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Research on Thin Pixel Detector with SOI Technology for High-rate Experiments

Research Project

Project/Area Number 21244040
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Particle/Nuclear/Cosmic ray/Astro physics
Research InstitutionHigh Energy Accelerator Research Organization

Principal Investigator

ARAI Yasuo  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 教授 (90167990)

Co-Investigator(Kenkyū-buntansha) TSUBOYAMA Toru  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 講師 (80188622)
HARA Kazuhiko  筑波大学, 数理物質科学研究科, 准教授 (20218613)
MIYOSHI Toshinobu  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 助教 (20470015)
Co-Investigator(Renkei-kenkyūsha) UNNO Yoshinobu  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 教授 (40151956)
ICHIMIYA Ryo  大学共同利用機関法人高エネルギー加速器研究機構, 素粒子原子核研究所, 研究員 (80435627)
Project Period (FY) 2009 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥40,170,000 (Direct Cost: ¥30,900,000、Indirect Cost: ¥9,270,000)
Fiscal Year 2012: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2011: ¥17,940,000 (Direct Cost: ¥13,800,000、Indirect Cost: ¥4,140,000)
Fiscal Year 2010: ¥10,920,000 (Direct Cost: ¥8,400,000、Indirect Cost: ¥2,520,000)
Fiscal Year 2009: ¥7,150,000 (Direct Cost: ¥5,500,000、Indirect Cost: ¥1,650,000)
KeywordsSilicon On Insulator / Pixel 検出器 / 素粒子実験 / 半導体超微細化 / 放射線 / Silicon-On-Insulator / 放射線、X線、粒子線 / ピクセル検出器 / 放射線イメージセンサー / Silicon-On Insulator
Research Abstract

In this research project, we developed Silicon-On-Insulator (SOI)pixel radiation detectors (called SOIPIX) which can be thinned to 50 um and have more than 1 Mega pixels. We have demonstrated the resolution of a few micron by doingaccelerator beam test. In addition, we performed radiation tolerance test of the detector and made simulations to study its mechanism, and improved the tolerance by changing the process.

Report

(5 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (101 results)

All 2013 2012 2011 2010 2009 Other

All Journal Article (31 results) (of which Peer Reviewed: 22 results) Presentation (57 results) (of which Invited: 3 results) Remarks (5 results) Patent(Industrial Property Rights) (8 results) (of which Overseas: 1 results)

  • [Journal Article] Design and Evaluation of a SOI Pixel Sensor for X-ray Trigger-driven Readout2013

    • Author(s)
      Ayaki Takeda, Yasuo Arai, et al
    • Journal Title

      IEEE Trans.on Nucl. Sci., Vol. PP, Issue

      Volume: 99 Issue: 2 Pages: 586-591

    • DOI

      10.1109/tns.2012.2225072

    • Related Report
      2012 Annual Research Report 2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Monolithic Pixel Detectors With 0.2um FD-SOI Pixel Process Technology2013

    • Author(s)
      T. Miyoshi
    • Journal Title

      Nuclear Instruments and Methods in Physics Research Section A

      Volume: 印刷中

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Tests With Soft X-rays of an Improved Monolithic SOI Active Pixel Sensor2013

    • Author(s)
      丸藤竜之介、他
    • Journal Title

      IEEE Transactions on Nuclear Science (TNS)

      Volume: 60 Issue: 1 Pages: 465-469

    • DOI

      10.1109/tns.2012.2231880

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of the Pixel OR SOI Detector for High Energy Physics Experiments2013

    • Author(s)
      Y. Ono
    • Journal Title

      Nuclear Instruments and Methods in Physics Research Section A

      Volume: 印刷中

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of FD-SOI Monolithic Pixel Devices for High-Energy Charged Particle Detection2011

    • Author(s)
      K. Shinsho, K. Hara, Y. Arai, T. Miyoshi, et al.
    • Journal Title

      IEEE Nuclear Science Symposium CR N21-1

    • Related Report
      2012 Final Research Report
  • [Journal Article] SOI Readout ASIC of Pair-monitor for International Linear Collider2011

    • Author(s)
      Yutaro Sato, Yasuo Arai, et al
    • Journal Title

      Nuclear Inst. and Methods in Physics Research, A、10.1016/j.nima

      Volume: Vol. 637, Isuue 1 Issue: 1 Pages: 53-59

    • DOI

      10.1016/j.nima.2011.02.063

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Development of SOI Pixel Process Technology2011

    • Author(s)
      Y. Arai, T. Miyoshi, Y. Unno, T. Tsuboyama, K. Hara, et al.
    • Journal Title

      Nucl. Instr. and Meth

      Volume: Vol. 636, Issue 1 Issue: 1 Pages: S31-S36

    • DOI

      10.1016/j.nima.2010.04.081

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Performance study of SOI monolithic pixel detectors for X-ray application2011

    • Author(s)
      T. Miyoshi, Y. Arai, T. Tsuboyama, Y. Unno, et al.
    • Journal Title

      Nucl. Instr. and Meth.

      Volume: A Vol. 636 Issue: 1 Pages: S237-S241

    • DOI

      10.1016/j.nima.2010.04.117

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Radiation effects in silicon-on-insulator transistors with back-gate control method fabricated with OKI Semiconductor 0.20 μm FD-SOI technology2011

    • Author(s)
      M. Kochiyama, K. Hara , Y. Arai, T.Miyoshi et al.
    • Journal Title

      Nucl. Instr. and Meth.

      Volume: A Vol. 636, Issue 1 Issue: 1 Pages: S62-S67

    • DOI

      10.1016/j.nima.2010.04.086

    • Related Report
      2012 Final Research Report 2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of SOI pixel process technology2011

    • Author(s)
      Y. Arai, T. Miyoshi, K. Hara et al.
    • Journal Title

      Nucl. Instr. and Meth.

      Volume: A Vol. 636, Issue 1

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Radiation test on FD-SOI Readout ASIC of Pair-monitor for ILC2011

    • Author(s)
      Y. Sato
    • Journal Title

      Nuclear Instruments and Methods in Physics Research A

      Volume: 650 Issue: 1 Pages: 106-110

    • DOI

      10.1016/j.nima.2010.12.149

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] SOI detector developments2011

    • Author(s)
      S. Onuki
    • Journal Title

      Proceedings of Science

      Volume: PoS(Vertex 2011) Pages: 43-43

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] SOI Readout ASIC of Pair-monitor for International Linear Collider2011

    • Author(s)
      Y.Sato, et al.
    • Journal Title

      Nuclear Inst.and Methods in Physics Research, 2011.02.063

      Volume: 637 Pages: 53-59

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Radiation effects in silicon-on-insulator transistors with back-gate control method fabricated with OKI Semiconductor 0.20 μm FD-SOI technology2011

    • Author(s)
      M.Kochiyama, et al.
    • Journal Title

      Nucl.Instr.and Meth.A(2010), doi:10.1016/j.nima.2010.04.086

      Volume: (印刷中)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Performance study of SOI monolithic pixel detectors for X-ray application2011

    • Author(s)
      T.Miyoshi, et al.
    • Journal Title

      Nucl.Instr.and Meth.A(2010), doi:10.1016/j.nima.2010.04.117

      Volume: (印刷中)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Radiation test on FD-SOI Readout ASIC of Pair-monitor for ILC2011

    • Author(s)
      Y.Sato, et al.
    • Journal Title

      Nucl.Instr.and Meth.A(2011), doi:10.1016/j.nima.2010.12.149

      Volume: (印刷中)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of Monolithic Silicon-On-Insulator Pixel Devices Thinned to 100 um2011

    • Author(s)
      T.Shinsho, et al.
    • Journal Title

      Nucl.Instr.and Meth.A(2010), doi:10.1016/j.nima.2010.04.117

      Volume: (印刷中)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of X-ray Imaging Spectroscopy Sensor with SOI CMOS Technology2011

    • Author(s)
      S.G.Ryu, et al.
    • Journal Title

      IEEE Trans.on Nucl.Sci.

      Volume: (印刷中)

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Developments of SOI Monolithic Pixel Detectors2010

    • Author(s)
      Y. Arai, T. Miyoshi, Y. Unno, T. Tsuboyama, K. Hara, et al.
    • Journal Title

      Nucl. Instr. and Meth

      Volume: A 623 Issue: 1 Pages: 186-188

    • DOI

      10.1016/j.nima.2010.02.190

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Evaluation of Monolithic Silicon-On-Insulator Pixel Devices Thinned to 100 μm2010

    • Author(s)
      K. Shinsho, K. Hara, Y. Arai, T. Miyoshi, et al.
    • Journal Title

      IEEE Nuclear Science Symposium CR N23-2, Knoxville, Tennessee

    • Related Report
      2012 Final Research Report
  • [Journal Article] Development of INTPIX and CNTPIX Silicon-On-Insulator Monolithic Pixel Devices2010

    • Author(s)
      K. Hara, Y. Arai, T. Miyoshi et al.
    • Journal Title

      Proceeding of Science (VERTEX2010)

      Volume: 033

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Integrated Radiation Image Sensors with SOI technology2010

    • Author(s)
      Yasuo Arai, Toshinobu Miyoshi, Ryo Ichimiya, Kazuhiko Hara, Yoshiyuki Onuki
    • Journal Title

      SOI Conference, 2010 IEEE International

      Pages: 1-5

    • DOI

      10.1109/soi.2010.5641403

    • Related Report
      2012 Final Research Report
  • [Journal Article] Vertical Integration of Radiation Sensors and Readout Electronics2010

    • Author(s)
      Y. Arai
    • Journal Title

      15th Mediterranian Electromechanical Conference, Melecon 2010, Valletta, Malta

      Volume: 25-28 Pages: 1062-1067

    • Related Report
      2012 Final Research Report
  • [Journal Article] Integrated Radiation Image Sensors with SOI technology2010

    • Author(s)
      Y.Arai, et al.
    • Journal Title

      SOI Conference (SOI), 2010 IEEE International Digital Object Identifier : 10.1109/SOI.2010.5641403

      Pages: 1-5

    • Related Report
      2010 Annual Research Report
  • [Journal Article] Developments of SOI Monolithic Pixel Detectors2010

    • Author(s)
      Y.Arai, et al.
    • Journal Title

      Nucl.Instr. and Meth.A (doi : 10.1016/j.nima. 2010.02.190) (印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Silicon-on-insulator technology enables next-generation radiation image sensors2009

    • Author(s)
      Yasuo Arai and Toshinobu Miyoshi
    • Journal Title

      SPIE Newsroom

    • DOI

      10.1117/2.1200907.1725

    • URL

      http://spie.org/x36212.xml?highlight=x2414&ArticleID=x36212

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Radiation Resistance of SOI Pixel Devices Fabricated with OKI 0.15 μm FD-SOITechnology2009

    • Author(s)
      K. Hara, Y. Arai, T. Miyoshi, et al.
    • Journal Title

      IEEE Trans. Nucl. Sci.

      Volume: Vol.56-5 Pages: 2896-2904

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] New Techniques in SOI Pixel Detector2009

    • Author(s)
      Y. Arai
    • Journal Title

      2009 IEEE Nuclear Science Symposium and Medical Imaging Conference, Conference Record

      Volume: N22-2 Pages: 1161-1164

    • DOI

      10.1109/nssmic.2009.5402397

    • Related Report
      2012 Final Research Report
  • [Journal Article] Reduction techniques of the back gate effect in the SOI Pixel Detector2009

    • Author(s)
      R. Ichimiya, Y.Arai, et al.
    • Journal Title

      Proceedings of Topical Workshop on Electronics for Particle Physics (TWEPP-09)

      Volume: 21-25 Pages: 68-71

    • Related Report
      2012 Final Research Report
  • [Journal Article] Reduction techniques of the back gate effect in the SOI Pixel Detector2009

    • Author(s)
      R.Ichimiya, Y.Arai, et al.
    • Journal Title

      CERN-2009-006

      Pages: 68-71

    • Related Report
      2009 Annual Research Report
  • [Journal Article] New Techniques in SOI Pixel Detector2009

    • Author(s)
      Y.Arai, et al.
    • Journal Title

      IEEE Nuclear Science Symposium Conference Record

      Pages: 1161-1164

    • Related Report
      2009 Annual Research Report
  • [Presentation] FZおよび2重SOIウエハを用いた放射線ピクセル検出器の特性評価、実験核物理領域2013

    • Author(s)
      三好敏喜
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      広島大学
    • Year and Date
      2013-03-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 27aFB-6 、「高エネルギー加速器実験に向けてのSOI検出器PIXOR1の試験評価」、素粒子実験領域2013

    • Author(s)
      小野善将
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      関西大学
    • Year and Date
      2013-03-27
    • Related Report
      2012 Final Research Report
  • [Presentation] 3-S25-2「SOI技術による1チップ放射線イメージセンサーの開発」、'放射線計測とそのネットワーク化の取り組み'シンポジウム、招待講演2013

    • Author(s)
      新井康夫
    • Organizer
      電気学会
    • Place of Presentation
      名古屋大学
    • Year and Date
      2013-03-22
    • Related Report
      2012 Final Research Report
  • [Presentation] Monolithic pixel detectors with 0.2 um FD-SOI pixel process technology2013

    • Author(s)
      T. Miyoshi
    • Organizer
      13th Vienna Conference on Instrumentation (VCI2013)
    • Place of Presentation
      Vienna, Austria
    • Related Report
      2012 Final Research Report
  • [Presentation] 2 層埋込酸化膜構造をもつSOI ピクセル検出器のTID 放射線耐性の評価2013

    • Author(s)
      本多俊介
    • Organizer
      日本物理学第68回年次大会
    • Place of Presentation
      広島大学
    • Related Report
      2012 Final Research Report
  • [Presentation] dvanced Radiation Image Sensors with SOI Technology2012

    • Author(s)
      Yasuo Arai
    • Organizer
      IEEE Solid State Device and Materials
    • Place of Presentation
      Invited Talk
    • Year and Date
      2012-09-25
    • Related Report
      2012 Final Research Report
  • [Presentation] 27aFB-5 、「SOI技術を用いた積分型ピクセルセンサーの基本特性評価」、素粒子実験領域2012

    • Author(s)
      三好敏喜
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      関西大学
    • Year and Date
      2012-03-27
    • Related Report
      2012 Final Research Report
  • [Presentation] Progress of SOI Pixel Process2012

    • Author(s)
      Y. Arai
    • Organizer
      International Workshop on Semiconductor Pixel Detectors for Particles and Imaging
    • Place of Presentation
      Inawashiro, Japan, Invited Talk
    • Related Report
      2012 Final Research Report
  • [Presentation] High-Resolution Monolithic Pixel Detectors in SOI Technology2012

    • Author(s)
      T. MIYOSHI
    • Organizer
      International Workshop on Semiconductor Pixel Detectors for Particles and Imaging (PIXEL2012)
    • Place of Presentation
      Inawashiro, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] Development of the Pixel OR SOI Detector for High Energy Physics Experiments2012

    • Author(s)
      Y. Ono
    • Organizer
      International Workshop on Semiconductor Pixel Detectors for Particles and Imaging (PIXEL2012)
    • Place of Presentation
      Inawashiro,Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] X-Ray Detection Using SOI Monolithic Sensors at a Compact High-Brightness X-Ray Source Based on Inverse Compton Scattering2012

    • Author(s)
      T. Miyoshi
    • Organizer
      2012 IEEE Nuclear Science Symposium
    • Place of Presentation
      Anaheim, CA, USA
    • Related Report
      2012 Final Research Report
  • [Presentation] 高エネルギー荷電粒子検出用SOI ピクセル検出器の開発2012

    • Author(s)
      新庄康平
    • Organizer
      日本物理学会第67回年次大会
    • Place of Presentation
      関西学院大学
    • Related Report
      2012 Final Research Report
  • [Presentation] Development of FD-SOI Monolithic Pixel Devices for High-Energy Charged Particle Detection2011

    • Author(s)
      K. Hara, K. Shinsho
    • Organizer
      IEEE Nuclear Science Symposium
    • Place of Presentation
      Valencia,Spain
    • Year and Date
      2011-10-25
    • Related Report
      2012 Final Research Report
  • [Presentation] 27pGN-11、SOI pixel 検出器を用いた電子線飛跡再構成実験、素粒子実験領域2011

    • Author(s)
      葛山浩教
    • Organizer
      日本物理学会
    • Year and Date
      2011-03-27
    • Related Report
      2012 Final Research Report
  • [Presentation] SOI pixel検出器を用いた電子線飛跡再構成実験2011

    • Author(s)
      葛山浩教
    • Organizer
      日本物理学会
    • Place of Presentation
      新潟大学(震災のため発表中止)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] 計数型SOIピクセル検出器の性能評価2011

    • Author(s)
      内田潤
    • Organizer
      日本物理学会
    • Place of Presentation
      新潟大学(震災のため発表中止)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] SOI検出器におけるセンサー層の電荷収集2011

    • Author(s)
      小野善将
    • Organizer
      日本物理学会
    • Place of Presentation
      新潟大学(震災のため発表中止)
    • Year and Date
      2011-03-27
    • Related Report
      2010 Annual Research Report
  • [Presentation] SOIイメージセンサーのX線応用2011

    • Author(s)
      三好敏喜
    • Organizer
      日本物理学会
    • Place of Presentation
      新潟大学(震災のため発表中止)
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] SOI Pixel Technology2011

    • Author(s)
      Y. Arai
    • Organizer
      The 8th international "Hiroshima" Symposium on the Development and Application of Semiconductor Tracking Detectors (HSTD-8)
    • Place of Presentation
      Taipei
    • Related Report
      2012 Final Research Report
  • [Presentation] CZ 及びFZ 型SOI ウェハを用いた一体型ピクセル検出器の放射線耐性の評価2011

    • Author(s)
      新庄康平
    • Organizer
      日本物理学会2011 年秋季大会
    • Place of Presentation
      弘前大学
    • Related Report
      2012 Final Research Report
  • [Presentation] センサー部薄型化SOI ピクセル検出器の陽電子ビーム照射試験2011

    • Author(s)
      新庄康平
    • Organizer
      日本物理学会第66回年次大会
    • Place of Presentation
      新潟大学
    • Related Report
      2012 Final Research Report
  • [Presentation] SOI技術を用いた新型X線撮像分光器の開発3:INTPIXの冷却X線試験におけるゲインと検出効率の測定2010

    • Author(s)
      中島真也
    • Organizer
      天文学会
    • Place of Presentation
      金沢大学
    • Year and Date
      2010-09-22
    • Related Report
      2010 Annual Research Report
  • [Presentation] SOI技術を用いた読出し一体型ピクセル検出器(計数型)の開発2010

    • Author(s)
      一宮亮
    • Organizer
      日本物理学会
    • Place of Presentation
      九州工業大学
    • Year and Date
      2010-09-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] SOI技術を用いた読み出し一体型ピクセル検出器(積分型)の開発2010

    • Author(s)
      武田彩希
    • Organizer
      日本物理学会
    • Place of Presentation
      九州工業大学
    • Year and Date
      2010-09-13
    • Related Report
      2010 Annual Research Report
  • [Presentation] SOI技術を用いた放射線ピクセル検出器の開発2010

    • Author(s)
      新井康夫
    • Organizer
      理研シンポジウム「先進ものづくり技術によるアナライザーキーコンポーネント開発基盤の構築状況」
    • Place of Presentation
      理化学研究所(和光)(招待講演)
    • Year and Date
      2010-08-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] 素粒子実験用TDCとSOI放射線イメージ検出器2010

    • Author(s)
      新井康夫
    • Organizer
      映像情報メディア学会研究会
    • Place of Presentation
      常翔学園大阪センター
    • Year and Date
      2010-07-23
    • Related Report
      2012 Final Research Report
  • [Presentation] 素粒子実験用TDCとSOI放射線イメージ検出器2010

    • Author(s)
      新井康夫
    • Organizer
      映像情報メディア学会研究会
    • Place of Presentation
      常翔学園大阪センター(招待講演)
    • Year and Date
      2010-07-23
    • Related Report
      2010 Annual Research Report
  • [Presentation] SOIピクセル検出器における回路部トランジスタの放射線損傷評価(TCADによるシミュレーション)2010

    • Author(s)
      河内山真美, 他
    • Organizer
      日本物理学会
    • Place of Presentation
      岡山大学
    • Year and Date
      2010-03-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] 埋め込みPウェル構造をもつSOI pixel検出器の放射線耐性試験2010

    • Author(s)
      瀬賀智子, 他
    • Organizer
      日本物理学会
    • Place of Presentation
      岡山大学
    • Year and Date
      2010-03-23
    • Related Report
      2009 Annual Research Report
  • [Presentation] 測定器技術の革新でつながるサイエンスの横糸2010

    • Author(s)
      新井康夫
    • Organizer
      22pBA-6、'マイクロエレクトロニクスでつながるサイエンス',素粒子実験領域、実験核物理領域、ビーム物理領域、領域10、宇宙線・宇宙物理領域合同シンポジウム
    • Year and Date
      2010-03-22
    • Related Report
      2012 Final Research Report
  • [Presentation] マイクロエレクトロニクスでつながるサイエンス2010

    • Author(s)
      新井康夫
    • Organizer
      日本物理学会(招待講演)
    • Place of Presentation
      岡山大学
    • Year and Date
      2010-03-22
    • Related Report
      2009 Annual Research Report
  • [Presentation] SOI技術によるX線ピクセル検出器の開発2010

    • Author(s)
      新井康夫
    • Organizer
      応用物理学会(招待講演)
    • Place of Presentation
      東海大学
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Evaluation of Monolithic Silicon-On-Insulator Pixel Devices Thinned to 100 μm2010

    • Author(s)
      K. Shinsho and K. Hara
    • Organizer
      IEEE Nuclear Science Symposium, Knoxville
    • Place of Presentation
      Tennessee
    • Related Report
      2012 Final Research Report
  • [Presentation] Plans of the SOIPIX Collaboration2010

    • Author(s)
      K. Hara
    • Organizer
      Invited Talk at VERTEX2010
    • Place of Presentation
      Loch Lemond, Scotland, UK
    • Related Report
      2012 Final Research Report
  • [Presentation] SOI 技術を用いた読み出し一体型ピクセル検出器の開発2010

    • Author(s)
      新庄康平
    • Organizer
      (検出部ウェハの薄型化)日本物理学会2010 年秋季大会
    • Place of Presentation
      九州工業大
    • Related Report
      2012 Final Research Report
  • [Presentation] 埋め込みP ウェル構造をもつSOI pixel 検出器の放射線耐性試験2010

    • Author(s)
      瀬賀智子
    • Organizer
      日本物理学会第65回年次大会
    • Place of Presentation
      岡山大学
    • Related Report
      2012 Final Research Report
  • [Presentation] SOIピクセル検出器における回路部トランジスタの放射線損傷評価(TCADによるシミュレーション)2010

    • Author(s)
      河内山真美
    • Organizer
      日本物理学会第65回年次大会
    • Place of Presentation
      岡山大学
    • Related Report
      2012 Final Research Report
  • [Presentation] 大面積化を目指した計数型X線SOIイメージセンサー(CNTPIX3)2009

    • Author(s)
      三好敏喜
    • Organizer
      日本物理学会秋季大会
    • Place of Presentation
      熊本大学
    • Year and Date
      2009-09-28
    • Related Report
      2012 Final Research Report
  • [Presentation] SOI plxel検出器におけるバックゲート効果の埋め込みPウェルによる抑制2009

    • Author(s)
      瀬賀智子, 他
    • Organizer
      日本物理学会
    • Place of Presentation
      甲南大学
    • Year and Date
      2009-09-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] CDS機能を備えた積分型SOI pixel検出器の性能評価2009

    • Author(s)
      池本由希子, 他
    • Organizer
      日本物理学会
    • Place of Presentation
      甲南大学
    • Year and Date
      2009-09-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] SOI技術を用いた読出し一体型ピクセル検出器の開発(TCADによる放射線損傷の研究)2009

    • Author(s)
      河内山真美, 他
    • Organizer
      日本物理学会
    • Place of Presentation
      甲南大学
    • Year and Date
      2009-09-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] Belle II実験に向けたSOIピクセル検出器の開発2009

    • Author(s)
      堀井泰之, 他
    • Organizer
      日本物理学会
    • Place of Presentation
      甲南大学
    • Year and Date
      2009-09-11
    • Related Report
      2009 Annual Research Report
  • [Presentation] SOI pixel 検出器におけるバックゲート効果の埋め込みP ウェルによる抑制2009

    • Author(s)
      瀬賀智子
    • Organizer
      日本物理学会2009 年秋季大会
    • Place of Presentation
      甲南大学
    • Related Report
      2012 Final Research Report
  • [Presentation] SOI 技術を用いた読みだし一体型ピクセル検出器の開発(TCADによる放射線損傷の研究)2009

    • Author(s)
      河内山真美
    • Organizer
      日本物理学会2009 年秋季大会
    • Place of Presentation
      甲南大学
    • Related Report
      2012 Final Research Report
  • [Presentation] Radiation Effects in OKI SOI Pixel Devices2009

    • Author(s)
      Mami Kochiyama and Tomoko Sega
    • Organizer
      7th International Symposium on Development and Applications of Semiconductor Tracking Devices
    • Place of Presentation
      Hiroshima, Japan
    • Related Report
      2012 Final Research Report
  • [Presentation] 高エネルギー加速器実験に向けたSOI検出器:PIXORの全体動作確認試験

    • Author(s)
      篠田直幸
    • Organizer
      日本物理学会秋季大会
    • Place of Presentation
      京都産業大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高エネルギー実験のためのSOI技術を用いたPIXOR(Pixel OR)半導体検出器の研究開発

    • Author(s)
      小野善将
    • Organizer
      日本物理学会秋季大会
    • Place of Presentation
      京都産業大学
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] SOI技術による1チップ放射線イメージセンサーの開発

    • Author(s)
      新井康夫
    • Organizer
      電機学会
    • Place of Presentation
      名古屋大学
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] Bell II実験にむけたSOI検出器:PIXORの全体動作確認試験

    • Author(s)
      篠田直幸
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      広島大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] SOI技術を用いた大面積積分型ピクセルセンサーの基礎特性評価

    • Author(s)
      三好敏喜
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      広島大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] シンポジウム「ピクセルセンサー技術で拡がる科学者の視野」はじめに

    • Author(s)
      新井康夫
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      広島大学
    • Related Report
      2012 Annual Research Report
    • Invited
  • [Presentation] SOI技術を用いた放射線ピクセルセンサーのX線応用

    • Author(s)
      三好敏喜
    • Organizer
      日本物理学会秋季大会
    • Place of Presentation
      富山大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] SOIシリコン検出器の全空乏化と検出器特性について

    • Author(s)
      一宮亮
    • Organizer
      日本物理学会秋季大会
    • Place of Presentation
      弘前大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] CERN120GeVハドロンビームを用いたSOIピクセル検出器のビーム試験

    • Author(s)
      小貫良行
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      関西大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] 高エネルギー荷電粒子検出用SOIピクセル検出器の開発

    • Author(s)
      新庄康平
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      関西大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] SOI技術を用いた積分型ピクセルセンサーの基本特性評価

    • Author(s)
      三好敏喜
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      関西大学
    • Related Report
      2011 Annual Research Report
  • [Presentation] 高エネルギー加速器実験に向けてのSOI検出器PIXOR1の試験評価

    • Author(s)
      小野善将
    • Organizer
      日本物理学会年次大会
    • Place of Presentation
      関西大学
    • Related Report
      2011 Annual Research Report
  • [Remarks] ホームページ

    • URL

      http://rd.kek.jp/project/soi/

    • Related Report
      2012 Final Research Report
  • [Remarks] SOI Pixel Detector R&D

    • URL

      http://rd.kek.jp/project/soi/

    • Related Report
      2012 Annual Research Report
  • [Remarks] SOI Pixel Detector R&D

    • URL

      http://rd.kek.jp/project/soi/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://rd.kek.jp/project/soi/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://rd.kek.jp/project/soi/

    • Related Report
      2009 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置およびその製造方法2013

    • Inventor(s)
      新井康夫、沖原将生、葛西大樹
    • Industrial Property Rights Holder
      高エネルギー加速器研究機構、 Lapisセミコンダクタ(株)
    • Industrial Property Number
      2013-004017
    • Filing Date
      2013-01-11
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 半導体装置およびその製造方法2013

    • Inventor(s)
      新井康夫、葛西大樹
    • Industrial Property Rights Holder
      高エネルギー加速器研究機構、 Lapisセミコンダクタ(株)
    • Industrial Property Number
      2013-079859
    • Filing Date
      2013-04-05
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 半導体装置およびその製造方法2013

    • Inventor(s)
      新井康夫
    • Industrial Property Rights Holder
      高エネルギー加速器研究機構
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2013-004017
    • Filing Date
      2013-01-11
    • Related Report
      2012 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置及び半導体装置の製造方法2011

    • Inventor(s)
      新井康夫、沖原将生、葛西大樹
    • Industrial Property Rights Holder
      高エネルギー加速器研究機構、 Lapisセミコンダクタ(株)
    • Filing Date
      2011-03-09
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 半導体装置及び半導体装置の製造方法2011

    • Inventor(s)
      新井康夫, 他
    • Industrial Property Rights Holder
      高エネ研、OKIセミコンダクタ
    • Filing Date
      2011-03-09
    • Related Report
      2010 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] 半導体装置2010

    • Inventor(s)
      新井康夫、葛西大樹、初井宇記
    • Industrial Property Rights Holder
      高エネルギー加速器研究機構、 Lapisセミコンダクタ(株)、理化学研究所
    • Patent Publication Number
      2012-080045
    • Filing Date
      2010-10-06
    • Related Report
      2012 Final Research Report
  • [Patent(Industrial Property Rights)] 半導体装置2010

    • Inventor(s)
      新井康夫, 他
    • Industrial Property Rights Holder
      高エネ研、OKIセミコンダクタ
    • Industrial Property Number
      2010-052173
    • Filing Date
      2010-10-06
    • Related Report
      2010 Annual Research Report
  • [Patent(Industrial Property Rights)] 半導体装置及び半導体装置の製造方法2010

    • Inventor(s)
      新井康夫、沖原将生、葛西大樹
    • Industrial Property Rights Holder
      高エネルギー加速器研究機構、OKIセミコンダクター
    • Industrial Property Number
      2010-052173
    • Filing Date
      2010-03-09
    • Related Report
      2009 Annual Research Report

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Published: 2009-04-01   Modified: 2019-07-29  

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