Large-area formation of atomically flat diamond (111) surface and creation of the functions
| Project/Area Number |
20760455
|
|---|
| Research Category |
Grant-in-Aid for Young Scientists (B)
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
Inorganic materials/Physical properties
|
|---|
| Research Institution | National Institute of Advanced Industrial Science and Technology |
|---|
Principal Investigator |
TOKUDA Norio National Institute of Advanced Industrial Science and Technology, 電子情報学系, 助教 (80462860)
|
|---|
| Project Period (FY) |
2008 – 2009
|
| Project Status |
Completed (Fiscal Year 2009)
|
| Budget Amount *help |
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000)
Fiscal Year 2008: ¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
|
|---|
| Keywords | ダイヤモンド / 半導体 / 結晶成長 / 表面制御 / 標準試料 |
|---|
| Research Abstract |
The control of diamond surface in atomic level has been studied by controlling the diamond crystal growth using plasma-enhanced CVD. As a result, 100×100μm2 step-free surface of diamond (111) was successfully formed. The diamond nano-structure, which was composed of equivalent triangular islands with single steps, was suggested as world's smallest nanometer-sized ruler.
|
Report
(3 results)
Research Products
(22 results)
-
-
-
-
-
-
[Journal Article]2009
Author(s)
Norio Tokuda, Hitoshi Umezawa, Hirom itsu Kato, Masahiko Ogura, Satoshi Gond a, Kikuo Yamabe, Hideyo Okushi, Satoshi Yamasaki
-
Journal Title
Applied Physics Express 2
Pages: 55001-55001
Related Report
Peer Reviewed
-
-
-
[Presentation] 完全平坦ダイヤモンド表面の形成2010
Author(s)
徳田規夫, 猪熊孝夫, 山部紀久夫, 大串秀世, 山崎聡
Organizer
表面技術協会第120回講演大会
Place of Presentation
幕張メッセ国際会議場(千葉県)
Year and Date
2010-09-18
Related Report
-
[Presentation] 完全平坦ダイヤモンド表面の形成2009
Author(s)
徳田規夫, 猪熊孝夫, 山部紀久夫, 大串秀世, 山崎聡
Organizer
表面技術協会 第120回講演大会
Place of Presentation
幕張メッセ国際会議場(千葉県)
Year and Date
2009-09-18
Related Report
-
[Presentation] Atomically controlled diamond surfaces2009
Author(s)
Norio Tokuda, Toshiharu Makino, Masahiko Ogura, Hiromitsu Kato, Hitoshi Umezawa, Kikuo Yamabe, Hideyo Okushi, Satoshi Yamasaki
Organizer
The second international symposium on interdisciplinary Materials Science (ISIMS-2009)
Place of Presentation
つくば国際会議場(茨城県)
Year and Date
2009-03-10
Related Report
-
-
-
-
-
-
-
-
-
-
-
