| Budget Amount *help |
¥17,810,000 (Direct Cost: ¥13,700,000、Indirect Cost: ¥4,110,000)
Fiscal Year 2022: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2021: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2020: ¥8,190,000 (Direct Cost: ¥6,300,000、Indirect Cost: ¥1,890,000)
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| Outline of Final Research Achievements |
All matter has both particle and wave properties. Light is a typical example in which wave properties are most effectively utilized. Waves is known to diffract but modern optical technology has reached its diffraction limit. On the other hand, the development of technology for electron waves is still in progress, and the properties of electron waves have not been fully utilized. In this research, we have developed a fabrication technology to realize a diffraction element approaching the diffraction limit for electron waves. Specifically, we have succeeded in developing technology that enables nanoprocessing of thin films that allow most electrons to pass through.
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