Development of stress measurement method using Raman spectroscopy and biaxial tensile testing for micro/nanoscale structures

• Project/Area Number: 20760075
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Materials/Mechanics of materials
• Research Institution: University of Hyogo
• Principal Investigator: NAMAZU Takahiro University of Hyogo, 大学院・工学研究科, 准教授 (90347526)
• Project Period (FY): 2008 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000); Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2008: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
• Keywords: 応力 / 引張試験 / ラマン分光 / 単結晶Si / 薄膜引張試験 / 二軸引張試験 / 応力・ひずみ / マイクロマシン / 電子デバイス / 非接触・非破壊計測 / 検量線

Research Abstract

We have designed and developed bi-axial tensile tester for film specimens, and obtained Raman spectra of micro/nanoscale single crystal silicon structures under uniaxial and biaxial stress states. As the results, Raman shift map around the Si structure under biaxial stress state was different from that under uniaxial stress state. By comparing Raman spectral parameters with stress components and its magnitude, we have confirmed that the parameters were correlated with stress components and magnitude. Integration of biaxial tensile testing with Raman spectroscopy enables us to precisely evaluate stress distribution of single crystal silicon structures in MEMS.

Research Products

• [Journal Article] Fatigue Life Prediction Criterion for Micro-Nanoscale Single-Crystal Silicon Structures (2009)
  • Author(s): T. Namazu, Y. Isono
  • Journal Title: IEEE/ASME J. Microelectromech. Syst. Vol.18 Pages: 129-137
  • Peer Reviewed
• [Journal Article] Raman Spectrum Curve Fitting for Estimating Surface Stress Distribution in Single-Crystal Silicon Microstructure (2009)
  • Author(s): M. Komatsubara, T. Namazu, Y. Nagai, S. Inoue, N. Naka, S. Kashiwagi, K. Ohtsuki
  • Journal Title: Japanese Journal of Applied Physics Vol.48
  • NAID: 210000066532
  • Peer Reviewed
• [Journal Article] Fatigue Life Prediction Criterion for Micro-Nanoscale Single-Crystal Silicon Structures (2009)
  • Author(s): T.Namazu, Y.Isono
  • Journal Title: IEEE/ASME J.Microelectromechanical Systems 18 Pages: 129-137
  • Peer Reviewed
• [Journal Article] Raman Spectrum Curve Fitting for Estimating Surface Stress Distribution in Single-CrYstal Silicon Microstructure (2009)
  • Author(s): M.Komatsubara, T.Namazu, Y.Nagai, S.Inoue, N.Naka, S.Kashiwagi, K.Ohtsuki
  • Journal Title: Japanese Journal of Applied Physics 48
  • NAID: 210000066532
  • Peer Reviewed
• [Journal Article] Fatigue Life Prediction Criterion for Micro-Nanoscale Single-Crystal Silicon Structures (2009)
  • Author(s): T. Namazu, Y. Isono
  • Journal Title: ASME/IEEE Journal of Microelectromechanical Systems 18 Pages: 129-137
  • Peer Reviewed
• [Journal Article] Fatigue Life Evaluation for Single and Poly-Crystalline Silicon Films by Pulsating-Tension Cyclic Loading Test (2008)
  • Author(s): Y. Nagai, T. Namazu, S. Inoue
  • Journal Title: Surface and Interface Analysis 40 Pages: 993-997
  • Peer Reviewed
• [Presentation] Non-Destructive Quantitative Measurement Method for Normal and Shear Stresses on Single-Crystalline Silicon Structures for Reliability of Silicon-MEMS (2009)
  • Author(s): M. Komatsubara, Y. Nagai, T. N amazu, N. Naka, S. Kashiwagi, K. Ohtsuki, and S. Inoue
  • Organizer: 22nd IEEE International Conference on Microelec tromechanical Systems, MEMS 2009
  • Place of Presentation: Sorrento, Italy
  • Year and Date: 2009-01-25
• [Presentation] Uniaxial Tensile Testing System for Quantitative Stress Analysis in Silicon Oxide Thin Films by Cathodoluminescence Spectroscopy (2009)
  • Author(s): N. Goami, N. Yamashita, N. Araki, S. Kakinuma, K. Nishikata, N. Naka, K. Matsumoto, T. Namazu, S. Inoue
  • Organizer: The 2008 International Conference on Solid State Devices and Materials, SSDM 2009
  • Place of Presentation: Sendai, Japan
• [Presentation] Mechanical Degradation Mechanism of Aluminum-Alloy Structural Films Evaluated by Environment-Controlled Tensile Testing (2009)
  • Author(s): Y. Kaibara, H. Fujii, T. Namazu, Y. Tomizawa, K. Masunishi, S. Inoue
  • Organizer: 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009
  • Place of Presentation: Denver, Colorado, USA
• [Presentation] Raman Spectroscopy under Tensile Loading for Evaluating Surface Stress on Single-Crystalline Silicon Microstructures (2008)
  • Author(s): M. Komatsubara, Y. Nagai, T. N amazu, N. Naka, S. Kashiwagi, K. Ohtsuki, and S. Inoue
  • Organizer: 2008 Material Research Society Fall Meeting
  • Place of Presentation: Boston, USA
  • Year and Date: 2008-12-03
• [Presentation] Raman Spectroscopic Stress Analysis of Single Crystal Silicon (001) Specimen Tensioned along The [100] Direction Over 1000 MPa (2008)
  • Author(s): M. Komatsubara, Y. Nagai, T. N amazu, N. Naka, S. Kashiwagi, K. Ohtsuki, and S. Inoue
  • Organizer: International Conference on Solid State Devices and Materials. SSDM 2008
  • Place of Presentation: Tsukuba, Japan
  • Year and Date: 2008-09-25
• [Book] Advanced Micro & Nanosystems, Reliability of MEMS (2008)
  • Author(s): T. Namazu
  • Total Pages: 303
  • Publisher: Wiley-VCH Verlag GmbH & Co. kGaA
• [Remarks]
  • URL: http://www.eng.u-hyogo.ac.jp/mse/mse12/index.html
• [Remarks]
  • URL: http://www.eng.u-hyogo.ac.jp/mse/mse12/index.html
• [Remarks]
  • URL: http://www.eng.u-hyogo.ac.jp/mse/mse12/index.html