• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Precise Evaluation of Zero-CTE Temperature of Ultra-Low-Expansion Glass Using the Line-Focus-Beam Ultrasonic Material Characterization System

Research Project

Project/Area Number 20760261
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeSingle-year Grants
Research Field Measurement engineering
Research InstitutionTohoku University

Principal Investigator

ARAKAWA Mototaka  Tohoku University, 大学院・工学研究科, 助教 (00333865)

Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2009: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2008: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Keywords計測工学 / 超音波計測工学 / 音響特性 / 線膨張係数 / 超低膨張ガラス / 検量線 / 超精密計測 / 超低膨張
Research Abstract

Zero-CTE temperatures, temperatures at which coefficients of thermal expansion (CTE) become zero, T(zero-CTE), of TiO_2-SiO_2 ultra-low-expansion glasses depend not only on the TiO_2 concentrations C (TiO_2) but also on the fictive temperatures T_f and the OH concentrations C (OH). Calibration lines, viz., interrelationships among T (zero-CTE), C (TiO_2), T_f, C (OH), and acoustic properties (leaky surface acoustic wave velocity, longitudinal velocity, shear velocity, and density), were obtained to evaluate T (zero-CTE) of TiO_2-SiO_2 ultra-low-expansion glasses by the line-focus-beam ultrasonic material characterization system.

Report

(3 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • Research Products

    (34 results)

All 2010 2009 2008 Other

All Journal Article (6 results) (of which Peer Reviewed: 4 results) Presentation (27 results) Remarks (1 results)

  • [Journal Article] Development of an ultrasonic system for super-precise measurement of zero-CTE temperature of EUVL-grade TiO2-SiO2- ultra-low-expansion glasses2010

    • Author(s)
      J. Kushibiki, M. Arakawa, Y. Ohashi, T. Sannomiya, Y. Maruyama
    • Journal Title

      Proc. SPIE Vol.7636

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Precise evaluation of zero-CTE temperature of EUVL-grade TiO2-SiO2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system2010

    • Author(s)
      J. Kushibiki, M. Arakawa
    • Journal Title

      Proc. SPIE Vol.7271

    • Related Report
      2009 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of an ultrasonic system for super-precise measurement of zero-CTE temperature of EUVL-grade TiO_2-SiO_2- ultra-low-expansion glasses2010

    • Author(s)
      Jun-ichi Kushibiki, Mototaka Arakawa, Yuji Ohashi, Toshio Sannomiya, Yuko Maruyama
    • Journal Title

      Proc.SPIE 7636(印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of synthetic silica glasses by the ultrasonic microspectroscopy technology2009

    • Author(s)
      M. Arakawa, H. Shimamura, J. Kushibiki
    • Journal Title

      IEEE Ultrson. Symp. Proc.

      Pages: 1559-1562

    • NAID

      110007005083

    • Related Report
      2009 Final Research Report
  • [Journal Article] Precise evaluation of zero-CTE temperature of EUVL-grade TiO_2-SiO_2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system2009

    • Author(s)
      J.Kushibiki, M.Arakawa
    • Journal Title

      Proc.SPIE 7271

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of synthetic silica glasses by the ultrasonic microspectroscopy technology2009

    • Author(s)
      M.Arakawa, H.Shimamura, J.Kushibiki
    • Journal Title

      IEEE Ultrson.Symp.Proc.

      Pages: 1559-1562

    • NAID

      110007005083

    • Related Report
      2009 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術による合成石英ガラスの評価 -熱処理温度依存性-2010

    • Author(s)
      櫛引淳一, 荒川元孝, 大橋雄二, 吉田翔, 近藤貴則, 丸山由子, 島村秀樹, 作田達也
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] LFB超音波材料解析システムによるTiO_2-SiO_2超低膨張ガラスのゼロCTE温度の評価および制御2010

    • Author(s)
      櫛引淳一, 荒川元孝, 大橋雄二, 吉田翔, 近藤貴則, 丸山由子, 山田修史
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] LFB超音波材料解析システムを用いた光周波数標準用均質化TiO_2-SiO_2超低膨張ガラスの評価 -均質性の改善-2010

    • Author(s)
      櫛引淳一, 荒川元孝, 大橋雄二, 吉田翔, 丸山由子
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Year and Date
      2010-03-17
    • Related Report
      2009 Annual Research Report
  • [Presentation] 直線集束ビーム超音波材料解析システムを用いた均質化TiO_2-SiO_2超低膨張ガラスの評価2010

    • Author(s)
      櫛引淳一, 荒川元孝, 大橋雄二, 吉田翔, 丸山由子
    • Organizer
      音響学会春季研究発表会
    • Place of Presentation
      東京
    • Year and Date
      2010-03-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] Development of an ultrasonic system for super-precise measurement of zero-CTE temperature of EUVL-grade TiO2-SiO2 ultra-low-expansion glasses2010

    • Author(s)
      J. Kushibiki, M. Arakawa, Y. Ohashi, T. Sannomiya, Y. Maruyama
    • Organizer
      SPIE Advanced Lithography
    • Place of Presentation
      サンノゼ, アメリカ
    • Year and Date
      2010-02-24
    • Related Report
      2009 Final Research Report
  • [Presentation] Development of an ultrasonic system for super-precise measurement of zero-CTE temperature of EUVL-grade TiO_2-SiO_2 ultra-low-expansion glasses2010

    • Author(s)
      J.Kushibiki, M.Arakawa, Y.Ohashi, T.Sannomiya, Y.Maruyama
    • Organizer
      SPIE Advanced Lithography
    • Place of Presentation
      サンノゼ, アメリカ
    • Year and Date
      2010-02-24
    • Related Report
      2009 Annual Research Report
  • [Presentation] Precise evaluation of zero-CTE temperature of TiO2-SiO2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system2009

    • Author(s)
      J. Kushibiki, M. Arakawa
    • Organizer
      IEEE Ultrasonics Symposium
    • Place of Presentation
      ローマ, イタリア
    • Year and Date
      2009-09-23
    • Related Report
      2009 Final Research Report
  • [Presentation] Precise Evaluation of Zero-CTE Temperature of TiO_2-SiO_2 Ultra-Low-Expansion Glass Using the Line-Focus-Beam Ultrasonic Material Characterization System2009

    • Author(s)
      櫛引淳一, 荒川元孝
    • Organizer
      IEEE Ultrasonics Symposium
    • Place of Presentation
      ローマ, イタリア
    • Year and Date
      2009-09-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] Evaluation of synthetic silica glasses by the ultrasonic microspectroscopy technology2009

    • Author(s)
      M. Arakawa, H. Shimamura, J. Kushibiki
    • Organizer
      IEEE Ultrasonics Symposium
    • Place of Presentation
      ローマ, イタリア
    • Year and Date
      2009-09-21
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] 熱膨張計によるTiO_2-SiO_2超低膨張ガラスのCTE特性の測定2009

    • Author(s)
      荒川元孝, 島村秀樹, 櫛引淳一, 山田修史
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術による合成石英ガラスの仮想温度評価2009

    • Author(s)
      櫛引淳一, 荒川元孝, 島村秀樹, 作田達也
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] LFB超音波材料解析システムによる光周波数標準用均質化TiO_2-SiO_2超低膨張ガラスの評価2009

    • Author(s)
      櫛引淳一, 荒川元孝, 島村秀樹
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山
    • Year and Date
      2009-09-09
    • Related Report
      2009 Annual Research Report
  • [Presentation] Accurate evaluation of CTE characteristics of ultra-low-expansion glasses for optical frequency standards by the LFB-UMC system2009

    • Author(s)
      J. Kushibiki, M. Arakawa
    • Organizer
      European Frequency and Time Forum International Frequency Control Symposium
    • Place of Presentation
      ブサンソン, フランス
    • Year and Date
      2009-04-23
    • Related Report
      2009 Final Research Report
  • [Presentation] Accurate evaluation of CTE characteristics of ultra-low expansion glasses for optical frequency standards by the LFB-UMC system2009

    • Author(s)
      櫛引淳一, 荒川元孝
    • Organizer
      European Frequency and Time Forum International Frequency Control Symposium
    • Place of Presentation
      ブサンソン, フランス
    • Year and Date
      2009-04-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] 直線集束ビーム超音波材料解析システムを用いたTiO2-SiO2超低膨張ガラスのゼロCTE温度評価法2009

    • Author(s)
      櫛引淳一
    • Organizer
      日本音響学会春季研究発表会
    • Place of Presentation
      東京都目黒区
    • Year and Date
      2009-03-17
    • Related Report
      2008 Annual Research Report
  • [Presentation] 直線集束ビーム超音波材料解析システムを用いたTiO_2-SiO_2超低膨張ガラスのゼロCTE温度評価法2009

    • Author(s)
      櫛引淳一
    • Organizer
      東北大学電気通信研究所 第60回超音波エレクトロニクス研究会
    • Place of Presentation
      仙台市
    • Year and Date
      2009-03-12
    • Related Report
      2008 Annual Research Report
  • [Presentation] Precise evaluation of zero-CTE temperature of EUVL-grade TiO2-SiO2 ultra-low-expansion glass using the line-focus-beam ultrasonic material characterization system2009

    • Author(s)
      J. Kushibiki, M. Arakawa
    • Organizer
      SPIE Advanced Lithography
    • Place of Presentation
      サンノゼ, アメリカ
    • Year and Date
      2009-02-26
    • Related Report
      2009 Final Research Report
  • [Presentation] Precise Evaluation of Zero-CTE Temperature of EUVL-grade TiO_2 SiO_2 Ultra-Low-Expansion Glass Using the Line-Focus-Beam Ultrasonic Material Characterization System2009

    • Author(s)
      Jun-ichi Kushibiki
    • Organizer
      SPIE Advanced Lithography
    • Place of Presentation
      San Jose, CA, USA
    • Year and Date
      2009-02-26
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術による合成石英ガラスの評価2009

    • Author(s)
      荒川元孝
    • Organizer
      圧電材料・デバイスシンポジウム
    • Place of Presentation
      仙台市
    • Year and Date
      2009-02-03
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術による合成石英ガラスの評価-OH濃度の影響-2008

    • Author(s)
      荒川元孝
    • Organizer
      東北大学電気通信研究所第59回超音波エレクトロニクス研究会
    • Place of Presentation
      仙台市
    • Year and Date
      2008-12-18
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術による合成石英ガラスの評価2008

    • Author(s)
      荒川元孝
    • Organizer
      第29回超音波エレクトロニクスの基礎と応用に関するシンポジウム
    • Place of Presentation
      仙台市
    • Year and Date
      2008-11-11
    • Related Report
      2008 Annual Research Report
  • [Presentation] A super-precise evaluation method of zero-CTE temperature of EUVL-grade TiO2-SiO2 ultra-low-expansion glass using the LFB ultrasonic material characterization system2008

    • Author(s)
      J. Kushibiki, M. Arakawa
    • Organizer
      2008 International Symposium on Extreme Ultraviolet Lithography
    • Place of Presentation
      レイクタホ, アメリ
    • Year and Date
      2008-09-29
    • Related Report
      2009 Final Research Report
  • [Presentation] A super-precise evaluation method of zero-CTE temperature of EUVL-grade TiO_2-SiO_2 ultra-low-expansion glass using the LFB ultrasonic material characterization system2008

    • Author(s)
      Jun-ichi Kushibiki
    • Organizer
      2008 International Symposium on Extreme Ultraviolet Li thography
    • Place of Presentation
      Lake Tahoe, CA, USA
    • Year and Date
      2008-09-29
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術による合成石英ガラスの評価2008

    • Author(s)
      荒川元孝
    • Organizer
      超音波研究会
    • Place of Presentation
      仙台市
    • Year and Date
      2008-09-25
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術による合成石英ガラスの評価2008

    • Author(s)
      荒川元孝
    • Organizer
      平成20年度電気関係学会東北支部連合大会
    • Place of Presentation
      郡山市
    • Year and Date
      2008-08-21
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術による合成石英ガラスの評価2008

    • Author(s)
      荒川元孝
    • Organizer
      2008年秋季応用物理学会学術講演会
    • Place of Presentation
      春日井市
    • Year and Date
      2008-08-21
    • Related Report
      2008 Annual Research Report
  • [Presentation] 超音波マイクロスペクトロスコピー技術による合成石英ガラスの評価2008

    • Author(s)
      荒川元孝
    • Organizer
      東北大学電気通信研究所 第56回超音波エレクトロニクス研究会
    • Place of Presentation
      仙台市
    • Year and Date
      2008-06-19
    • Related Report
      2008 Annual Research Report
  • [Remarks]

    • URL

      http://www.ecei.tohoku.ac.jp/kushi/

    • Related Report
      2009 Final Research Report

URL: 

Published: 2008-04-01   Modified: 2016-04-21  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi