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Enhancement of surface acoustic wave harmonics excitation using bonded dissimilar-material structures and its application to next-generation super-high frequency filters

Research Project

Project/Area Number 20H02181
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 21050:Electric and electronic materials-related
Research InstitutionUniversity of Yamanashi

Principal Investigator

Shoji Kakio  山梨大学, 大学院総合研究部, 教授 (70242617)

Co-Investigator(Kenkyū-buntansha) 水野 潤  早稲田大学, ナノ・ライフ創新研究機構, 客員上級研究員(研究院客員教授) (60386737)
鈴木 雅視  山梨大学, 大学院総合研究部, 助教 (60763852)
Project Period (FY) 2020-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2022: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2021: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2020: ¥10,660,000 (Direct Cost: ¥8,200,000、Indirect Cost: ¥2,460,000)
KeywordsSAWフィルタ / 高周波化 / 異種材料接合 / 高調波 / 弾性表面波 / 高周波フィルタ
Outline of Research at the Start

次世代通信システムへの進化,実現に向けて,弾性表面波(Surface Acoustic Wave: SAW)を利用した周波数フィルタの高周波化が要請されているが,高周波化に必要なすだれ状電極の微細化が困難である.一方,本研究グループでは,これまでの科研費による研究により,高性能なSAW伝搬特性を有する異種材料接合構造を開発している.そこで本研究では,SAWの高次高調波を異種材料接合構造に適用することにより,従来の電極周期を用いて3倍,あるいは5倍の高周波化と,フィルタ応用に見合うSAW伝搬特性を同時に実現させることを目的としている.

Outline of Final Research Achievements

For the evolution of next-generation mobile communication systems, surface acoustic wave (SAW) devices with higher frequency and wide bandwidth are strongly demanded. The conventional SAW devices have a frequency limit of around 3.5 GHz owing to the limitations of narrower electrodes and power handling capability. In this study, the enhancement of high-order SAW harmonics by increasing the metallization ratio was theoretically and experimentally investigated in high-performance bonded dissimilar-material structures, such as LiTaO3(LT)/quartz and LiNbO3(LN)/quartz. It was clarified that the 3rd and 5th harmonics of the SAW are strongly excited compared to a single LT or LN, resulting in significantly larger resonance characteristics. The applicability to ultra-high frequency filters that can operate at frequencies 3 and 5 times higher without narrowing the electrode period was demonstrated.

Academic Significance and Societal Importance of the Research Achievements

スマートフォン等の端末用の弾性表面波(SAW)フィルタには,LiTaO3(LT)やLiNbO3(LN)の圧電結晶が用いられてきたが,第5世代通信システム,次世代通信システムの高周波化に必要な電極周期の狭小化は限界である.本研究では,LT薄板,またはLN薄板を水晶基板と異種材料接合させた構造と,0.8程度の電極メタライゼーション比を組み合わせると,単体のLT,またはLNと比較してSAWの3次,5次高調波が強勢に励振され,格段に大きな共振特性が得られることを理論的,実験的に明らかにし,電極周期を狭くすることなく3倍,5倍の周波数で動作可能な超高周波フィルタへの適用可能性を示した.

Report

(4 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Annual Research Report
  • 2020 Annual Research Report
  • Research Products

    (23 results)

All 2023 2022 2021 2020 Other

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Open Access: 1 results) Presentation (17 results) (of which Int'l Joint Research: 4 results,  Invited: 2 results) Remarks (3 results)

  • [Journal Article] High-performance surface acoustic wave devices using composite substrate structures2021

    • Author(s)
      Kakio Shoji
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 60 Issue: SD Pages: SD0802-SD0802

    • DOI

      10.35848/1347-4065/abf2d9

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Enhancement of leaky surface acoustic wave harmonics excitation using bonded dissimilar-material structures2021

    • Author(s)
      Shiori Asakawa, Masashi Suzuki, Shoji Kakio, Ami Tezuka, and Jun Mizuno
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 60 Issue: SD Pages: SDDC07-SDDC07

    • DOI

      10.35848/1347-4065/abeff2

    • Related Report
      2021 Annual Research Report 2020 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-Residual-Stress Amorphous Film for LiTaO<sub>3</sub>/Quartz or LiNbO<sub>3</sub>/Quartz Bonding toward 5G Surface Acoustic Wave Devices2020

    • Author(s)
      Tezuka Ami、Kuwae Hiroyuki、Yamada Kosuke、Shoji Shuichi、Kakio Shoji、Mizuno Jun
    • Journal Title

      Transactions of The Japan Institute of Electronics Packaging

      Volume: 13 Issue: 0 Pages: E19-009-1-E19-009-7

    • DOI

      10.5104/jiepeng.13.E19-009-1

    • NAID

      130007868189

    • ISSN
      1883-3365, 1884-8028
    • Related Report
      2020 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] LiNbO3/水晶接合構造のリーキーSAW 高調波の共振特性2023

    • Author(s)
      森田 響生,鈴木 雅視,垣尾 省司,水野 潤
    • Organizer
      圧電材料・デバイスシンポジウム2023
    • Related Report
      2022 Annual Research Report
  • [Presentation] 異種材料接合構造上のリーキーSAW高次高調波の共振特性2023

    • Author(s)
      森田 響生,鈴木 雅視,垣尾 省司,水野 潤
    • Organizer
      弾性波素子技術コンソーシアム第10回研究会
    • Related Report
      2022 Annual Research Report
  • [Presentation] LiTaO3/水晶接合構造上のリーキーSAW三次高調波の共振特性-1GHz帯における評価-2023

    • Author(s)
      森田 響生,鈴木 雅視,垣尾 省司,水野 潤
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] LiNbO3/水晶接合構造のリーキーSAW五次高調波の共振特性2022

    • Author(s)
      森田 響生,鈴木 雅視,垣尾 省司,水野 潤
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Resonance Properties of Leaky SAW Harmonics on LiNbO3/Quartz Bonded Structures2022

    • Author(s)
      Hibiki Morita, Masashi Suzuki, Shoji Kakio, Jun Mizuno
    • Organizer
      The 43rd Symposium on Ultrasonic Electronics (USE2022)
    • Related Report
      2022 Annual Research Report
  • [Presentation] LiNbO3/水晶接合構造のリーキーSAW高調波の共振特性2022

    • Author(s)
      森田 響生,鈴木 雅視,垣尾 省司,水野 潤
    • Organizer
      第51回EMシンポジウム
    • Related Report
      2022 Annual Research Report
  • [Presentation] LiNbO3/水晶接合構造のリーキーSAW三次高調波の共振特性2022

    • Author(s)
      森田 響生,鈴木 雅視,垣尾 省司,水野 潤
    • Organizer
      第69回応用物理学会春季学術講演会
    • Related Report
      2021 Annual Research Report
  • [Presentation] <Session Invited> High-performance SAW devices using bonded dissimilar-material structures2021

    • Author(s)
      Shoji Kakio
    • Organizer
      2021 International Conference on Electronics Packaging (ICEP)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] LiTaO3/水晶接合構造におけるリーキーSAW高調波の共振特性2021

    • Author(s)
      浅川詩織,鈴木雅視,垣尾省司,手塚彩水,水野潤
    • Organizer
      圧電・材料デバイスシンポジウム2021,F-1
    • Related Report
      2020 Annual Research Report
  • [Presentation] Resonance properties of leaky SAW harmonics on bonded dissimilar-material structures2020

    • Author(s)
      Asakawa Shiori、Suzuki Masashi、Kakio Shoji、Tezuka Ami、Mizuno Jun
    • Organizer
      IEEE International Ultrasonics Symposium 2020, C5P-10-1390
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Enhancement of leaky SAW harmonics excitation using bonded dissimilar material structures2020

    • Author(s)
      Asakawa Shiori、Suzuki Masashi、Kakio Shoji、Tezuka Ami、Mizuno Jun
    • Organizer
      The 41st Symposium on Ultrasonics Electronics,2E3-1
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High-performance surface acoustic wave devices using composite substrate structures2020

    • Author(s)
      Kakio Shoji
    • Organizer
      The 41st Symposium on Ultrasonics Electronics,PL1
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] LiTaO3/水晶接合構造を用いたリーキーSAW高調波の強勢励振2020

    • Author(s)
      浅川詩織, 鈴木雅視,垣尾省司,手塚彩水,水野潤
    • Organizer
      第81回応用物理学会秋季学術講演会,10p-Z22-9
    • Related Report
      2020 Annual Research Report
  • [Presentation] LiTaO3と水晶の接合構造を用いたリーキーSAW共振子の高周波特性2020

    • Author(s)
      浅川詩織, 鈴木雅視,垣尾省司,手塚彩水,水野潤
    • Organizer
      2020年電子情報通信学会ソサイエティ大会,A-4-2
    • Related Report
      2020 Annual Research Report
  • [Presentation] LiTaO3/水晶接合構造上のリーキーSAW共振特性の周波数依存性2020

    • Author(s)
      浅川詩織, 鈴木雅視,垣尾省司,手塚彩水,水野潤
    • Organizer
      電子情報通信学会・日本音響学会2020年度超音波研究会(US),US2020-32
    • Related Report
      2020 Annual Research Report
  • [Presentation] 異種材料接合構造を用いたリーキーSAW高調波の強勢励振2020

    • Author(s)
      浅川詩織, 鈴木雅視,垣尾省司,手塚彩水,水野潤
    • Organizer
      第49回EM シンポジウム,EM49-1-12
    • Related Report
      2020 Annual Research Report
  • [Presentation] 異種材料接合構造を用いたリーキーSAW高調波の強勢励振2020

    • Author(s)
      浅川詩織, 鈴木雅視,垣尾省司,手塚彩水,水野潤
    • Organizer
      弾性波素子技術コンソーシアム第1回研究会
    • Related Report
      2020 Annual Research Report
  • [Remarks] 垣尾・鈴木研究室HP

    • URL

      https://www.ccn.yamanashi.ac.jp/~kakio/

    • Related Report
      2022 Annual Research Report
  • [Remarks] 垣尾・鈴木研究室

    • URL

      https://www.ccn.yamanashi.ac.jp/~kakio/

    • Related Report
      2021 Annual Research Report
  • [Remarks] 垣尾・鈴木研究室

    • URL

      http://www.ccn.yamanashi.ac.jp/~kakio/

    • Related Report
      2020 Annual Research Report

URL: 

Published: 2020-04-28   Modified: 2024-01-30  

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