DEVELOPMENT OF MATHEMATICAL OPTIMIZATION IN NANO-MICRO ENGINEERING

• Project/Area Number: 20710112
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Social systems engineering/Safety system
• Research Institution: Tokyo University of Agriculture and Technology
• Principal Investigator: MIYASHIRO Ryuhei Tokyo University of Agriculture and Technology, 大学院・工学研究院, 特任准教授 (50376860)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000); Fiscal Year 2010: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2009: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000); Fiscal Year 2008: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
• Keywords: OR / 数理工学 / 精密工学 / 最適化 / アルゴリズム / 数理計画 / 組合せ最適化 / マイクロエンジニアリング

Research Abstract

In nano-micro engineering, observation and implementation errors strongly affects production process. With traditional optimization methods, it is difficult to obtain true optimum solutions due to such errors. In this study, we developed several optimization algorithms avoiding numerical difficulties. The obtained results are robust against observation and implementation errors, and are highly effective in practice.

Research Products

• [Journal Article] An improved approximation algorithm for the traveling tournament problem (2011)
  • Author(s): Daisuke Yamaguchi, Shinji Imahori, Ryuhei Miyashiro, Tomomi Matsui
  • Journal Title: Algorithmica 印刷中
  • Peer Reviewed
• [Journal Article] An improved approximation algorithm for the traveling tournament problem (2011)
  • Author(s): D.Yamaguchi, S.Imahori, R.Miyashiro, T.Matsui
  • Journal Title: Algorithmica Volume: (印刷中)
  • Peer Reviewed
• [Journal Article] An improved approximation algorithm for the traveling tournament problem (2010)
  • Author(s): 山口大輔, 今掘慎治, 宮代隆平, 松井知己
  • Journal Title: 統計数理研究所共同研究リポート 252巻 Pages: 1-14
• [Journal Article] Optimization of lens adjustment in semiconductor lithography equipment using quadratically constrained and second- order cone programming (2010)
  • Author(s): Yuji Shinano,Toshiyuki Yoshihara,Ryuhei Miyashiro,Youzou Fukagawa
  • Journal Title: Journal of Advanced Mechanical Design, Systems, and Manufacturing Vol.4 Pages: 785-793
  • NAID: 130000300129
  • Peer Reviewed
• [Journal Article] Optimization of lens adjustment in semiconductor lithography equipment using quadratically constrained and second-order cone programming (2010)
  • Author(s): Y.Shinano, T.Yoshihara, R.Miyashiro, Y.Fukagawa
  • Journal Title: Journal of Advanced Mechanical Design, Systems, and Manufacturing Volume: 4 Pages: 785-793
  • NAID: 130000300129
  • Peer Reviewed
• [Journal Article] An Approximation Algorithm for the Traveling Tournament Problem (2010)
  • Author(s): Ryuhei Miyashiro
  • Journal Title: Annals of Operations Research (印刷中)
  • Peer Reviewed
• [Journal Article] An Improved Approximation Algorithm for the Traveling Tournament Problem (2010)
  • Author(s): Daisuke Yamaguchi
  • Journal Title: 統計数理研究所共同研究リポート 252 Pages: 1-14
• [Journal Article] Optimization of alignment in semi-conductor lithography equipment (2009)
  • Author(s): Ryuhei Miyashiro, Youzou Fukagawa
  • Journal Title: Precision Engineering Vol.33 Pages: 327-332
  • NAID: 10029041520
  • Peer Reviewed
• [Journal Article] 制約2次計画法および2次錐計画法を用いた半導体露光装置用レンズの最適調整 (2009)
  • Author(s): 品野勇治, 吉原俊幸, 宮代隆平, 深川容三
  • Journal Title: 日本機械学会論文集C編 75巻 Pages: 157-163
  • Peer Reviewed
• [Journal Article] 制約2次計画法および2次錐計画法を用いた半導体露光装置用レンズの最適調整 (2009)
  • Author(s): 品野勇治, 吉原俊幸, 宮代隆平, 深川容三
  • Journal Title: 日本機械学会論文集C編 75 Pages: 157-163
  • Peer Reviewed
• [Journal Article] Optimization of alignment in semiconductor lithography equipment (2009)
  • Author(s): Ryuhei Miyashiro, Youzou Fukagawa
  • Journal Title: Precision Engineering 33(印刷中)
  • NAID: 10029041520
  • Peer Reviewed
• [Journal Article] An approximation algorithm for the traveling tournament problem
  • Author(s): Ryuhei Miyashiro, Shinji Imahori, Tomomi Matsui
  • Journal Title: Annals of Operations Research 印刷中(掲載確定)
  • Peer Reviewed
• [Presentation] 交通ネットワークデザイン問題におけるBPR関数の近似について (2011)
  • Author(s): 宮代隆平
  • Organizer: 日本応用数理学会 2011年研究部会連合発表会
  • Place of Presentation: 電気通信大学・東京都
  • Year and Date: 2011-03-08
• [Presentation] リスク最小化に着目したネットワークフローモデルと安全下校問題への応用 (2011)
  • Author(s): 田中健一
  • Organizer: 日本応用数理学会 2011年研究部会連合発表会
  • Place of Presentation: 電気通信大学・東京都
  • Year and Date: 2011-03-08
• [Presentation] An Approximation Algorithm for the Unconstrained Traveling Tournament Problem (2010)
  • Author(s): Shinji Imahori, Tomomi Matsui, Ryuhei Miyashiro
  • Organizer: The 8th International Conference on the Practice and Theory of Automated Timetabling (PATAT 2010)
  • Place of Presentation: Queen's University Belfast, Northern Ireland, United Kingdom
  • Year and Date: 2010-08-10
• [Presentation] An Approximation Algorithm for the Unconstrained Traveling Tournament Problem (2010)
  • Author(s): Tomomi Matsui
  • Organizer: The 8th International Conference on the Practice and Theory of Automated Timetabling
  • Place of Presentation: ベルファスト・英国
  • Year and Date: 2010-08-10
• [Presentation] 或M君の半々生 (2010)
  • Author(s): 宮代隆平
  • Organizer: 日本オペレーションズ・リサーチ学会「計算と最適化の新展開」研究部会 SCOPE@つくば-未来を担う若手研究者の集い2010-
  • Place of Presentation: 筑波大学・茨城県(招待講演)
  • Year and Date: 2010-06-27
• [Presentation] 加法的実装誤差の不連続性を考慮したレンズ間隔調整のロバスト最適化 (2010)
  • Author(s): 宮代隆平
  • Organizer: 研究集会「最適化:モデリングとアルゴリズム」
  • Place of Presentation: 東京都・統計数理研究所
  • Year and Date: 2010-03-24
• [Presentation] 加法的実装誤差の不連続性を考慮したレンズ間隔調整のロバスト最適化 (2010)
  • Author(s): 宮代隆平
  • Organizer: 研究集会「最適化:モデリングとアルゴリズム」,統計数理研究所
  • Place of Presentation: 統計数理研究所
  • Year and Date: 2010-03-23
• [Presentation] An improved approximation algorithm for the traveling tournament problem (2009)
  • Author(s): Daisuke Yamaguchi, Shinji Imahori, Ryuhei Miyashiro, Tomomi Matsui
  • Organizer: The 20th International Symposium on Algorithms and Computation (ISAAC 2009)
  • Place of Presentation: Honolulu, Hawaii, USA
  • Year and Date: 2009-12-18
• [Presentation] An improved approximation algorithm for the traveling tournament problem (2009)
  • Author(s): Daisuke Yamaguchi
  • Organizer: ISAAC 2009
  • Place of Presentation: アメリカ合衆国・ハワイ州
  • Year and Date: 2009-12-18
• [Presentation] 誤差の離散性を考慮したレンズ調整のロバスト最適化 (2009)
  • Author(s): 宮代隆平
  • Organizer: 日本オペレーションズ・リサーチ学会2009年秋季研究発表会
  • Place of Presentation: 長崎大学
  • Year and Date: 2009-09-10
• [Presentation] 誤差の離散性を考慮したレンズ調整のロバスト最適化 (2009)
  • Author(s): 宮代隆平
  • Organizer: 日本オペレーションズ・リサーチ学会
  • Place of Presentation: 長崎県・長崎大学
  • Year and Date: 2009-09-10
• [Presentation] An improved approximation algorithm for the traveling tournament problem (2009)
  • Author(s): Daisuke Yamaguchi, Shinji Imahori, Ryuhei Miyashiro, Tomomi Matsui
  • Organizer: The 12th KOREA-JAPAN Joint Workshop on Algorithms and Computation (WAAC 2009)
  • Place of Presentation: Kookmin University, Korea
  • Year and Date: 2009-07-04
• [Presentation] An improved approximation algorithm for the traveling tournament problem (2009)
  • Author(s): Daisuke Yamaguchi
  • Organizer: WAAC 2009
  • Place of Presentation: 韓国・ソウル
  • Year and Date: 2009-07-04
• [Presentation] 混合整数計画法とその適用事例 (2008)
  • Author(s): 宮代隆平
  • Organizer: 日本オペレーションズ・リサーチ学会平成20年度第1回ORセミナー
  • Place of Presentation: 構造計画研究所, 東京
  • Year and Date: 2008-08-28
• [Patent(Industrial Property Rights)] 露光装置、調整方法及びデバイスの製造方法 (2009)
  • Inventor(s): 宮代隆平, 品野勇治, 深川容三, 久保諭史, 高野義巳, 吉原俊幸
  • Industrial Property Rights Holder: キヤノン株式会社、国立大学法人東京農工大学
  • Patent Publication Number: 2011-009575
  • Filing Date: 2009-06-26