evaluation of ultrahigh precision machining tool using on-machine measurement of diffratcion gratings
Project/Area Number |
20760092
|
Research Category |
Grant-in-Aid for Young Scientists (B)
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Allocation Type | Single-year Grants |
Research Field |
Production engineering/Processing studies
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Research Institution | The Institute of Physical and Chemical Research |
Principal Investigator |
MORITA Shin-ya (MORITA Shinya) 独立行政法人理化学研究所, 超精密加工技術開発チーム, 協力研究員 (30360655)
|
Project Period (FY) |
2008 – 2011
|
Project Status |
Completed (Fiscal Year 2011)
|
Budget Amount *help |
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2011: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2010: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2009: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2008: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
|
Keywords | 機上測定 / 超精密加工機 / 超精密切削 / 回折格子 / 単結晶ダイヤモンド工具 / 超精密加工 / 超精密バニシング加工 / 回折光測定 / 干渉測定 / 高脆材料 / 硫化亜鉛 / セレン化亜鉛 |
Research Abstract |
A performance evaluation method of ultrahigh precision machine tools has been developed for the manufacturing of high-efficiency ultrahigh-dispersion diffraction gratings, using on-machine measurement units. In order to construct fabricating processes of diffraction grating groove, long-life diamond cutting tools for brittle materials, diamond burnishing for soft or amorphous metal materials tools has been developed. A compact laser autofocus displacement sensor has been developed and on-machine profile measurement system has been constructed and a profile of grating substrates has been measured. On-machine diffracted light measurement method has been developed, and a difference between burnished groove and micro cut groove has been observed.
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Report
(6 results)
Research Products
(11 results)