A study and development on MQW strain control MEMS for wavelength tunable laser
| Project/Area Number |
20710099
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Microdevices/Nanodevices
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| Research Institution | The University of Tokyo |
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Principal Investigator |
HIGO Akio The University of Tokyo, 先端科学技術研究センター, 助教 (60451895)
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| Project Period (FY) |
2008 – 2009
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| Project Status |
Completed (Fiscal Year 2009)
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| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2009: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2008: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
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| Keywords | マイクロ・ナノデバイス / マイクロマシン / 量子井戸 / メムス / 可変波長レーザ / 多重量子井戸 |
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| Research Abstract |
In this study, we introduce of micro electro mechanical systems (MEMS) to conventional compound semiconductor laser structures. At first, we proposed and fabricated the MEMS-grating structure with comb drive actuators but the estimate of wavelength shifts is quite small. Therefore, in order to apply external force to multiple quantum well (MQW) structure by MEMS, we developed the surface active bonding technology and compound semiconductor chips were successfully bonded on silicon. We also measured optical emitting by current injection from silicon to MQW.
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Report
(3 results)
Research Products
(11 results)
