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Development of 1 nm X-ray focusing system

Research Project

Project/Area Number 20K20444
Project/Area Number (Other) 19H05523 (2019)
Research Category

Grant-in-Aid for Challenging Research (Pioneering)

Allocation TypeMulti-year Fund (2020)
Single-year Grants (2019)
Review Section Medium-sized Section 30:Applied physics and engineering and related fields
Research InstitutionThe University of Tokyo

Principal Investigator

Mimura Hidekazu  東京大学, 先端科学技術研究センター, 教授 (30362651)

Co-Investigator(Kenkyū-buntansha) 木村 隆志  東京大学, 物性研究所, 准教授 (50531472)
Project Period (FY) 2019-06-28 – 2023-03-31
Project Status Completed (Fiscal Year 2022)
Budget Amount *help
¥25,610,000 (Direct Cost: ¥19,700,000、Indirect Cost: ¥5,910,000)
Fiscal Year 2022: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2021: ¥8,970,000 (Direct Cost: ¥6,900,000、Indirect Cost: ¥2,070,000)
Fiscal Year 2020: ¥7,020,000 (Direct Cost: ¥5,400,000、Indirect Cost: ¥1,620,000)
Fiscal Year 2019: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
KeywordsX線ミラー / X線集光 / 集光 / X線イメージング / 精密加工 / 精密計測 / 高精度ミラー / X線 / X線ミラー / X線集光
Outline of Research at the Start

光の集光サイズは、波長と光学系の開口数で決定される。波長の短いX線を利用すれば、10nm以下の集光サイズが可能である。本研究では、「多層膜3次反射」の「超小型ミラー」というアイディアの導入により、硬X線を1nmレベルに集光することを最終目的としている。本研究では、波長が1nmの軟X線を利用した集光実験から開始し、軟X線集光実験を通して小型ミラー基板の作製技術とミラー集光アライメント装置を開発し、最終的には3次反射可能な多層膜のコーティングにより硬X線を反射可能とすることで、1nmレベルの集光を目指す。

Outline of Final Research Achievements

In this research, we introduced the idea of significant reduction in mirror length in X-ray focusing using mirrors, aiming for ultimate focusing down to a size of 1 nm. This was a challenging study. During the research period, we successfully developed a high-precision focusing mirror with a focal length of 2 mm and a mirror length of 2 mm. We also achieved diffraction-limited focusing of 20 nm for 2 keV X-rays at SPring-8, and confirmed that it is possible to focus X-rays below 4 nm theoretically for 10 keV X-rays.

Academic Significance and Societal Importance of the Research Achievements

従来のX線ミラーのミラー長は報告されている中では20mmが最小である。本研究ではその1/10の2mm長のミラーの開発に成功した。光の集光においては焦点距離を短くすることで、理論的に誤差の影響を少なくすることができる。本研究における成果はミラーによるX線の極限集光の道を拓いたといえる。開発したミラーを用いれば、X線顕微鏡のシステムの超小型化も可能であり、多くのX線分析技術の性能向上に寄与することができる。

Report

(5 results)
  • 2022 Annual Research Report   Final Research Report ( PDF )
  • 2021 Research-status Report
  • 2020 Research-status Report
  • 2019 Annual Research Report
  • Research Products

    (12 results)

All 2023 2022 2021 2020 2019

All Journal Article (2 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 2 results,  Open Access: 2 results) Presentation (10 results) (of which Int'l Joint Research: 7 results)

  • [Journal Article] Fabrication of ultrashort sub-meter-radius x-ray mirrors using dynamic stencil deposition with figure correction2023

    • Author(s)
      Shimamura Takenori、Takeo Yoko、Kimura Takashi、Perrin Francois、Vivo Amparo、Senba Yasunori、Kishimoto Hikaru、Ohashi Haruhiko、Mimura Hidekazu
    • Journal Title

      Review of Scientific Instruments

      Volume: 94 Issue: 4 Pages: 043102-043102

    • DOI

      10.1063/5.0135367

    • Related Report
      2022 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] Design of ultrashort Kirkpatrick-Baez mirror for soft x-ray nanofocusing2020

    • Author(s)
      Takenori Shimamura, Yoko Takeo, Takashi Kimura, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
    • Journal Title

      SPIE Proceedings

      Volume: 11492 Pages: 1-9

    • DOI

      10.1117/12.2569845

    • Related Report
      2020 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] “Design of soft x-ray fluorescence microscopy beyond 100-nm spatial resolution with ultrashort Kirkpatrick-Baez mirror2022

    • Author(s)
      T. Shimamura, Y. Takeo, F. Moriya, T. Kimura, M. Shimura, Y. Senba, H. Kishimoto, H. Ohashi, K. Shimba, Y. Jimbo, and H. Mimura
    • Organizer
      SPIE Optical Engineering + Applications, 2022
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of ultrashort Kirkpatrick-Baez mirrors for sub-50-nm achromatic soft-X-ray probes2022

    • Author(s)
      T. Shimamura, Y. Takeo, T. Kimura, M. Shimura, Y. Senba, H. Kishimoto, H. Ohashi, and H. Mimura
    • Organizer
      XOPT2022 (International Conference on X-ray Optics and Application)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Design, fabrication, and testing of 2-mm-long X-ray mirrors for soft-X-ray nanofocusing2022

    • Author(s)
      T. Shimamura, Y. Takeo, T. Kimura, Y. Senba, H. Kishimoto, H. Ohashi, and H. Mimura
    • Organizer
      IWXM 2022 (7th International Workshop on Metrology for X-ray Optics, Mirror Design and Fabrication)
    • Related Report
      2022 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 超小型 KB ミラーを用いた軟 X 線 sub 50 nm 集光システムの開発2021

    • Author(s)
      島村 勇徳, 竹尾 陽子, 木村 隆志, 仙波 泰徳, 岸本 煇, 大橋 治彦, 三村 秀和
    • Organizer
      2021年度精密工学会秋季大会学術講演会
    • Related Report
      2021 Research-status Report
  • [Presentation] 軟X線による超小型Kirkpatrick-Baezミラーの特性評価2021

    • Author(s)
      島村 勇徳, 竹尾 陽子, 木村 隆志, 仙波 泰徳, 岸本 輝, 大橋 治彦, 三村 秀和
    • Organizer
      第34回日本放射光学会年会・放射光科学合同シンポジウム, オンライン開催
    • Related Report
      2020 Research-status Report
  • [Presentation] 差分成膜法による超小型X線集光ミラーの作製2021

    • Author(s)
      島村 勇徳, 竹尾 陽子, 木村 隆志, 仙波 泰徳, 岸本 輝, 大橋 治彦, 三村 秀和
    • Organizer
      2021年度精密工学会春季大会学術講演会, オンライン開催
    • Related Report
      2020 Research-status Report
  • [Presentation] Design of ultrashort Kirkpatrick-Baez mirror for soft x-ray nanofocusing2020

    • Author(s)
      Takenori Shimamura, Yoko Takeo, Takashi Kimura, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
    • Organizer
      Advances in Metrology for X-Ray and EUV Optics IX,Optical Engineering + Applications, SPIE Optics + Photonics 2020 Digital Forum, Online Only
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Development of ultra-short Kirkpatrick-Baez mirror system for nano-focusing of soft X-rays2020

    • Author(s)
      Takenori Shimamura, Yoko Takeo, Takashi Kimura, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, and Hidekazu Mimura
    • Organizer
      XOPT2-01, XOPT2020 (International Conference on X-ray Optics and Application), OPIC2020 (OPTICS & PHOTONICS International Congress 2020), Online Only
    • Related Report
      2020 Research-status Report
    • Int'l Joint Research
  • [Presentation] Development of Small Kirkpatrick-Baez Mirror System for Nano-Focusing of X-Rays2019

    • Author(s)
      T. Shimamura, H. Mimura
    • Organizer
      XOPT2019 (International Conference on X-ray Optics and Application)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of ultra-small mirrors for soft-X-ray nano-focusing by differential deposition2019

    • Author(s)
      T. Shimamura, H. Mimura,
    • Organizer
      The 8th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2019)
    • Related Report
      2019 Annual Research Report
    • Int'l Joint Research

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Published: 2019-07-04   Modified: 2024-03-26  

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