Development of a plasma diagnostic tool with Terahertz time-domain spectroscopy (THz-TDS)

• Project/Area Number: 20740322
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Plasma science
• Research Institution: Osaka University
• Principal Investigator: ANDO Ayumi Osaka University, 工学研究科, 特任研究員 (60452471)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000); Fiscal Year 2009: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2008: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
• Keywords: プラズマ計測 / 反応性プラズマ / ラジカル / プラズマ診断 / 大気圧プラズマ / テラヘルツ時間領域分光法 / THz時間領域分光法

Research Abstract

A new plasma diagnostic tool of terahertz time-domain spectroscopy (THz-TDS) has been developed in this project. The experimental results have been demonstrated that THz-TDS may be used for electron density measurements of the steady-state discharges generated by inductively coupled plasma or capacitively coupled plasma systems. The electron density estimated by THz-TDS agrees well with that estimated by a Langmuir probe for inductively coupled argon plasma.

Research Products

• [Journal Article] Electron density measurement for plasmas by Terahertz time-domain spectroscopy (2010)
  • Author(s): Ayumi Ando, Hideaki Kitahara, Tomoko Kurose, Katsuhisa Kitano, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
  • Journal Title: Journal of Physics; Conference Series(Proceedings of 14^<th> International Symposium on Laser-Aided Plasma Diagnostics (14^<th> LAPD)) (in press)
  • Peer Reviewed
• [Journal Article] Estimation of Electron Densities of Plasmas by Terahertz Time-Domain Spectroscopy (2010)
  • Author(s): 北原英明
  • Journal Title: Proceedings of The 34th International Conference on Infrared, Millimeter, and Terahertz Waves No.W5E61 Pages: 135-136
  • Peer Reviewed
• [Journal Article] Estimation of Electron Densities of Plasmas by Terahertz Time-Domain Spectroscopy (2009)
  • Author(s): Hideaki Kitahara, Ayumi Ando, Tomoko Kurose, Katsuhisa Kitano, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
  • Journal Title: The 34th International Conference on Infrared, Millimeter, and Terahertz Waves, Paradise Hotel, Busan, Paper No.W5E61 Pages: 135-136
  • Peer Reviewed
• [Presentation] Diagnosis of atmospheric pressure plasmas by using terahertz time-domain spectroscopy (2010)
  • Author(s): 北原英明
  • Organizer: The 3rd International Workshop on Far-Infrared Technologies 2010 (IW-FIRT 2010)
  • Place of Presentation: 福井県福井市 福井大学
  • Year and Date: 2010-03-16
• [Presentation] Diagnosis of atmospheric pressure plasmas by using terahertz time-domain spectroscopy (2010)
  • Author(s): Hideaki Kitahara, Ayumi Ando, Katsuhisa Kitano, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
  • Organizer: The 3rd International Workshop on Far-Infrared Technologies (IW-FIRT)
  • Place of Presentation: Fukui, Japan
• [Presentation] Terahertz time domain spectroscopy for the atmospheric pressure plasmas (2009)
  • Author(s): 北原英明
  • Organizer: 4^<th> International Symposium on Atomic Technology (ISAT- 4)
  • Place of Presentation: 兵庫県神戸市 舞子ビラ神戸
  • Year and Date: 2009-11-19
• [Presentation] Estimation of Electron Densities of Plasmas by Terahertz Time-Domain Spectroscopy (2009)
  • Author(s): 北原英明
  • Organizer: The 34^<th> International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW)
  • Place of Presentation: 韓国 釜山
  • Year and Date: 2009-09-23
• [Presentation] Electron density measurement for plasmas by Terahertz time-domain spectroscopy (2009)
  • Author(s): 安藤あゆみ
  • Organizer: 14^<th> International Symposium on Laser-Aided Plasma Diagnostics (14^<th> LAPD)
  • Place of Presentation: イタリア・トレビソ
  • Year and Date: 2009-09-22
• [Presentation] テラヘルツ時間領域分光法による容量結合型反応性プラズマ診断 (2009)
  • Author(s): 安藤あゆみ
  • Organizer: 第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
  • Year and Date: 2009-03-30
• [Presentation] Reactivity plasma diagnostic with Terahertz time-domain spectroscopy (2009)
  • Author(s): 安藤あゆみ
  • Organizer: 3rd International Symposium on Atomic Technology/3rd Polyscale Technology Workshop (ISAT-3/ PTW-3)
  • Place of Presentation: 東京国際交流館
  • Year and Date: 2009-03-05
• [Presentation] Terahertz time domain spectroscopy for the atmospheric pressure plasmas (2009)
  • Author(s): Hideaki Kitahara, Ayumi Ando, Tsuyohito Ito, Katsuhisa Kitano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
  • Organizer: 4^<th> International Symposium on Atomic Technology (ISAT-4)
  • Place of Presentation: Hyogo, Japan
• [Presentation] Electron density measurement for plasmas by Terahertz time-domain spectroscopy (2009)
  • Author(s): Ayumi Ando, Hideaki Kitahara, Tomoko Kurose, Katsuhisa Kitano, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
  • Organizer: 14^<th> International Symposium on Laser-Aided Plasma Diagnostics (14^<th> LAPD)
  • Place of Presentation: Castelbrando, Treviso, Italy
• [Presentation] Estimation of Electron Densities of Plasmas by Terahertz Time-Domain Spectroscopy (2009)
  • Author(s): Hideaki Kitahara, Ayumi Ando, Tomoko Kurose, Katsuhisa Kitano, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
  • Organizer: The 34^<th> International Conference on Infrared, Millimeter, and Terahertz Waves (IRMMW)
  • Place of Presentation: Paradise Hotel, Busan, Korea
• [Presentation] テラヘルツ時間領域分光法による容量結合型放電プラズマの診断 (2009)
  • Author(s): 安藤あゆみ, 北原英明, 北野勝久, 高野恵介, 谷正彦, 萩行正憲, 浜口智志
  • Organizer: 第56回応用物理学関係連合講演会
  • Place of Presentation: 筑波大学
• [Presentation] Reactivity plasma diagnostic with Terahertz time-domain spectroscopy (2009)
  • Author(s): Ayumi Ando, Tomoko Kurose, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
  • Organizer: 3^<rd> International Symposium on Atomic Technology (ISAT-3)
  • Place of Presentation: Tokyo, Japan
• [Presentation] CH_4/Ar plasma measurements with Terahertz time-domain spectroscopy (2008)
  • Author(s): 安藤あゆみ
  • Organizer: The 6th EU-Japan Joint Symposium on Plasma Processing (EU-Japan JSPP)
  • Place of Presentation: 沖縄コンベンションセンター
  • Year and Date: 2008-04-22
• [Presentation] CH_4/Ar plasma measurements with Terahertz time-domain spectroscopy (2008)
  • Author(s): Ayumi Ando, Tomoko Kurose, Katsuhisa Kitano, Hideaki Kitahara, Keisuke Takano, Masahiko Tani, Masanori Hangyo, Satoshi Hamaguchi
  • Organizer: The 6^<th> EU-JAPAN Joint Symposium on Plasma Processing
  • Place of Presentation: Okinawa, Japan