High-performance and high-reliability diamond MEMS: fundamental and magnetic sensing application

• Project/Area Number: 20H02212
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Review Section: Basic Section 21060:Electron device and electronic equipment-related
• Research Institution: National Institute for Materials Science
• Principal Investigator: LIAO Meiyong 国立研究開発法人物質・材料研究機構, 機能性材料研究拠点, 主席研究員 (70528950)
• Co-Investigator(Kenkyū-buntansha): 戸田 雅也 東北大学, 工学研究科, 准教授 (40509890)
• Project Period (FY): 2020-04-01 – 2023-03-31
• Project Status: Completed (Fiscal Year 2022)
• Budget Amount: ¥17,810,000 (Direct Cost: ¥13,700,000、Indirect Cost: ¥4,110,000); Fiscal Year 2022: ¥4,030,000 (Direct Cost: ¥3,100,000、Indirect Cost: ¥930,000); Fiscal Year 2021: ¥5,850,000 (Direct Cost: ¥4,500,000、Indirect Cost: ¥1,350,000); Fiscal Year 2020: ¥7,930,000 (Direct Cost: ¥6,100,000、Indirect Cost: ¥1,830,000)
• Keywords: ダイヤモンド / MEMS / 磁気センサー / 磁気センサ / 高温

Outline of Research at the Start

超高温(>773K)での磁気センシングは挑戦的な課題である。本研究には我々は開発したダイヤモンドMEMSに基づいて、773K以上高温で高信頼性、高感度のダイヤモンドMEMS磁気センサーを提案する。 この目標を達成するために、（i）ダイヤモンドMEMS共振子の上に磁歪材料のヘテロ成長と最適化、（ii）オンチップでセルフセンシング・アクチュエーションの革新的なトランスデューサー物理概念の提案、および（iii）これまでにない力感度をもつダイヤモンドMEMS共振子を簡単に製造する方法を行う。提案されたダイヤモンドMEMS磁気センサーは、従来の磁気センシングの信頼性の問題を克服する。

Outline of Final Research Achievements

All the present magnetic sensors have each own drawback, such as high cost, low-temperature requirement, and complex infrastructure for SQUID, low sensitivity for Hall sensor, and high volume and power consumption for fluxgate sensor. In particular, magnetic sensing with preserved performance at high temperatures over 500℃ has been difficult for these sensors. The present magnetic sensors are suffered from low sensitivity and poor reliability issues due to the lack of proper device concept compatible with materials tailoring.In this project, we combined the robust single-crystal diamond (SCD) MEMS with a multifunctional magnetostrictive FeGa film and demonstrated the integrated on-chip resonator-type MEMS magnetic sensor. The MEMS magnetic sensor shows a high sensitivity of 9.45 nT/Hz1/2, stable up to 300℃. The work paves the way for producing magnetic sensor to overcome the weakness of the current magnetic sensors in sensitivity, energy consumption, and reliability.

Academic Significance and Societal Importance of the Research Achievements

本成果は、内燃機関、石油、鉱物探索、原子炉の材質劣化診断、宇宙利用など過酷な環境下における磁気センシングに応用されることが期待できます。

Research Products

• [Journal Article] Unconventional Giant “Magnetoresistance” in Bosonic Semiconducting Diamond Nanorings (2023)
  • Author(s): Zhang Gufei、Zulkharnay Ramiz、Ke Xiaoxing、Liao Meiyong、Liu Liwang、Guo Yujie、Li Yejun、Rubahn Horst‐G?nter、Moshchalkov Victor V.、May Paul W.
  • Journal Title: Advanced Materials Volume: 35 Issue: 22 Pages: 2211129-2211129
  • DOI: 10.1002/adma.202211129
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] On‐chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film (2023)
  • Author(s): Zhang Zilong、Zhao Wen、Chen Guo、Toda Masaya、Koizumi Satoshi、Koide Yasuo、Liao Meiyong
  • Journal Title: Advanced Functional Materials Volume: 33 Issue: 27 Pages: 2300805-2300805
  • DOI: 10.1002/adfm.202300805
  • Peer Reviewed
• [Journal Article] Effect of gas pressure on the quality-factor of single-crystal diamond micro cantilevers (2022)
  • Author(s): Chen Yinling、Sang Liwen、Koizumi Satoshi、Koide Yasuo、Liu Xiaoxi、Liao Meiyong
  • Journal Title: Diamond and Related Materials Volume: 129 Pages: 109340-109340
  • DOI: 10.1016/j.diamond.2022.109340
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Enhancement of magnetic sensing performance of diamond resonators coupling with magnetic-strictive FeGa films by various interlayers (2022)
  • Author(s): Zhang Zilong、Sang Liwen、Huang Jian、Wang Linjun、Koide Yasuo、Koizumi Satoshi、Liao Meiyong
  • Journal Title: Carbon Volume: 200 Pages: 401-409
  • DOI: 10.1016/j.carbon.2022.08.086
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Stress effect on the resonance properties of single-crystal diamond cantilever resonators for microscopy applications (2022)
  • Author(s): Shen Xiulin、Lv Zhenfei、Ichikawa Kimiyoshi、Sun Huanying、Sang Liwen、Huang Zhaohui、Koide Yasuo、Koizumi Satoshi、Liao Meiyong
  • Journal Title: Ultramicroscopy Volume: 234 Pages: 113464-113464
  • DOI: 10.1016/j.ultramic.2022.113464
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Elastic strain engineered nanomechanical GaN resonators with thermoelastic dissipation dilution up to 600?K (2022)
  • Author(s): Sun Huanying、Sang Liwen、Shen Xiulin、Yang Xuelin、Li Tiefu、You J. Q.、Shen Bo、Liao Meiyong
  • Journal Title: Journal of Applied Physics Volume: 131 Issue: 5 Pages: 054502-054502
  • DOI: 10.1063/5.0080227
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Integrated TbDyFe Film on a Single‐Crystal Diamond Microelectromechanical Resonator for Magnetic Sensing (2021)
  • Author(s): Shen Xiulin、Sun Huanying、Sang Liwen、Imura Masataka、Koide Yasuo、Koizumi Satoshi、Liao Meiyong
  • Journal Title: physica status solidi (RRL) Rapid Research Letters Volume: 15 Issue: 9 Pages: 2100352-2100352
  • DOI: 10.1002/pssr.202100352
  • Peer Reviewed
• [Journal Article] Highly efficient diamond electromechanical transducer based on released metal-oxide-semiconductor structure (2021)
  • Author(s): Liao Meiyong、Sang Liwen、Sun Huanying、Li Tiefu、Koizumi Satoshi
  • Journal Title: Applied Physics Letters Volume: 119 Issue: 7 Pages: 073504-073504
  • DOI: 10.1063/5.0058646
  • Peer Reviewed
• [Journal Article] Temperature dependence of Young's modulus of single-crystal diamond determined by dynamic resonance (2021)
  • Author(s): Shen Xiulin、Wu Kongping、Sun Huanying、Sang Liwen、Huang Zhaohui、Imura Masataka、Koide Yasuo、Koizumi Satoshi、Liao Meiyong
  • Journal Title: Diamond and Related Materials Volume: 116 Pages: 108403-108403
  • DOI: 10.1016/j.diamond.2021.108403
  • Peer Reviewed
• [Journal Article] Thermal mismatch induced stress characterization by dynamic resonance based on diamond MEMS (2021)
  • Author(s): Sun Huanying、Shen Xiulin、Sang Liwen、Imura Masataka、Koide Yasuo、You Jianqiang、Li Tie-Fu、Koizumi Satoshi、Liao Meiyong
  • Journal Title: Applied Physics Express Volume: 14 Issue: 4 Pages: 045501-045501
  • DOI: 10.35848/1882-0786/abe7b0
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Exceptional Point and Cross-Relaxation Effect in a Hybrid Quantum System (2021)
  • Author(s): G.Q. Zhang, Z. Chen, Da Xu, N. Shammah, M. Liao, T.F. Li, L. Tong, S.Y. Zhu, F. Nori, J.Q. You
  • Journal Title: PRX Quantum Volume: 2 Issue: 2 Pages: 020307-020307
  • DOI: 10.1103/prxquantum.2.020307
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] Tailoring the magnetic properties of galfenol film grown on single-crystal diamond (2021)
  • Author(s): Zhang Zilong、Sang Liwen、Huang Jian、Wang Linjun、Koizumi Satoshi、Liao Meiyong
  • Journal Title: Journal of Alloys and Compounds Volume: 858 Pages: 157683-157683
  • DOI: 10.1016/j.jallcom.2020.157683
  • Peer Reviewed
• [Journal Article] Progress in semiconductor diamond photodetectors and MEMS sensors (2021)
  • Author(s): Liao Meiyong
  • Journal Title: Functional Diamond Volume: 1 Issue: 1 Pages: 29-46
  • DOI: 10.1080/26941112.2021.1877019
  • Peer Reviewed / Open Access
• [Journal Article] Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film (2020)
  • Author(s): Zilong Zhang, Liwen Sang, Jian Huang, Waiyan Chen, Linjun Wang, Yukiko Takahashi, Seiji Mitani, Yasuo Koide, Satoshi Koizumi, Meiyong Liao
  • Journal Title: Carbon Volume: 170 Pages: 294-301
  • DOI: 10.1016/j.carbon.2020.08.049
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Effect of Deep-Defects Excitation on Mechanical Energy Dissipation of Single-Crystal Diamond (2020)
  • Author(s): Sun Huanying、Sang Liwen、Wu Haihua、Zhang Zilong、Teraji Tokuyuki、Li Tie-Fu、You Jiangqiang、Toda Masaya、Koizumi Satoshi、Liao Meiyong
  • Journal Title: Physical Review Letters Volume: 125 Issue: 20 Pages: 206802-206802
  • DOI: 10.1103/physrevlett.125.206802
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Precise characterization of atomic-scale corrosion of single crystal diamond in H2 plasma based on MEMS/NEMS (2020)
  • Author(s): Wu Haihua、Zhang Zilong、Sang Liwen、Li Tiefu、You Jianqiang、Imura Masataka、Koide Yasuo、Liao Meiyong
  • Journal Title: Corrosion Science Volume: 170 Pages: 108651-108651
  • DOI: 10.1016/j.corsci.2020.108651
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Enhancing Delta E Effect at High Temperatures of Galfenol/Ti/Single-Crystal Diamond Resonators for Magnetic Sensing (2020)
  • Author(s): Zilong Zhang, Haihua Wu, Liwen Sang, Yukiko Takahashi, Jian Huang, Linjun Wang, Masaya Toda, Indianto Mohammad Akita, Yasuo Koide, Satoshi Koizumi, Meiyong Liao
  • Journal Title: ACS Applied Materials & Interfaces Volume: 12 Issue: 20 Pages: 23155-23164
  • DOI: 10.1021/acsami.0c06593
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Coupling of magneto-strictive FeGa film with single-crystal diamond MEMS resonator for high-reliability magnetic sensing at high temperatures (2020)
  • Author(s): Zhang Zilong、Wu Yuanzhao、Sang Liwen、Wu Haihua、Huang Jian、Wang Linjun、Takahashi Yukiko、Li Runwei、Koizumi Satoshi、Toda Masaya、Akita Indianto Mohammad、Koide Yasuo、Liao Meiyong
  • Journal Title: Materials Research Letters Volume: 8 Issue: 5 Pages: 180-186
  • DOI: 10.1080/21663831.2020.1734680
  • Peer Reviewed / Int'l Joint Research
• [Journal Article] Electrical readout/characterization of single crystal diamond (SCD) cantilever resonators (2020)
  • Author(s): Wu Haihua、Zhang Zilong、Sang Liwen、Li Tiefu、You Jianqiang、Lu Yingjie、Koide Yasuo、Liao Meiyong
  • Journal Title: Diamond and Related Materials Volume: 103 Pages: 107711-107711
  • DOI: 10.1016/j.diamond.2020.107711
  • Peer Reviewed / Int'l Joint Research
• [Presentation] Effect of Ultra-High Vacuum Annealing and Hydrogen Plasma Treatment on the Resonance Properties of Single-Crystal Diamond MEMS Cantilevers (2022)
  • Author(s): Guo Chen, Zilong Zhang, Liwen Sang, Yasuo Koide, Satoshi Koizumi, Meiyong Liao
  • Organizer: 2023年第70回応用物理学会春季学術講演会
• [Presentation] High-temperature diamond MEMS magnetic sensor with on-chip actuation and sensing (2022)
  • Author(s): Zilong Zhang, Guo Chen, Liwen Sang, Yasuo Koide, Satoshi Koizumi and Meiyong Liao
  • Organizer: 第70回応用物理学会春季学術講演会
• [Presentation] Air damping effect on the quality factor of single-crystal diamond MEMS resonators (2022)
  • Author(s): CHEN, Yingling, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, 劉 小晰, LIAO, Meiyong
  • Organizer: 第83回応用物理学会秋季学術講演会
• [Presentation] Effect of pressure on quality-factor of single-crystal diamond micro cantilevers (2022)
  • Author(s): CHEN, Yingling, サン フアンイン, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, Xiaoxi Liu, LIAO, Meiyong
  • Organizer: 15th International Conference on New Diamond and Nano Carbons (NDNC2022)
  • Int'l Joint Research
• [Presentation] Enhancement of Magnetic Sensing Performances of Single-crystal Diamond Resonators through Various Interlayers (2022)
  • Author(s): ZHANG, Zilong, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong
  • Organizer: 15th International Conference on New Diamond and Nano Carbons (NDNC2022)
  • Int'l Joint Research
• [Presentation] Efficient etching of diamond by oxygen annealing toward high-Q factor diamond MEMS resonators (2022)
  • Author(s): CHEN, Yingling, サン フアンイン, SANG, Liwen, KOIZUMI, Satoshi, KOIDE, Yasuo, Xiaoxi Liu, LIAO, Meiyong
  • Organizer: E-MRS Spring Meeting 2022 https://www.european-mrs.com/advanced-carbon-materials-emrs. 2022
  • Int'l Joint Research / Invited
• [Presentation] High-temperature Magnetic Sensor Based on Single-crystal Diamond MEMS (2021)
  • Author(s): LIAO, Meiyong, ZHANG, Zilong, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi.
  • Organizer: 2021年第82回応用物理学会秋季学術講演会.
• [Presentation] Semiconductor Diamond Electronics and MEMS Sensors (2021)
  • Author(s): Meiyong Liao
  • Organizer: International Conference on Advances in Functional Materials (AAAFM-UCLA International Conference)
  • Int'l Joint Research / Invited
• [Presentation] Three-dimensional Raman analysis of single crystal diamond cantilevers (2021)
  • Author(s): シェン シウリン, ICHIKAWA, Kimiyoshi, Zhaohui Huang, KOIDE, Yasuo, IMURA, Masataka, KOIZUMI, Satoshi, LIAO, Meiyong
  • Organizer: The 14th International Conference on New Diamond and Nano Carbons (NDNC2020/2021) conference
  • Int'l Joint Research
• [Presentation] Single-crystal Diamond MEMS Resonator for Magnetic Sensor Working up to 773 K. (2021)
  • Author(s): ZHANG, Zilong, SANG, Liwen, KOIDE, Yasuo, KOIZUMI, Satoshi, LIAO, Meiyong
  • Organizer: The 14th International Conference on New Diamond and Nano Carbons (NDNC2020/2021)
  • Int'l Joint Research
• [Presentation] High-temperature diamond MEMS magnetic sensor (2021)
  • Author(s): Meiyong Liao
  • Organizer: 第78回日本磁気学会 スピントロニクス専門研究会
  • Invited
• [Presentation] Deep-defects excitation on energy dissipation of single crystal diamond micromechanical resonators (2021)
  • Author(s): サン フアンイン, サン リウエン, ウ ハイファ ,寺地 徳之 .Jianqiang You, Tiefu Li, 小泉 聡 , 廖 梅勇
  • Organizer: The 14th International Conference on New Diamond and Nano Carbons (NDNC2020/2021)
  • Int'l Joint Research
• [Presentation] Self-Temperature-Compensated GaN MEMS Resonators through Strain Engineering up to 600 K. (2020)
  • Author(s): SANG, Liwen, サン フアンイン, Xuelin Yang, Tiefu Li, Bo Shen, LIAO, Meiyong
  • Organizer: IEEE International Electron Devices Meeting (IEDM)
  • Int'l Joint Research
• [Presentation] Diamond Electronics and MEMS (2020)
  • Author(s): Meiyong Liao
  • Organizer: International Symposium on Diamond and Super Hard Materials 2020
  • Invited
• [Patent(Industrial Property Rights)] 磁気センサー (2020)
  • Inventor(s): リャオ メイヨン/ジャン ジロン/サン リウエン/小出 康夫
  • Industrial Property Rights Holder: 物質・材料研究機構
  • Industrial Property Rights Type: 特許
  • Filing Date: 2020