Aperiodic design and development of soft X-ray broadband multilayermirror optics
| Project/Area Number |
20760017
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Tohoku University |
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Principal Investigator |
TSURU Toshihide Tohoku University, 多元物質科学研究所, 助教 (30306526)
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| Project Period (FY) |
2008 – 2009
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| Project Status |
Completed (Fiscal Year 2009)
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| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2008: ¥2,600,000 (Direct Cost: ¥2,000,000、Indirect Cost: ¥600,000)
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| Keywords | 超薄膜 / 多層膜 / 軟X線 / 広帯域 / 光学素子 / ミラー |
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| Research Abstract |
In the soft X-ray wavelength region, design method by using optimization algorithms and fabrication method were developed to broadening the reflection passband of multilayer mirror optics. Fabrication system which can control aperiodic period thickness and thickness distribution was realized. Aperiodic designs of broadband multilayer polarizer for the EUV and mutliayer mirror for the carbon window were determined.
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Report
(3 results)
Research Products
(8 results)
