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Study on fabrication technology of photonic crystals composed of visible-light emitting tantalum-oxide thin films

Research Project

Project/Area Number 20760217
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Electron device/Electronic equipment
Research InstitutionGunma University

Principal Investigator

MIURA Kenta  Gunma University, 大学院・工学研究科, 助教 (40396651)

Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2009: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2008: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Keywords酸化タンタル / エルビウム / 緑色発光 / スパッタリング / フォトニック結晶 / タンタル酸化物 / 発光 / スパッタ
Research Abstract

Er-doped TaOx films were prepared by using rf magnetron sputtering. Visible light emission was observed from the films after annealing under excitation with a He-Cd laser (λ=325nm). Two peaks having wavelengths around 550 nm and 670 nm were observed from the films annealed at 800-1100oC. The strongest intensity of the 550-nm (green) peak was obtained from the film with 0.96 mol% of Er concentration after annealing at 900oC for 20 min. Such sputtered films which emit visible light can be useful as high-index materials for novel active devices using autocloned photonic crystals.

Report

(3 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • Research Products

    (51 results)

All 2010 2009 2008

All Journal Article (8 results) (of which Peer Reviewed: 8 results) Presentation (43 results)

  • [Journal Article] Intense photoluminescence from erbium-doped tantalum oxide thin films deposited by sputtering2009

    • Author(s)
      M.K. Singh, G. Fusegi, K. Kano, J.P. Bange, K. Miura, O. Hanaizumi
    • Journal Title

      IEICE Electronics Express vol.6,no.23

      Pages: 1676-1682

    • NAID

      130000140859

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Modified finite-difference time-domain method for triangular lattice photonic crystals2009

    • Author(s)
      A.V. Umenyi, K. Miura, O. Hanaizumi
    • Journal Title

      IEEE/OSA Journal of Lightwave Technology vol.27,no.22

      Pages: 4995-5001

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Modified finite-difference time-domain method for triangular lattice photonic crystals2009

    • Author(s)
      A.V.Umenyi, K.Miura, O.Hanaizumi
    • Journal Title

      IEEE/OSA Journal of Lightwave Technology Vol.27

      Pages: 4995-5001

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Intense photoluminescence from erbium-doped tantalum oxide thin films deposited by sputtering2009

    • Author(s)
      M.K.Singh, G.Fusegi, K.Kano, J.P.Bange, K.Miura, O.Hanaizumi
    • Journal Title

      IEICE Electronics Express Vol.6

      Pages: 1676-1682

    • NAID

      130000140859

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observation of blue-light emission from tantalum oxide films deposited by radio-frequency magnetron sputtering2008

    • Author(s)
      K. Miura, H. Miyazaki, O. Hanaizumi
    • Journal Title

      IEICE Transactions on Electronics vol.E91-C,no.10

      Pages: 1669-1672

    • NAID

      10026819907

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of ultraviolet-light emitting Si/SiO2 multilayered films using radio-frequency magnetron sputtering and high-temperature annealing2008

    • Author(s)
      K. Miura, Y. Kato, H. Hoshino, O. Hanaizumi
    • Journal Title

      Thin Solid Films vol.516,no.21

      Pages: 7732-7734

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Fabrication of ultraviolet-light emitting Si/SiO_2 multilayered films using radio-frequency magnetron sputtering and high-temperature annealing2008

    • Author(s)
      K. Miura, Y. Kato, H. Hoshino, and O. Hanaizumi
    • Journal Title

      Thin Solid Films 516

      Pages: 7732-7734

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observation of blue-light emission from tantalum oxide films deposited by radio-frequency magnetron sputtering2008

    • Author(s)
      K. Miura, H. Miyazaki, and O. Hanaizumi
    • Journal Title

      IEICE Transactions on Electronics E91-C

      Pages: 1669-1672

    • NAID

      10026819907

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] プロトンビーム描画による波長1. 5μm帯用PMMA導波路の試作(II)2010

    • Author(s)
      三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
    • Organizer
      2010年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      平塚
    • Year and Date
      2010-03-18
    • Related Report
      2009 Final Research Report
  • [Presentation] プロトンビーム描画による波長1.5μm帯用PMMA導波路の試作(II)2010

    • Author(s)
      三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      平塚
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] プロトンビーム描画による波長1. 5・m帯用シングルモードPMMA導波路2009

    • Author(s)
      三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      東京
    • Year and Date
      2009-12-18
    • Related Report
      2009 Final Research Report
  • [Presentation] プロトンビーム描画による波長1.5μm帯用シングルモードPMMA導波路2009

    • Author(s)
      三浦健太, 狩野一総, 伏木厳穣, シンマヤンク, 花泉修
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      東京
    • Year and Date
      2009-12-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication and optimization of green light emitting Er-TaO, films2009

    • Author(s)
      M.K. Singh, G. Fusegi, K. Kano, J.P. Bange, K. Miura, O. Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Final Research Report
  • [Presentation] Structural analysis of RF sputtered Er doped Ta2O5 films2009

    • Author(s)
      J.P. Bange, M.K. Singh, K. Kano, K. Miura, O. Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Final Research Report
  • [Presentation] Fabrication of polymer optical waveguides using proton beam writing2009

    • Author(s)
      Y. Machida, M. Uehara, K. Miura, O. Hanaizumi, Y. Ishii, T. Satoh, K. Takano, T. Ohkubo, A. Yamazaki, A. Inouye, M. Koka, A. Yokoyama, T. Kamiya, T. Kojima, H. Nishikawa
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Final Research Report
  • [Presentation] Fabrication and evaluation of wavelength-conversion devices composed of zinc oxide thin films2009

    • Author(s)
      M. Tanaka, H. Miyazaki, K. Miura, O. Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Final Research Report
  • [Presentation] Visible-light emitting tantalum-oxide films produced by radio-frequency sputtering2009

    • Author(s)
      K. Miura, K. Kano, G. Fusegi, M.K. Singh, O. Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Final Research Report
  • [Presentation] Fabrication and optimization of green light emitting Er-TaO_x films2009

    • Author(s)
      M.K.Singh, G.Fusegi, K.Kano, J.P.Bange, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Structural analysis of RP sputtered Er doped Ta_2O_5 films2009

    • Author(s)
      J.P.Bange, M.K.Singh, K.Kano, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication of polymer optical waveguides using proton beam writing2009

    • Author(s)
      町田裕貴, 上原政人, 三浦健太, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Fabrication and evaluation of wavelength-conversion devices composed of zinc oxide thin films2009

    • Author(s)
      A.Inouye, M.Koka, A.Yokoyama, T.Kamiya, T.Kojima, H.Nishikawa
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Visible-light emitting tantalum-oxide films produced by radio-frequency sputtering2009

    • Author(s)
      M.Tanaka, H.Miyazaki, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Application of Si/SiO2 materials to photonic devices2009

    • Author(s)
      O. Hanaizumi K. Miura
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Final Research Report
  • [Presentation] Novel photonic crystal waveguides utilizing Si-ion implantation2009

    • Author(s)
      S. Kawashiri, M. Honmi, A.V. Umenyi, T. Shinagawa, K. Miura, O. Hanaizumi, S. Yamamoto, A. Inouye, M. Yoshikawa
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Final Research Report
  • [Presentation] FDTD analysis of fused-silica substrates fabricated by Si-ion implantation for photonic crystals devices2009

    • Author(s)
      A.V. Umenyi, S. Kawashiri, K. Miura, O. Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Final Research Report
  • [Presentation] Study on fabrication and conversion-efficiency improvement of ZnO thin film solar cells2009

    • Author(s)
      N. Hirasawa, K. Miura, O. Hanaizumi
    • Organizer
      5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering (ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Final Research Report
  • [Presentation] Application of Si/SiO_2 materials to photonic devices2009

    • Author(s)
      花泉修, 三浦健太
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Novel photonic crystal waveguides utilizing Si-ion implantation2009

    • Author(s)
      S.Kawashiri, M.Honmi, A.V.Umenyi, T.Shinagawa, K.Miura, O.Hanaizumi, S.Yamamoto, A.Inouye, M.Yoshikawa
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] FDTD analysis of fused-silica substrates fabricated by Si-ion implantation for photonic crystals devices2009

    • Author(s)
      A.V.Umenyi, S.Kawashiri, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Study on fabrication and conversion-efficiency improvement of ZnO thin film solar cells2009

    • Author(s)
      N.Hirasawa, K.Miura, O.Hanaizumi
    • Organizer
      The 5th International Symposium on Silicon Science and 1st International Conference on Advanced Micro-Device Engineering(ISSS&AMDE2009)
    • Place of Presentation
      Kiryu
    • Year and Date
      2009-12-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] UV and visible light emitting fused-silica substrates fabricated by Si-ion implantation2009

    • Author(s)
      A. Umenyi, M. Honmi, K. Miura, O. Hanaizumi, S. Yamamoto, A. Inouye, M. Yoshikawa
    • Organizer
      16th International Conference on Surface Modification of Materials by Ion Beams (SMMIB2009)
    • Place of Presentation
      Tokyo
    • Year and Date
      2009-09-14
    • Related Report
      2009 Final Research Report
  • [Presentation] UV and visible light emitting fused-silica substrates fabricated by Si-ion implantation2009

    • Author(s)
      A.Umenyi, M.Honmi, K.Miura, O.Hanaizumi, S.Yamamoto, A.Inouye, M.Yoshikawa
    • Organizer
      The 16th International Conference on Surface Modification of Materials by Ion Beams(SMMIB2009)
    • Place of Presentation
      Tokyo
    • Year and Date
      2009-09-14
    • Related Report
      2009 Annual Research Report
  • [Presentation] スパッタリング法で作製したEr:TaOx薄膜の可視発光特性2009

    • Author(s)
      三浦健太, 狩野一総, 伏木厳穣, シンマヤンク, 花泉修
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-10
    • Related Report
      2009 Final Research Report
  • [Presentation] スパッタリンダ法で作製したEr:TaO_x薄膜の可視発光特性2009

    • Author(s)
      三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] プロトンビーム描画による波長1. 5μm帯用PMMA導波路の試作2009

    • Author(s)
      三浦健太, 町田裕貴, 上原政人, 花泉修, 石井保行, 佐藤隆博, 高野勝昌, 大久保猛, 山崎明義, 井上愛知, 江夏昌志, 横山彰人, 神谷富裕, 小嶋拓治, 西川宏之
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-08
    • Related Report
      2009 Final Research Report
  • [Presentation] プロトンビーム描画による波長1.5μm帯用PMMA導波路の試作2009

    • Author(s)
      三浦健太, 本美勝史, 花泉修, 山本春也, 井上愛知, 吉川正人
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Light emission from Er-doped Ta-oxide films fabricated by RF-sputtering2009

    • Author(s)
      M.K. Singh, G. Fusegi, K. Kanou, K. Miura, O. Hanaizumi
    • Organizer
      The International Conference on Physics of Optical Materials and Devices (IC0M2009
    • Place of Presentation
      Herceg Novi, Montenegro
    • Year and Date
      2009-08-28
    • Related Report
      2009 Final Research Report
  • [Presentation] Siイオン注入により発現する溶融石英基板からの紫外発光2009

    • Author(s)
      三浦健太, 本美勝史, 花泉修, 山本春也, 井上愛知, 吉川正人
    • Organizer
      第42回照明学会全国大会
    • Place of Presentation
      札幌
    • Year and Date
      2009-08-28
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] Light emission from Er-doped Ta-oxide films fabricated by RF-sputtering2009

    • Author(s)
      M.K.Singh, G.Fusegi, K.Kanou, K.Miura, Hanaizumi
    • Organizer
      The International Conference on Physics of Optical Materials and Devices(ICOM2009)
    • Place of Presentation
      Herceg Novi, Montenegro
    • Year and Date
      2009-08-28
    • Related Report
      2009 Annual Research Report
  • [Presentation] スパッタリング法によるErドープTaOx薄膜の作製とその発光特性2009

    • Author(s)
      三浦健太, 狩野一総, 伏木厳穣, シンマヤンク, 花泉修
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      仙台
    • Year and Date
      2009-08-21
    • Related Report
      2009 Final Research Report
  • [Presentation] スパッタリング法によるErドープTaO_x薄膜の作製とその発光特性2009

    • Author(s)
      K.Miura, K.Kano, G.Fusegi, M.K.Singh, O.Hanaizumi
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      仙台
    • Year and Date
      2009-08-21
    • Related Report
      2009 Annual Research Report
  • [Presentation] Simple finite-difference time-domain method for triangular lattice photonic crystals2009

    • Author(s)
      A.V. Umenyi, K. Miura, O. Hanaizumi
    • Organizer
      The 14th Optoelectronics and Communications Conference (OECC 2009)
    • Place of Presentation
      Hong Kong
    • Year and Date
      2009-07-15
    • Related Report
      2009 Final Research Report
  • [Presentation] Simple finite-difference time-domain method for triangular lattice photonic crystals2009

    • Author(s)
      A.V.Umenyi, K.Miura, O.Hanaizumi
    • Organizer
      The 14th Optoelectronics and Communications Conference(OECC 2009)
    • Place of Presentation
      Hong Kong
    • Year and Date
      2009-07-15
    • Related Report
      2009 Annual Research Report
  • [Presentation] A new approach to simple and easy FDTD method for triangular lattice photonic crystals2009

    • Author(s)
      アマラチュクウメイニ, 三浦健太, 花泉修
    • Organizer
      第56回応用物理学関係連合講演会
    • Place of Presentation
      つくば
    • Year and Date
      2009-03-31
    • Related Report
      2009 Final Research Report 2008 Annual Research Report
  • [Presentation] Modified FDTD method for triangular lattice photonic crystals2008

    • Author(s)
      アマラチュクバレンタインウメイニ, 三浦健太, 花泉修
    • Organizer
      電子情報通信学会光エレクトロニクス研究会
    • Place of Presentation
      東京
    • Year and Date
      2008-12-19
    • Related Report
      2009 Final Research Report 2008 Annual Research Report
  • [Presentation] Fabrication of blue-light emitting tantalum oxide films by radio-frequency sputtering2008

    • Author(s)
      K. Miura, H. Miyazaki, O. Hanaizumi
    • Organizer
      IEEE Photonics Global 2008
    • Place of Presentation
      Singapore
    • Year and Date
      2008-12-10
    • Related Report
      2009 Final Research Report
  • [Presentation] Fabrication of blue-light emitting tantalum oxide films by radio-frequency sputtering2008

    • Author(s)
      K. Miura, H. Miyazaki, and O. Hanaizumi
    • Organizer
      IEEE PhotonicsGlobal@Singapore
    • Place of Presentation
      Singapore
    • Year and Date
      2008-12-10
    • Related Report
      2008 Annual Research Report
  • [Presentation] SiO2媒質中に分散形成されたナノ結晶シリコンが実現する青色発光体2008

    • Author(s)
      三浦健太, 花泉修, 山本春也, 高野勝昌, 杉本雅樹, 吉川正人
    • Organizer
      第3回高崎量子応用研究シンポジウム
    • Place of Presentation
      高崎
    • Year and Date
      2008-10-09
    • Related Report
      2009 Final Research Report
  • [Presentation] SiO_2媒質中に分散形成されたナノ結晶シリコンが実現する青色発光体2008

    • Author(s)
      三浦健太, 花泉修, 山本春也, 高野勝昌, 杉本雅樹, 吉川正人
    • Organizer
      第3回高崎量子応用研究シンポジウム
    • Place of Presentation
      高崎
    • Year and Date
      2008-10-09
    • Related Report
      2008 Annual Research Report
  • [Presentation] Improvement of emission efficiency of Si:SiO2 sputtered films by introducing two-dimensional periodic structures2008

    • Author(s)
      K. Miura, T. Hayakawa, O. Hanaizumi
    • Organizer
      The 6th International Conference on Optics-photonics Design and Fabrication (ODF'08)
    • Place of Presentation
      Taipei, Taiwan
    • Year and Date
      2008-06-10
    • Related Report
      2009 Final Research Report
  • [Presentation] Improvement of emission efficiency of Si:SiO_2 sputtered films by introducing two-dimensional periodic structures2008

    • Author(s)
      K. Miura, T. Hayakawa, and O. Hanaizumi
    • Organizer
      The 6th International Conference on Optics-photonics Design and Fabrication (ODF08)
    • Place of Presentation
      Taipei
    • Year and Date
      2008-06-10
    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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