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Creating science of vacuum-ultraviolet optical processes in semiconductors

Research Project

Project/Area Number 20H00246
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Review Section Medium-sized Section 21:Electrical and electronic engineering and related fields
Research InstitutionKyoto University

Principal Investigator

Fujita Shizuo  京都大学, 工学研究科, 名誉教授 (20135536)

Co-Investigator(Kenkyū-buntansha) 尾沼 猛儀  工学院大学, 先進工学部, 教授 (10375420)
太田 優一  地方独立行政法人東京都立産業技術研究センター, 研究開発本部物理応用技術部電気技術グループ, 副主任研究員 (50707099)
Project Period (FY) 2020-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥36,400,000 (Direct Cost: ¥28,000,000、Indirect Cost: ¥8,400,000)
Fiscal Year 2022: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Fiscal Year 2021: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2020: ¥21,840,000 (Direct Cost: ¥16,800,000、Indirect Cost: ¥5,040,000)
Keywords超ワイドギャップ半導体 / 酸化物半導体 / 真空紫外光 / 光物性 / 量子構造
Outline of Research at the Start

白色発光ダイオード(LED)が蛍光灯に置き換わりつつあるように、半導体を用いる固体光源は小型で高効率であるという特徴を持ちます。ところが、現在のところ波長200nm以下の紫外光(真空紫外光)の光源としては、水銀や希ガスの放電を用いるランプやレーザが用いられています。しかし、ここには、水銀や希ガスなど危険・希少な元素が用いられており、とくに水銀は利用の撤廃が求められています。本研究は、真空紫外光の発光機能を持つ新しい半導体(MgZnOおよび(Al,Ga)2O3)を主たる研究対象として、真空紫外半導体光物性の特徴、物理、材料開発を明確にして、その学理を創成することを目的として実施します。

Outline of Final Research Achievements

We investigated crystal growth and detailed optical processes of high-quality MgZnO semiconductors, which possesses optical functions in the vacuum ultraviolet region. We have constructed a spectroscopy system for observing optical properties up to 115-nm in wavelength, with which we obtained cathodoluminescence at <200 nm. Excitonic transition contributed greatly to the emission mechanism, suggesting excellent physical properties as a light-emitting material, while iso-electronic traps dominated the emission processes, whose formation and association should be controlled. The MgZnO/MgO heterointerface was classified both from experiment and theory as type I-type band alignment, suitable for quantum structure. The research results, together with knowledges on conductivity control etc., contributes to establishment of science of vacuum ultraviolet semiconductors. Evolution of application fields such as vacuum ultraviolet sensors has also been demonstrated.

Academic Significance and Societal Importance of the Research Achievements

波長200 nm以下の真空紫外光を含む短波長の光は、殺菌、加工、光化学等の応用に不可欠である一方で、光源には水銀や希ガスの放電が一般に用いられている。固体による発光の実現は、脱水銀や希少資源の保護と、任意の波長での光源開発につながり、また真空紫外線センサは新たな環境観測技術を提供し、ここに本研究成果の社会的意義がある。MgZnOは真空紫外域の光機能を持つ半導体であり、発光機構、バンドアライメント、ドーピング等その光物性と応用に関する基礎的な知見を多く得て学理の創成に寄与したことに学術的意義がある。今後の真空・深紫外光の開拓に向けた貢献が期待されるところが本研究の価値である。

Report

(5 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Annual Research Report
  • 2020 Comments on the Screening Results   Annual Research Report
  • Research Products

    (49 results)

All 2023 2022 2021 2020

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (46 results) (of which Int'l Joint Research: 16 results,  Invited: 6 results)

  • [Journal Article] Natural band alignment of MgO_{1-x}S_{x} alloys2023

    • Author(s)
      Yuichi Ota, Kentaro Kaneko, Takeyoshi Onuma, Shizuo Fujita
    • Journal Title

      AIP Advances

      Volume: 13 Issue: 5

    • DOI

      10.1063/5.0141199

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Identification of free and bound exciton emission of MgO single crystal in vacuum ultraviolet spectral range2021

    • Author(s)
      Takeyoshi Onuma, Wataru Kosaka, Kanta Kudo, Yuichi Ota, Tomohiro Yamaguchi, Kentaro Kaneko, Shizuo Fujita, Tohru Honda
    • Journal Title

      Applied Physics Letters

      Volume: 119 Issue: 13

    • DOI

      10.1063/5.0057718

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Vacuum ultraviolet emission properties of rocksalt‐structured MgZnO microcrystals prepared on quartz glass substrates2021

    • Author(s)
      Wataru Kosaka, Shoma Hoshi, Kenta Kudo, Kentaro Kaneko, Tomohiro Yamaguchi, Tohru Honda, Shizuo Fujita, Takeyoshi Onuma
    • Journal Title

      Physica Status Solidi (b)

      Volume: 259 Issue: 2 Pages: 2100354-2100354

    • DOI

      10.1002/pssb.202100354

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed
  • [Presentation] Advancement and prospects of ultra-wide-bandgap oxide semiconductors2023

    • Author(s)
      Shizuo Fujita, Kentaro Kaneko, Katsuhisa Tanaka
    • Organizer
      48th Conference on Physics and Chemistry of Surfaces and Interfaces
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 岩塩構造酸化マグネシウム亜鉛薄膜の真空紫外領域での光電流スペクトル(II)2023

    • Author(s)
      日下皓也, 高坂亘, 小川広太郎, 金子健太郎, 山口智広, 本田徹, 藤田静雄, 尾沼猛儀
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] ミストCVD法によるIII族ドープ岩塩構造MgZnO薄膜成長2023

    • Author(s)
      松田真樹, 小川広太郎, 太田優一, 山口智広, 金子健太郎, 藤田静雄, 本田徹, 尾沼猛儀
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 超ワイドバンドギャップ酸化物混晶のバリガ性能指数評価2023

    • Author(s)
      太田優一, 金子健太郎, 尾沼猛儀, 藤田静雄
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Sub-200 nm far-UV emission characteristics in rocksalt-structured MgZnO epitaxial films2022

    • Author(s)
      Takeyoshi Onuma, Wataru Kosaka, Hiroya Kusaka, Kotaro Ogawa, Yuichi Ota, Kentaro Kaneko, Tomohiro Yamaguchi, Shizuo Fujita, Tohru Honda
    • Organizer
      14th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials/ 15th International Conference on Plasma-Nano Technology & Science
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Potentials of future ultra-wide bandgap oxide semiconductors2022

    • Author(s)
      Shizuo Fujita, Kentaro Kaneko, Takeyoshi Onuma
    • Organizer
      5th International Workshop on Ultraviolet Materials and Devices
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Vacuum UV emission property of Zn-doped MgO films2022

    • Author(s)
      Wataru Kosaka, Kotaro Ogawa, Hiroya Kusaka, Kentaro Kaneko, Tomohiro Yamaguchi, Shizuo Fujita, Tohru Honda, Takeyoshi Onuma
    • Organizer
      International Conference on Light-Emitting Devices and Their Industrial Applications
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analyses of band alignment in rocksalt-structured MgZnO/MgO interface2022

    • Author(s)
      Masaki Matsuda, Kotaro Ogawa, Yuichi Ota, Tomohiro Yamaguchi, Kentaro Kaneko, Shizuo Fujita, Tohru Honda, Takeyoshi Onuma
    • Organizer
      5th International Workshop on Ultraviolet Materials and Devices
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Vacuum UV emission property of Zn-doped MgO films grown by mist chemical vapor deposition method2022

    • Author(s)
      Wataru Kosaka, Kotaro Ogawa, Hiroya Kusaka, Kentaro Kaneko, Tomohiro Yamaguchi, Tohru Honda, Shizuo Fujita, Takeyoshi Onuma
    • Organizer
      Compound Semiconductor Week
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Realization of near-band-edge cathodoluminescence in 190 nm wavelength range by rocksalt-structured MgZnO epitaxial films2022

    • Author(s)
      Takeyoshi Onuma, Kotaro Ogawa, Wataru Kosaka, Hiroya Kusaka, Yuichi Ota, Kentaro Kaneko, Tomohiro Yamaguchi, Shizuo Fujita, Tohru Honda
    • Organizer
      10th Asia-Pacific Workshop on Widegap Semiconductors
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Roles of In doped in MgZnO films grown by mist CVD method2022

    • Author(s)
      Masaki Matsuda, Kotaro Ogawa, Yuichi Ota, Tomohiro Yamaguchi, Kentaro Kaneko, Shizuo Fujita, Tohru Honda, Takeyoshi Onuma
    • Organizer
      10th Asia-Pacific Workshop on Widegap Semiconductors
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Photocurrent spectra of rocksalt-structured MgZnO films in vacuum UV spectral range2022

    • Author(s)
      Hiroya Kusaka, Wataru Kosaka, Kotaro Ogawa, Kentaro Kaneko, Tomohiro Yamaguchi, Tohru Honda, Shizuo Fujita, Takeyoshi Onuma
    • Organizer
      10th Asia-Pacific Workshop on Widegap Semiconductors
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Roles of In doping In rocksalt-structured MgZnO films grown by mist CVD method2022

    • Author(s)
      Masaki Matsuda, Kotaro Ogawa, Yuichi Ota, Tomohiro Yamaguchi, Kentaro Kaneko, Ssjizuo Fujita, Tohru Honda, Takeyoshi Onuma
    • Organizer
      21th International Symposium on Advanced Technology
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Analyses of Band Alignment in rocksalt-structured MgZnO/MgO interface grown by mist CVD2022

    • Author(s)
      Masaki Matsuda, Kotaro Ogawa, Yuichi Ota, Tomohiro Yamaguchi, Kentaro Kaneko, Shizuo Fujita, Tohru Honda, Takeyoshi Onuma
    • Organizer
      41st Electronic Materials Symposium
    • Related Report
      2022 Annual Research Report
  • [Presentation] Schottky barrier height for Ga2O3 polymorphs: A simple estimation2022

    • Author(s)
      Yuichi Ota, Kentaro Kaneko, Takeyoshi Onuma, Shizuo Fujita
    • Organizer
      41st Electronic Materials Symposium
    • Related Report
      2022 Annual Research Report
  • [Presentation] 岩塩構造MgZnO の結晶成長とサブ200 nm の発光特性評価2022

    • Author(s)
      尾沼猛儀, 小川広太郎. 太田優一, 金子健太郎, 山口智広, 藤田静雄, 本田徹
    • Organizer
      第387回蛍光体同学会講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 岩塩構造酸化マグネシウム亜鉛薄膜の真空紫外領域での光電流スペクトル2022

    • Author(s)
      日下皓也, 高坂亘, 小川広太郎, 金子健太郎, 山口智広, 本田徹, 藤田静雄, 尾沼猛儀
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] InドープMgO薄膜の発光特性2022

    • Author(s)
      高坂亘, 小川広太郎, 松田真樹, 日下皓也, 太田優一, 金子健太郎, 山口智広, 本田徹, 藤田静雄, 尾沼猛儀
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] 岩塩型MgZnO混晶のドーピング傾向の予測2022

    • Author(s)
      太田優一, 金子健太郎, 尾沼猛儀, 藤田静雄
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] MgO薄膜へのInドーピングが発光特性に与える影響2022

    • Author(s)
      高坂亘, 小川広太郎, 松田真樹, 日下皓也, 太田優一, 山口智広, 金子健太郎, 本田徹, 藤田静雄, 尾沼猛儀
    • Organizer
      第5回結晶工学ⅹISYSE 合同研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] ミストCVD法により成膜したInドープMgO薄膜の発光特性2022

    • Author(s)
      高坂亘, 小川広太郎, 松田真樹, 日下皓也, 太田優一, 金子健太郎, 藤田静雄, 山口智広, 本田徹, 尾沼猛儀
    • Organizer
      第14回大学コンソーシアム八王子
    • Related Report
      2022 Annual Research Report
  • [Presentation] InドープMgZnO薄膜のミストCVD成長2022

    • Author(s)
      松田真樹, 小川広太郎, 太田優一, 山口智広, 金子健太郎, 藤田静雄, 本田徹, 尾沼猛儀
    • Organizer
      第14回大学コンソーシアム八王子
    • Related Report
      2022 Annual Research Report
  • [Presentation] 岩塩構造酸化マグネシウム亜鉛MSM型真空紫外センサーの受光感度の温度依存性2022

    • Author(s)
      日下皓也, 高坂亘, 小川広太郎, 金子健太郎, 藤田静雄, 山口智広, 本田徹, 尾沼猛儀
    • Organizer
      第14回大学コンソーシアム八王子
    • Related Report
      2022 Annual Research Report
  • [Presentation] Far-UV emission around 200 nm in rocksalt-structured MgZnO2022

    • Author(s)
      Takeyoshi Onuma, Wataru Kosaka, Shoma Hoshi, Kanta Kudo, Kyohei Ishii, Mizuki Ono, Yuichi Ota, Izumi Serizawa, Kentaro Kaneko, Tomohiro Yamaguchi, Shizuo Fujita, Tohru Honda
    • Organizer
      3rd International Workshop on Materials Science and Advanced Electronics Created by Singularity/2nd International Symposium on Wide Gap Semiconductor Growth, Process and Device Simulation
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] スピネル構造MgX2O4 (X = Al,Ga,In)混晶のバンドエンジニアリング2022

    • Author(s)
      太田優一, 金子健太郎, 尾沼猛儀. 藤田静雄
    • Organizer
      2022年第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 岩塩構造MgZnO/MgO界面における バンドアライメント解析2022

    • Author(s)
      松田真樹, 小川広太郎, 太田優一, 山口智広, 金子健太郎, 藤田静雄, 本田徹, 尾沼猛儀
    • Organizer
      2022年第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] ミストCVD成長した岩塩構造MgZnO薄膜の室温真空紫外線発光2022

    • Author(s)
      小川広太郎, 高坂亘, 日下皓也, 芹澤和泉, 金子健太郎, 山口智広, 藤田静雄, 本田徹, 尾沼猛儀
    • Organizer
      2022年第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 時間分解PL測定による岩塩構造MgZnOの発光特性の評価2022

    • Author(s)
      高坂亘, 小川広太, 日下皓也, 金子健太郎, 山口智広, 嶋紘平, 藤田静雄, 本田徹, 秩父重英, 尾沼猛儀
    • Organizer
      2022年第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Deep UV optical properties of high-Mg-content rocksalt-structured MgZnO2021

    • Author(s)
      Takeyoshi Onuma, Kanta Kudo, Kyohei Ishii, Mizuki Ono, Yuichi Ota, Kentaro Kaneko, Tomohiro Yamaguchi, Shizuo Fujita, Tohru Honda
    • Organizer
      Materials Research Society, 2021 Spring Meeting
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] VUV emission properties of rocksalt-structured MgZnO microcrystals prepared on quartz glass substrates2021

    • Author(s)
      Wataru Kosaka, Shoma Hoshi, Kanta Kudo, Yusei Igari, Kentaro Kaneko, Tomohiro Yamaguchi, Tohru Honda, Shizuo Fujita, Takeyoshi Onuma
    • Organizer
      Compound Semiconductor Week 2021
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Emission properties of rocksalt-structured MgZnO microcrystals for VUV light emitter2021

    • Author(s)
      Wataru Kosaka, Shoma Hoshi, Kanta Kudo, Kentaro Kaneko, Tomohiro Yamaguchi, Tohru Honda, Shizuo Fujita, Takeyoshi Onuma
    • Organizer
      20th International Symposium on Advanced Technology
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MgO単結晶の真空紫外励起子スペクトル2021

    • Author(s)
      尾沼猛儀, 高坂亘, 工藤幹太, 太田優一, 山口智広, 金子健太郎, 藤田静雄, 本田徹
    • Organizer
      2021年第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] 195nmで発光する岩塩構造MgZnO薄膜のミストCVD成長2021

    • Author(s)
      小川広太郎, 高坂亘, 工藤幹太, 芹澤和泉, 金子健太郎, 山口智広, 藤田静雄, 本田徹, 尾沼猛儀
    • Organizer
      2021年第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] ZnドープMgO薄膜の発光特性2021

    • Author(s)
      高坂亘, 小川広太郎, 金子健太郎, 山口智広, 藤田静雄, 本田徹, 尾沼猛儀
    • Organizer
      2021年第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] MgSxO1-x混晶のバンドアライメント2021

    • Author(s)
      太田優一, 金子健太郎, 尾沼猛儀, 藤田静雄
    • Organizer
      2021年第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Valence band modulation in MgO1-xYx (Y = S, Se) alloys2021

    • Author(s)
      Yuichi Ota, Kentaro Kaneko, Takeyoshi Onuma, Shizuo Fujita
    • Organizer
      第40回電子材料シンポジウム
    • Related Report
      2021 Annual Research Report
  • [Presentation] ミストCVD法により成長したRS-MgZnOにおける深紫外PL寿命の評価2021

    • Author(s)
      高坂亘, 工藤幹太, 石井恭平, 小野瑞生, 金子健太郎, 山口智広, 嶋紘平, 小島一信, 藤田静雄, 本田徹, 秩父重英, 尾沼猛儀
    • Organizer
      第21回東北大学多元物質科学研究所研究発表会
    • Related Report
      2021 Annual Research Report
  • [Presentation] Deep UV optical properties of high-Mg-content rocksalt-structured MgZnO2021

    • Author(s)
      T. Onuma, K. Kudo, K. Ishii, M. Ono, Y. Ota, K. Kaneko, T. Yamaguchi, S. Fujita, T. Honda
    • Organizer
      Materials Research Society, 2021 Spring Meeting
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 殺菌応用を目指した真空・深紫外線半導体発光材料の開発2021

    • Author(s)
      尾沼猛儀, 工藤幹太, 小野瑞生, 橘直純, 橋本真里, 石井恭平, 太田優一, 金子健太郎, 山口智広, 藤田静雄, 本田徹
    • Organizer
      応用物理学会関西支部2020年度第1回+第2回合同講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 合成石英基板上に成長した岩塩構造 MgZnO 微結晶の真空紫外域での発光特性2021

    • Author(s)
      高坂亘, 星翔馬, 工藤幹太, 猪狩有生, 金子健太郎, 山口智広, 藤田静雄, 尾沼猛儀
    • Organizer
      2021年応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 岩塩構造MgZnO 混晶の電子有効質量の推定2021

    • Author(s)
      太田優一, 金子健太郎, 尾沼猛儀, 藤田静雄
    • Organizer
      2021年応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Deep and vacuum UV emission properties in rocksalt-structured MgZnO2020

    • Author(s)
      T. Onuma, K. Kudo, K. Ishii, M. Ono, Y. Ota, K. Kaneko, T. Yamaguchi, S. Fujita, and T. Honda
    • Organizer
      39th Electronic Materials Symposium
    • Related Report
      2020 Annual Research Report
    • Invited
  • [Presentation] Radiation patterns of MgO and AlN evaluated by angle-resolved cathodoluminescence measurements2020

    • Author(s)
      Y. Igari, K. Kudo, W. Kosaka, K. Kaneko, T. Yamaguchi, T. Honda, S. Fujita, T. Onuma
    • Organizer
      19th International Symposium on Advanced Technology (ISAT-19)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Band alignment of MgZnO alloys and the related band offset calculations2020

    • Author(s)
      Y. Ota, K. Kaneko, T. Onuma, and S. Fujita
    • Organizer
      39th Electronic Materials Symposium
    • Related Report
      2020 Annual Research Report
  • [Presentation] 岩塩構造MgZnO薄膜における深紫外PL寿命の評価2020

    • Author(s)
      工藤幹太, 石井恭平, 小野瑞生, 金子健太郎, 山口智広, 嶋紘平, 小島一信, 藤田静雄, 本田徹, 秩父重英, 尾沼猛儀
    • Organizer
      2020年応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] 酸化物半導体MgZnOの結晶成長とサブ200 nmの発光特性2020

    • Author(s)
      尾沼猛儀, 工藤幹太, 石井恭平, 小野瑞生, 太田優一, 金子健太郎, 山口智広, 藤田静雄, 本田徹
    • Organizer
      応用物理学会第結晶工学分科会153回研究会
    • Related Report
      2020 Annual Research Report

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Published: 2020-04-28   Modified: 2024-01-30  

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