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Reduction of defect density in silicon quantum dot light-absorbers using hydrogen plasma treatment

Research Project

Project/Area Number 20K05075
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 26020:Inorganic materials and properties-related
Research InstitutionNagoya University

Principal Investigator

Kurokawa Yasuyoshi  名古屋大学, 工学研究科, 准教授 (00588527)

Co-Investigator(Kenkyū-buntansha) 加藤 慎也  名古屋工業大学, 工学(系)研究科(研究院), 助教 (10775844)
Project Period (FY) 2020-04-01 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2022: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2021: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2020: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Keywordsシリコン / 量子ドット / プラズマ / 太陽電池 / ベイズ最適化 / 水素
Outline of Research at the Start

本研究では,次世代の太陽電池材料として注目されるシリコン量子ドット積層膜を高品質化するアプローチとして,水素プラズマ処理を採用する.シリコン量子ドット積層膜を水素プラズマに曝露することで,水素が膜中にどのように入っていき,拡散し,シリコン原子と結合を形成するか多角的な評価手法により解明する.これにより,水素が効率的にシリコン量子ドット積層膜中の欠陥を終端する条件を見出す.最終的にはシミュレーションにて太陽電池の高変換効率が得られている1e16cm-3台の欠陥密度を目指す.

Outline of Final Research Achievements

The bandgap of silicon quantum dots (Si-QDs) can be tuned by the quantum size effect and it is possible to fabricate solar cells with active layers tuned to ambient light. To reduce the defect density in Si-QD active films is one of issues. In this study, hydrogen plasma treatment (HPT) was conducted to decrease the defect density in Si-QD active layers. Since HPT has 6 process parameters, a Bayesian optimization approach was adopted to find the optimal conditions. Photosensitivity (PS) was adopted as the objective function for BO. The PS is obtained by dark and photo conductivities of Si-QD active layers. As a result, the PS was improved from 22.7 to 347.2 with 7 cycles BO processes. Under the optimal conditions, Si-QD solar cells were fabricated. The open-circuit voltage and fill factor of 689 mV and 0.67 were obtained, respectively. These values are the highest among conventional Si-QD solar cells. Such significant improvements were achieved with the combination of BO and HPT.

Academic Significance and Societal Importance of the Research Achievements

今回の研究にて、シリコン量子ドット太陽電池の開放電圧と曲線因子はそれぞれ689mVと0.67に達した。これらの特性値は同様のデバイスの中でも最高値であり、BOとHPTを組み合わせたことで吸収層の大幅な性能向上を達成できた結果と考えられる。本研究成果はプラズマプロセスへのベイズ最適化の有用性を示すとともにシリコン量子ドット太陽電池のポテンシャルも示した点で学術的には意義がある。シリコン量子ドットを用いた太陽電池は環境光にチューニングが容易にできることから、IoT用電源として用いることができ、IoTセンサネットワーク構築のための電源としても有望である。

Report

(4 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • Research Products

    (23 results)

All 2023 2022 2021 2020 Other

All Journal Article (4 results) (of which Peer Reviewed: 4 results,  Open Access: 1 results) Presentation (15 results) (of which Int'l Joint Research: 10 results,  Invited: 3 results) Remarks (4 results)

  • [Journal Article] Preparation and thermoelectric characterization of boron-doped Si nanocrystals/silicon oxide multilayers2023

    • Author(s)
      Shibata Keisuke、Kato Shinya、Kurosawa Masashi、Gotoh Kazuhiro、Miyamoto Satoru、Usami Noritaka、Kurokawa Yasuyoshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 62 Issue: SC Pages: SC1074-SC1074

    • DOI

      10.35848/1347-4065/acb779

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Bayesian optimization of hydrogen plasma treatment in silicon quantum dot multilayer and application to solar cells2023

    • Author(s)
      Kumagai Fuga、Gotoh Kazuhiro、Miyamoto Satoru、Kato Shinya、Kutsukake Kentaro、Usami Noritaka、Kurokawa Yasuyoshi
    • Journal Title

      Discover Nano

      Volume: 18 Issue: 1 Pages: 0043-0043

    • DOI

      10.1186/s11671-023-03821-9

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Effect of Hydrogen Plasma Treatment on Silicon Quantum Dot Multilayers Using Amorphous SiOx2020

    • Author(s)
      R. Akaishi, K. Gotoh, S. Kato, N. Usami, Y. Kurokawa
    • Journal Title

      Proc. 37th European Photovoltaic Solar Energy Conference and Exhibition

      Volume: - Pages: 83-86

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Journal Article] Preparation and thermoelectric characterization of phosphorus-doped Si nanocrystals/silicon oxide multilayers2020

    • Author(s)
      Kobayashi Hisayoshi、Akaishi Ryushiro、Kato Shinya、Kurosawa Masashi、Usami Noritaka、Kurokawa Yasuyoshi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 59 Issue: SG Pages: SGGF09-SGGF09

    • DOI

      10.7567/1347-4065/ab6346

    • NAID

      210000157822

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Presentation] シリコン量子ドット積層膜の光導電率評価2022

    • Author(s)
      熊谷 風雅、後藤 和泰、山田 繁、伊藤 貴司、宇佐美 徳隆、黒川 康良
    • Organizer
      第19回次世代の太陽光発電シンポジウム
    • Related Report
      2022 Annual Research Report
  • [Presentation] Application of Bayesian optimization for high-efficiency silicon quantum dot solar cells2022

    • Author(s)
      Yasuyoshi Kurokawa, Fuga Kumagai, Shinsuke Miyagawa, Kazuhiro Gotoh, Satoru Miyamoto, Kentaro Kutsukake, Shinya Kato, and Noritaka Usami
    • Organizer
      European assembly of Advanced Materials Congress
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] ボロンドープしたシリコンナノ結晶/シリコン酸化膜積層構造の作製及び熱電特性評価2022

    • Author(s)
      柴田 啓介、加藤 慎也、黒澤 昌志、後藤 和泰、宮本 聡、宇佐美 徳隆、黒川 康良
    • Organizer
      第83回応用物理学会秋季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Application of Silicon Nanocrystals to Energy Harvesting Devices2022

    • Author(s)
      Yasuyoshi Kurokawa, Fuga Kumagai, Keisuke Shibata, Kazuhiro Gotoh, Satoru Miyamoto, Shinya Kato, and Noritaka Usami
    • Organizer
      Advanced Materials World Congress
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Photoconductivity measurement of silicon quantum dot multilayers for the Bayesian optimization2022

    • Author(s)
      Fuga Kumagai, Kazuhiro Gotoh, Satoru Miyamoto, Shinya Kato, Naoki Matsuo, Shigeru Yamada, Takashi Itoh, Noritaka Usami, Yasuyoshi Kurokawa
    • Organizer
      33rd International Photovoltaic Science and Engineering Conference
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ベイズ最適化を援用したシリコン量子ドット積層構造の高品質化と太陽電池応用2022

    • Author(s)
      熊谷 風雅、後藤 和泰、加藤 慎也、宮本 聡、沓掛 健太朗、宇佐美 徳隆、黒川 康良
    • Organizer
      第70回応用物理学会春季学術講演会
    • Related Report
      2022 Annual Research Report
  • [Presentation] Preparation and thermoelectric characterization of boron-doped silicon nanocrystals/silicon oxide multilayers2022

    • Author(s)
      Keisuke Shibata , Shinya Kato , Masashi Kurosawa , Kazuhiro Gotoh, Satoru Miyamoto, Noritaka Usami, Yasuyoshi Kurokawa
    • Organizer
      International Conference on Solid State Devices and Materials 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of Silicon-nanocrystals-embedded Silicon Oxide Passivating Contacts for Use in Crystalline Silicon Solar Cells2021

    • Author(s)
      Kazuhiro Gotoh, Ryohei Tsubata, Masashi Matsumi, Markus Wilde, Tetsuya Inoue, Yasuyoshi Kurokawa, Katsuyuki Fukutani and Noritaka Usami
    • Organizer
      Global Photovoltaic Conference 2021 (GPVC 2021)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Realization of the Crystalline Silicon Solar Cell Using Nanocrystalline Transport Path in Ultra-thin Dielectrics for Reinforced Passivating Contact2021

    • Author(s)
      Ryohei Tsubata, Kazuhiro Gotoh, Tetsuya Inoue, Yasuyoshi Kurokawa, and Noritaka Usami
    • Organizer
      48th IEEE Photovoltaic Specialists Conference (PVSC)
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] シリコンナノ結晶/酸化シリコン複合膜におけるキャリア選択能の水素プラズマ処理温度依存性2021

    • Author(s)
      松見優志,後藤和泰,ビルデ マーカス,黒川康良,福谷克之,宇佐美徳隆
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] ベイズ最適化を援用したシリコン量子ドット積層構造の欠陥低減2021

    • Author(s)
      熊谷風雅,宮川晋輔, 後藤和泰, 沓掛健太朗, 加藤慎也, 宇佐美徳隆, 黒川康良
    • Organizer
      第82回応用物理学会秋季学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] Effect of Hydrogenation Process on Passivation Performance of Silicon Nano-crystal/Silicon Oxide Compound Layer2021

    • Author(s)
      Masashi Matsumi, Kazuhiro Gotoh, Markus Wilde, Yasuyoshi Kurokawa, Katsuyuki Fukutani and Noritaka Usami
    • Organizer
      31st International Photovoltaic Science and Engineering Conference
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Bayesian Optimization of Hydrogen Plasma Treatment for Reducing Defects in Silicon Quantum Dot Multilayers2021

    • Author(s)
      Fuga Kumagai, Shinsuke Miyagawa, Kazuhiro Gotoh, Satoru Miyamoto, Kentaro Kutsukake, Shinya Kato, Noritaka Usami, Yasuyoshi Kurokawa
    • Organizer
      31st International Photovoltaic Science and Engineering Conference
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Effect of Hydrogen Plasma Treatment on Silicon Quantum Dot Multilalyers Using Amorphous SiOx2020

    • Author(s)
      R. Akaishi, K. Gotoh, N. Usami & Y. Kurokawa
    • Organizer
      37th European PV Solar Eneregy Conference and Exhibition
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Size effect of silicon nanocrystals on Seebeck coefficient of phosphorus-doped Si nanocrystals/silicon oxide multilayers2020

    • Author(s)
      H. Kobayashi, S. Kato, M. Kurosawa, K. Gotoh, N. Usami, and Y. Kurokawa
    • Organizer
      2020 International Conference on Solid State Devices and Materials (SSDM 2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Remarks] 名古屋大学 宇佐美・黒川研究室HP

    • URL

      https://www.material.nagoya-u.ac.jp/photonics/

    • Related Report
      2022 Annual Research Report
  • [Remarks] 名古屋大学研究者総覧

    • URL

      https://profs.provost.nagoya-u.ac.jp/html/100008535_ja.html

    • Related Report
      2022 Annual Research Report 2021 Research-status Report 2020 Research-status Report
  • [Remarks] Researchermap

    • URL

      https://researchmap.jp/kurokawacookie1129

    • Related Report
      2022 Annual Research Report 2021 Research-status Report 2020 Research-status Report
  • [Remarks] 研究室ホームページ

    • URL

      https://www.material.nagoya-u.ac.jp/photonics/publications.html

    • Related Report
      2021 Research-status Report 2020 Research-status Report

URL: 

Published: 2020-04-28   Modified: 2024-01-30  

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