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Evaluation of crystalline quality of GaInN grown on high-quality nonpolar or semipolar GaN

Research Project

Project/Area Number 20860057
Research Category

Grant-in-Aid for Young Scientists (Start-up)

Allocation TypeSingle-year Grants
Research Field Applied materials science/Crystal engineering
Research InstitutionYamaguchi University

Principal Investigator

OKADA Narihito  Yamaguchi University, 大学院・理工学研究科, 助教 (70510684)

Project Period (FY) 2008 – 2009
Project Status Completed (Fiscal Year 2009)
Budget Amount *help
¥3,289,000 (Direct Cost: ¥2,530,000、Indirect Cost: ¥759,000)
Fiscal Year 2009: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2008: ¥1,729,000 (Direct Cost: ¥1,330,000、Indirect Cost: ¥399,000)
Keywordsサファイア加工基板 / GaN / GaInN / 非極性面 / 非極性面GaN
Research Abstract

We established novel growth technique to fabricate high-quality nonpolar or semipolar GaN. The technique led GaN with "low-cost, large, and high-quality" which are essential for the commercialization. Specifically, GaN is grown from sapphire sidewall in stripe-patterned sapphire substrate. Finally, GaInN was grown on high-quality nonpolar or semipolar GaN and evaluated. As a result, we found the condition to obtain high-quality GaInN.

Report

(3 results)
  • 2009 Annual Research Report   Final Research Report ( PDF )
  • 2008 Annual Research Report
  • Research Products

    (49 results)

All 2011 2010 2009 2008 Other

All Journal Article (11 results) (of which Peer Reviewed: 6 results) Presentation (29 results) Remarks (2 results) Patent(Industrial Property Rights) (7 results) (of which Overseas: 1 results)

  • [Journal Article] Growth mechanism of nonpolar m-plane GaN on maskless patterned a-plane sapphire substrate2010

    • Author(s)
      Yuji Kawashima
    • Journal Title

      physica status solidi (印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of semipolar (112^-2) GaN on c-plane sap-phire sidewall of patterned r-plane sapphire substrate without SiO2 mask2010

    • Author(s)
      Akihiro Kurisu
    • Journal Title

      physica status solidi (印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] サファイア基板上のGaN成長の新展開2010

    • Author(s)
      只友一行
    • Journal Title

      応用物理 1

      Pages: 59-63

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Growth of Semipolar (1122) GaN Layer by ControllGaInNisotropic Growth Rates in r-Plane Patterned Sapphire Substrate2009

    • Author(s)
      N. Okada, H. Kurisu, K. Tadatomo
    • Journal Title

      Appl. Phys. Express 2

      Pages: 91001-91001

    • Related Report
      2009 Final Research Report
  • [Journal Article] Growth of m-GaN layers by epitaxial lateral overgrowth from sapphire sidewalls2009

    • Author(s)
      N. Okada, Y. Kawashima, K. Tadatomo
    • Journal Title

      physica status solidi(a) 206No.6

      Pages: 1164-1167

    • Related Report
      2009 Final Research Report
  • [Journal Article] Growth of Semipolar (112^-2) GaN Layer by Controlling Anisotropic Growth Rates in r-Plane Patterned Sapphire Substrate2009

    • Author(s)
      N.Okada
    • Journal Title

      Appl.Phys.Express 2

      Pages: 0910011-3

    • NAID

      10025517429

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Direct Growth of m-plane GaN with Epitaxial Lateral Overgrowth from c-plane Sidewall of Sapphire2008

    • Author(s)
      N. Okada, Y. Kawashima, K. Tadatomo
    • Journal Title

      Appl. Phys. Express 1

      Pages: 111101-111101

    • Related Report
      2009 Final Research Report
  • [Journal Article] Direct Growth of m-plane GaN with Epitaxial Lateral Overgrowth from c-plane Sidewall of Sapphire2008

    • Author(s)
      N. Okada
    • Journal Title

      Appl. Phys. Express 1

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of semipolar (112 ̄2) GaN on c-plane sap-phire sidewall of patterned r-plane sapphire substrate without SiO2 mask

    • Author(s)
      Akihiro Kurisu, Kazuma Murakami, Yuki Abe, Narihito Okada, Kazuyuki Tadatomo
    • Journal Title

      physica status solidi (in press)

    • Related Report
      2009 Final Research Report
  • [Journal Article] Growth mechanism of nonpolar m-plane GaN on maskless patterned a-plane sapphire substrate

    • Author(s)
      Yuji Kawashima, Kazuma Murakami, Yuki Abe, Narihito Okada, Kazuyuki Tadatomo
    • Journal Title

      physica status solidi (in press)

    • Related Report
      2009 Final Research Report
  • [Journal Article] Growth of m-GaN layers by epitaxial lateral overgrowth from sapphire sidewalls

    • Author(s)
      N. Okada
    • Journal Title

      physica status solidi(a) (印刷中)

    • Related Report
      2008 Annual Research Report
    • Peer Reviewed
  • [Presentation] 窒化処理を行ったサファイア加工基板上GaNの側壁選択成長2010

    • Author(s)
      岡田成仁, 大下弘康, 栗栖彰宏, 川嶋佑治, 只友一行
    • Organizer
      成22年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学, 神奈川県
    • Year and Date
      2010-03-18
    • Related Report
      2009 Final Research Report
  • [Presentation] マスクレスm面サファイア加工基板上の非極性GaNの成長2010

    • Author(s)
      大下弘康, 阿部結樹, 村上一馬, 岡田成仁, 只友一行
    • Organizer
      平成22年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学, 神奈川県
    • Year and Date
      2010-03-18
    • Related Report
      2009 Final Research Report
  • [Presentation] n面サファイア加工基板上c面側壁からの半極性{10-11}面GaN選択横方向成長2010

    • Author(s)
      高見成希, 栗栖彰宏, 村上一馬, 岡田成仁, 只友一行
    • Organizer
      平成22年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学, 神奈川県
    • Year and Date
      2010-03-18
    • Related Report
      2009 Final Research Report
  • [Presentation] テラス幅の広いr面サファイア加工基板を用いた(11-22) GaNの成長2010

    • Author(s)
      栗栖彰宏, 村上一馬, 阿部結樹, 品川拓, 岡田成仁, 只友一行
    • Organizer
      平成22年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学, 神奈川県
    • Year and Date
      2010-03-18
    • Related Report
      2009 Final Research Report
  • [Presentation] 窒化処理を行ったサファイア加工基板上GaNの側壁選択成長2010

    • Author(s)
      岡田成仁
    • Organizer
      平成22年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学,神奈川県
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] マスクレスm面サファイア加工基板上の非極性GaNの成長2010

    • Author(s)
      大下弘康
    • Organizer
      平成22年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学,神奈川県
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] n面サファイア加工基板上c面側壁からの半極性{10-11}面GaN選択横方向成長2010

    • Author(s)
      高見成希
    • Organizer
      平成22年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学,神奈川県
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] テラス幅の広いr面サファイア加工基板を用いた(11-22)GaNの成長2010

    • Author(s)
      栗栖彰宏
    • Organizer
      平成22年春季第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学,神奈川県
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] 様々なマスクレス加工基板上の非極性面GaNの成長機構2009

    • Author(s)
      岡田成仁, 大下弘康, 栗栖彰宏, 川嶋佑治, 只友一行
    • Organizer
      第39回結晶成長国内会議
    • Place of Presentation
      名古屋大学, 愛知県
    • Year and Date
      2009-11-14
    • Related Report
      2009 Final Research Report
  • [Presentation] 様々なマスクレス加工基板上の非極性面GaNの成長機構2009

    • Author(s)
      岡田成仁
    • Organizer
      第39回結晶成長国内会議
    • Place of Presentation
      名古屋大学,愛知県
    • Year and Date
      2009-11-14
    • Related Report
      2009 Annual Research Report
  • [Presentation] Growth mechanism of nonpolar m-GaN on patterned a-plane sapphire substrate2009

    • Author(s)
      Yuji Kawashima, Kazuma Murakami, BoCheng Li, Hiroyuki Matsumoto, Narihito Okada, Kazuyuki Tadatomo
    • Organizer
      The 8th International Conference on Nitride Semiconductor
    • Place of Presentation
      ICC, Jeju, Korea
    • Year and Date
      2009-10-22
    • Related Report
      2009 Final Research Report
  • [Presentation] Growth mechanism of nonpolar m-GaN on patterned a-plane sapphire substrate2009

    • Author(s)
      Yuji Kawashima
    • Organizer
      The 8th International Conference on Nitride Semiconductors
    • Place of Presentation
      ICC, Jeju, Korea
    • Year and Date
      2009-10-22
    • Related Report
      2009 Annual Research Report
  • [Presentation] Epitaxial lateral overgrowth of semipolar (11-22) GaN from c-plane sapphire sidewall of patterned r-plane sapphire substrate without SiO2 mask2009

    • Author(s)
      A. Kurisu, K. Murakami, Y. Abe, N. Okada, K. Tadatomo
    • Organizer
      The 8th International Conference on Nitride Semiconductors
    • Place of Presentation
      ICC, Jeju, Korea
    • Year and Date
      2009-10-21
    • Related Report
      2009 Annual Research Report 2009 Final Research Report
  • [Presentation] マスクレスサファイア加工基板上の非極性GaNの成長メカニズム2009

    • Author(s)
      川嶋佑治, 村上一馬, 阿部結樹, 栗栖彰宏, 岡田成仁, 只友一行
    • Organizer
      平成21年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学, 富山県
    • Year and Date
      2009-09-10
    • Related Report
      2009 Final Research Report
  • [Presentation] 半極性(11-22) GaN成長におけるr面サファイア加工基板のオフ角の最適化2009

    • Author(s)
      栗栖彰宏, 村上一馬, 阿部結樹, 松本大志, 品川拓, 岡田成仁, 只友一行
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学, 富山県
    • Year and Date
      2009-09-10
    • Related Report
      2009 Final Research Report
  • [Presentation] マスクレスサファイア加工基板上の非極性GaNの成長メカニズム2009

    • Author(s)
      川嶋佑治
    • Organizer
      平成21年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学,富山県
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 半極性(11-22)GaN成長におけるr面サファイア加工基板のオフ角の最適化2009

    • Author(s)
      栗栖彰宏
    • Organizer
      平成21年秋季第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学,富山県
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] r面サファイア加工基板上c面側壁からの半極性(11-22)GaN選択横方向成長とLEDへの応用2009

    • Author(s)
      栗栖彰宏, 南雅博, 河野創一郎, 石田文男, 光井靖智, 村上一馬, 李伯成, 松本大志, 岡田成仁, 只友一行
    • Organizer
      平成21年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学, 茨城県
    • Year and Date
      2009-04-01
    • Related Report
      2009 Final Research Report
  • [Presentation] r面サファイア加工基板上c面側壁からの半極性(11-22)GaN選択横方向成長とLEDへの応用2009

    • Author(s)
      栗栖彰宏
    • Organizer
      平成21年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学,茨城県
    • Year and Date
      2009-04-01
    • Related Report
      2009 Annual Research Report
  • [Presentation] a面サファイア加工基板上に成長するm面GaNの成長配向依存性2009

    • Author(s)
      川嶋佑治, 村上一馬, 李伯成, 河野創一郎, 石田文男, 岡田成仁, 只友一行
    • Organizer
      平成21年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      筑波大学, 茨城県
    • Year and Date
      2009-03-30
    • Related Report
      2009 Final Research Report
  • [Presentation] a面サファイア加工基板上に成長するm面GaNの成長配向依存性2009

    • Author(s)
      川嶋佑治
    • Organizer
      平成21年春季第56回応用物理学関係連合講演会
    • Place of Presentation
      茨城県 筑波大学
    • Year and Date
      2009-03-30
    • Related Report
      2008 Annual Research Report
  • [Presentation] a面サファイア加工基板上に成長するm面GaNの成長条件依存性2009

    • Author(s)
      大下弘康, 川嶋佑治, 村上一馬, 李伯成, 岡田成仁, 只友一行
    • Organizer
      平成21年第11回IEEE広島支部学生シンポジウム
    • Place of Presentation
      山口大学, 山口県
    • Related Report
      2009 Final Research Report
  • [Presentation] r面サファイア加工基板上c面側壁からの半極性(11-22)GaN選択横方向成長2009

    • Author(s)
      高見成希, 栗栖彰宏, 村上一馬, 李伯成, 松本大志, 岡田成仁, 只友一行
    • Organizer
      平成21年第11回IEEE広島支部学生シンポジウム
    • Place of Presentation
      山口大学, 山口県
    • Related Report
      2009 Final Research Report
  • [Presentation] a面サファイア加工基板上に成長するm面GaNの成長条件依存性2009

    • Author(s)
      大下弘康
    • Organizer
      平成21年第11回IEEE広島支部学生シンポジウム
    • Place of Presentation
      山口大学,山口県
    • Related Report
      2009 Annual Research Report
  • [Presentation] r面サファイア加工基板上c面側壁からの半極性(11-22)GaN選択横方向成長2009

    • Author(s)
      高見成希
    • Organizer
      平成21年第11回IEEE広島支部学生シンポジウム
    • Place of Presentation
      山口大学,山口県
    • Related Report
      2009 Annual Research Report
  • [Presentation] Direct growth of m-plane GaN on grooved-patterned a-plane sapphire substrate with SiO2 mask2008

    • Author(s)
      N. Okada, Y. Kawashima, K. Tadatomo
    • Organizer
      International Workshop on Nitride Semiconductors 2008
    • Year and Date
      2008-10-09
    • Related Report
      2009 Final Research Report
  • [Presentation] Direct growth of m-plane GaN on grooved-patterned a-plane sapphire substrate with SiO_2, mask2008

    • Author(s)
      N. Okada
    • Organizer
      International Workshop on Nitride Semiconductors 2008
    • Place of Presentation
      スイス
    • Year and Date
      2008-10-09
    • Related Report
      2008 Annual Research Report
  • [Presentation] 側壁選択横方向成長を用いたa面サファイア加工基板上のm面GaN成長2008

    • Author(s)
      川嶋佑治
    • Organizer
      平成20年秋季第69回応用物理学関係連合講演会
    • Place of Presentation
      愛知県 中部大学
    • Year and Date
      2008-09-03
    • Related Report
      2008 Annual Research Report
  • [Presentation] 側壁選択横方向成長を用いたa面サファイア加工基板上のm面GaN成長2008

    • Author(s)
      川嶋佑治, 村上一馬, 松本大志, 李伯成, 河野創一郎, 光井靖智, 石田文男, 岡田成仁, 只友一行
    • Organizer
      平成20年秋季第69回応用物理学関係連合講演会
    • Place of Presentation
      中部大学, 愛知県
    • Related Report
      2009 Final Research Report
  • [Remarks]

    • URL

      http://device.eee.yamaguchi-u.ac.jp/

    • Related Report
      2009 Final Research Report
  • [Remarks]

    • URL

      http://device.eee.yamaguchi-u.ac.jp/

    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体基板及びその製造方法2011

    • Inventor(s)
      只友一行、岡田成仁
    • Industrial Property Rights Holder
      国立大学法人山口大学
    • Industrial Property Number
      2010-037025
    • Filing Date
      2011-02-23
    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] 半導体基板及びその製造方法2010

    • Inventor(s)
      只友一行、岡田成仁
    • Industrial Property Rights Holder
      国立大学法人山口大学
    • Industrial Property Number
      2010-037025
    • Filing Date
      2010-02-23
    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体基板及びその製造方法2009

    • Inventor(s)
      只友一行、岡田成仁
    • Industrial Property Rights Holder
      国立大学法人山口大学
    • Filing Date
      2009-08-20
    • Related Report
      2009 Final Research Report
  • [Patent(Industrial Property Rights)] 半導体基板及びその製造方法2009

    • Inventor(s)
      只友一行、岡田成仁
    • Industrial Property Rights Holder
      国立大学法人山口大学
    • Filing Date
      2009-08-20
    • Related Report
      2009 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 半導体発光素子の製造方法2009

    • Inventor(s)
      只友一行, 岡田成仁
    • Filing Date
      2009-03-09
    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体発光素子の製造方法2009

    • Inventor(s)
      只友一行, 岡田成仁
    • Filing Date
      2009-03-10
    • Related Report
      2008 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体発光素子の製造方法2008

    • Inventor(s)
      只友一行, 岡田成仁
    • Filing Date
      2008-08-25
    • Related Report
      2008 Annual Research Report

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Published: 2008-04-01   Modified: 2016-04-21  

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