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On-chip molecular sensing using Ge mid-infrared photonic integrated circuit

Research Project

Project/Area Number 20H02198
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Review Section Basic Section 21060:Electron device and electronic equipment-related
Research InstitutionThe University of Tokyo

Principal Investigator

Takenaka Mitsuru  東京大学, 大学院工学系研究科(工学部), 教授 (20451792)

Project Period (FY) 2020-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥17,680,000 (Direct Cost: ¥13,600,000、Indirect Cost: ¥4,080,000)
Fiscal Year 2022: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2021: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Fiscal Year 2020: ¥6,630,000 (Direct Cost: ¥5,100,000、Indirect Cost: ¥1,530,000)
Keywords光集積回路 / 中赤外光 / ゲルマニウム / センシング / 光通信 / コンピューティング
Outline of Research at the Start

本研究では、ゲルマニウム光回路を用いた中赤外光センシングにより、様々な分子を検出可能なオンチップ分子センシングの実現を目指す。中赤外光に対して透明なゲルマニウムを使って、低損失ゲルマニウム光導波路、リング共振器やスパイラル導波路などの各種導波路光回路、光変調器、受光器などの研究を進めるとともに、それを一体集積した光集積回路技術を創出することで、オンチップで様々な分子を光センシングすることを可能とする基盤技術の確立を目指す。

Outline of Final Research Achievements

We have conducted research on Ge photonic integrated circuits for sensing using a Ge-on-insulator (GeOI) platform. We have successfully reduce the propagation loss of the Ge waveguide by a factor of about 10, enabling various Ge waveguide elements required for sensing. In the study of carrier-injection Ge optical modulators, the modulation efficiency was greatly improved using solid-phase doping, and optical phase modulation using the plasma dispersion effect was also successfully achieved for the first time. A defect-mediated photodetector was demonstrated on a GeOI platform, and high-sensitivity operation by avalanche amplification was demonstrated for the first time.
As a result, we have successfully established the basic technology for realizing small and highly sensitive molecular sensor chips using Ge mid-infrared photonic circuits.

Academic Significance and Societal Importance of the Research Achievements

Geは中赤外波長全域で透明であることから、中赤外集積回路の導波路材料として期待されている。本研究を通じて、Ge導波路の導波損失の低減手法を確立したことで、低損失Ge導波路が実現された。これにより、様々な超小型導波路素子の作製が可能となった。光集積回路中の光信号の変調に用いる光変調器においても、強度変調の効率改善に加えて、位相変調にも初めて成功した。結晶欠陥準位を介した受光器の実証に成功した。これらの素子を一体集積することで、ウェアラブルデバイスに搭載可能な光センサーチップや光通信、コンピューティングへの応用が期待されることから、学術的だけでなく社会的にも意義の大きい研究成果となった。

Report

(4 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Annual Research Report
  • 2020 Annual Research Report
  • Research Products

    (35 results)

All 2023 2022 2021 2020 Other

All Int'l Joint Research (1 results) Journal Article (7 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 6 results,  Open Access: 2 results) Presentation (25 results) (of which Int'l Joint Research: 15 results,  Invited: 8 results) Remarks (2 results)

  • [Int'l Joint Research] 南洋理工大学(シンガポール)

    • Related Report
      2020 Annual Research Report
  • [Journal Article] Proposal of Low-Loss Non-Volatile Mid-Infrared Optical Phase Shifter Based on Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>3</sub>S<sub>2</sub>2023

    • Author(s)
      Miyatake Yuto、Makino Kotaro、Tominaga Junji、Miyata Noriyuki、Nakano Takashi、Okano Makoto、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
    • Journal Title

      IEEE Transactions on Electron Devices

      Volume: 70 Issue: 4 Pages: 2106-2112

    • DOI

      10.1109/ted.2023.3235865

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Efficient optical phase modulator based on an III?V metal-oxide-semiconductor structure with a doped graphene transparent electrode2022

    • Author(s)
      Piyapatarakul Tipat、Tang Hanzhi、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 62 Issue: SC Pages: SC1008-SC1008

    • DOI

      10.35848/1347-4065/aca59c

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Non-volatile compact optical phase shifter based on Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub> operating at 2.3 μm2022

    • Author(s)
      Miyatake Yuto、Ho Chong Pei、Pitchappa Prakash、Singh Ranjan、Makino Kotaro、Tominaga Junji、Miyata Noriyuki、Nakano Takashi、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
    • Journal Title

      Optical Materials Express

      Volume: 12 Issue: 12 Pages: 4582-4582

    • DOI

      10.1364/ome.473987

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Ge-on-insulator Platform for Mid-infrared Photonic Integrated Circuits2022

    • Author(s)
      Takenaka Mitsuru、Zhao Ziqiang、Ho Chong Pei、Fujigaki Takumi、Piyapatarakul Tipat、Miyatake Yuto、Tang Rui、Toprasertpong Kasidit、Takagi Shinichi
    • Journal Title

      ECS Transactions

      Volume: 109 Issue: 4 Pages: 47-58

    • DOI

      10.1149/10904.0047ecst

    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Journal Article] Numerical analysis of optical phase modulator operating at 2 μm wavelength using graphene/III?V hybrid metal-oxide-semiconductor capacitor2022

    • Author(s)
      Piyapatarakul Tipat、Tang Hanzhi、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 61 Issue: SC Pages: SC1031-SC1031

    • DOI

      10.35848/1347-4065/ac4443

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Low-loss Ge waveguide at the 2-μm band on an n-type Ge-on-insulator wafer2021

    • Author(s)
      Zhao Ziqiang、Lim Cheol-Min、Ho Chongpei、Sumita Kei、Miyatake Yuto、Toprasertpong Kasidit、Takagi Shinichi、Takenaka Mitsuru
    • Journal Title

      Optical Materials Express

      Volume: 11 Issue: 12 Pages: 4097-4097

    • DOI

      10.1364/ome.444071

    • Related Report
      2021 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Ge-on-insulatorを用いた近赤外・中赤外集積フォトニクス2020

    • Author(s)
      竹中充,高木信一
    • Journal Title

      レーザー研究

      Volume: 48 Pages: 535-539

    • Related Report
      2020 Annual Research Report
    • Peer Reviewed
  • [Presentation] Ge2Sb2Te3S2を用いた不揮発性相変化中赤外光位相シフタ2023

    • Author(s)
      宮武悠人, 牧野孝太郎, 富永淳二, 宮田典幸, 中野隆志, 岡野 誠, トープラサートポン カシディット, 高木信一, 竹中 充
    • Organizer
      電気学会ナノエレクトロニクス機能化・応用技術調査専門委員会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] Ge2Sb2Te3S2を用いた不揮発性相変化中赤外光位相シフタ2023

    • Author(s)
      宮武悠人, 牧野孝太郎, 富永淳二, 宮田典幸, 中野隆志, 岡野 誠, トープラサートポン カシディット, 高木信一, 竹中 充
    • Organizer
      電子情報通信学会シリコン材料・デバイス研究会(SDM)
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] Record-low loss non-volatile mid-infrared PCM optical phase shifter based on Ge2Sb2Te3S22022

    • Author(s)
      Y. Miyatake, K. Makino, J. Tominaga, N. Miyata, T. Nakano, M. Okano, K. Toprasertpong, S. Takagi, M. Takenaka
    • Organizer
      International Electron Devices Meeting (IEDM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design of the III-V MOS optical modulator with doped graphene electrode for efficient, high-speed phase modulation2022

    • Author(s)
      T. Piyapatarakul, H. Tang, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      12th International Symposium on Photonics and Electronics Convergence (ISPEC2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ge-on-insulator platform for mid-infrared photonic integrated circuits2022

    • Author(s)
      M. Takenaka, Z. Zhao, T. Piyapatarakul, Y. Miyatake, K. Toprasertpong, and S. Takagi
    • Organizer
      242th ECS Meeting
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Analysis of III-V MOS optical modulator with transparent doped graphene gate electrode2022

    • Author(s)
      T. Piyapataraku, H. Tang, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      International Conference on Solid State Devices and Materials (SSDM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] III-V/Si hybrid integration for scalable optical switching and computing2022

    • Author(s)
      M. Takenaka, H. Tang, K. Watanabe, T. Ochiai, T. Akazawa, Y. Miyatake, S. Ohno, K. Sumita, S. Monfray, F. Boeuf, R. Tang, K. Toprasertpong, and S. Takagi
    • Organizer
      International Conference on Photonics in Switching and Computing (PSC2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Compact, low-loss, fabrication-tolerant, and thermally stable 2x2 Si optical coupler designed by CMA-ES2022

    • Author(s)
      Y. Miyatake, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      International Conference on Solid State Devices and Materials (SSDM2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Optimization of Compact and Low-loss 2×2 Si Optical Coupler based on CMA-ES2022

    • Author(s)
      Y. Miyatake, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      12th International Symposium on Photonics and Electronics Convergence (ISPEC2022)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ウェハ接合を用いた光集積回路およびコンピューティング応用2022

    • Author(s)
      竹中 充
    • Organizer
      電子実装工学研究所(IMSI)第3回会員会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] 極薄III-V族半導体を用いたSiハイブリッド光集積回路および光コンピューティング応用2022

    • Author(s)
      竹中充
    • Organizer
      学振R025産学協力委員会第11回研究会
    • Related Report
      2022 Annual Research Report
    • Invited
  • [Presentation] CAM-ESに基づく小型低損失2×2カプラの設計2022

    • Author(s)
      宮武 悠人, トープラサートポン カシディット, 高木 信一, 竹中 充
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Numerical analysis of III-V MOS optical modulator with graphene transparent electrode for efficient phase modulation2022

    • Author(s)
      Tipat Piyapatarakul, Hanzhi Tang, Kasidit Toprasertpong, Shinichi Takagi, Mitsuru Takenaka
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Reduction of optical loss of phase-change phase shifter based on Ge2Sb2Te5 operating at mid-infrared wavelength2021

    • Author(s)
      Y. Miyatake, C.-P. Ho, K. Makino, J. Tominaga, N. Miyata, T. Nakano, N. Sekine, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      11th International Symposium on Photonics and Electronics Convergence (ISPEC2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Materials drive Si photonics2021

    • Author(s)
      M. Takenaka, K. Toprasertpong, and S. Takagi
    • Organizer
      34th International Microprocesses and Nanotechnology Conference (MNC2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Ge ring modulator based on carrier-injection phaser shifter operating at two micrometer band2021

    • Author(s)
      Z. Zhao, C.-P. Ho, Q. Li, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      European Conference on Optical Communication (ECOC2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Germanium mid-infrared integrated photonics on GeOI platform2021

    • Author(s)
      M. Takenaka, Z. Zhao, C.-P. Ho, T. Fujigaki, K. Toprasertpong, and S. Takagi
    • Organizer
      Conference on Lasers and Electro-Optics (CLEO2021)
    • Related Report
      2021 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 波長2.4μmで動作する相変化材料を用いた中赤外光位相シフタ2021

    • Author(s)
      宮武 悠人, 何 鐘培, 牧野 孝太郎, 富永 淳二, 宮田 典幸, 中野 隆志, 関根 尚希, トープラサートポン カシディット, 高木 信一, 竹中 充
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Enhancement of the Ge sub-bandgap photo-response at 2-μm band by photo-gating effect2021

    • Author(s)
      Z. Zhao, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      第68回応用物理学会春季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Mid-infrared non-volatile compact optical phase shifter based on Ge2Sb2Te52020

    • Author(s)
      Y. Miyatake, C.-P. Ho, P. Pitchappa, R. Singh, K. Makino, J. Tominaga, N. Miyata, T. Nakano, N. Sekine, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      European Conference on Optical Communication (ECOC 2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Non-volatile compact optical phase shifter based on Ge2Sb2Te5 operating at mid-infrared wavelength2020

    • Author(s)
      Y. Miyatake, C. P. Ho, P. Pitchappa, R. Singh, K. Makino, J. Tominaga, N. Miyata, T. Nakano, N. Sekine, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      10th International Symposium on Photonics and Electronics Convergence (ISPEC2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Experimental evaluation of the free-carrier plasma dispersion effect in germanium2020

    • Author(s)
      Z. Zhao, C.-P. Ho, Q. Li, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      10th International Symposium on Photonics and Electronics Convergence (ISPEC2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Two-micrometer monolithic germanium waveguide photodetector integrated with lateral PIN junction2020

    • Author(s)
      Z. Zhao, C.-P. Ho, Q. Li, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      10th International Symposium on Photonics and Electronics Convergence (ISPEC2020)
    • Related Report
      2020 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 相変化材料を用いた中赤外光位相シフタの提案2020

    • Author(s)
      宮武 悠人, 何 鐘培, 牧野 孝太郎, 富永 淳二, 宮田 典幸, 中野 隆志, 関根 尚希, トープラサートポン カシディット, 高木 信一, 竹中 充
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Presentation] Investigation of Optical Phase-shift by Free-carrier effect in Germanium Waveguides for Mid-infrared Photonics2020

    • Author(s)
      Z. Zhao, C. Ho, Q. Li, Z. Lin, K. Toprasertpong, S. Takagi, and M. Takenaka
    • Organizer
      第81回応用物理学会秋季学術講演会
    • Related Report
      2020 Annual Research Report
  • [Remarks] 竹中研究室Webページ

    • URL

      https://sites.google.com/g.ecc.u-tokyo.ac.jp/takenaka-lab/

    • Related Report
      2022 Annual Research Report
  • [Remarks] Si Photonics Lab

    • URL

      https://sites.google.com/g.ecc.u-tokyo.ac.jp/takenaka-lab/

    • Related Report
      2020 Annual Research Report

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Published: 2020-04-28   Modified: 2024-01-30  

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