Development of a practical two-mirror objective with sub-100 nm spatial resolution for soft-X-ray microscopy

• Project/Area Number: 20760018
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: Tohoku University
• Principal Investigator: TOYODA Mitsunori Tohoku University, 多元物質科学研究所, 助教 (40375168)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2009: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2008: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
• Keywords: 軟X線 / 顕微鏡 / 対物鏡 / 非球面 / 多層膜 / 光学設計 / 収差論 / 反射光学系 / 反射結像系

Research Abstract

A soft-X-ray microscope is expected as a novel tool to observe a high definition image of a living tissue with a spatial resolution better than 100 nm. In this study, we develop novel mirror optics for soft-X-ray microscopy. The optics consisted of two aspherical mirrors with a Mo/Si multilayer coating, which was optimized to have a maximum reflectivity at a wavelength of 13 nm. A wave aberration of the optics was corrected by adjusting the mirror misalignments, and we confirmed a minimum value of 10.6 nm rms.

Research Products

• [Journal Article] High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms (2010)
  • Author(s): T. Ejima, F. Ishida, H. Murata, M. Toyoda, T. Harada, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto, Haruo Mizutani
  • Journal Title: Opt. Exp. 18 Pages: 7203-7209
  • Peer Reviewed
• [Journal Article] Design study of two-aspherical-mirror anastigmat with reduced sensitivities to misalignments: correction of higher-order aberrations (2009)
  • Author(s): M. Toyoda, M. Yanagihara
  • Journal Title: J. Phys. Conf. Series 186 Pages: 12076-12076
  • Peer Reviewed
• [Journal Article] Multi-coincidence ion detection system for EUV-FEL fragmentation experiments at Spring-8 (2009)
  • Author(s): K. Motomura, L. Foucar, A. Czasch, N. Saito, O. Jagutzki, H. Schmidt-Boecking, R. Doerner, X.-J.Liu, H. Fukuzawa, G. Pruemper, K. Ueda, M. Okunishi, K. Shimada, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, A. Rudenko, J. Ullrich, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, H. Ohashi, H. Kimura
  • Journal Title: Nucl. Instrum. Methods A 606 Pages: 770-773
  • Peer Reviewed
• [Journal Article] Frustration of direct photoionization of Ar clusters in intense extreme ultraviolet pulses from a free electron laser (2009)
  • Author(s): H. Iwayama, K. Nagaya, M. Yao, H. Fukuzawa, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, H. Ohashi, H. Kimura
  • Journal Title: J. Phys. B: At. Mol. Opt. Phys. 42
  • Peer Reviewed
• [Journal Article] Dead-time-free ion momentum spectroscopy of multiple ionization of Xe clusters irradiated by euv free-electron laser pulses (2009)
  • Author(s): H. Fukuzawa, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, H. Ohashi, H. Kimura
  • Journal Title: Phys. Rev. A 79 Pages: 31201-3201
  • Peer Reviewed
• [Journal Article] Design study of two-aspherical-mirror anastigmat with reduced sensitivities to misalignments : correction of higher-order aberrations (2009)
  • Author(s): M.Toyoda, M.Yanagihara
  • Journal Title: J.Phys.Conf.Series 186 Pages: 12076-12076
  • Peer Reviewed
• [Journal Article] Multi-coincidence ion detection system for EUV-FEL fragmentation experiments at Spring-8 (2009)
  • Author(s): K.Motomura, K.Ueda, M.Toyoda, et.al.
  • Journal Title: Nucl.Instrum.Methods A 606 Pages: 770-773
  • Peer Reviewed
• [Journal Article] Frustration of direct photoionization of Ar clusters in intense extreme ultraviolet pulses from a free electron laser (2009)
  • Author(s): H.Iwayama, K.Ueda, M.Toyoda, et.al.
  • Journal Title: J.Phys.B : At.Mol.Opt.Phys. 42 Pages: 134019-134019
  • Peer Reviewed
• [Presentation] 広視野と高倍率を両立した軟X線多層膜顕微鏡の開発 (2009)
  • Author(s): 豊田光紀
  • Organizer: 第10回X線結像光学シンポジウム
  • Place of Presentation: つくば国際会議場
  • Year and Date: 2009-11-07
• [Presentation] 広視野と高倍率を両立した軟x線多層膜顕微鏡の開発 (2009)
  • Author(s): 豊田光紀
  • Organizer: 第10回X線結像光学シンポジウム
  • Place of Presentation: つくば市
• [Presentation] 軟x線用超高倍率顕微対物鏡の開発 (2009)
  • Author(s): 豊田光紀, 神野貴義, 原田哲男, 羽多野忠, 柳原美広
  • Organizer: 第34回光学シンポジウム
  • Place of Presentation: 東京
• [Presentation] LPP光源を用いた透過型X線反射多層膜顕微鏡TXM3 (2009)
  • Author(s): 江島丈雄, 中村芳雅, 豊田光紀, 原田哲男, 津留俊英, 羽多野忠, 柳原美広, 山本正樹
  • Organizer: 第22回日本放射光学会年会・放射光科学合同シンポジウム
  • Place of Presentation: 東京
• [Presentation] EUV-FEL光と運動量イメージングを用いたクラスター解離ダイナミクスの研究:クラスターサイズ依存性 (2009)
  • Author(s): 岩山 洋士, 永谷清信, 八尾誠, 福澤宏宣, X. -J. Liu, G. Pruemper, 奥西み さき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 本村浩治, 齋藤則生, A. Rudenko, J. Ullrich, L. Fouca, A. Czasch, R. Doerner, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
  • Organizer: 第22回日本放射光学会・放射光科学合同シンポジウム
  • Place of Presentation: 東京
• [Presentation] EUV-FEL光と運動量イメージングを用いたクラスター解離ダイナミクスの研究:光強度依存性 (2009)
  • Author(s): 永谷 清信, 岩山洋士, 八尾誠, 福澤宏宣, X. -J. Liu, G. Pruemper, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 本村浩治, 齋藤則生, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
  • Organizer: 第22回日本放射光学会・放射光科学合同シンポジウム
  • Place of Presentation: 東京
• [Presentation] EUV-FEL利用実験に用いる多粒子同期計測システムの開発と評価 (2009)
  • Author(s): 本村 浩治, 齋藤則生, 福澤宏宣, Liu XiaoJing, Pruemper Georg, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 岩山洋士, 永谷清信, 八尾誠, Rudenko Artem, Ullrich Joachim, Foucar Lutz, Czasch Achim, Doerner Reinhard, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
  • Organizer: 第22回日本放射光学会・放射光科学合同シンポジウム
  • Place of Presentation: 東京
• [Presentation] 極紫外自由電子レーザー照射によるN2およびO2分子多光子多重イオン化 (2009)
  • Author(s): 福澤宏宣, Liu XiaoJing, Pruemper Georg, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 本村浩治, 齋藤則生, 岩山洋士, 永谷清信, 八尾誠, Rudenko Artem, Ullrich Joachim, Foucar Lutz, Czasch Achim, Doerner Reinhard, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
  • Organizer: 第22回日本放射光学会・放射光科学合同シンポジウム
  • Place of Presentation: 東京
• [Presentation] 直入射非球面鏡による広視野軟X線結像系 (2008)
  • Author(s): 豊田光紀, 山本正樹, 柳原美広
  • Organizer: 第69回応用物理学会学術講演会X線結像光学の最前線
  • Place of Presentation: 中部大学
  • Year and Date: 2008-09-03
• [Presentation] 炭素の窓多層膜顕微鏡を目指した0. 1%オーダー精度波長マッチング技術の開発 (2008)
  • Author(s): 原田哲男, 神野貴義, 豊田光紀, 羽多野忠, 山本正樹
  • Organizer: 第69回応用物理学会学術講演会講演奨励賞受賞記念講演
  • Place of Presentation: 日井
• [Presentation] 直入射非球面鏡による広視野軟X線結像系 (2008)
  • Author(s): 豊田光紀, 山本正樹, 柳原美広
  • Organizer: 第69回応用物理学会学術講演会x線結像光学の最前線
  • Place of Presentation: 春日井
• [Presentation] EUV自由電子レーザー集光用直入射光学系の開発 (2008)
  • Author(s): 豊田光紀, 原田哲男, 山本正樹, 柳原美広, 福澤宏宣, X.J. Liu, G. Prumper, 奥西みさき, 嶋田浩三, 上田潔, 岩山洋士, 永谷清信, 八尾誠, 本村幸治, 齋藤則生, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Dorner, 石川顕一, 永園充, 東谷篤志, 矢橋牧名, 田中隆次, 石川哲也, 大橋治彦, 木村洋昭
  • Organizer: 第69回応用物理学会学術講演会
  • Place of Presentation: 春日井
• [Presentation] レーザープラズマ光源を用いた透過型X線反射多層膜顕微鏡TXM3の開発3 (2008)
  • Author(s): 江島丈雄, 中村芳雅, 豊田光紀, 原田哲男, 羽多野忠, 柳原美広
  • Organizer: 第69回応用物理学会学術講演会
  • Place of Presentation: 春日井
• [Presentation] Multiple ionization of rare gas clusters using the EUV-FEL at SPring-8 (2008)
  • Author(s): G. Pruemper, H. Fukuzawa, X.J. Liu, M. Okunishi, K. Shimada, K. Ueda,T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, N. Saito, K. Motomura, H. Iwayama, K. Nagaya, M. Yao, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, R. Tanaka, H. Ohashi, H. Kimura
  • Organizer: 11th International Coference on Multiphoton Processes
  • Place of Presentation: Germany, Heidelberg
• [Presentation] Analytical Designing of Two-Aspherical-Mirror Optics for Soft X-Ray Imaging (2008)
  • Author(s): M. Toyoda, M. Yamamoto, M. Yanagihara
  • Organizer: 9th International Conference on X-Ray Microscopy
  • Place of Presentation: Switzerland, Zurich
• [Presentation] Exact Period Thickness Control of Soft X-ray Multilayers on Curved Substrates (2008)
  • Author(s): T. Harada, T. Jinno, M. Toyoda, T. Hatano, M. Yamamoto
  • Organizer: 9th International Conference on X-Ray Microscopy
  • Place of Presentation: Switzerland, Zurich
• [Remarks]
  • URL: http://www.tagen.tohoku.ac.jp/modules/laboratory/index.php?laboid=43
• [Patent(Industrial Property Rights)] 反射型投影光学装置 (2009)
  • Inventor(s): 豊田光紀
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2009-152742
  • Filing Date: 2009-06-26
• [Patent(Industrial Property Rights)] 反射型投影光学装置 (2008)
  • Inventor(s): 豊田光紀
  • Industrial Property Rights Holder: 東北大学
  • Industrial Property Number: 2008-220382
  • Filing Date: 2008-08-28