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A Study of Micro-Accelerometer Using Silicon Ring Resonator

Research Project

Project/Area Number 20710102
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Microdevices/Nanodevices
Research InstitutionKansai University

Principal Investigator

SUZUKI Masato  Kansai University, システム理工学部, 助教 (70467786)

Project Period (FY) 2008 – 2010
Project Status Completed (Fiscal Year 2010)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2010: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2009: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2008: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords加速度センサ / 光リング共振器 / 慣性力センサ / シリコンフォトニクス / マッハツェンダ干渉計 / 光学シミュレーション / 多モード干渉光導波路(MMI) / 光計測 / 光導波路 / MEMS(マイクロマシン) / 光干渉 / 機械シミュレーション
Research Abstract

A concept accelerometer was newly proposed which uses an optical interference of propagated light in Si waveguide. In this sensor, one waveguide of Mach-Zehnder interferometer (MZI) has floating beam structure (air-bridge type) which crosses with a cantilever supporting a proof mass in same plane. When the inertial force is applied to the proof mass, the floating waveguide is expanded and the output of the MZI is modulated. As a result of optical simulation and measurement of fabricated device, optical loss at the intersection of waveguide and supporting cantilever (50μm in width) becomes very small when the f the waveguide at the intersection is Multi-Mode interference (MMI) waveguide. Finally, we confirm the performance of the fabricated accelerometer by measurement of its optical modulation response to applying force.

Report

(4 results)
  • 2010 Annual Research Report   Final Research Report ( PDF )
  • 2009 Annual Research Report
  • 2008 Annual Research Report
  • Research Products

    (11 results)

All 2011 2010 2009 2008

All Journal Article (5 results) (of which Peer Reviewed: 5 results) Presentation (6 results)

  • [Journal Article] A Study of Mach?Zehnder Interferometer Type Optical Modulator Applicable to an Accelerometer2011

    • Author(s)
      M.Suzuki, T.Takahashi, S.Aoyagi, Y.Amemiya, M.Fukuyama, S.Yokoyama
    • Journal Title

      Japanese Journal of Applied Physics Vol.50

    • NAID

      210000070331

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] A Study of Mach-Zehnder Interferometer Type Optical Modulator Applicable to an Accelerometer2011

    • Author(s)
      Masato Suzuki, Tomokazu Takahashi, Seiji Aoyagi, Yoshiteru Amemiya, Masataka Fukuyama, Shin Yokoyama
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: Vol.50

    • NAID

      210000070331

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Design and Simulation of Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon2009

    • Author(s)
      M.Suzuki, G.Kawai, H.Izumi, S.Aoyagi, S.Yokoyama, T.Takahashi, S.Aoyagi, Y.Amemiya, M.Fukuyama, S.Yokoyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines Vol.129

      Pages: 301-306

    • NAID

      10025102814

    • Related Report
      2010 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design and Simulation of Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon2009

    • Author(s)
      Masato Suzuki
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines 129

      Pages: 301-306

    • NAID

      10025102814

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of Micro Accelerometer Using Screen Printed BaTiO_3 Film on a Ceramic Substrate and Its Characterization2009

    • Author(s)
      M. Suzuki, G. Kawai, H. Izumi, S. Aoyagi, S. Yokoyama
    • Journal Title

      IEEJ Transactions on Sensors and Micromachines Vol.129(In Print)

    • NAID

      10025102804

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] Development of Accelerometer Using Mach-Zehnder Interferometer Type Optical Waveguide2010

    • Author(s)
      Masato Suzuki
    • Organizer
      2010 International Conference on Solid State Devices and Materials (SSDM 2010)
    • Place of Presentation
      The University of Tokyo, Tokyo, Japan
    • Year and Date
      2010-09-24
    • Related Report
      2010 Annual Research Report
  • [Presentation] Development of Accelerometer Using Mach-Zehnder Interferometer Type Optical Waveguide2010

    • Author(s)
      M.Suzuki, K Nishioka T.Takahashi, S.Aoyagi, Y.Amemiya, M.Fukuyama1, S.Yokoyama
    • Organizer
      2010 International conference on Solid State Devices and Materials (SSDM2010)
    • Place of Presentation
      Toyo, Japan
    • Related Report
      2010 Final Research Report
  • [Presentation] マルチモード干渉を利用したSi光導波路の平面交差とその慣性センサのへの応用2009

    • Author(s)
      鈴木昌人
    • Organizer
      電気学会E部門総合研究会
    • Place of Presentation
      八王子市
    • Related Report
      2010 Final Research Report
  • [Presentation] マルチモード干渉を利用したSi光導波路の平面交差とその慣性センサのへの応用2009

    • Author(s)
      鈴木昌人
    • Organizer
      平成21年度電気学会E部門総合研究会
    • Place of Presentation
      東京工科大学八王子キャンパス
    • Related Report
      2009 Annual Research Report
  • [Presentation] Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon2008

    • Author(s)
      M.Suzuki, G.Kawai, H.Izumi, S.Aoyagi, S.Yokoyama
    • Organizer
      25th Sensor Symposium on Sensors Micromachines and Microsystems
    • Place of Presentation
      Ginowan-shi, Japan
    • Related Report
      2010 Final Research Report
  • [Presentation] Inertial Force Sensor Using Mach-Zehnder Interferometer with Optical Waveguides Made of Crystal Silicon2008

    • Author(s)
      M. Suzuki, G. Kawai, H. Izumi, S. Aoyagi, S. Yokoyama
    • Organizer
      25th Sensor Symposium
    • Place of Presentation
      沖縄県宜野湾市
    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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