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Nanoengineered nanochannels for energy harvesting of low-grade waste heat

Research Project

Project/Area Number 20K15147
Research Category

Grant-in-Aid for Early-Career Scientists

Allocation TypeMulti-year Fund
Review Section Basic Section 28050:Nano/micro-systems-related
Research InstitutionTohoku University

Principal Investigator

Nguyen Van Toan  東北大学, 工学研究科, 准教授 (30795117)

Project Period (FY) 2020-04-01 – 2024-03-31
Project Status Completed (Fiscal Year 2023)
Budget Amount *help
¥2,730,000 (Direct Cost: ¥2,100,000、Indirect Cost: ¥630,000)
Fiscal Year 2022: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2021: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2020: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
KeywordsNanochannels / Energy harvesting / IoT sensing systems / Thermoelectric generator / Energy conversion / Thermoelectric materials / Nanofluidic transport / Anodized aluminum oxide / Ionic nanofluidic / MACE / TEGs
Outline of Research at the Start

Several energy harvesting systems have been developed to collect energy from ambient energy sources, such as sunlight, vibration and heat.These systems pose advantages and disadvantages. Herein, a novel concept of a combination between fluidic transport in nanochannels and thermal charging of metal oxide material is proposed which expect to generate a higher output voltage as well as the electrical power.

Outline of Final Research Achievements

This work demonstrates thermal-to-electric energy conversion based on ionic nanofluidic transport in nanochannels inducted by a temperature gradient. Two types of highly periodic and high aspect ratio nanochannels have been fabricated in a silicon (Si) substrate and in an aluminium oxide (Al2O3) membrane. Silicon nanochannels with diameter of 100 nm and height of 300 μm have been produced by metal-assisted chemical etching process (MACE), while nanochannels with the dimensions of the 10 nm and 3 μm respectively, were fabricated in a Al2O3 membrane by the anodic aluminum oxidation (AAO) process. Moreover, a novel approach of thermally nanofluidic energy harvesting was proposed and conducted. This investigation may open new opportunities for the future thermoelectric generators based on ionic transport in nanochannels.

Academic Significance and Societal Importance of the Research Achievements

The harvested power in this work could be used as a green energy source to power wireless IoT sensing systems. Between 2020 and 2023, I published 15 peer-reviewed journal articles, 1 book chapter and result achievement has been presented at over 10 international conferences.

Report

(5 results)
  • 2023 Annual Research Report   Final Research Report ( PDF )
  • 2022 Research-status Report
  • 2021 Research-status Report
  • 2020 Research-status Report
  • Research Products

    (42 results)

All 2024 2023 2022 2021 2020

All Journal Article (23 results) (of which Int'l Joint Research: 20 results,  Peer Reviewed: 11 results,  Open Access: 5 results) Presentation (19 results) (of which Int'l Joint Research: 9 results,  Invited: 5 results)

  • [Journal Article] A Large-Stroke 3-DOF Micromirror With Novel Lorentz Force-Based Actuators Utilizing Metallic Glass Thin Film2024

    • Author(s)
      Ou Chuan-Hui、Van Toan Nguyen、Tsai Yao-Chuan、Voiculescu Ioana、Toda Masaya、Ono Takahito
    • Journal Title

      Journal of Microelectromechanical Systems

      Volume: 33 Issue: 1 Pages: 46-53

    • DOI

      10.1109/jmems.2023.3337333

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Nanoengineered micro-supercapacitors based on graphene nanowalls for self-powered wireless sensing system2024

    • Author(s)
      Van Toan Nguyen、Sui Hongtao、Li Jinhua、Tuoi Truong Thi Kim、Ono Takahito
    • Journal Title

      Journal of Energy Storage

      Volume: 81 Pages: 110446-110446

    • DOI

      10.1016/j.est.2024.110446

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Electrodeposited Bismuth Telluride Nanocomposite Thermoelectric Film with Improved Graphene Deposition2023

    • Author(s)
      Khairul Fadzli Samat, Muhammad Afiff Alias, Nuraiham Mohamed, Mohd Warikh Abd Rashid, Mohd Asyadi Azam, Nguyen Van Toan, Takahito Ono, Alicja Klimkowicz, Akito Takasaki
    • Journal Title

      Journal of Advanced Research in Applied Mechanics

      Volume: 111 Pages: 161-172

    • Related Report
      2023 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Self-powered wireless sensing system driven by daily ambient temperature energy harvesting2022

    • Author(s)
      Thi Kim Tuoi Truong、Van Toan Nguyen、Ono Takahito
    • Journal Title

      Applied Energy

      Volume: 311 Pages: 118679-118679

    • DOI

      10.1016/j.apenergy.2022.118679

    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Journal Article] Ultra-flexible thermoelectric generator based on silicone rubber sheet and electrodeposited thermoelectric material for waste heat harvesting2022

    • Author(s)
      Toan Nguyen Van、Tuoi Truong Thi Kim、Sui Hongtao、Trung Nguyen Huu、Samat Khairul Fadzli、Ono Takahito
    • Journal Title

      Energy Reports

      Volume: 8 Pages: 5026-5037

    • DOI

      10.1016/j.egyr.2022.03.121

    • Related Report
      2022 Research-status Report
    • Open Access
  • [Journal Article] High-performance flexible thermoelectric generator for self-powered wireless BLE sensing systems2022

    • Author(s)
      Van Toan Nguyen、Kim Tuoi Truong Thi、Ono Takahito
    • Journal Title

      Journal of Power Sources

      Volume: 536 Pages: 231504-231504

    • DOI

      10.1016/j.jpowsour.2022.231504

    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Journal Article] Nanoengineered nanochannels for thermally ionic nanofluidic energy harvesting2022

    • Author(s)
      Van Toan Nguyen、Tuoi Truong Thi Kim、Inomata Naoki、Hasnan Megat Muhammad Ikhsan Megat、Toda Masaya、Voiculescu Ioana、Said Suhana Mohd、Ono Takahito
    • Journal Title

      Energy Conversion and Management

      Volume: 264 Pages: 115760-115760

    • DOI

      10.1016/j.enconman.2022.115760

    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Journal Article] Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro-thermoelectric generator2022

    • Author(s)
      Van Toan Nguyen、Ito Keisuke、Tuoi Truong Thi Kim、Toda Masaya、Chen Po-Hung、Sabri Mohd Faizul Mohd、Li Jinhua、Ono Takahito
    • Journal Title

      Energy Conversion and Management

      Volume: 267 Pages: 115923-115923

    • DOI

      10.1016/j.enconman.2022.115923

    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Journal Article] Highly enhanced thermoelectric and mechanical properties of Bi2Te3 hybrid nanocomposite with inclusion of Pt nanoparticles and SWCNTs2022

    • Author(s)
      Samat Khairul Fadzli、Li Yijie、Van Toan Nguyen、Azam Mohd Asyadi、Ono Takahito
    • Journal Title

      Journal of Materials Research

      Volume: 37 Issue: 20 Pages: 3445-3458

    • DOI

      10.1557/s43578-022-00694-z

    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Journal Article] Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices2021

    • Author(s)
      Van Toan Nguyen、Tuoi Truong Thi Kim、Inomata Naoki、Toda Masaya、Ono Takahito
    • Journal Title

      Scientific Reports

      Volume: 11 Issue: 1 Pages: 1-12

    • DOI

      10.1038/s41598-020-80880-3

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Thermoelectric generator with a high integration density for portable and wearable self-powered electronic devices2021

    • Author(s)
      Van Toan Nguyen、Thi Kim Tuoi Truong、Van Hieu Nguyen、Ono Takahito
    • Journal Title

      Energy Conversion and Management

      Volume: 245 Pages: 114571-114571

    • DOI

      10.1016/j.enconman.2021.114571

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Morphological Analysis and Properties Evaluation of Electrodeposited Thick BiSbTe Films with Cooperative Interactions among Multiple Additives2021

    • Author(s)
      Yu Wei、Van Toan Nguyen、Li Yi Jie、Wang Zhuqing、Ono Takahito、Wang Ruochen
    • Journal Title

      Journal of The Electrochemical Society

      Volume: 168 Issue: 2 Pages: 022505-022505

    • DOI

      10.1149/1945-7111/abdd7b

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Heat storage thermoelectric generator as an electrical power source for wireless Iot sensing systems2021

    • Author(s)
      Tuoi Truong Thi Kim、Van Toan Nguyen、Ono Takahito
    • Journal Title

      International Journal of Energy Research

      Volume: 45 Issue: 10 Pages: 15557-15568

    • DOI

      10.1002/er.6774

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Formation and Evaluation of Silicon Substrate with Highly-Doped Porous Si Layers Formed by Metal-Assisted Chemical Etching2021

    • Author(s)
      Li Yijie、Van Toan Nguyen、Wang Zhuqing、Samat Khairul Fadzli Bin、Ono Takahito
    • Journal Title

      Nanoscale Research Letters

      Volume: 16 Issue: 1 Pages: 1-8

    • DOI

      10.1186/s11671-021-03524-z

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Evaluation of Microfluidic Channels With Thin Si Windows and Trapping Structures2021

    • Author(s)
      Toda Masaya、Hayashi Hideki、Toan Nguyen van、Inomata Naoki、Ono Takahito
    • Journal Title

      Journal of Microelectromechanical Systems

      Volume: 30 Issue: 4 Pages: 560-568

    • DOI

      10.1109/jmems.2021.3076791

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Vertically-oriented graphene electrodeposited with MnO2 on native SiO2/Si for high-performance supercapacitor electrodes2021

    • Author(s)
      Sui Hongtao、Van Toan Nguyen、Ono Takahito
    • Journal Title

      Journal of Electroanalytical Chemistry

      Volume: 895 Pages: 115507-115507

    • DOI

      10.1016/j.jelechem.2021.115507

    • Related Report
      2021 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Thermoelectrical properties of silicon substrates with nanopores synthesized by metal-assisted chemical etching2020

    • Author(s)
      Li Yijie、Toan Nguyen Van、Wang Zhuqing、Samat Khairul Fadzli、Ono Takahito
    • Journal Title

      Nanotechnology

      Volume: 31 Issue: 45 Pages: 455705-455705

    • DOI

      10.1088/1361-6528/ab8fe1

    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Journal Article] High Performance Thermoelectric Films with Nanoengineered Electrochemical Process for Micro Thermoelectric Power Generators2020

    • Author(s)
      Ono Takahito、Van Toan Nguyen、Bin Samat Khairul Fadzli
    • Journal Title

      ECS Meeting Abstracts

      Volume: MA2020-01 Issue: 19 Pages: 1204-1204

    • DOI

      10.1149/ma2020-01191204mtgabs

    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Journal Article] Magnetostrictive Performance of Electrodeposited TbxDy(1?x)Fey Thin Film with Microcantilever Structures2020

    • Author(s)
      Shim Hang、Sakamoto Kei、Inomata Naoki、Toda Masaya、Toan Nguyen Van、Ono Takahito
    • Journal Title

      Micromachines

      Volume: 11 Issue: 5 Pages: 523-523

    • DOI

      10.3390/mi11050523

    • Related Report
      2020 Research-status Report
    • Open Access
  • [Journal Article] Bridged resonator based on assembled Si thin wire2020

    • Author(s)
      Toda Masaya、Nakamura Taichi、Inomata Naoki、Toan Nguyen Van、Ono Takahito
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 30 Issue: 10 Pages: 105015-105015

    • DOI

      10.1088/1361-6439/aba6cc

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Theoretical and experimental investigation of a thermoelectric generator (TEG) integrated with a phase change material (PCM) for harvesting energy from ambient temperature changes2020

    • Author(s)
      Tuoi Truong Thi Kim、Toan Nguyen Van、Ono Takahito
    • Journal Title

      Energy Reports

      Volume: 6 Pages: 2022-2029

    • DOI

      10.1016/j.egyr.2020.07.023

    • Related Report
      2020 Research-status Report
    • Open Access
  • [Journal Article] Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology2020

    • Author(s)
      Van Toan Nguyen、Kim Tuoi Truong Thi、Li Jinhua、Inomata Naoki、Ono Takahito
    • Journal Title

      Materials Research Bulletin

      Volume: 131 Pages: 110977-110977

    • DOI

      10.1016/j.materresbull.2020.110977

    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Journal Article] Thermoelectric generators for heat harvesting: From material synthesis to device fabrication2020

    • Author(s)
      Van Toan Nguyen、Tuoi Truong Thi Kim、Ono Takahito
    • Journal Title

      Energy Conversion and Management

      Volume: 225 Pages: 113442-113442

    • DOI

      10.1016/j.enconman.2020.113442

    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] A large-stroke tip-tilt-pistion micromirror with electromagnetic actuators based on metallic glass2023

    • Author(s)
      Chuan-hui Ou, Nguyen Van Toan, and Takahito Ono
    • Organizer
      The 36th International conference on micro electro mechanical systems (MEMS 2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Autonomous IoT senosrs for infrastructure monitoring2023

    • Author(s)
      Akane Kobayashi, Truong Thi Kim Tuoi, Nguyen Van Toan, and Takahito Ono
    • Organizer
      The 78th ubiquitous computing system research conference
    • Related Report
      2023 Annual Research Report
  • [Presentation] Thermoelectric generators and its applications2023

    • Author(s)
      Nguyen Van Toan
    • Organizer
      Joint workshop National Tsing Hua University and Tohoku University
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] IoT sensing systems driven by daily ambient temperature variations2023

    • Author(s)
      Truong Thi Kim Tuoi, Nguyen Van Toan, Nguyen Van Hieu and Takahito Ono
    • Organizer
      The 4th international conference on engineering physics, MEMS-Biosensors and applications (4th ICEBA 2023)
    • Related Report
      2023 Annual Research Report
    • Int'l Joint Research
  • [Presentation] A power management circuit of Thermoelectric Generator (TEGs) using wakeup-timer IC toward the applications in green agriculture2023

    • Author(s)
      Nguyen Hoang Quan, Ho Thanh Huy, Nguyen Phan Minh Nguyet, Nguyen Van An, Nguyen Chi Nhan, Nguyen Van Toan and Nguyen Van Hieu
    • Organizer
      The 4th international conference on engineering physics, MEMS-Biosensors and applications (4th ICEBA 2023)
    • Related Report
      2023 Annual Research Report
  • [Presentation] High density micro-thermoelectric generator based on electrodeposition of Bi2Te3 and Sb2Te32022

    • Author(s)
      Cheng Hou Chang, Nguyen Van Toan*, and Takahito Ono
    • Organizer
      The 35th International conference on micro electro mechanical systems (MEMS 2022)
    • Related Report
      2022 Research-status Report
    • Int'l Joint Research
  • [Presentation] A large stroke three-degree-of-freedom electromagnetic micromirror with metallic glass springs2022

    • Author(s)
      Chuan-hui Ou, Nguyen Van Toan, and Takahito Ono
    • Organizer
      Sensor symposium 2022
    • Related Report
      2022 Research-status Report
  • [Presentation] Electrochemical micro methanation device2022

    • Author(s)
      Shigeki Kawamura, Takahito Ono, Masaya Toda, Nguyen Van Toan
    • Organizer
      The 13th micro/nano engineering symposium
    • Related Report
      2022 Research-status Report
  • [Presentation] A micromirror driven by electromagnetic force for fourier transform infrared spectroscopy2022

    • Author(s)
      Chuan-hui Ou, Nguyen Van Toan, and Takahito Ono
    • Organizer
      The 3rd international workshop on engineering physics, IC-MEMS-Sensors and their applications
    • Related Report
      2022 Research-status Report
  • [Presentation] Heat storage thermoelectric generator for wireless IoT sensing systems2022

    • Author(s)
      Takahito Ono, Nguyen Van Toan, and Truong Thi Kim Tuoi
    • Organizer
      The 2022 International Meeting for Future of Electron Devices (IMFEDK 2022)
    • Related Report
      2022 Research-status Report
    • Invited
  • [Presentation] Thermoelectric generator with a high integration density for portable and wearable self-powered electronic devices2022

    • Author(s)
      Nguyen Van Toan, Truong Thi Kim Tuoi, Nguyen Van Hieu, and Takahito Ono
    • Organizer
      The 3rd international workshop on engineering physics, IC-MEMS-Sensors and their applications
    • Related Report
      2022 Research-status Report
    • Invited
  • [Presentation] Self-powered wireless BLE sensing system driven by low-temperature waste heat2022

    • Author(s)
      Nguyen Van Toan, Truong Thi Kim Tuoi and Takahito Ono
    • Organizer
      The 7th Southeast Asia Conference on Thermoelectrics
    • Related Report
      2022 Research-status Report
    • Invited
  • [Presentation] Heat storage thermoelectric generator for wireless IoT sensing systems2021

    • Author(s)
      Truong Thi Kim Tuoi, Nguyen Van Toan, and Takahito Ono
    • Organizer
      The 21st International conference on solid-state sensors, actuators and microsystems
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] High-performance thermoelectric generator for self-powered wireless sensing systems2021

    • Author(s)
      Nguyen Van Toan, Truong Thi Kim Tuoi, and Takahito Ono
    • Organizer
      Joint workshop between Tohoku University and National Chiao Tung University
    • Related Report
      2021 Research-status Report
    • Int'l Joint Research
  • [Presentation] Thermoelectric power generator for self-powered systems2021

    • Author(s)
      Nguyen Van Toan, Truong Thi Kim Tuoi, and Takahito Ono
    • Organizer
      第19回MEMS集中講義 (The 19th MEMS concentration lecture)
    • Related Report
      2021 Research-status Report
    • Invited
  • [Presentation] Thermoelectric power generator for self-powered wireless IoT sensing systems2021

    • Author(s)
      Nguyen Van Toan, Truong Thi Kim Tuoi, and Takahito Ono
    • Organizer
      スマート社会~センサ技術調査専門委員会
    • Related Report
      2021 Research-status Report
    • Invited
  • [Presentation] High performance micro-thermoelectric generator based on metal doped electrochemical deposition2020

    • Author(s)
      Nguyen Van Toan, Truong Thi Kim Tuoi, Khairul Fadzli Samat, Hongtao Sui, Naoki Inomata, Masaya Toda and Takahito Ono
    • Organizer
      The 33rd IEEE international conference on Micro Electro Mechanical Systems (IEEE-MEMS 2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Carbon black nanoparticles inclusion in bismuth telluride film for micro thermoelectric generator application2020

    • Author(s)
      Khairul Fadzli Samat, Yijie Li, Nguyen Van Toan, and Takahito Ono
    • Organizer
      The 33rd IEEE international conference on Micro Electro Mechanical Systems (IEEE-MEMS 2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] A micromirror driven by electromagnetic force for fourier transform infared spectroscopy2020

    • Author(s)
      Chuan-Hui Ou, Nguyen Van Toan, and Takahito Ono
    • Organizer
      33rd International microprocesses and nanotechnology conference (MNC 2020)
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research

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Published: 2020-04-28   Modified: 2025-01-30  

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