| Budget Amount *help |
¥17,550,000 (Direct Cost: ¥13,500,000、Indirect Cost: ¥4,050,000)
Fiscal Year 2023: ¥3,510,000 (Direct Cost: ¥2,700,000、Indirect Cost: ¥810,000)
Fiscal Year 2022: ¥5,590,000 (Direct Cost: ¥4,300,000、Indirect Cost: ¥1,290,000)
Fiscal Year 2021: ¥3,640,000 (Direct Cost: ¥2,800,000、Indirect Cost: ¥840,000)
Fiscal Year 2020: ¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
|
|---|
| Outline of Final Research Achievements |
This research focused on the unique material ``liquid Si'' and aimed to demonstrate the ``liquid-to-solid Si conversion'' induced by electron beam (EB) irradiation, as well as to clarify its mechanism. Using a liquid phase (LP)-electron beam induced deposition (EBID) equipment which was constructed by us, we irradiated EB on liquid Si and demonstrated that liquid-to-amorphous/crystalline Si conversion was induced in the EB irradiation area. The impurity concentration in the obtained solid Si film was below the detection limit of the EDX, and it was a highly pure semiconductor Si film. Montecarlo simulation and Density Functional Theory were used to gain insight into the identification and influence of reactive species in the phase transition. We succeeded direct writing of semiconductor Si thin films without heating/vacuum.
|
