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A study and development on MQW strain control MEMS for wavelength tunable laser

Research Project

Project/Area Number 20710099
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Microdevices/Nanodevices
Research InstitutionThe University of Tokyo

Principal Investigator

HIGO Akio  The University of Tokyo, 先端科学技術研究センター, 助教 (60451895)

Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2009: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2008: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywordsマイクロ・ナノデバイス / マイクロマシン / 量子井戸 / メムス / 可変波長レーザ / 多重量子井戸
Research Abstract

In this study, we introduce of micro electro mechanical systems (MEMS) to conventional compound semiconductor laser structures. At first, we proposed and fabricated the MEMS-grating structure with comb drive actuators but the estimate of wavelength shifts is quite small. Therefore, in order to apply external force to multiple quantum well (MQW) structure by MEMS, we developed the surface active bonding technology and compound semiconductor chips were successfully bonded on silicon. We also measured optical emitting by current injection from silicon to MQW.

Report

(3 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • Research Products

    (11 results)

All 2009 2008

All Presentation (11 results)

  • [Presentation] SiフォトニックMEMS gratingの作製方法についての検討2009

    • Author(s)
      石塚彰, 肥後昭男, 中野義昭
    • Organizer
      3-134, 平成21年電気学会全国大会
    • Related Report
      2009 Final Research Report
  • [Presentation] Semiconductive Properties of Heterointegration of InP/InGaAs on High Doped Silicon Wire Waveguide for Silicon Hybrid Laser2009

    • Author(s)
      Ling-Han Li, Ryo Takigawa, Akio Higo, Masanori Kubota, Eiji Higurashi, Masakazu Sugiyama, Yoshiaki Nakano
    • Organizer
      International Conference on Indium Phosphide and Related Materials (IPRM 2009)
    • Place of Presentation
      Newport Beach, CA, USA
    • Related Report
      2009 Final Research Report
  • [Presentation] A Novel Parylene/Al/Parylene Sandwitch Procetion Mask for HF Vapor Release for Micro Electro Mechanical Systems2009

    • Author(s)
      A. Higo, K. Takahashi, H. Fujita, Y. Nakano, H. Toshiyoshi
    • Organizer
      15th Int. Conf. on Solid-State Sensors
    • Related Report
      2009 Final Research Report
  • [Presentation] MEMS Integrated with Silicon Photonic Wire Waveguides2009

    • Author(s)
      A. Higo, H. Toshiyoshi, H. Fujita, Y. Nakano
    • Organizer
      in Proc. 16th Int. Display Workshop (IDW'09), Dec. 9-11, 2009, World Convention Center Summit
    • Place of Presentation
      Phoenix Seagaia Resort, Miyazaki, Japan
    • Related Report
      2009 Final Research Report
  • [Presentation] MEMS Integrated with Silicon Photonic Wire Waveguides2009

    • Author(s)
      A.Higo, H.Toshiyoshi, H.Fujita, Y.Nakano
    • Organizer
      16th Int.Display Workshop
    • Place of Presentation
      シーガイア, 宮崎, 日本
    • Related Report
      2009 Annual Research Report
  • [Presentation] A Novel Parylene/Al/Parylene Sandwitch Procetion Mask for HF Vapor Release for Micro Electro Mechanical Systems2009

    • Author(s)
      A.Higo, K.Takahashi, H. Fujita, Y.Nakano, H.Toshiyoshi
    • Organizer
      15th Int.Conf.on Solid-State Sensors, Actuators & Microsystems(Transducers 2009)
    • Place of Presentation
      デンバー, コロラド, USA
    • Related Report
      2009 Annual Research Report
  • [Presentation] Semiconductive Properties of Heterointegration of InP/InGaAs on High Doped Silicon Wire Waveguide for Silicon Hybrid Laser2009

    • Author(s)
      Ling-Han Li, Ryo Takigawa, Akio Higo, Masanori Kubota, Eiji Higurashi, Masakazu Sugiyama, Yoshiaki Nakano
    • Organizer
      International Conference on Indium Phosphide and Related Materials(IPRM 2009)
    • Place of Presentation
      ニューポートビーチ, カリフォルニア, USA
    • Related Report
      2009 Annual Research Report
  • [Presentation] SiフォトニックMEMS gratingの作製方法についての検討2009

    • Author(s)
      石塚彰, 肥後昭男, 中野義昭
    • Organizer
      平成21年電気学会全国大会
    • Place of Presentation
      北海道大学
    • Related Report
      2008 Annual Research Report
  • [Presentation] Design and fabrication of optical waveguide modulator integrated with silicon wire waveguide2008

    • Author(s)
      A. Higo, H. Fujita, H. Toshiyoshi, Y. Nakano
    • Organizer
      in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)
    • Place of Presentation
      TAYIH Landis Hotel, Tainan, Taiwan
    • Related Report
      2009 Final Research Report
  • [Presentation] Design and Simulation of Hybrid Direct Coupling Laser with 3-5 MQW and Silicon Waveguide by Alignment Free Direct Bonding2008

    • Author(s)
      Ling-Han Li, Akio Higo, Masanori Kubota, Masakazu Sugiyama, Yoshiaki Nakano
    • Organizer
      in Proc. 4th Asia Pacific Conference on Transducers and Micro-Nano Technology (APCOT2008)
    • Place of Presentation
      TAYIH Landis Hotel, Tainan, Taiwan
    • Related Report
      2009 Final Research Report
  • [Presentation] Design of InP Based Tunable MEMS Grating for Photonic IC2008

    • Author(s)
      A. Ishizuka, A. Higo and Y. Nakano
    • Organizer
      International nano optoelectronic workship(iNOW)2008
    • Place of Presentation
      Tokyo, Japan
    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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