| Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2011: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2010: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2009: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2008: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
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| Research Abstract |
A performance evaluation method of ultrahigh precision machine tools has been developed for the manufacturing of high-efficiency ultrahigh-dispersion diffraction gratings, using on-machine measurement units. In order to construct fabricating processes of diffraction grating groove, long-life diamond cutting tools for brittle materials, diamond burnishing for soft or amorphous metal materials tools has been developed. A compact laser autofocus displacement sensor has been developed and on-machine profile measurement system has been constructed and a profile of grating substrates has been measured. On-machine diffracted light measurement method has been developed, and a difference between burnished groove and micro cut groove has been observed.
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