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Development of intense pulsed heavy ion beam and its application to ion implantation technology for next generation semiconductor

Research Project

Project/Area Number 20740319
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Plasma science
Research InstitutionUniversity of Toyama

Principal Investigator

ITO Hiroaki  University of Toyama, 理工学研究部, 助教 (70302445)

Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2009: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2008: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywordsパルス重イオンビーム / 両極性パルス加速器 / パルスパワー技術 / パルスイオン注入
Research Abstract

In order to improve the purity of the intense pulsed ion beam a new type of a pulsed ion beam accelerator named "bipolar pulse accelerator (BPA)" has been proposed and developed. The BPA system utilizes a magnetically insulated acceleration gap and is operated with the bipolar pulse. When the bipolar pulse with voltage of about ±100 kV and pulse duration of about 70 ns was applied to the drift tube, the ions were successfully accelerated from the grounded anode to the drift tube in the 1st gap by the negative pulse of the bipolar pulse and the pulsed ion beam with current density of 40 A/cm^2 and pulse duration of 30 ns was obtained at 50 mm downstream from the anode surface. In addition, part of the ion beam was again accelerated toward the grounded cathode in the 2nd gap by the positive pulse of the bipolar pulse. The pulsed ion beam with the peak ion current density of 10 A/cm^2 and the beam pulse duration of 30 ns was obtained at 30 mm downstream from the cathode surface.

Report

(3 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • Research Products

    (35 results)

All 2010 2009 2008 Other

All Journal Article (19 results) (of which Peer Reviewed: 8 results) Presentation (15 results) Remarks (1 results)

  • [Journal Article] Development of Bipolar Pulse Accelerator for Intense Pulsed Heavy Ion Beam2009

    • Author(s)
      H. Ito, I. Kitamura, K. Masugata
    • Journal Title

      Plasma and Fusion Research Series 8

      Pages: 1522-1525

    • Related Report
      2009 Final Research Report
  • [Journal Article] Characteristic observation of intense pulsed aluminum ion beam in magnetically insulated ion diode with vacuum arc ion source2009

    • Author(s)
      H. Ito, K. Fujikawa, H. Miyake, K. Masugata
    • Journal Title

      IEEE Transactions on Plasma Science 37

      Pages: 1879-1884

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of High Current Pulsed Aluminum Ion Beam with Ion Source of Vacuum Arc Plasma Gun2009

    • Author(s)
      K. Fujikawa, H. Miyake, H. Ito, K. Masugata
    • Journal Title

      Research Report NIFS-PROC 79

      Pages: 51-57

    • Related Report
      2009 Final Research Report
  • [Journal Article] Development of Bipolar Pulse Accelerator for Intense Pulsed Heavy Ion Beam2009

    • Author(s)
      H.Ito, et. al.
    • Journal Title

      Plasma and Fusion Research Series 8

      Pages: 1522-1525

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of DLC films by pulsed ion beam ablation in a dense plasma focus device2009

    • Author(s)
      Z.P.Wang, et. al.
    • Journal Title

      Physics Letters A 373

      Pages: 4169-4173

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characteristic observation of intense pulsed aluminum ion beam in mag netically insulated ion diode with vacuum arc ion source2009

    • Author(s)
      H.Ito, et. al.
    • Journal Title

      IEEE Transactions on Plasma Science 37

      Pages: 1879-1884

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication and Characterization of Silicon Carbide using Electron Beam by Plasma Focus Device2009

    • Author(s)
      Z.P.Wang, et. al.
    • Journal Title

      Research Report NIFS-PROC 79

      Pages: 41-47

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Development of High Current Pulsed Aluminum Ion Beam with Ion Source of Vacuum Arc Plasma Gun2009

    • Author(s)
      K.Fujikawa, et. al.
    • Journal Title

      Research Report NIFS-PROC 79

      Pages: 51-57

    • Related Report
      2009 Annual Research Report
  • [Journal Article] プラズマフォーカス装置におけるパルスイオンビームの特性評価2009

    • Author(s)
      西野勇紀, 他5名
    • Journal Title

      電気学会プラズマ・プラズマ・放電合同研究会資料

      Pages: 5-9

    • Related Report
      2009 Annual Research Report
  • [Journal Article] パルスパワー技術を用いた高強度パルス重イオンビームの発生と特性評価2009

    • Author(s)
      藤川幸大, 他3名
    • Journal Title

      電気学会プラズマ・プラズマ・放電合同研究会資料

      Pages: 19-23

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Diagnosis of high-intensity pulsed heavy ion beam generated by a novel magnetically insulated diode with gas puff plasma gun2008

    • Author(s)
      H. Ito, H. Miyake, K. Masugata
    • Journal Title

      Review of Scientific Instruments 79

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of silicon carbide film by a plasma focus device2008

    • Author(s)
      Z.P. Wang, H.R. Yousefi, Y. Nishino, H. Ito, K. Masugata
    • Journal Title

      Physics Letters A 372

      Pages: 7179-7182

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of Bipolar Pulse Generator for High-purity Pulsed Ion Beam2008

    • Author(s)
      H. Ito, I. Kitamura, K. Masugata
    • Journal Title

      Research Report NIFS-PROC 72

      Pages: 51-57

    • Related Report
      2009 Final Research Report
  • [Journal Article] Diagnosis of high-intensity pulsed heavy ion beam generated by a novel magnetically insulated diode with gas puff plasma gun2008

    • Author(s)
      H. Ito, et.al.
    • Journal Title

      Review of Scientific Instruments 79

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Preparation of silicon carbide film by a plasma focus device2008

    • Author(s)
      Z.P. Wang, et.al.
    • Journal Title

      Physics Letters A 372

      Pages: 7179-7182

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of Intense Pulsed Aluminum Ion Beam by Mag netically Insulated Diode with Vacuum Arc Ion Source2008

    • Author(s)
      H. Ito, et.al.
    • Journal Title

      Proc. of The 17th International Conference on High-Power Particle Beams

      Pages: 227-230

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Application of Ion Beam and Electron Beam by Plasma Focus device to Material Processes2008

    • Author(s)
      Z.P. Wang, et.al.
    • Journal Title

      Proc. of The 17th International Conference on High-Power Particle Beams

      Pages: 323-326

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Evaluation of Bipolar Pulse Generator for High-purity Pulsed Ion Beam2008

    • Author(s)
      H. Ito, et.al.
    • Journal Title

      Research Report NIFS-PROC 72

      Pages: 68-74

    • Related Report
      2008 Annual Research Report
  • [Journal Article] Diagnosis of Pulsed Heavy Ion beam by Magnetically Insulated I on Diode2008

    • Author(s)
      H. Miyake, et.al
    • Journal Title

      Research Report NIFS-PROC 72

      Pages: 75-79

    • Related Report
      2008 Annual Research Report
  • [Presentation] 高強度パルスイオンビーム源としての真空ア-クプラズマガンの特性評価2010

    • Author(s)
      落合靖、藤川幸大、伊藤弘昭、升方勝己
    • Organizer
      電気学会
    • Place of Presentation
      明治大学
    • Year and Date
      2010-03-17
    • Related Report
      2009 Final Research Report
  • [Presentation] 高強度パルスイオンビーム源としての真空アークプラズマガンの特性評価2010

    • Author(s)
      落合靖, 他3名
    • Organizer
      電気学会
    • Place of Presentation
      明治大学
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] プラズマフォーカス装置から発生するプロトンビームの特性評価2010

    • Author(s)
      西野勇紀, 他5名
    • Organizer
      電気学会
    • Place of Presentation
      明治大学
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] 両極性パルス加速器用電源の特性評価2009

    • Author(s)
      高部淳二, 他2名
    • Organizer
      日本物理学会
    • Place of Presentation
      金沢大学
    • Year and Date
      2009-12-05
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高強度パルス重イオンビーム用両極性パルス加速器の開発2009

    • Author(s)
      伊藤弘昭、高部淳二、升方勝己
    • Organizer
      核融合科学研究所共同研究研究会
    • Place of Presentation
      核融合科学研究所
    • Year and Date
      2009-11-21
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] プラズマフォーカスにおけるパルスイオンビームの特性評価2009

    • Author(s)
      西野勇紀, 他6名
    • Organizer
      電気学会
    • Place of Presentation
      北陸先端科学技術大学
    • Year and Date
      2009-09-12
    • Related Report
      2009 Annual Research Report
  • [Presentation] パルスパワー技術を用いたパルスアルミニウムイオンビーム発生と特性評価2009

    • Author(s)
      藤川幸大、落合靖、三宅秀典、伊藤弘昭、升方勝己
    • Organizer
      応用物理学会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-11
    • Related Report
      2009 Final Research Report
  • [Presentation] パルスパワー技術を用いた高強度パルス重イオンビームの発生と特性評価2009

    • Author(s)
      藤川幸大, 他4名
    • Organizer
      応用物理学会
    • Place of Presentation
      富山大学
    • Year and Date
      2009-09-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] パルスパワーによる高強度パルスイオンビーム生成とその応用2009

    • Author(s)
      升方勝己、伊藤弘昭
    • Organizer
      プラズマ科学シンポジウム2009
    • Place of Presentation
      名古屋大学
    • Year and Date
      2009-02-02
    • Related Report
      2009 Final Research Report 2008 Annual Research Report
  • [Presentation] 高強度パルス重イオンビームの開発と材料プロセスへの応用2008

    • Author(s)
      伊藤弘昭、藤川幸大、落合靖、鍋谷実、升方勝己
    • Place of Presentation
      栃木県総合文化センター
    • Year and Date
      2008-12-02
    • Related Report
      2009 Final Research Report 2008 Annual Research Report
  • [Presentation] パルスアルミニウムイオンビームによる材料表面処理の研究2008

    • Author(s)
      落合靖、藤川幸大、鍋谷実、伊藤弘昭、升方勝己
    • Organizer
      物理学会
    • Place of Presentation
      福井大学
    • Year and Date
      2008-11-29
    • Related Report
      2008 Annual Research Report
  • [Presentation] パルスアルミニウムイオンビームによるアニール処理2008

    • Author(s)
      鍋谷実、藤川幸大、落合靖、伊藤弘昭、升方勝己
    • Organizer
      電気学会
    • Place of Presentation
      富山大学
    • Year and Date
      2008-09-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] Development of Bipolar Pulse Accelerator for Intense Pulsed Heavy Ion Beam2008

    • Author(s)
      H. Ito, I. Kitamura, K. Masugata
    • Organizer
      The 14th International Congress on Plasma Physics 2008
    • Place of Presentation
      福岡国際会議場
    • Year and Date
      2008-09-11
    • Related Report
      2009 Final Research Report 2008 Annual Research Report
  • [Presentation] Diagnosis of Intense Pulsed Aluminum Ion Beam by Magnetically Insulated Ion Diode2008

    • Author(s)
      K. Fujikawa, H. Ito, K. Masugata
    • Organizer
      The 14th International Congress on Plasma Physics 2008
    • Place of Presentation
      福岡国際会議場
    • Year and Date
      2008-09-11
    • Related Report
      2009 Final Research Report 2008 Annual Research Report
  • [Presentation] 高強度パルスイオンビーム発生と材料照射実験2008

    • Author(s)
      藤川幸大、落合靖、鍋谷実、伊藤弘昭、升方勝己
    • Organizer
      電気学会
    • Place of Presentation
      北海道大学
    • Year and Date
      2008-03-17
    • Related Report
      2008 Annual Research Report
  • [Remarks]

    • URL

      http://denryoku.eng.u-toyama.ac.jp/

    • Related Report
      2009 Final Research Report

URL: 

Published: 2008-04-01   Modified: 2016-04-21  

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