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Subatomic 3D Ultra-Precision Measurement by Creation of Optical Comb Dimensional Conversion Optics and In-Situ Autonomous Calibration Method

Research Project

Project/Area Number 20H00211
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Review Section Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
Research InstitutionTohoku University

Principal Investigator

Gao Wei  東北大学, 工学研究科, 教授 (70270816)

Co-Investigator(Kenkyū-buntansha) 清水 裕樹  北海道大学, 工学研究院, 教授 (70606384)
松隈 啓  東北大学, 工学研究科, 准教授 (90728370)
Project Period (FY) 2020-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥44,980,000 (Direct Cost: ¥34,600,000、Indirect Cost: ¥10,380,000)
Fiscal Year 2023: ¥8,710,000 (Direct Cost: ¥6,700,000、Indirect Cost: ¥2,010,000)
Fiscal Year 2022: ¥13,910,000 (Direct Cost: ¥10,700,000、Indirect Cost: ¥3,210,000)
Fiscal Year 2021: ¥9,750,000 (Direct Cost: ¥7,500,000、Indirect Cost: ¥2,250,000)
Fiscal Year 2020: ¥12,610,000 (Direct Cost: ¥9,700,000、Indirect Cost: ¥2,910,000)
Keywords精密位置決め / 加工計測 / 超精密計測 / 精密計測 / 精度 / 分解能 / 超短パルスレーザ / 光周波数コム / 変位 / 形状 / 位置決め / 光応用計測 / 3次元計測 / トレーサビリティ / 自律校正 / 角度 / 位置 / 生産工学 / 加工学 / 絶対計測
Outline of Research at the Start

次世代「つながる」超精密ものづくり実現に必須となる3次元超精密「絶対」形状計測基盤の確立を目的として,不等ピッチ絶対グリッド(不等間隔のものさし)および色収差レンズの分光作用をもとに,XYZ3軸絶対位置情報を光コム光源の光周波数情報に次元変換して検出する,極高感度絶対型XYZ位置コムを開発する.さらに,ナノメートル精度が限界である従来の計測・校正分離型信頼性保証(校正)体系の打破に向け,光コム光源をGPS衛星経由で「時間」の国家標準に直結することで実現する新概念の計測・校正一体型「その場自律校正体系」を確立し,遠隔地の生産現場における国家標準に匹敵する限界精度までの極高精度化を試みる.

Outline of Final Research Achievements

An ultra-sensitive absolute XYZ position comb that uses an unequal-pitch absolute grid and the spectral action of a chromatic aberration lens to detect the XY-axis and Z-axis absolute position information of measurement points by converting it into an optical frequency scale comb have been proposed. An ultra-sensitive absolute XYZ position comb that detects the XY-axis and Z-axis absolute position information of a measurement point by converting it into an optical frequency scale comb has been newly proposed, a wavefront-division optical interference optics system to generate the large-area unequal-pitch absolute grid required for this system has been constructed. Furthermore, a new concept of "in-situ autonomous calibration system" that integrates measurement and calibration to simultaneously realize reliability assurance by directly connecting the optical frequency comb light source of the XYZ position comb to the national standard for "time" via GPS satellites have established.

Academic Significance and Societal Importance of the Research Achievements

光周波数域における独創的な差動型検出手法で,高感度かつロバストな極高精度XYZ絶対位置計測を世界に先駆けて実現できる.これは超精密光計測の学術分野を格段に発展させるもので,生産工学のみならず機械工学の幅広い分野への波及効果が高い.また絶対型XYZ位置コムにより,次世代「つながる工場」のコンセプトを超精密ものづくりに適用しIoT社会に波及させる.あらゆる計測量の中で一番高確度な「時間」の国家標準と直結した最高精度の信頼性保証サービスを,どこでも,いつでも必要な人に提供できる社会的インフラ基盤が実現し,国家標準を社会全体で容易に共有できることになり,今までにない価値を生み出すことができる.

Report

(6 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Annual Research Report
  • 2021 Annual Research Report
  • 2020 Comments on the Screening Results   Annual Research Report
  • Research Products

    (98 results)

All 2024 2023 2022 2021 2020 Other

All Journal Article (39 results) (of which Int'l Joint Research: 10 results,  Peer Reviewed: 38 results,  Open Access: 23 results) Presentation (55 results) (of which Int'l Joint Research: 35 results,  Invited: 10 results) Book (2 results) Remarks (1 results) Patent(Industrial Property Rights) (1 results)

  • [Journal Article] Design of an Optical Head with Two Phase-Shifted Interference Signals for Direction Detection of Small Displacement in an Absolute Surface Encoder2024

    • Author(s)
      Sato Ryo、Liu Tao、Maehara Satoru、Okimura Ryota、Matsukuma Hiraku、Gao Wei
    • Journal Title

      International Journal of Automation Technology

      Volume: 18 Issue: 2 Pages: 249-256

    • DOI

      10.20965/ijat.2024.p0249

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2024-03-05
    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] On-Machine Calibration of Pitch Deviations of a Linear Scale Grating by Using a Differential Angle Sensor2024

    • Author(s)
      Wu Jiucheng、Hong Yifang、Shin Dong Wook、Sato Ryo、Quan Lue、Matsukuma Hiraku、Gao Wei
    • Journal Title

      International Journal of Automation Technology

      Volume: 18 Issue: 1 Pages: 4-10

    • DOI

      10.20965/ijat.2024.p0004

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2024-01-05
    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Enhanced Data-Processing Algorithms for Dispersive Interferometry Using a Femtosecond Laser2024

    • Author(s)
      Liu Tao、Matsukuma Hiraku、Suzuki Amane、Sato Ryo、Gao Wei
    • Journal Title

      Sensors

      Volume: 24 Issue: 2 Pages: 370-370

    • DOI

      10.3390/s24020370

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Improved peak-to-peak method for cavity length measurement of a Fabry-Perot etalon using a mode-locked femtosecond laser2023

    • Author(s)
      Shin Dong Wook、Matsukuma Hiraku、Sato Ryo、Manske Eberhard、Gao Wei
    • Journal Title

      Optics Express

      Volume: 31 Issue: 16 Pages: 25797-25797

    • DOI

      10.1364/oe.493507

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Angle Measurement Based on Second Harmonic Generation Using Artificial Neural Network2023

    • Author(s)
      Li Kuangyi、Zhang Zhiyang、Lin Jiahui、Sato Ryo、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 6 Issue: 1 Pages: 1-15

    • DOI

      10.1007/s41871-023-00206-5

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Signal Processing and Artificial Intelligence for Dual-Detection Confocal Probes2023

    • Author(s)
      Sato Ryo、Li Xinghui、Fischer Andreas、Chen Liang-Chia、Chen Chong、Shimomura Rintaro、Gao Wei
    • Journal Title

      International Journal of Precision Engineering and Manufacturing

      Volume: 25 Issue: 1 Pages: 199-223

    • DOI

      10.1007/s12541-023-00842-3

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Improved Algorithms of Data Processing for Dispersive Interferometry Using a Femtosecond Laser2023

    • Author(s)
      Liu Tao、Wu Jiucheng、Suzuki Amane、Sato Ryo、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Sensors

      Volume: 23 Issue: 10 Pages: 4953-4953

    • DOI

      10.3390/s23104953

    • Related Report
      2023 Annual Research Report
  • [Journal Article] Confocal probe based on the second harmonic generation for measurement of linear and angular displacements2023

    • Author(s)
      Sato Ryo、Shimizu Yuki、Shimizu Hiroki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Optics Express

      Volume: 31 Issue: 7 Pages: 11982-11982

    • DOI

      10.1364/oe.486421

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Investigation of Angle Measurement Based on Direct Third Harmonic Generation in Centrosymmetric Crystals2023

    • Author(s)
      Li Kuangyi、Lin Jiahui、Zhang Zhiyang、Sato Ryo、Shimizu Hiroki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 13 Issue: 2 Pages: 996-996

    • DOI

      10.3390/app13020996

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Design and Testing of a Compact Optical Angle Sensor for Pitch Deviation Measurement of a Scale Grating with a Small Angle of Diffraction2022

    • Author(s)
      Quan Lue、Shimizu Yuki、Sato Ryo、Shin Dong Wook、Matsukuma Hiraku、Archenti Andreas、Gao Wei
    • Journal Title

      International Journal of Automation Technology

      Volume: 16 Issue: 5 Pages: 572-581

    • DOI

      10.20965/ijat.2022.p0572

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2022-09-05
    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Self-Calibration of a Large-Scale Variable-Line-Spacing Grating for an Absolute Optical Encoder by Differencing Spatially Shifted Phase Maps from a Fizeau Interferometer2022

    • Author(s)
      Xiong Xin、Yin Chenguang、Quan Lue、Sato Ryo、Matsukuma Hiraku、Shimizu Yuki、Tamiya Hideaki、Gao Wei
    • Journal Title

      Sensors

      Volume: 22 Issue: 23 Pages: 9348-9348

    • DOI

      10.3390/s22239348

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Reduction of Crosstalk Errors in a Surface Encoder Having a Long Z-Directional Measuring Range2022

    • Author(s)
      Hong Yifan、Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Shimizu Hiroki、Gao Wei
    • Journal Title

      Sensors

      Volume: 22 Issue: 23 Pages: 9563-9563

    • DOI

      10.3390/s22239563

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Fabry-P?rot angle sensor using a mode-locked femtosecond laser source2022

    • Author(s)
      Shin Dong Wook、Matsukuma Hiraku、Sato Ryo、Gao Wei
    • Journal Title

      Optics Express

      Volume: 30 Issue: 26 Pages: 46366-46366

    • DOI

      10.1364/oe.477435

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] A Second Harmonic Wave Angle Sensor with a Collimated Beam of Femtosecond Laser2022

    • Author(s)
      Astuti Wijayanti Dwi、Li Kuangyi、Sato Ryo、Matsukuma Hiraku、Shimizu Yuki、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 12 Issue: 10 Pages: 5211-5211

    • DOI

      10.3390/app12105211

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Influence of Surface Tilt Angle on a Chromatic Confocal Probe with a Femtosecond Laser2022

    • Author(s)
      Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 12 Issue: 9 Pages: 4736-4736

    • DOI

      10.3390/app12094736

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] A New Optical Configuration for the Surface Encoder with an Expanded Z-Directional Measuring Range2022

    • Author(s)
      Hong Yifan、Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Sensors

      Volume: 22 Issue: 8 Pages: 3010-3010

    • DOI

      10.3390/s22083010

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Theoretical Investigation for Angle Measurement Based on Femtosecond Maker Fringe2022

    • Author(s)
      Li Kuangyi、Astuti Wijayanti Dwi、Sato Ryo、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 12 Issue: 7 Pages: 3702-3702

    • DOI

      10.3390/app12073702

    • Related Report
      2022 Annual Research Report 2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source2021

    • Author(s)
      Matsukuma Hiraku、Department of Finemechanics, Tohoku University 6-6-01 Aramaki Aza Aoba, Aoba-ku, Sendai, Miyagi 980-8579, Japan、Sato Ryo、Shimizu Yuki、Gao Wei
    • Journal Title

      International Journal of Automation Technology

      Volume: 15 Issue: 4 Pages: 529-536

    • DOI

      10.20965/ijat.2021.p0529

    • NAID

      130008062461

    • ISSN
      1881-7629, 1883-8022
    • Year and Date
      2021-07-05
    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Self-calibration of a variable-line-spacing grating for an absolute optical encoder with a Fizeau interferometer2021

    • Author(s)
      Xiong Xin、Quan Lue、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Measurement Science and Technology

      Volume: 32 Issue: 6 Pages: 064005-064005

    • DOI

      10.1088/1361-6501/abe9de

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer2021

    • Author(s)
      Xiong Xin、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Sensors

      Volume: 21 Issue: 21 Pages: 7412-7412

    • DOI

      10.3390/s21217412

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] A Comparison of the Probes with a Cantilever Beam and a Double-Sided Beam in the Tool Edge Profiler for On-Machine Measurement of a Precision Cutting Tool2021

    • Author(s)
      Wen Bo、Sekine Sho、Osawa Shinichi、Shimizu Yuki、Matsukuma Hiraku、Archenti Andreas、Gao Wei
    • Journal Title

      Machines

      Volume: 9 Issue: 11 Pages: 271-271

    • DOI

      10.3390/machines9110271

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation2021

    • Author(s)
      Shimizu Yuki、Quan Lue、Shin Dong Wook、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Measurement: Sensors

      Volume: 18 Pages: 100135-100135

    • DOI

      10.1016/j.measen.2021.100135

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An application of the edge reversal method for accurate reconstruction of the three-dimensional profile of a single-point diamond tool obtained by an atomic force microscope2021

    • Author(s)
      Zhang Kai、Shimizu Yuki、Matsukuma Hiraku、Cai Yindi、Gao Wei
    • Journal Title

      The International Journal of Advanced Manufacturing Technology

      Volume: 117 Issue: 9-10 Pages: 2883-2893

    • DOI

      10.1007/s00170-021-07879-6

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] An Optical Frequency Domain Angle Measurement Method Based on Second Harmonic Generation2021

    • Author(s)
      Dwi Astuti Wijayanti、Matsukuma Hiraku、Nakao Masaru、Li Kuangyi、Shimizu Yuki、Gao Wei
    • Journal Title

      Sensors

      Volume: 21 Issue: 2 Pages: 670-670

    • DOI

      10.3390/s21020670

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Laser Interference Lithography for Fabrication of Planar Scale Gratings for Optical Metrology2021

    • Author(s)
      Shimizu Yuki
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 4 Issue: 1 Pages: 3-27

    • DOI

      10.1007/s41871-020-00083-2

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An absolute surface encoder with a planar scale grating of variable periods2021

    • Author(s)
      Shimizu Yuki、Ishizuka Ryo、Mano Kazuki、Kanda Yuri、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Precision Engineering

      Volume: 67 Pages: 36-47

    • DOI

      10.1016/j.precisioneng.2020.09.007

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Scalability of precision design principles for machines and instruments2021

    • Author(s)
      Yague-Fabra Jose A.、Gao Wei、Archenti Andreas、Morse Edward、Donmez Alkan
    • Journal Title

      CIRP Annals

      Volume: 70 Issue: 2 Pages: 659-680

    • DOI

      10.1016/j.cirp.2021.05.004

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] A new method for evaluation of the pitch deviation of a linear scale grating by an optical angle sensor2021

    • Author(s)
      Quan Lue、Shimizu Yuki、Xiong Xin、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Precision Engineering

      Volume: 67 Pages: 1-13

    • DOI

      10.1016/j.precisioneng.2020.09.008

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Measurement of the apex angle of a small prism by an oblique-incidence mode-locked femtosecond laser autocollimator2021

    • Author(s)
      Shimizu Yuki、Kanda Yuri、Ma Xu、Ikeda Kakeru、Matsukuma Hiraku、Nagaike Yasunari、Hojo Masaki、Tomita Keita、Gao Wei
    • Journal Title

      Precision Engineering

      Volume: 67 Pages: 339-349

    • DOI

      10.1016/j.precisioneng.2020.10.013

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Closed-Loop Control of an XYZ Micro-Stage and Designing of Mechanical Structure for Reduction in Motion Errors2021

    • Author(s)
      Matsukuma Hiraku、Adachi Keisuke、Sugawara Takuma、Shimizu Yuki、Gao Wei、Niwa Eiji、Sasaki Yoshihiro
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 4 Issue: 1 Pages: 53-66

    • DOI

      10.1007/s41871-020-00091-2

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A technique for measurement of a prism apex angle by optical angle sensors with a reference artefact2021

    • Author(s)
      Shimizu Yuki、Ma Xu、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Measurement Science and Technology

      Volume: 32 Issue: 5 Pages: 054007-054007

    • DOI

      10.1088/1361-6501/abd8a6

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An insight on optical metrology in manufacturing2020

    • Author(s)
      Shimizu Yuki、Chen Liang Chia、Kim Dae Wook、Chen Xiuguo、Li Xinghui、Matsukuma Hiraku
    • Journal Title

      Measurement Science and Technology

      Volume: 32 Pages: 042003-042003

    • DOI

      10.1088/1361-6501/abc578

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] High-Precision Cutting Edge Radius Measurement of Single Point Diamond Tools Using an Atomic Force Microscope and a Reverse Cutting Edge Artifact2020

    • Author(s)
      Zhang Kai、Cai Yindi、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 10 Issue: 14 Pages: 4799-4799

    • DOI

      10.3390/app10144799

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Measurement Uncertainty Analysis of a Stitching Linear-Scan Method for the Evaluation of Roundness of Small Cylinders2020

    • Author(s)
      Li Qiaolin、Shimizu Yuki、Saito Toshiki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 10 Issue: 14 Pages: 4750-4750

    • DOI

      10.3390/app10144750

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] On-machine angle measurement of a precision V-groove on a ceramic workpiece2020

    • Author(s)
      Shimizu Yuki、Gao Wei、Matsukuma Hiraku、Szipka Karoly、Archenti Andreas
    • Journal Title

      CIRP Annals

      Volume: 69 Issue: 1 Pages: 469-472

    • DOI

      10.1016/j.cirp.2020.03.011

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] An Off-Axis Differential Method for Improvement of a Femtosecond Laser Differential Chromatic Confocal Probe2020

    • Author(s)
      Chen Chong、Shimizu Yuki、Sato Ryo、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 10 Issue: 20 Pages: 7235-7235

    • DOI

      10.3390/app10207235

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Design and Construction of a Low-Force Stylus Probe for On-machine Tool Cutting Edge Measurement2020

    • Author(s)
      Matsukuma Hiraku、Wen Bo、Osawa Shinichi、Sekine Sho、Shimizu Yuki、Gao Wei
    • Journal Title

      Nanomanufacturing and Metrology

      Volume: 3 Issue: 4 Pages: 282-291

    • DOI

      10.1007/s41871-020-00084-1

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Optical Angle Sensor Technology Based on the Optical Frequency Comb Laser2020

    • Author(s)
      Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Applied Sciences

      Volume: 10 Issue: 11 Pages: 4047-4047

    • DOI

      10.3390/app10114047

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe2020

    • Author(s)
      Sato Ryo、Shimizu Yuki、Matsukuma Hiraku、Gao Wei
    • Journal Title

      Proceedings of the JSME 2020 Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)

      Volume: -

    • DOI

      10.1115/lemp2020-8626

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Presentation] Investigation of angle measurement based on confocal probe employing second harmonic generation2023

    • Author(s)
      Ryo Sato, Yuki Shimiz, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 15th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The application of neural network for angle measurement based on second harmonic generation2023

    • Author(s)
      Zhiyang Zhang, Kuangyi Li, Jiahui Lin, Ryo Sato, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 15th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Absolute distance measurement based on Radio-frequency Interferometer using the method of Excess Fraction2023

    • Author(s)
      Tao Liu, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 15th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A Surface Encoder with an Improved Z-range and Reduced Crosstalk Errors2023

    • Author(s)
      Yifan Hong, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Organizer
      15th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Theoretical analysis on gauge block length measurement by a modulated synthetic wavelength method2023

    • Author(s)
      Tao Liu, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao
    • Organizer
      15th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2023)
    • Related Report
      2023 Annual Research Report
  • [Presentation] Holographic lithography of scale gratings for ultra-precision positioning2023

    • Author(s)
      Wei Gao
    • Organizer
      The Third International Conference on Free-form Optics and Application technology
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] On-machine measurement technologies for ultraprecision machining2023

    • Author(s)
      Wei Gao
    • Organizer
      The CHINA-JAPAN International Conference on Ultra-Precision Machining Process (CJUMP2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Multi-axis measurement by using diffraction gratings2023

    • Author(s)
      Wei Gao
    • Organizer
      The 2nd International Conference on Optical Imaging and Measurement (ICOIM 2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Measurement Technologies for ACSM2023

    • Author(s)
      Wei Gao
    • Organizer
      The 20th International Manufacturing Conference in China (IMCC 2023 )
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Fast self-calibration of diffraction gratings2022

    • Author(s)
      Wei Gao
    • Organizer
      International Scientific Symposium on the occasion of World Interferometry Day 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Micro/nano-metrology for nanomanufacturing2022

    • Author(s)
      Wei Gao
    • Organizer
      The International Conference IEEE 3M-NANO 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Laser interference lithography for nanomanufacturing of scale gratings2022

    • Author(s)
      Wei gao
    • Organizer
      The 8th International Conference on Nanomanufacturing (nanoMan2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Theoretical analysis on gauge block length measurement by a modulated synthetic wavelength method2022

    • Author(s)
      Tao Liu, Jiucheng Wu, Ryo Sato, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 8th International Conference on Nanomanufacturing (nanoMan2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Theoretical investigation of angle measurement based on third-harmonic generation (THG) with a femtosecond laser2022

    • Author(s)
      Kuangyi Li, Jiahui Lin, Wijayanti Dwi Astuti, Ryo Sato, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 8th International Conference on Nanomanufacturing (nanoMan2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design and testing of a Fizeau-type two-axis surface encoder2022

    • Author(s)
      Yifan Hong, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Eberhard Manske, Wei Gao
    • Organizer
      The 8th International Conference on Nanomanufacturing (nanoMan2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a wide-range differential angle sensor for calibration of image-scanning linear scale2022

    • Author(s)
      Jiucheng Wu, Lue Quan, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      The 8th International Conference on Nanomanufacturing (nanoMan2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Feasibility study of precise angle measurements with a dual-differentical confocal probe2022

    • Author(s)
      Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao, Andreas Fischer
    • Organizer
      The 8th International Conference on Nanomanufacturing (nanoMan2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Self-calibration for variable line spacing gratings by a lateral distance with Fizeau interferometer2022

    • Author(s)
      Chenguang Yin, Wei Gao, Xin Xiong, Ryo Sato, Hiraku Matsukuma
    • Organizer
      The 8th International Conference on Nanomanufacturing (nanoMan2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Uncertainty analysis of ultra-precision grating pitch calibration by using optical frequency comb2022

    • Author(s)
      Dong Wook Shin, Ryo Sato, Hiraku Matsukuma, Yuki shimizu, Wei Gao
    • Organizer
      The 8th International Conference on Nanomanufacturing (nanoMan2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 第二次高調波共焦点プローブに関する研究 ー角度計測に関する検討ー2022

    • Author(s)
      佐藤 遼,清水 裕樹,清水 浩貴,松隈 啓,高 偉
    • Organizer
      2023年度精密工学会春季大会学術講演会論文集
    • Related Report
      2022 Annual Research Report
  • [Presentation] フェムト秒レーザを用いたキャビティ間隔の検出方法2022

    • Author(s)
      辛東昱,松隈啓,高偉
    • Organizer
      2022年度精密工学会東北支部学術講演会講演論文集
    • Related Report
      2022 Annual Research Report
  • [Presentation] Simulation analysis on gauge block length calibration by the method of Excess Fraction2022

    • Author(s)
      LiuTao,Jiucheng Wu,Ryo Sato,Hiraku Matsukuma,Wei Gao
    • Organizer
      2022年度精密工学会東北支部学術講演会講演論文集
    • Related Report
      2022 Annual Research Report
  • [Presentation] フィゾー型2軸サーフェスエンコーダに関する研究2022

    • Author(s)
      洪 一帆,清水 裕樹,松隈 啓,松岡 良太,高 偉
    • Organizer
      2022年度精密工学会東北支部学術講演会講演論文集
    • Related Report
      2022 Annual Research Report
  • [Presentation] An angle sensor based on second harmonic generation with a collimated femtosecond laser beam2022

    • Author(s)
      Jiahui Lin,Kuangyi Li,Ryo Sato,Hiraku Matsukuma,Wei Gao
    • Organizer
      2022年度精密工学会東北支部学術講演会講演論文集
    • Related Report
      2022 Annual Research Report
  • [Presentation] モード同期フェムト秒レーザ共焦点プローブに関する研究 -測定対象物チルト角が極小点追跡法へ与える影響の調査-2022

    • Author(s)
      佐藤遼,松隈啓,高偉
    • Organizer
      2022年度精密工学会東北支部学術講演会講演論文集
    • Related Report
      2022 Annual Research Report
  • [Presentation] The theoretical investigation of angle measurement based on the third harmonic generation(THG) using focused beam2022

    • Author(s)
      Li Kuangyi,Lin Jiahui,Ryo Sato,Hiraku Matsukuma,Wei Gao
    • Organizer
      2022年度精密工学会東北支部学術講演会講演論文集
    • Related Report
      2022 Annual Research Report
  • [Presentation] Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation2021

    • Author(s)
      Yuki Shimizu, Lue Quan, Dong Wook Shin, Hiraku Matsukuma, Wei Gao
    • Organizer
      XXIII IMEKO World Congress
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of a variable-line-spacing grating based on the non-othogonal Lloyd's interferometer2021

    • Author(s)
      Shusaku Endo, Kai Zhang, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Measurement of the angle of a small prism by a mode-locked femtosecond laser autocollimator2021

    • Author(s)
      Kakeru Ikeda, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] An absolute surface encoder with a femtosecond laser and a planar scale grating of variable periods2021

    • Author(s)
      Satoru Maehara, Ryo Sato, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of a probe type profiler for measurement of a micro cutting edge2021

    • Author(s)
      Wen Bo, Hiraku Matsukuma, Yuki Shimizu, Andreas Archenti, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2021

    • Author(s)
      Qiaolin Li, Hiraku Matukuma, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Angular Measurement Method Utilizing Second Harmonic Generation2021

    • Author(s)
      Wijayanti Dwi Astuti, Hiraku Matsukuma, Li Kuangyi, Yuki Shimizu, Wei Gao
    • Organizer
      The 7th International Conference on Nanomanufacturing (nanoMan2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Evaluation of pitch deviation of a scale linear grating based on the laser autocollimation2021

    • Author(s)
      Lue Quan, Yuki Shimizu, Hiraku Matsukuma, Wei Gao, Eberhard Manske
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 3D profile measurement of a diamond tool without the effect of AFM probe tip radius2021

    • Author(s)
      Kai ZHANG, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of a two-dimensional diffraction grating with reduction of the effect of thermal expansion2021

    • Author(s)
      Hiraku Matsukuma, Masanori Matsunaga, Yuki Shimizu, Wei Gao
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Investigation of Measurement Range of a Differential Chromatic Confocal Probe employing a Mode-Locked Femtosecond Laser2021

    • Author(s)
      Ryo SATO, Hiraku MATSUKUMA, Yuki SHIMIZU, Wei GAO, Andreas FISCHER
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design of a small-sized surface encoder with short-period planar gratings for stage motion measurement2021

    • Author(s)
      Yifan Hong, Yuki Shimizu, Hiraku Matsukuma, Ryota Matsuoka, Wei Gao, Eberhard Manske
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Calibration of grating periods based on laser diffraction method using optical frequency comb2021

    • Author(s)
      Dong Wook Shin, Lue Quan, Hiraku Matsukuma, Yuki Shimizu, Wei Gao and Eberhard Manske
    • Organizer
      The 10th International Conference on Leading Edge Manufacturing in 21st Century(LEM21)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] フェムト秒レーザを用いた絶対位置計測に関する研究2021

    • Author(s)
      前原 智,佐藤 遼,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2021年度精密工学会東北支部学術講演会講演論文集(A03) 2021/11/6
    • Related Report
      2021 Annual Research Report
  • [Presentation] マイクロ光学素子の角度計測に関する研究2021

    • Author(s)
      池田 翔,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2021年度精密工学会東北支部学術講演会講演論文集(A05) 2021/11/6
    • Related Report
      2021 Annual Research Report
  • [Presentation] 非直交型ロイドミラー干渉計によるVLS格子の製作に関する研究2021

    • Author(s)
      遠藤 秀作,村上 裕記,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2021年度精密工学会東北支部学術講演会講演論文集(A06) 2021/11/6
    • Related Report
      2021 Annual Research Report
  • [Presentation] モード同期フェムト秒レーザ共焦点プローブに関する研究-極小点追跡法を用いた合焦波長検出に関する検討-2021

    • Author(s)
      佐藤 遼,松隈 啓,清水 裕樹,高 偉
    • Organizer
      2021年度精密工学会秋季大会学術講演会講演論文集(講演番号 H31) 2021/9/21-23
    • Related Report
      2021 Annual Research Report
  • [Presentation] 短ピッチ格子を用いた平面ステージ計測用小型サーフェスエンコーダの設計2021

    • Author(s)
      洪 一帆,清水 裕樹,松隈 啓,松岡 良太,高 偉
    • Organizer
      2021年度砥粒加工学会学術講演会論文集(C14) 2021/9/1
    • Related Report
      2021 Annual Research Report
  • [Presentation] モード同期フェムト秒レーザを利用した回折格子の校正方法2021

    • Author(s)
      Shin Dong Wook,Quan Lue,松隈 啓,清水 裕樹,高 偉,Manske Eberhard
    • Organizer
      2021年度砥粒加工学会学術講演会論文集 2021/9/1
    • Related Report
      2021 Annual Research Report
  • [Presentation] モード同期フェムト秒レーザを用いた「つながる」高精度角度計測2021

    • Author(s)
      清水 裕樹
    • Organizer
      日本機械学会 IIP2021 情報・知能・精密機器部門(IIP部門)講演会 若手研究者招待講演
    • Related Report
      2021 Annual Research Report
    • Invited
  • [Presentation] Measurement technologies for future smart manufacturing2021

    • Author(s)
      Wei Gao
    • Organizer
      International Conference on Future Technologies
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Scalability of precision design principles for machines and instruments2021

    • Author(s)
      Yague-Fabra Jose A.、Gao Wei、Archenti Andreas、Morse Edward、Donmez Alkan
    • Organizer
      2021 CIRP General Assembly
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] On-machine angle measurement of a precision V-groove on a ceramic workpiece2020

    • Author(s)
      Yuki Shimizu, Wei Gao, Hiraku Matsukuma, Karoly Szipka, Andreas Archenti
    • Organizer
      CIRP Video paper sessions 2020
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe2020

    • Author(s)
      Ryo Sato, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
    • Organizer
      The International Conference on Leading Edge Manufacturing/Materials and Processing (LEMP2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of an optical angle sensor unit for the evaluation of pitch deviations2020

    • Author(s)
      権略,松隈啓,清水裕樹,高偉
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Design of a small-sized surface encoder for stage motion measurement2020

    • Author(s)
      洪一帆, 清水裕樹, 松隈啓, 松岡良太, 高偉
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Three-dimensional profile measurement of a single point diamond tool without the influence of the tip radius of an AFM probe2020

    • Author(s)
      Kai Zhang, Yindi Cai, Hiraku Matsukuma, Yuki Shimizu, Wei Gao
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] ロイドミラー干渉計による微細格子製作に関する研究2020

    • Author(s)
      村上裕記, 張凱, 松隈啓, 清水裕樹, 高偉
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Uncertainty analysis of roundness measurement of a small cylinder based on the stitching linear-scan method2020

    • Author(s)
      李橋林, 齋藤俊樹, 町田裕貴, 松隈啓, 清水裕樹, 高偉
    • Organizer
      2020年度精密工学会東北支部学術講演会
    • Related Report
      2020 Annual Research Report
  • [Book] Unlicensed Published by De Gruyter 2022 Optical Metrology for Precision Engineering2021

    • Author(s)
      Wei Gao and Yuki Shimizu
    • Total Pages
      644
    • Publisher
      Walter de Gruyter GmbH 2022
    • ISBN
      9783110541090
    • Related Report
      2021 Annual Research Report
  • [Book] Surface Metrology for Micro- and Nanofabrication2020

    • Author(s)
      Wei Gao
    • Total Pages
      448
    • Publisher
      Elsevier
    • ISBN
      9780128178508
    • Related Report
      2020 Annual Research Report
  • [Remarks] 東北大学 大学院工学研究科 ファインメカニクス専攻 高・清水・松隈研究室

    • URL

      http://web.tohoku.ac.jp/nanometrology/index.html

    • Related Report
      2020 Annual Research Report
  • [Patent(Industrial Property Rights)] 特許出願2021

    • Inventor(s)
      清水裕樹,高偉,松隈啓,洪一帆
    • Industrial Property Rights Holder
      清水裕樹,高偉,松隈啓,洪一帆
    • Industrial Property Rights Type
      特許
    • Filing Date
      2021
    • Related Report
      2021 Annual Research Report

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Published: 2020-04-28   Modified: 2025-01-30  

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