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Development of a practical two-mirror objective with sub-100 nm spatial resolution for soft-X-ray microscopy

Research Project

Project/Area Number 20760018
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionTohoku University

Principal Investigator

TOYODA Mitsunori  Tohoku University, 多元物質科学研究所, 助教 (40375168)

Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2009: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2008: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords軟X線 / 顕微鏡 / 対物鏡 / 非球面 / 多層膜 / 光学設計 / 収差論 / 反射光学系 / 反射結像系
Research Abstract

A soft-X-ray microscope is expected as a novel tool to observe a high definition image of a living tissue with a spatial resolution better than 100 nm. In this study, we develop novel mirror optics for soft-X-ray microscopy. The optics consisted of two aspherical mirrors with a Mo/Si multilayer coating, which was optimized to have a maximum reflectivity at a wavelength of 13 nm. A wave aberration of the optics was corrected by adjusting the mirror misalignments, and we confirmed a minimum value of 10.6 nm rms.

Report

(3 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • Research Products

    (27 results)

All 2010 2009 2008 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results) Presentation (16 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] High throughput and wide field of view EUV microscope for blur-free one-shot imaging of living organisms2010

    • Author(s)
      T. Ejima, F. Ishida, H. Murata, M. Toyoda, T. Harada, T. Tsuru, T. Hatano, M. Yanagihara, M. Yamamoto, Haruo Mizutani
    • Journal Title

      Opt. Exp. 18

      Pages: 7203-7209

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design study of two-aspherical-mirror anastigmat with reduced sensitivities to misalignments: correction of higher-order aberrations2009

    • Author(s)
      M. Toyoda, M. Yanagihara
    • Journal Title

      J. Phys. Conf. Series 186

      Pages: 12076-12076

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Multi-coincidence ion detection system for EUV-FEL fragmentation experiments at Spring-82009

    • Author(s)
      K. Motomura, L. Foucar, A. Czasch, N. Saito, O. Jagutzki, H. Schmidt-Boecking, R. Doerner, X.-J.Liu, H. Fukuzawa, G. Pruemper, K. Ueda, M. Okunishi, K. Shimada, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, A. Rudenko, J. Ullrich, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, H. Ohashi, H. Kimura
    • Journal Title

      Nucl. Instrum. Methods A 606

      Pages: 770-773

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Frustration of direct photoionization of Ar clusters in intense extreme ultraviolet pulses from a free electron laser2009

    • Author(s)
      H. Iwayama, K. Nagaya, M. Yao, H. Fukuzawa, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, H. Ohashi, H. Kimura
    • Journal Title

      J. Phys. B: At. Mol. Opt. Phys. 42

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Dead-time-free ion momentum spectroscopy of multiple ionization of Xe clusters irradiated by euv free-electron laser pulses2009

    • Author(s)
      H. Fukuzawa, X.-J. Liu, G. Pruemper, M. Okunishi, K. Shimada, K. Ueda, T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, H. Iwayama, K. Nagaya, M. Yao, K. Motomura, N. Saito, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, H. Ohashi, H. Kimura
    • Journal Title

      Phys. Rev. A 79

      Pages: 31201-3201

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Design study of two-aspherical-mirror anastigmat with reduced sensitivities to misalignments : correction of higher-order aberrations2009

    • Author(s)
      M.Toyoda, M.Yanagihara
    • Journal Title

      J.Phys.Conf.Series 186

      Pages: 12076-12076

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Multi-coincidence ion detection system for EUV-FEL fragmentation experiments at Spring-82009

    • Author(s)
      K.Motomura, K.Ueda, M.Toyoda, et.al.
    • Journal Title

      Nucl.Instrum.Methods A 606

      Pages: 770-773

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Frustration of direct photoionization of Ar clusters in intense extreme ultraviolet pulses from a free electron laser2009

    • Author(s)
      H.Iwayama, K.Ueda, M.Toyoda, et.al.
    • Journal Title

      J.Phys.B : At.Mol.Opt.Phys. 42

      Pages: 134019-134019

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] 広視野と高倍率を両立した軟X線多層膜顕微鏡の開発2009

    • Author(s)
      豊田光紀
    • Organizer
      第10回X線結像光学シンポジウム
    • Place of Presentation
      つくば国際会議場
    • Year and Date
      2009-11-07
    • Related Report
      2009 Annual Research Report
  • [Presentation] 広視野と高倍率を両立した軟x線多層膜顕微鏡の開発2009

    • Author(s)
      豊田光紀
    • Organizer
      第10回X線結像光学シンポジウム
    • Place of Presentation
      つくば市
    • Related Report
      2009 Final Research Report
  • [Presentation] 軟x線用超高倍率顕微対物鏡の開発2009

    • Author(s)
      豊田光紀, 神野貴義, 原田哲男, 羽多野忠, 柳原美広
    • Organizer
      第34回光学シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2009 Final Research Report
  • [Presentation] LPP光源を用いた透過型X線反射多層膜顕微鏡TXM32009

    • Author(s)
      江島丈雄, 中村芳雅, 豊田光紀, 原田哲男, 津留俊英, 羽多野忠, 柳原美広, 山本正樹
    • Organizer
      第22回日本放射光学会年会・放射光科学合同シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2009 Final Research Report
  • [Presentation] EUV-FEL光と運動量イメージングを用いたクラスター解離ダイナミクスの研究:クラスターサイズ依存性2009

    • Author(s)
      岩山 洋士, 永谷清信, 八尾誠, 福澤宏宣, X. -J. Liu, G. Pruemper, 奥西み さき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 本村浩治, 齋藤則生, A. Rudenko, J. Ullrich, L. Fouca, A. Czasch, R. Doerner, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
    • Organizer
      第22回日本放射光学会・放射光科学合同シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2009 Final Research Report
  • [Presentation] EUV-FEL光と運動量イメージングを用いたクラスター解離ダイナミクスの研究:光強度依存性2009

    • Author(s)
      永谷 清信, 岩山洋士, 八尾誠, 福澤宏宣, X. -J. Liu, G. Pruemper, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 本村浩治, 齋藤則生, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
    • Organizer
      第22回日本放射光学会・放射光科学合同シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2009 Final Research Report
  • [Presentation] EUV-FEL利用実験に用いる多粒子同期計測システムの開発と評価2009

    • Author(s)
      本村 浩治, 齋藤則生, 福澤宏宣, Liu XiaoJing, Pruemper Georg, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 岩山洋士, 永谷清信, 八尾誠, Rudenko Artem, Ullrich Joachim, Foucar Lutz, Czasch Achim, Doerner Reinhard, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
    • Organizer
      第22回日本放射光学会・放射光科学合同シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2009 Final Research Report
  • [Presentation] 極紫外自由電子レーザー照射によるN2およびO2分子多光子多重イオン化2009

    • Author(s)
      福澤宏宣, Liu XiaoJing, Pruemper Georg, 奥西みさき, 嶋田浩三, 上田潔, 原田哲男, 豊田光紀, 柳原美広, 山本正樹, 本村浩治, 齋藤則生, 岩山洋士, 永谷清信, 八尾誠, Rudenko Artem, Ullrich Joachim, Foucar Lutz, Czasch Achim, Doerner Reinhard, 永園充, 東谷篤志, 矢橋牧名, 石川哲也, 大橋治彦, 木村洋昭
    • Organizer
      第22回日本放射光学会・放射光科学合同シンポジウム
    • Place of Presentation
      東京
    • Related Report
      2009 Final Research Report
  • [Presentation] 直入射非球面鏡による広視野軟X線結像系2008

    • Author(s)
      豊田光紀, 山本正樹, 柳原美広
    • Organizer
      第69回応用物理学会学術講演会X線結像光学の最前線
    • Place of Presentation
      中部大学
    • Year and Date
      2008-09-03
    • Related Report
      2008 Annual Research Report
  • [Presentation] 炭素の窓多層膜顕微鏡を目指した0. 1%オーダー精度波長マッチング技術の開発2008

    • Author(s)
      原田哲男, 神野貴義, 豊田光紀, 羽多野忠, 山本正樹
    • Organizer
      第69回応用物理学会学術講演会講演奨励賞受賞記念講演
    • Place of Presentation
      日井
    • Related Report
      2009 Final Research Report
  • [Presentation] 直入射非球面鏡による広視野軟X線結像系2008

    • Author(s)
      豊田光紀, 山本正樹, 柳原美広
    • Organizer
      第69回応用物理学会学術講演会x線結像光学の最前線
    • Place of Presentation
      春日井
    • Related Report
      2009 Final Research Report
  • [Presentation] EUV自由電子レーザー集光用直入射光学系の開発2008

    • Author(s)
      豊田光紀, 原田哲男, 山本正樹, 柳原美広, 福澤宏宣, X.J. Liu, G. Prumper, 奥西みさき, 嶋田浩三, 上田潔, 岩山洋士, 永谷清信, 八尾誠, 本村幸治, 齋藤則生, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Dorner, 石川顕一, 永園充, 東谷篤志, 矢橋牧名, 田中隆次, 石川哲也, 大橋治彦, 木村洋昭
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      春日井
    • Related Report
      2009 Final Research Report
  • [Presentation] レーザープラズマ光源を用いた透過型X線反射多層膜顕微鏡TXM3の開発32008

    • Author(s)
      江島丈雄, 中村芳雅, 豊田光紀, 原田哲男, 羽多野忠, 柳原美広
    • Organizer
      第69回応用物理学会学術講演会
    • Place of Presentation
      春日井
    • Related Report
      2009 Final Research Report
  • [Presentation] Multiple ionization of rare gas clusters using the EUV-FEL at SPring-82008

    • Author(s)
      G. Pruemper, H. Fukuzawa, X.J. Liu, M. Okunishi, K. Shimada, K. Ueda,T. Harada, M. Toyoda, M. Yanagihara, M. Yamamoto, N. Saito, K. Motomura, H. Iwayama, K. Nagaya, M. Yao, A. Rudenko, J. Ullrich, L. Foucar, A. Czasch, R. Doerner, M. Nagasono, A. Higashiya, M. Yabashi, T. Ishikawa, R. Tanaka, H. Ohashi, H. Kimura
    • Organizer
      11th International Coference on Multiphoton Processes
    • Place of Presentation
      Germany, Heidelberg
    • Related Report
      2009 Final Research Report
  • [Presentation] Analytical Designing of Two-Aspherical-Mirror Optics for Soft X-Ray Imaging2008

    • Author(s)
      M. Toyoda, M. Yamamoto, M. Yanagihara
    • Organizer
      9th International Conference on X-Ray Microscopy
    • Place of Presentation
      Switzerland, Zurich
    • Related Report
      2009 Final Research Report
  • [Presentation] Exact Period Thickness Control of Soft X-ray Multilayers on Curved Substrates2008

    • Author(s)
      T. Harada, T. Jinno, M. Toyoda, T. Hatano, M. Yamamoto
    • Organizer
      9th International Conference on X-Ray Microscopy
    • Place of Presentation
      Switzerland, Zurich
    • Related Report
      2009 Final Research Report
  • [Remarks]

    • URL

      http://www.tagen.tohoku.ac.jp/modules/laboratory/index.php?laboid=43

    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] 反射型投影光学装置2009

    • Inventor(s)
      豊田光紀
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2009-152742
    • Filing Date
      2009-06-26
    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] 反射型投影光学装置2008

    • Inventor(s)
      豊田光紀
    • Industrial Property Rights Holder
      東北大学
    • Industrial Property Number
      2008-220382
    • Filing Date
      2008-08-28
    • Related Report
      2009 Final Research Report 2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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