A Study of Micro-Accelerometer Using Silicon Ring Resonator
| Project/Area Number |
20710102
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (B)
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
Microdevices/Nanodevices
|
|---|
| Research Institution | Kansai University |
|---|
Principal Investigator |
SUZUKI Masato Kansai University, システム理工学部, 助教 (70467786)
|
|---|
| Project Period (FY) |
2008 – 2010
|
| Project Status |
Completed (Fiscal Year 2010)
|
| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2009: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2008: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
|
|---|
| Keywords | 加速度センサ / 光リング共振器 / 慣性力センサ / シリコンフォトニクス / マッハツェンダ干渉計 / 光学シミュレーション / 多モード干渉光導波路(MMI) / 光計測 / 光導波路 / MEMS(マイクロマシン) / 光干渉 / 機械シミュレーション |
|---|
| Research Abstract |
A concept accelerometer was newly proposed which uses an optical interference of propagated light in Si waveguide. In this sensor, one waveguide of Mach-Zehnder interferometer (MZI) has floating beam structure (air-bridge type) which crosses with a cantilever supporting a proof mass in same plane. When the inertial force is applied to the proof mass, the floating waveguide is expanded and the output of the MZI is modulated. As a result of optical simulation and measurement of fabricated device, optical loss at the intersection of waveguide and supporting cantilever (50μm in width) becomes very small when the f the waveguide at the intersection is Multi-Mode interference (MMI) waveguide. Finally, we confirm the performance of the fabricated accelerometer by measurement of its optical modulation response to applying force.
|
Report
(4 results)
Research Products
(11 results)
