Development of stage-scanning-type scanning confocal electron microscopy
| Project/Area Number |
20760027
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | National Institute for Materials Science |
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Principal Investigator |
HASHIMOTO Ayako National Institute for Materials Science, ナノ計測センター, 研究員 (30327689)
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| Project Period (FY) |
2008 – 2009
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| Project Status |
Completed (Fiscal Year 2009)
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| Budget Amount *help |
¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2008: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
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| Keywords | 透過型電子顕微鏡 / 共焦点顕微鏡 / 三次元可視化法 / ピエゾ駆動試料ホルダー / 深さ分解能 / 電子顕微鏡 |
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| Research Abstract |
Scanning confocal electron microscopy (SCEM) is a promising 3D imaging techniques by electron microscopy, which enables to improve the depth resolution by rejecting most of electrons from an out-of-focal plane in an object using a pinhole aperture. We developed a stage-scanning system for SCEM, by which only the specimen moves three-dimensionally while maintaining constant lens configuration. Then, we proposed annular dark-field SCEM that use scattered electrons by using an annular aperture to block direct beams. Finally, we succeeded in the improvement of the depth resolution and 3D imaging of carbon nanostructures and catalytic nanoparticles on support materials.
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Report
(3 results)
Research Products
(30 results)
