Real-time analysis of silicide formation processes of refractory metals controlled by surfactant effects
| Project/Area Number |
20760021
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Yokohama National University |
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Principal Investigator |
OHNO Shinya Yokohama National University, 工学研究院, 特別研究教員 (00377095)
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| Project Period (FY) |
2008 – 2009
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| Project Status |
Completed (Fiscal Year 2009)
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| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2009: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2008: ¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
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| Keywords | 表面・界面物性 / シリコン / 酸化反応 / シリサイド / 光電子分光 / 走査トンネル顕微鏡 |
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| Research Abstract |
The objective of the present research is to investigate surfactant effect of oxygen or hydrogen on silicide formation processes of refractory metals. In 2009, defect formation process on titanium and oxygen coadsorbed Si(001) surfaces was clarified. In 2010, effect of oxygen on titanium silicide formation processes on Si(001), Si(311) and Si(120) surfaces was systematically investigated.
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Report
(3 results)
Research Products
(36 results)
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[Presentation] 酸素吸着Ti/Si(001)表面の構造と電子状態2009
Author(s)
大野真也, 山崎紀明, 中山史人, 市川雄一, 佐藤和成, 青木健志, 首藤健一, 田中正俊, 奥田太一, 原沢あゆみ, 松田巌, 柿崎明人
Organizer
II日本物理学会
Place of Presentation
熊本大学黒髪キャンパス
Related Report
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[Presentation] The effect of oxygen adsorption on titanium silicide formation on Si(001)-(2x1) European Conference on Surface Science(ECOSS26)2009
Author(s)
大野真也, 山崎紀明, 中山史人, 市川雄一, 佐藤和成, 首藤健一, 田中正俊, 奥田太一, 原沢あゆみ, 松田巌, 柿崎明人
Organizer
Parma
Place of Presentation
Italy
Related Report
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[Presentation] Electronic states of titanium silicide and titanium-silicon-oxide on Si(001) International Symposium on Surface Science and Nanotechnology (ISSS-5)2008
Author(s)
中山史人, 山崎紀明, 大野真也, 寅丸雅光, 市川雄一, 山崎貴彦, 首藤健一, 田中正俊, 奥田太一, 原沢あゆみ, 松田巌, 柿崎明人
Organizer
International Conference Center, Waseda University
Place of Presentation
Tokyo
Related Report
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[Presentation] Effect of oxygen coadsorption on titanium silicide formation on Si(001) studied with photoemission spectroscopy 4th Vacuum and Surface Sciences Conference of Asia and Australia(VASSCAA-4)2008
Author(s)
山崎紀明, 中山史人, 大野真也, 寅丸雅光, 市川雄一, 山崎貴彦, 首藤健一, 田中正俊, 奥田太一, 原沢あゆみ, 松田巌, 柿崎明人
Organizer
Matsue
Place of Presentation
Japan
Related Report
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[Presentation] Si(001)表面におけるTiシリサイド形成過程へのサーファクタント効果の検討2008
Author(s)
山崎紀明, 中山史人, 大野真也, 寅丸雅光, 市川雄一, 山崎貴彦, 飯田貴則, 佐藤和成, 青木健志, 西岡広明, 首藤健一, 田中正俊, 奥田太一, 原沢あゆみ, 松田巌, 柿崎明人
Organizer
日本物理学会
Place of Presentation
岩手大学上田キャンパス
Related Report
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[Presentation] 酸素吸着Ti/Si(001)表面の構造と電子状態2008
Author(s)
大野真也, 寅丸雅光, 飯田貴則, 佐藤和成, 青木健志, 山崎紀明, 中山史人, 市川雄一, 山崎貴彦, 首藤健一, 田中正俊, 奥田太一, 原沢あゆみ, 松田巌, 柿崎明人
Organizer
日本物理学会
Place of Presentation
手大学上田キャンパス
Related Report
