A study and development on MQW strain control MEMS for wavelength tunable laser

• Project/Area Number: 20710099
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Microdevices/Nanodevices
• Research Institution: The University of Tokyo
• Principal Investigator: HIGO Akio The University of Tokyo, 先端科学技術研究センター, 助教 (60451895)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2009: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000); Fiscal Year 2008: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
• Keywords: マイクロ・ナノデバイス / マイクロマシン / 量子井戸 / メムス / 可変波長レーザ / 多重量子井戸

Research Abstract

In this study, we introduce of micro electro mechanical systems (MEMS) to conventional compound semiconductor laser structures. At first, we proposed and fabricated the MEMS-grating structure with comb drive actuators but the estimate of wavelength shifts is quite small. Therefore, in order to apply external force to multiple quantum well (MQW) structure by MEMS, we developed the surface active bonding technology and compound semiconductor chips were successfully bonded on silicon. We also measured optical emitting by current injection from silicon to MQW.

Research Products

• [Presentation] SiフォトニックMEMS gratingの作製方法についての検討 (2009)
  • Author(s): 石塚彰, 肥後昭男, 中野義昭
  • Organizer: 3-134, 平成21年電気学会全国大会
• [Presentation] Semiconductive Properties of Heterointegration of InP/InGaAs on High Doped Silicon Wire Waveguide for Silicon Hybrid Laser (2009)
  • Author(s): Ling-Han Li, Ryo Takigawa, Akio Higo, Masanori Kubota, Eiji Higurashi, Masakazu Sugiyama, Yoshiaki Nakano
  • Organizer: International Conference on Indium Phosphide and Related Materials (IPRM 2009)
  • Place of Presentation: Newport Beach, CA, USA
• [Presentation] A Novel Parylene/Al/Parylene Sandwitch Procetion Mask for HF Vapor Release for Micro Electro Mechanical Systems (2009)
  • Author(s): A. Higo, K. Takahashi, H. Fujita, Y. Nakano, H. Toshiyoshi
  • Organizer: 15th Int. Conf. on Solid-State Sensors
• [Presentation] MEMS Integrated with Silicon Photonic Wire Waveguides (2009)
  • Author(s): A. Higo, H. Toshiyoshi, H. Fujita, Y. Nakano
  • Organizer: in Proc. 16th Int. Display Workshop (IDW'09), Dec. 9-11, 2009, World Convention Center Summit
  • Place of Presentation: Phoenix Seagaia Resort, Miyazaki, Japan
• [Presentation] MEMS Integrated with Silicon Photonic Wire Waveguides (2009)
  • Author(s): A.Higo, H.Toshiyoshi, H.Fujita, Y.Nakano
  • Organizer: 16th Int.Display Workshop
  • Place of Presentation: シーガイア, 宮崎, 日本
• [Presentation] A Novel Parylene/Al/Parylene Sandwitch Procetion Mask for HF Vapor Release for Micro Electro Mechanical Systems (2009)
  • Author(s): A.Higo, K.Takahashi, H. Fujita, Y.Nakano, H.Toshiyoshi
  • Organizer: 15th Int.Conf.on Solid-State Sensors, Actuators & Microsystems(Transducers 2009)
  • Place of Presentation: デンバー, コロラド, USA
• [Presentation] Semiconductive Properties of Heterointegration of InP/InGaAs on High Doped Silicon Wire Waveguide for Silicon Hybrid Laser (2009)
  • Author(s): Ling-Han Li, Ryo Takigawa, Akio Higo, Masanori Kubota, Eiji Higurashi, Masakazu Sugiyama, Yoshiaki Nakano
  • Organizer: International Conference on Indium Phosphide and Related Materials(IPRM 2009)
  • Place of Presentation: ニューポートビーチ, カリフォルニア, USA
• [Presentation] SiフォトニックMEMS gratingの作製方法についての検討 (2009)
  • Author(s): 石塚彰, 肥後昭男, 中野義昭
  • Organizer: 平成21年電気学会全国大会
  • Place of Presentation: 北海道大学
• [Presentation] Design and fabrication of optical waveguide modulator integrated with silicon wire waveguide (2008)
  • Author(s): A. Higo, H. Fujita, H. Toshiyoshi, Y. Nakano
  • Organizer: in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)
  • Place of Presentation: TAYIH Landis Hotel, Tainan, Taiwan
• [Presentation] Design and Simulation of Hybrid Direct Coupling Laser with 3-5 MQW and Silicon Waveguide by Alignment Free Direct Bonding (2008)
  • Author(s): Ling-Han Li, Akio Higo, Masanori Kubota, Masakazu Sugiyama, Yoshiaki Nakano
  • Organizer: in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)
  • Place of Presentation: TAYIH Landis Hotel, Tainan, Taiwan
• [Presentation] Design of InP Based Tunable MEMS Grating for Photonic IC (2008)
  • Author(s): A. Ishizuka, A. Higo and Y. Nakano
  • Organizer: International nano optoelectronic workship(iNOW)2008
  • Place of Presentation: Tokyo, Japan