Aperiodic design and development of soft X-ray broadband multilayermirror optics

• Project/Area Number: 20760017
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Tohoku University
• Principal Investigator: TSURU Toshihide Tohoku University, 多元物質科学研究所, 助教 (30306526)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000); Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2008: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
• Keywords: 超薄膜 / 多層膜 / 軟X線 / 広帯域 / 光学素子 / ミラー

Research Abstract

In the soft X-ray wavelength region, design method by using optimization algorithms and fabrication method were developed to broadening the reflection passband of multilayer mirror optics. Fabrication system which can control aperiodic period thickness and thickness distribution was realized. Aperiodic designs of broadband multilayer polarizer for the EUV and mutliayer mirror for the carbon window were determined.

Research Products

• [Journal Article] 軟X線顕微鏡用精密多層膜ミラーの開発 (2010)
  • Author(s): 津留俊英, 羽多野忠, 原田哲男, 山本正樹
  • Journal Title: 放射光 (印刷中)
  • NAID: 10026450527
  • Peer Reviewed
• [Journal Article] 軟X線顕微鏡用精密多層膜ミラーの開発 (2010)
  • Author(s): 津留俊英, 羽多野忠, 原田哲男, 山本正樹
  • Journal Title: 放射光 3(掲載確定)
  • NAID: 10026450527
  • Peer Reviewed
• [Journal Article] Advanced nanometer-size structures, Design and in-situ fabrication control of X-EUV mirrors (2008)
  • Author(s): Eva Majkova, Matej Jergel, Masaki Yamamoto, Toshihide Tsuru, Stefan Luby, Peter Siffalovi
  • Journal Title: Acta Physica Slovaca 57(6) Pages: 911-1074
• [Presentation] 膜厚分布制御成膜法を応用した新機能x線ミラーの開発 (2009)
  • Author(s): 羽多野忠, 原田哲男, 豊田光紀, 津留俊英, 山本正樹
  • Organizer: 第10回X線結像光学シンポジウム
  • Place of Presentation: 筑波
  • Year and Date: 2009-11-06
• [Presentation] 膜厚分布制御成膜法を応用した新機能X線ミラーの開発 (2009)
  • Author(s): 羽多野忠, 原田哲男, 豊田光紀, 津留俊英, 山本正樹
  • Organizer: 第10回X線結像光学シンポジウム
  • Place of Presentation: 筑波、つくば国際会議場
  • Year and Date: 2009-11-06
• [Presentation] 軟X線顕微鏡用精密多層膜ミラーの開発, 軟X線顕微鏡用精密多層膜ミラーの開発 (2009)
  • Author(s): 津留俊英, 羽多野忠, 原田哲男, 山本正樹
  • Organizer: 日本放射光学会第一回若手研究会「x線ナノ集光技術研究会」
  • Place of Presentation: 大阪
  • Year and Date: 2009-08-11
• [Presentation] 軟X線顕微鏡用精密多層膜ミラーの開発 (2009)
  • Author(s): 津留俊英, 羽多野忠, 原田哲男, 山本正樹
  • Organizer: 日本放射光学会第一回若手研究会「X線ナノ集光技術研究会」
  • Place of Presentation: 大阪、大阪大学
  • Year and Date: 2009-08-11
• [Remarks]
  • URL: http://www.tagen.tohoku.acjp/labo/m_yamamoto/index-j.html