Study on the development of position sensor for ultra precision control

• Project/Area Number: 20760271
• Research Category: Grant-in-Aid for Young Scientists (B)
• Allocation Type: Single-year Grants
• Research Field: Measurement engineering
• Research Institution: Aichi Institute of Technology
• Principal Investigator: UCHIDA Yoshihisa Aichi Institute of Technology, 工学部, 准教授 (20367626)
• Project Period (FY): 2008 – 2010
• Project Status: Completed (Fiscal Year 2010)
• Budget Amount: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000); Fiscal Year 2010: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2009: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000); Fiscal Year 2008: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
• Keywords: 位置センサ / 回折格子 / 位置決め / アライナー / 変位センサ / 角度センサ / 変位計 / 回折

Research Abstract

In this research, ultra precision position sensors for manufacturing of electric and mechanical devices and controlling of atoms and molecules were proposed. These sensors based on the diffraction phenomenon have simple configuration and high repetition accuracy. Automatic alignment sensor and automatic position sensor were developed. Multi-axis automatic sensing and control for 2 axes position senor and angle sensor were realized. The positioning accuracies of the standard deviations 0.07nm (X-axis) and 0.23nm (Y-axis) are estimated.

Research Products

• [Journal Article] Zooming effect of three-dimensional shape measurement system using projection method (2009)
  • Author(s): Saburo Uchida, Yoshihisa Uchida, et al.
  • Journal Title: Proc.of SPIE Vol.7506
  • Peer Reviewed
• [Journal Article] Blue Spectral Shift of P3HT Organic Film by KrF Excimer Laser Ablation (2009)
  • Author(s): Li Jiang, Yoshihisa Uchida, et al.
  • Journal Title: Proc.of SPIE Vol.7509
  • Peer Reviewed
• [Journal Article] Zooming effect of three-dimensional shape measurement system using projection method (2009)
  • Author(s): Saburo Uchida
  • Journal Title: Proc.of SPIE Vol.7506
  • Peer Reviewed
• [Journal Article] Blue Spectral Shift of P3HT Organic Film by KrF Excimer Laser Ablation (2009)
  • Author(s): Li Jiang
  • Journal Title: Proc.of SPIE Vol.7509
  • Peer Reviewed
• [Journal Article] Three-Dimensional Whole Circumference Shapes Measurement System Using Optical Patterns Projection Technique (2008)
  • Author(s): Katsumi Tsujioka, Yoshihisa Uchida, et al.
  • Journal Title: Proc.of SPIE Vol.7156
  • Peer Reviewed
• [Journal Article] Three-Dimensional Whole Circumference Shapes Measurement System Using Optical Patterns Projection Technique (2008)
  • Author(s): Katsumi Tsujioka
  • Journal Title: Proceedings of SPIE 2008 International Conference on Optical Instruments and Technology 7156
  • Peer Reviewed
• [Presentation] Micro-nano position control system using interferometric phenomena (2011)
  • Author(s): Tomoya Higuchi, et al.
  • Organizer: EUSPEN Conference Proceedings 2011
  • Place of Presentation: Como, Italy
  • Year and Date: 2011-05-27
• [Presentation] 回折モアレ光を用いた微小角度変位センサ (2011)
  • Author(s): 樋口智哉, 内田敬久
  • Organizer: 平成23年電気学会全国大会
  • Place of Presentation: 大阪大学(大阪)
  • Year and Date: 2011-03-16
• [Presentation] Morphology control of organic film using excimer laser (2010)
  • Author(s): Rei Asai, et al.
  • Organizer: The International Chemical Congress of Pacific Basin Societies
  • Place of Presentation: Hawaii, USA
  • Year and Date: 2010-12-19
• [Presentation] 回折モアレ光を用いたXY軸自動位置決め装置の開発 (2010)
  • Author(s): 樋口智哉, 内田敬久
  • Organizer: 第53回自動制御連合講演会
  • Place of Presentation: 高知城ホール(高知県)
  • Year and Date: 2010-11-06
• [Presentation] 溶液法による有機自己組織膜の配向特性 (2010)
  • Author(s): 浅井零, 内田敬久, 古橋秀夫, 内田悦行
  • Organizer: 平成22年電気学会基礎・材料・共通部門大会
  • Place of Presentation: 琉球大学(沖縄)
  • Year and Date: 2010-09-13
• [Presentation] 有機膜の形態に及ぼすレーザフルエンスの効果 (2010)
  • Author(s): 包小暉, 浅井零, 内田敬久, 比嘉俊太郎, 古橋秀夫, 内田悦行
  • Organizer: 平成22年電気学会基礎・材料・共通部門大会
  • Place of Presentation: 琉球大学(沖縄)
  • Year and Date: 2010-09-13
• [Presentation] Development of Non-Contact Micro-Nano Displacement Sensor using Interferometric Phenomena (2010)
  • Author(s): Tomoya Higuchi, et al.
  • Organizer: EUSPEN Conference Proceedings 2010
  • Place of Presentation: Delft, Netherlands
  • Year and Date: 2010-06-02
• [Presentation] 回折モアレ型変位センサの開発 (2010)
  • Author(s): 樋口智哉, 他
  • Organizer: 平成22年電気学会全国大会
  • Place of Presentation: 明治大学
  • Year and Date: 2010-03-18
• [Presentation] 回折モアレ型変位センサの開発 (2010)
  • Author(s): 樋口智哉
  • Organizer: 電気学会
  • Place of Presentation: 明治大学
  • Year and Date: 2010-03-18
• [Presentation] 反射型回折モアレ光による精密位置センサの開発 (2010)
  • Author(s): 岩田雅史
  • Organizer: 日本機械学会
  • Place of Presentation: 名城大学(名古屋)
  • Year and Date: 2010-03-10
• [Presentation] 回折モアレ光を用いた微小変位センサの開発 (2010)
  • Author(s): 樋口智哉
  • Organizer: 日本機械学会
  • Place of Presentation: 名城大学(名古屋)
  • Year and Date: 2010-03-10
• [Presentation] 回折光を用いた非接触微小変位計測 (2009)
  • Author(s): 樋口智哉, 他
  • Organizer: 日本機械学会
  • Place of Presentation: 北海道大学(北海道)
  • Year and Date: 2009-08-04
• [Presentation] Blue Spectral Shift of Organic Film by Excimer Laser Ablation (2009)
  • Author(s): Xiaohui Bao, et al
  • Organizer: International Workshop on Nanotechnology and Advanced Functional Materials
  • Place of Presentation: Pune, India
  • Year and Date: 2009-07-10
• [Presentation] Characteristics of Interferometric Measuring System for Sub-Nanometer Positioning (2009)
  • Author(s): Yoshihisa Uchida
  • Organizer: EUSPEN Conference Proceedings 2009
  • Place of Presentation: San Sebastian, Spain
  • Year and Date: 2009-06-04
• [Presentation] Development of Non-Contact Micro-Nano Displacement Sensor using Interferometric Phenomena (2009)
  • Author(s): Yoshihisa Uchida
  • Organizer: EUSPEN Conference Proceedings 2009
  • Place of Presentation: San Sebastian, Spain
  • Year and Date: 2009-06-04
• [Presentation] Image Data Processing in Three-Dimensional Whole Circumference Shapes Measurement System using Optical Patterns Projection Technique (2009)
  • Author(s): Yoshihisa Uchida, et al
  • Organizer: Proceedings of the 6th Lux Pacifica
  • Place of Presentation: Bangkok, Thailand
  • Year and Date: 2009-04-24
• [Presentation] 回折モアレ光による精密位置センサの開発 (2009)
  • Author(s): 岩田雅史
  • Organizer: 平成21年電気学会全国大会
  • Place of Presentation: 北海道大学
  • Year and Date: 2009-03-17