Research on Nano-scale Servo Control for Atomic Force Microscope and Positioning Stage
Project/Area Number |
20686028
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Research Category |
Grant-in-Aid for Young Scientists (A)
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Allocation Type | Single-year Grants |
Research Field |
Control engineering
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Research Institution | Yokohama National University |
Principal Investigator |
FUJIMOTO Hiroshi Yokohama National University, 大学院・工学研究院, 准教授 (20313033)
|
Project Period (FY) |
2008 – 2009
|
Project Status |
Completed (Fiscal Year 2009)
|
Budget Amount *help |
¥25,350,000 (Direct Cost: ¥19,500,000、Indirect Cost: ¥5,850,000)
Fiscal Year 2009: ¥15,470,000 (Direct Cost: ¥11,900,000、Indirect Cost: ¥3,570,000)
Fiscal Year 2008: ¥9,880,000 (Direct Cost: ¥7,600,000、Indirect Cost: ¥2,280,000)
|
Keywords | 制御機器 / 高速高精度位置決め制御 / ナノスケールサーボ / 走査プローブ顕微鏡 / 原子間力顕微鏡 / ナノステージ / 制御工学 / 超精密位置決め / 超高速位置決め / モーションコントロール |
Research Abstract |
The objective of this study is to develop the fundamental technology to realize nano-scale servo systems with high-speed and high performance positioning control systems. In order to contribute the progress of science, the advanced control method of nano-probe which is utilized in atomic force microscope. We also studied the novel design and fabrication of nano-scale multi-degree-of-freedom positioning stage.
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Report
(3 results)
Research Products
(95 results)