| Budget Amount *help |
¥18,070,000 (Direct Cost: ¥13,900,000、Indirect Cost: ¥4,170,000)
Fiscal Year 2023: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2022: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2021: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2020: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
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| Outline of Final Research Achievements |
In this research project, we demonstrated the chemical vapor deposition of self-organized columnar structures, mainly in hafnium oxide (HfO2) and lutetium oxide (Lu2O3)-based materials. First, we selected Sr organometallic compound precursor to prepare SrHfO3 films. In the HfO2-MgO and HfO2-TiO2 systems, we found the formation of stoichiometric double oxides, and in the HfO2-Lu2O3 system, it was found that the crystalline phase changed continuously depending on the Hf/Lu molar ratio. We also found that self-organization occurred in the Lu2O3-MgO and Lu2O3-Al2O3 systems.
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