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Three-dimensional magnetic modification by using energy in-plantation process and its device aplication

Research Project

Project/Area Number 20K12497
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Review Section Basic Section 80040:Quantum beam science-related
Research InstitutionOsaka Metropolitan University (2022-2023)
Osaka Prefecture University (2020-2021)

Principal Investigator

MATSUI TOSHIYUKI  大阪公立大学, 国際基幹教育機構, 教授 (20219372)

Co-Investigator(Kenkyū-buntansha) 堀 史説  大阪公立大学, 工学(系)研究科(研究院), 准教授 (20275291)
Project Period (FY) 2020-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
Fiscal Year 2022: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2021: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2020: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Keywords照射誘起強磁性 / クラスターイオンビーム / イオン注入 / 磁性ナノ粒子 / 磁気改質 / 高エネルギーイオンビーム / 照射効果 / XMCD / クラスターイオン
Outline of Research at the Start

本研究は,高エネルギーマイクロイオンビームとクラスターイオンビーム照射を利用した3次元局所傾斜磁気構造構築技術を開発し,新たな動作原理を持つ磁気交換結合素子へ展開するという新規な磁気応用機能開拓を行うことを目的とする.
反強磁性-強磁性メタ磁気相転移を示すFeRh合金に対し,描画機能を持つ高エネルギーマイクロイオンビーム照射を利用したマスクレスナノスケール局所磁気構造作成技術と,クラスターイオン照射による極表面領域での深さ方向への傾斜磁気機能改質技術を融合する技術開発を行うことを目指す.

Outline of Final Research Achievements

We have tried to develop a fabrication technique for three-dimensional gradient magnetic structures using various types of high-energy ion beam irradiation. Also, their application to magnetic exchange coupling devices with a new principle of operation have been investigated. In addition, we have developed materials for composite nanocluster magnetic materials, which will be utilized as the cap layer of the designed three-dimensional magnetic structure.
As a result, we found that cluster ion beam irradiation was an effective method to control the magnetic depth profile of the ultra-surface region of magnetic thin film media, and that magnetic ions are implanted into the silica layer to stabilize the magnetic layer on the polar surface. The combination of these techniques with micro-ion beam technology, suggests the possibility of constructing a three-dimensional locally graded magnetic structure.

Academic Significance and Societal Importance of the Research Achievements

物質表面に3次元磁気構造を人工的に構築する技術の開発とそれを磁気交換結合素子へ展開することにより,従前には無い磁気機能をもつ新奇なデバイスの開発が可能になると推測される.
本研究では,高エネルギーマイクロイオンビームとクラスターイオンビーム照射を利用した3次元局所傾斜磁気構造構築技術の開発を目指し,その磁気構造の構築,評価,物質開発に取り組んだ.結果として,深さ方向へポストプロセスで磁気構造を作りこむことが可能な,高エネルギークラスターイオンビーム照射の活用が,効果的であることを見出した.また,その構造評価技術として深さ方向XMCD評価とそのプロファイル解析技術に関して多様な知見を得た.

Report

(5 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Research-status Report
  • 2021 Research-status Report
  • 2020 Research-status Report
  • Research Products

    (20 results)

All 2024 2023 2022 2021 2020

All Journal Article (6 results) (of which Peer Reviewed: 6 results) Presentation (14 results) (of which Int'l Joint Research: 7 results)

  • [Journal Article] Structure of nanoparticles in amorphous SiO2 by sequential implantation with Co and Ag ions2024

    • Author(s)
      Matsuo S.、Iwase A.、Matsui T.、Yagura R.、Yamada T.、Taguchi N.、Tanaka S.、Semboshi S.、Hori F.
    • Journal Title

      Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

      Volume: 549 Pages: 165278-165278

    • DOI

      10.1016/j.nimb.2024.165278

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Change in local structure and hardness in the amorphization process of Zr45Cu45Al10 alloy by heavy ion irradiation2023

    • Author(s)
      F. Hori, Y. Morikuni, H. Obayashi, A. Iwase, T. Matsui, Y. Kaneno, T. Wada, H. Kato, N. Ishikawa
    • Journal Title

      Nuclear Inst. and Methods in Physics Research, B

      Volume: 535 Pages: 11-14

    • DOI

      10.1016/j.nimb.2022.11.007

    • Related Report
      2022 Research-status Report
    • Peer Reviewed
  • [Journal Article] Structure and magnetic properties of Fe nanoparticles in amorphous silica implanted with Fe ions and effect of subsequent energetic heavy ion irradiation2022

    • Author(s)
      Iwase A.、Fukuda K.、Saitoh Y.、Okamoto Y.、Semboshi S.、Amekura H.、Matsui T.
    • Journal Title

      Journal of Applied Physics

      Volume: 132 Issue: 16 Pages: 163902-163902

    • DOI

      10.1063/5.0102438

    • Related Report
      2022 Research-status Report
    • Peer Reviewed
  • [Journal Article] Characterization of Embedded Nanocomposites in Solid Synthesized by Dual Ion Irradiation2022

    • Author(s)
      F. Hori, T. Yamada, Y. Morikuni, H. Obayashi, A. Iwase, T. Matsui, M. Maekawa, A. Kawasuso
    • Journal Title

      QST Takasaki Annual Report 2020

      Volume: QST-M-33 Pages: 41-41

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Ag-Ni alloy nanocomposites synthesized by silver and nickel ions implantation into amorphous SiO2 glass2021

    • Author(s)
      Fuminobu Hori, Tomoko Yamada, Toshiyuki Matsui, Akihiro Iwase, Masaki Maekawa, Atsuo Kawasuso
    • Journal Title

      Photon Factory Activity Report 2020

      Volume: 1 Pages: 38-38

    • Related Report
      2021 Research-status Report
    • Peer Reviewed
  • [Journal Article] Restoration of ion beam irradiation induced metastable magnetic states and lattice structures of FeRh thin films by heat treatments at elevated temperatures2020

    • Author(s)
      Iwase A.、Yoneda K.、Ishigami R.、Matsui T.
    • Journal Title

      Journal of Magnetism and Magnetic Materials

      Volume: 515 Pages: 167286-167286

    • DOI

      10.1016/j.jmmm.2020.167286

    • Related Report
      2020 Research-status Report
    • Peer Reviewed
  • [Presentation] SiO2へのAgおよびCo二重イオン照射注入による生成粒子の照射順序依存性2024

    • Author(s)
      松尾駿之介, 岩瀬彰宏, 松井利之, 田口昇, 田中真悟, 千星聡, 堀史説
    • Organizer
      日本金属学会
    • Related Report
      2023 Annual Research Report
  • [Presentation] Formation of metal nanocomposites in amorphous SiO2 by multiple irradiation of Ag and Co ions2023

    • Author(s)
      S.Matsuo, T.Matsui, A.Iwase, T.Yamada, S.Semboshi, N.Taguchi, S.Tanaka, F.Hori
    • Organizer
      REI20 20th Int. Conf. on Radiation Effects in Insulators
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] The effect of implantation sequence on nanocomposite formation by Ag and Ni ions implantation into SiO22023

    • Author(s)
      T.Yamada, T.Matsui, A.Iwase, N.Taguchi, S.Tanaka, S.Semboshi, F.Hori
    • Organizer
      REI20 20th Int. Conf. on Radiation Effects in Insulators
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] AgとCo二重イオン照射注入によるSiO2中での金属ナノ複合化2023

    • Author(s)
      松尾駿之介、岩瀬彰宏、松井利之、田口昇、田中真悟、千星聡、堀史説
    • Organizer
      日本金属学会
    • Related Report
      2023 Annual Research Report
  • [Presentation] イオンビーム照射と熱処理によるFeRhの反強磁性-強磁性転移温度の制御2023

    • Author(s)
      岩瀬彰宏, 石神龍哉, 松井利之
    • Organizer
      日本物理学会
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] 多重イオン照射によるアモルファスガラス中での金属ナノ粒子複合化制御2022

    • Author(s)
      山田智子,田口昇,田中真悟,岩瀬彰宏,松井利之,千星聡, 堀史説
    • Organizer
      ナノ学会
    • Related Report
      2022 Research-status Report
  • [Presentation] Local structure and hardness change in the amorphization process of ZrCuAl alloys by heavy ion irradiation2022

    • Author(s)
      F. Hori, Y. Morikuni, H. Obayashi, A. Iwase, T. Matsui, Y. Kaneno, T. Wada, H. Kato, N. Ishikawa
    • Organizer
      SHIM & ICACS
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Changes in microstructure and hardness of Ni-Zr alloy by heavy ion irradiatio2022

    • Author(s)
      H. Obayshi, A. Iwase, Y. Kanen T. Matsui, T. Wada, H. Kato, N. Ishikawa, F. Hori
    • Organizer
      MRS-J
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] Control of antiferromagnetic-ferromagnetic transition temperatures of FeRh intermetallic compound by combination of energetic ion irradiation and high temperature heat treatment2022

    • Author(s)
      A. Iwase, R. Ishigami and T. Matsui
    • Organizer
      MRS-J
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] 二重イオン照射順序制御によるSiO2固体内Ag-Niナノ構造体の微細構造変化2022

    • Author(s)
      山田智子、岩瀬彰宏、松井利之、前川雅樹、河裾厚男、千星聡、田口昇、田中慎吾、堀史説
    • Organizer
      日本金属学会春期大会
    • Related Report
      2021 Research-status Report
  • [Presentation] The optical property of nanocomposites formed by Ag and Ni dual ions implantation in SiO2 glass2021

    • Author(s)
      T. Yamada, A. Iwase, T. Matsui, M. Maekawa, A. Kawasuso, N. Taguchi, S. Tanaka and F. Hori
    • Organizer
      Materials Research Meeting MRM2021
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] SiO2ガラスへの多重イオン照射による金属ナノ粒子変形と特性2021

    • Author(s)
      SiO2ガラスへの多重イオン照射による金属ナノ粒子変形と特性
    • Organizer
      ナノ学会
    • Related Report
      2021 Research-status Report
  • [Presentation] 二重イオン照射によるSiO2内 Ag-Ni複合粒子合成における微細構造の照射順序効果.2021

    • Author(s)
      山田智子、岩瀬彰宏、松井利之、前川雅樹、河裾厚男、堀史説
    • Organizer
      日本金属学会秋期大会
    • Related Report
      2021 Research-status Report
  • [Presentation] アモルファスSiO2へのイオン注入制御による Ag-Ni複合粒子の微細構造2021

    • Author(s)
      山田智子
    • Organizer
      2021年金属学会春季後援会
    • Related Report
      2020 Research-status Report

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Published: 2020-04-28   Modified: 2025-01-30  

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