishina(藤本研大学院生)
  • Organizer: SICE Annual Conference 2008
  • Place of Presentation: 東京(日本)
  • Year and Date: 2008-08-21
• [Presentation] Proposal on nonlinear friction compensation based on variable natural length spring model (2008)
  • Author(s): Hiroyoshi Asaumi(藤本研大学院生)
  • Organizer: SICE Annual Conference 2008
  • Place of Presentation: 東京(日本)
  • Year and Date: 2008-08-21
• [Presentation] Positioning of Large-Scale High-Precision Stage with Vibration Suppression PTC (2008)
  • Author(s): Koichi Sakata, Hiroshi Fujimoto, Kazuaki Saiki
  • Organizer: 17th IFAC World Congress
  • Place of Presentation: Korea
  • Year and Date: 2008-07-07
• [Presentation] Positioning of Large-Scale High-Precision Stage with Vibration Suppression PTC (2008)
  • Author(s): Koichi Sakata(藤本研大学院生)
  • Organizer: 17th IFAC World Congress, Korea
  • Place of Presentation: ソウル(韓国)
  • Year and Date: 2008-07-07
• [Remarks]
  • URL: http://fujilab.k.u-tokyo.ac.jp/
• [Remarks]
  • URL: http://fujilab.k.u-tokyo.ac.jp/
• [Remarks]
  • URL: http://www.dnj.ynu.ac.jp/hflab/
• [Patent(Industrial Property Rights)] 位置決め装置の設計手法、位置決め装置の製造方法、位置決め装置、及び露光装置 (2010)
  • Inventor(s): 藤本博志, 関優志, 佐伯和明, 原篤史, 山中貴裕
  • Industrial Property Rights Holder: 横浜国立大学・(株)ニコン
  • Industrial Property Number: 2010-049856
  • Filing Date: 2010-03-05
• [Patent(Industrial Property Rights)] 加減速時のLPTCを使用したショートスパンシーク制御を行う磁気ディスク装置の制御装置および制御方法 (2009)
  • Inventor(s): 藤本博志, 遠藤弘之
  • Industrial Property Rights Holder: 横浜国立大学
  • Industrial Property Number: 2009-134274
  • Filing Date: 2009-06-03
• [Patent(Industrial Property Rights)] IPMモータ制御装置及び制御方法 (2009)
  • Inventor(s): 藤本博志, 宮島孝幸
  • Industrial Property Rights Holder: 横浜国立大学
  • Industrial Property Number: 2009-013397
  • Filing Date: 2009-01-23
• [Patent(Industrial Property Rights)] 制御システム (2009)
  • Inventor(s): 藤本博志
  • Industrial Property Rights Holder: 横浜国立大学
  • Acquisition Date: 2009-06-26
• [Patent(Industrial Property Rights)] 移動体制御装置、露光装置、及び移動体制御方法 (2009)
  • Inventor(s): 藤本博志, 佐伯和明
  • Industrial Property Rights Holder: 横浜国立大学
  • Industrial Property Number: 2009-134274
  • Filing Date: 2009-06-03
• [Patent(Industrial Property Rights)] 状態推定装置及び制御装置 (2009)
  • Inventor(s): 藤本博志, 坂田晃一, 佐伯和明
  • Industrial Property Rights Holder: 横浜国立大学・(株)ニコン
  • Industrial Property Number: 2009-207576
  • Filing Date: 2009-09-08
• [Patent(Industrial Property Rights)] 制御システム (2009)
  • Inventor(s): 藤本博志
  • Industrial Property Rights Holder: 横浜国立大学
  • Acquisition Date: 2009-06-26
• [Patent(Industrial Property Rights)] 原子間力顕微鏡装置 (2008)
  • Inventor(s): 藤本博志, 白石貴行
  • Industrial Property Rights Holder: 横浜国立大学
  • Industrial Property Number: 2008-231424
  • Filing Date: 2008-09-09
• [Patent(Industrial Property Rights)] PMモータの制御装置及び制御方法 (2008)
  • Inventor(s): 藤本博志, 中村建太
  • Industrial Property Rights Holder: 横浜国立大学
  • Industrial Property Number: 2008-216000
  • Filing Date: 2008-08-25
• [Patent(Industrial Property Rights)] 原子間力顕微鏡装置 (2008)
  • Inventor(s): 藤本博志, 白石貴行
  • Industrial Property Rights Holder: 横浜国立大学
  • Industrial Property Number: 2008-212095
  • Filing Date: 2008-08-20
• [Patent(Industrial Property Rights)] RPTCによるRRO補償を行う磁気ディスク装置の制御装置および制御方法 (2008)
  • Inventor(s): 藤本博志, 仁科裕章
  • Industrial Property Rights Holder: 横浜国立大学
  • Industrial Property Number: 2008-211015
  • Filing Date: 2008-08-19
• [Patent(Industrial Property Rights)] 制御装置、位置決め装置、及び制御方法 (2008)
  • Inventor(s): 藤本博志, 浅海博圭
  • Industrial Property Rights Holder: 横浜国立大学
  • Industrial Property Number: 2008-198548
  • Filing Date: 2008-07-31