Development of the field emitter for electron wave interference and control of emission sites in atomic scale.

• Project/Area Number: 20710108
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Microdevices/Nanodevices
• Research Institution: Osaka University
• Principal Investigator: MURAKAMI Katsuhisa Osaka University, 極限量子科学研究センター, 特任研究員 (20403123)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000); Fiscal Year 2009: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000); Fiscal Year 2008: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: 微小電子源 / 電子波干渉 / ビーム誘起堆積 / 電界放射顕微鏡 / 電界イオン顕微鏡 / 電子ビーム誘起堆積

Research Abstract

Development of beam deposited Pt field emitters for electron wave interference and in-situ observations of the electron emission sites of these emitters were investigated. These results indicated that the electron wave interference is generated by electrons emitted from two adjacent emission sites within a Pt nanocrystal. Further, in-situ transmission electron microscopy observations of the Pt field emitter during field emission and field evaporation were investigated. The Pt nanocrystals were found to move to the top of Pt field emitter during field evaporation. These results show the possibility of the control of electron emission sites in atomic scale by field evaporation.

Research Products

• [Journal Article] Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused ion beam induced deposition (2010)
  • Author(s): K. Murakami, T. Matsuo, F. Wakaya, M. Takai
  • Journal Title: Journal of Vacuum Science and Technology B 28
  • Peer Reviewed
• [Journal Article] In situ transmission electron microscopy observation of electron beam deposited Pt field emitter during field emission and field evaporation (2010)
  • Author(s): K. Murakami, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
  • Journal Title: Journal of Vacuum Science and Technology B 28
  • Peer Reviewed
• [Journal Article] Superposition of fringelike electron emission pattern from radical oxygen gas exposed Pt field emitter fabricated by electron beam induced deposition (2009)
  • Author(s): K. Murakami, S. Nishihara, N. Matsubara, S. Ichikawa, F. Wakaya, M. Takai
  • Journal Title: Journal of Vacuum Science and Technology B 27 Pages: 721-724
  • Peer Reviewed
• [Journal Article] Transmission Electron Microscopy Observation of Pt Pillar Fabricated by Electron Beam Induced Deposition (2009)
  • Author(s): K. Murakami, N. Matsubara, S. Ichikawa, T. Kisa, T. Nakayama, K. Takamoto, F. Wakaya, M. Takai, s. Petersen, B. Amon, H. Ryssel
  • Journal Title: Japanese Journal of Applied Physics 48
  • Peer Reviewed
• [Journal Article] Superposition of fringelike-electron-emission pattern from radical-oxygen-gas exposed Pt field emitter fabricated by electron-beam-induced deposition (2009)
  • Author(s): K.Murakami, S.Nishihara, N.Matsubara, S.Ichikawa, F.Wakaya, M.Takai
  • Journal Title: Journal of Vacuum Science & Technology B 27 Pages: 721-724
  • Peer Reviewed
• [Journal Article] Transmission-Electron-Microscopy Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition (2009)
  • Author(s): K.Murakami, N.Matsubara, S.Ichikawa, T.Kisa, T.Nakayama, K.Takamoto, F.Wakaya, M.Takai, s.Petersen, B.Amon, H.Rvssel
  • Journal Title: Japanese Journal of Applied Physics 48
  • Peer Reviewed
• [Journal Article] Relationship between field-emission characteristics and defects measured by Raman scattering in carbon-nanotube cathodes treated by plasma and laser (2008)
  • Author(s): W. S. Kim, T. Honda, K. Ohsumi, C. B. Oh, K. Murakami, S. Abo, F. Wakaya, and M. Takai
  • Journal Title: Journal of Vacuum Science & Technology B 26 Pages: 760-763
  • Peer Reviewed
• [Journal Article] Improvement of emission efficiency of nanocrystalline silicon planar cathodes (2008)
  • Author(s): H. Shimawaki, Y. Neo, H. Mimura, K. Murakami, F. Wakaya, and M. Takai
  • Journal Title: Journal of Vacuum Science & Technology B 26 Pages: 864-867
  • Peer Reviewed
• [Presentation] Observation of electron wave interference pattern from Pt field emitter fabricated by beam induced deposition (2010)
  • Author(s): K. Murakami
  • Organizer: The 2nd Japan-Korea Vacuum Nanoelectronics Workshop
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2010-03-04
• [Presentation] Observation of Electron wave Interference Pattern and Electron emission Site of Pt Nanocrystalline Field Emitter by Field emission Microscopy and Field ion Microscopy (2009)
  • Author(s): K. Murakami
  • Organizer: 7th International Symposium on Atomic Level Characterizations for New Materials and Devices
  • Place of Presentation: Maui, Hawaii, USA
  • Year and Date: 2009-12-08
• [Presentation] Observation of Electron-wave Interference Pattern and Electron-emission Site of Pt Nanocrystalline Field Emitter by Field-emission Microscopy and Field-ion Microscopy (2009)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Organizer: 7th International Symposium on Atomic Level Characterizations for New Materials and Devices
  • Place of Presentation: Maui, Hawaii, USA
  • Year and Date: 2009-12-08
• [Presentation] Fabrication of Pt nanocrystalline field emitter for electron wave interference by beam induced deposition (2009)
  • Author(s): K. Murakami
  • Organizer: The 22nd International Microprocesses and Nanotechnology Conference
  • Place of Presentation: Sapporo, Japan
  • Year and Date: 2009-11-19
• [Presentation] Fabrication of Pt nanocrystalline field emitter for electron-wave interference by beam-induced deposition (2009)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Organizer: The 22nd International Microprocesses and Nanotechnology Conference
  • Place of Presentation: 札幌
  • Year and Date: 2009-11-19
• [Presentation] Electron wave interference induced by electrons emitted from Pt field emitter fabricated by focused ion beam induced deposition (2009)
  • Author(s): K. Murakami
  • Organizer: The 22nd International Vacuum Nanoelectronics Conference
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2009-07-21
• [Presentation] In situ transmission electron microscope observation of electron beam deposited Pt field emitter under field emission and field evaporation (2009)
  • Author(s): K. Murakami
  • Organizer: The 22nd International Vacuum Nanoelectronics Conference
  • Place of Presentation: Hamamatsu, Japan
  • Year and Date: 2009-07-21
• [Presentation] In situ transmission-electron-microscope observation of electron-beam-deposited Pt field emitter under field emission and field evaporation (2009)
  • Author(s): K.Murakami, N.Matsubara, S.Ichikawa, F.Wakava, M.Takai
  • Organizer: The 22nd International Vacuum Nanoelectronics Conference
  • Place of Presentation: 浜松
  • Year and Date: 2009-07-21
• [Presentation] Electron-wave interference induced by electrons emitted from Pt field emitter fabricated by focused-ion-beam-induced deposition (2009)
  • Author(s): K.Murakami, T.Matsuo, F.Wakaya, M.Takai
  • Organizer: The 22nd International Vacuum Nanoelectronics Conference
  • Place of Presentation: 浜松
  • Year and Date: 2009-07-21
• [Presentation] ransmission Electron Microscope Observation of Pt Pillar Fabricated by Electron Beam Induced Deposition (2008)
  • Author(s): K. Murakami
  • Organizer: The 21st International Microprocesses and Nanotechnology Conference
  • Place of Presentation: Fukuoka, Japan
  • Year and Date: 2008-10-27
• [Presentation] Observation of fringelike electron emission pattern from radical oxygen gas exposed Pt field emitter fabricated by electron beam induced deposition (2008)
  • Author(s): K. Murakami
  • Organizer: The 21st International Vacuum Nanoelectronics Conference
  • Place of Presentation: Poland
  • Year and Date: 2008-07-13
• [Presentation] bservation of fringelike-electron-emission pattern from radical-oxygen-gas exposed Pt field emitter fabricated by electron-beam-induced deposition (2008)
  • Author(s): K. Murakami, S, Nishihara, N. Matsubara, S. Abo, F. Wakaya, and M. Takai
  • Organizer: The 21st International Vacuum Nanoelectronics Conference
  • Place of Presentation: ポーランドブロックフ
• [Presentation] Transmission-Electron-Microscope Observation of Pt Pillar Fabricated by Electron-Beam-Induced Deposition (2008)
  • Author(s): K. Murakami, N. Matsubara, S. Ichikawa, T. Kisa, T. Nakayama, K. Takamoto, F. Wakaya, M. Takai, S. Petersen, B. Amon, and H. Ryssel
  • Organizer: The 21st International Microprocesses and Nanotechnology Conference
  • Place of Presentation: 福岡県
• [Remarks] Shoulders-Gray-Spindt Award (for novel and ingenious young scientist's work) The 21st International Vacuum Nanoelectronics Conference, 13 -17 July 2008, Poland.