| Budget Amount *help |
¥251,290,000 (Direct Cost: ¥193,300,000、Indirect Cost: ¥57,990,000)
Fiscal Year 2013: ¥53,040,000 (Direct Cost: ¥40,800,000、Indirect Cost: ¥12,240,000)
Fiscal Year 2012: ¥53,040,000 (Direct Cost: ¥40,800,000、Indirect Cost: ¥12,240,000)
Fiscal Year 2011: ¥74,100,000 (Direct Cost: ¥57,000,000、Indirect Cost: ¥17,100,000)
Fiscal Year 2010: ¥71,110,000 (Direct Cost: ¥54,700,000、Indirect Cost: ¥16,410,000)
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| Research Abstract |
We fabricated a MEMS device using the micro-nano fabrication technology of semiconductor devices and operated it in a transmission electron microscope (TEM). Our experimental setup enabled to measure the deformation process of a nano object due to the external force, the diffusion across the solid interface, atomic transport by electric field, the electrical conductivity and the heat transfer at the nano-scale. The comparison between our experimental results and computer analysis, such as molecular dynamics and ab-initio base simulation have elucidated microscopic mechanisms of nano scaled phenomena. Such understanding of the microscopic mechanisms will help solving problems associated with practical applications, such as efficient cooling in microelectronics, diffusion bonding technology, electrical noise due to the motion of dislocations in the electric wiring, degradation of the electrical contact, and nano-tribology.
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