• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Development of Fundamental Fabrication Processes for Functionalizing Electronic Devices Composed of High-Quality CVD Diamond

Research Project

Project/Area Number 21246011
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Thin film/Surface and interfacial physical properties
Research InstitutionOsaka University

Principal Investigator

ITO Toshimichi  大阪大学, 大学院・工学研究科, 教授 (00183004)

Co-Investigator(Kenkyū-buntansha) MAIDA Osamu  大阪大学, 大学院・工学研究科, 助教 (40346177)
Project Period (FY) 2009 – 2012
Project Status Completed (Fiscal Year 2012)
Budget Amount *help
¥45,240,000 (Direct Cost: ¥34,800,000、Indirect Cost: ¥10,440,000)
Fiscal Year 2012: ¥4,160,000 (Direct Cost: ¥3,200,000、Indirect Cost: ¥960,000)
Fiscal Year 2011: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
Fiscal Year 2010: ¥18,200,000 (Direct Cost: ¥14,000,000、Indirect Cost: ¥4,200,000)
Fiscal Year 2009: ¥11,570,000 (Direct Cost: ¥8,900,000、Indirect Cost: ¥2,670,000)
KeywordsCVDダイヤモンド / マイクロ波プラズマCVD / 微斜面(001)基板 / ホウ素ドープ / 燐ドープ / 粒子検出器 / パワーデバイス / 不純物バンド伝導 / マイクロ波プラズマCVD / ホウ素ドープダイヤモンド / 燐ドープダイヤモンド / 微斜面基板 / 放射線検出器 / 自立膜 / 不純物伝導 / ダイヤモンド検出器 / ダイヤモンドパワーデバイス / p型ダイヤモンド / n型ダイヤモンド / 紫外線検出器 / 軟X線検出器
Research Abstract

We havedemonstrated effectiveness of homoepitaxial growth on a vicinal (001) substrate using high-power-density microwave-plasma chemical-vapor-deposition on increases in the crystalline quality and growth rate of diamond films, and have found a new method for suppressing large degradations of carrier mobilities in highly doped samples. Detection efficiency offabricated diamond detectors for deep-ultra-violet light and soft-x-ray at low bias voltages has been substantially improved. Effectiveness of Si-diamond survey meter at heavy radiation doses has also been demonstrated. In addition, a devicestructure has been proposed for a normally-off-type p-i-p diamond FET working at room temperature.

Report

(5 results)
  • 2012 Annual Research Report   Final Research Report ( PDF )
  • 2011 Annual Research Report
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (93 results)

All 2012 2011 2010 2009 Other

All Journal Article (19 results) (of which Peer Reviewed: 19 results) Presentation (67 results) Remarks (7 results)

  • [Journal Article] Survey meter combining CVD diamond and silicon detectors for wide range of dose rates and high accumulated doses2012

    • Author(s)
      H. Sato, A. Yamaguchi, O. Maida, T. Ito
    • Journal Title

      Radiation Meas

      Volume: Vol.47 Pages: 266-271

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Sensitivity improvement of γ-ray detector fabricated with self-standing CVD diamond by attaching heavy element film2012

    • Author(s)
      H. Sato, O. Maida, T. Ito
    • Journal Title

      Diam. Relat. Mater.

      Volume: Vol.29 Pages: 2-7

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Sensitivity improvement of γ-ray detector fabricated with self-standing CVD diamond by attaching heavy element film2012

    • Author(s)
      Hidenori Sato
    • Journal Title

      Diamond and Related Materials

      Volume: vol. 29 Pages: 2-7

    • Related Report
      2012 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Survey meter combining CVD diamond and silicon detectors for wide range of dose rates and high accumulated doses2012

    • Author(s)
      H.Sato
    • Journal Title

      Radiation Measurements

      Volume: Vol.47 Issue: 4 Pages: 266-271

    • DOI

      10.1016/j.radmeas.2012.02.011

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Hall data analysis of heavily boron-doped CVD diamond films using a model considering an impurity band well separated from valence bands2011

    • Author(s)
      M. Aono, O. Maida, T. Ito
    • Journal Title

      Diam. Relat. Mater

      Volume: Vol.20 Pages: 1357-1362

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Reduced influences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their ultraviolet detector performance2011

    • Author(s)
      O. Maida, H. Sato, M. Kanasugi, S. Iguchi, T. Ito
    • Journal Title

      Diam. Relat. Mater.

      Volume: Vol.20 Pages: 242-245

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Hall data analysis of heavily boron-doped CVD diamond films using a model considering an impurity band well separated from valence bands2011

    • Author(s)
      M.Aono
    • Journal Title

      Diamond and Related Materials

      Volume: Vol.20 Issue: 10 Pages: 1357-1362

    • DOI

      10.1016/j.diamond.2011.08.008

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Structure optimization of diamond personal dosimeters based on Monte Carlo simulations2011

    • Author(s)
      H.Sato
    • Journal Title

      Diamond and Related Materials

      Volume: 20 Pages: 140-144

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Reduced influences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their ultraviolet detector performance2011

    • Author(s)
      O.Maida
    • Journal Title

      Diamond and Related Materials

      Volume: 20 Pages: 242-245

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement in low-voltage performance of surface-electrode soft-X-ray detectors composed of undoped homo- epitaxial CVD/HPHT Ib diamond layers2010

    • Author(s)
      M. Kanasugi, Y. Iwakaji, T. Yamamoto, O. Maida, Y. Takeda, Y. Saitoh, T. Ito
    • Journal Title

      Nucl. Instr. Methods Phys. Research A

      Volume: Vol.621 Pages: 650-655

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces fabricated using micro- wave-plasma chemical-vapor-deposition method2010

    • Author(s)
      S. Iguchi, O. Maida, T. Ito
    • Journal Title

      Thin Solid Films

      Volume: Vol.518

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Abnormal current increases induced under high electric fields in asymmetrical graphite-intrinsic diamond-graphite structures fabricated with high-quality homoepitaxial chemical-vapor-deposited diamond layers2010

    • Author(s)
      M.Hamada
    • Journal Title

      Journal of Applied Physics

      Volume: 107

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Self-standing device-duality single-crystalline diamond films on vicinal(001) surfaces fabricated using microwave-plasma chemical-vapor-deposition method2010

    • Author(s)
      S.Iguchi
    • Journal Title

      Thin Solid Films

      Volume: 518

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Improvement in low-voltage performance of surface-electrode soft-X-ray detectors composed of undoped homoepitaxial CVD/HPHT Ib diamond layers2010

    • Author(s)
      M.Kanasugi
    • Journal Title

      Nuclear Instruments and Methods in Physics Research A

      Volume: 621 Pages: 650-655

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron detection performance of diamond avalanche diode2010

    • Author(s)
      H.Morishita
    • Journal Title

      Journal of Vacuum Science and Technology B

      Volume: 28 Pages: 1169-1172

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Abnormal current increases induced under high electric fields in asymmetrical graphite-intrinsic diamond-graphite structures fabricated with high-quality homoepitaxial chemical-vapor-deposited diamond layers2010

    • Author(s)
      M.Hamada
    • Journal Title

      Journal of Applied Physics 107(印刷中)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Self-standing device-duality single-crystalline diamond films on vicinal (001) surfaces fabricated using microwave-plasma chemical-vapor-deposition method2010

    • Author(s)
      S.Iguchi
    • Journal Title

      Thin Solid Films (発表決定)

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of diamond ultraviolet detec-tors fabricated with high-quality single- crystal- line chemical vapor deposition films2009

    • Author(s)
      Y. Iwakaji, M. Kanasugi, O. Maida, T. Ito
    • Journal Title

      Appl. Phys. Lett.

      Volume: Vol.94

    • Related Report
      2012 Final Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of diamond ultraviolet detectors fabricated with high-quality single-crystalline chemical vapor deposition films2009

    • Author(s)
      Y.Iwakaji
    • Journal Title

      Applied Physics Letters 94

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Presentation] Micro- wave-plasma chemical-vapor-deposition homo- epitaxial processes suitable for heavily P-doped diamond films on vicinal (001) surfaces2012

    • Author(s)
      S. Tada,H. Nishio, O. Maida, T. Ito
    • Organizer
      11th Asia Pacific Conf. on Plasma Sci. and Technol.
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2012-10-02
    • Related Report
      2012 Final Research Report
  • [Presentation] ホウ素ドープ単結晶CVDダイヤモンドの高濃度ドープ領域における特性評価II2012

    • Author(s)
      森玲央奈
    • Organizer
      第59回応用物理学関係連合講演会
    • Place of Presentation
      早稲田大学(東京都)
    • Year and Date
      2012-03-17
    • Related Report
      2011 Annual Research Report
  • [Presentation] Carrier Transport Property of Heavily Boron-Doped Degenerate Diamond Single-crystalline Thin Layers Etched with Hydrogen Plasma2012

    • Author(s)
      T. Kuki
    • Organizer
      2012 International Conference on Solid State Devices and Materials
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Microwave-Plasma Chemical-Vapor-Deposition Homoepitaxial Processes Suitable for Heavily P-Doped Diamond Films on Vicinal (001) Surfaces2012

    • Author(s)
      S. Tada
    • Organizer
      11th Asia Pacific Conference on Plasma Science and Technology
    • Place of Presentation
      Kyoto, Japan
    • Related Report
      2012 Annual Research Report
  • [Presentation] Improvement on device performance of lateral p-i-p diamond transistors with underlain thin nitrogen-doped layer2011

    • Author(s)
      T.Ukida
    • Organizer
      International Symposium on Materials Science and Innovation for Sustainable Society
    • Place of Presentation
      ホテル阪急エキスポパーク(大阪府)
    • Year and Date
      2011-11-29
    • Related Report
      2011 Annual Research Report
  • [Presentation] Performance of radiation-tolerant diamond detector fabricated with self-standing single-crystalline CVD film2011

    • Author(s)
      H.Sato
    • Organizer
      15th International Conference on Thin Films
    • Place of Presentation
      京都テルサ(京都府)
    • Year and Date
      2011-11-09
    • Related Report
      2011 Annual Research Report
  • [Presentation] Improvement on p-type performance of CVD diamond by isolating thin heavily-boron-doped layer as innumerable islands2011

    • Author(s)
      O. Maida, M. Aono, T. Ito
    • Organizer
      15th Intl. Conf. on Thin Films
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2011-11-08
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth of phosphorus-doped homoepitaxial CVD diamond on vicinal (001) substrates2011

    • Author(s)
      H.Nishio
    • Organizer
      15th International Conference on Thin Films
    • Place of Presentation
      京都テルサ(京都府)
    • Year and Date
      2011-11-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] Improvement on P-type performance of CVD diamond by isolating thin heavily-boron-doped layer as innumerable islands2011

    • Author(s)
      O.Maida
    • Organizer
      15th International Conference on Thin Films
    • Place of Presentation
      京都テルサ(京都府)
    • Year and Date
      2011-11-08
    • Related Report
      2011 Annual Research Report
  • [Presentation] (001)微斜面基板上の高濃度燐ドープダイヤモンドのMWPCVD成長における基板温度の適正化2011

    • Author(s)
      多田周平
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] ホウ素ドープ単結晶CVDダイヤモンドの高濃度ドープ領域における特性評価2011

    • Author(s)
      森玲央奈
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] 高濃度ホウ素ドープCVDダイヤモンド単結晶薄膜における水素プラズマエッチング効果2011

    • Author(s)
      九鬼知博
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] (001)微斜面基板上の燐ドープCVDダイヤモンド薄膜におけるホモエピタキシャル成長プロセスの適正化2011

    • Author(s)
      西尾晴樹
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] CVDダイヤモンドを用いたパワートランジスタの作製2011

    • Author(s)
      浮田昂史
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] 単結晶CVDダイヤモンドを用いた位置敏感検出器の作製と評価2011

    • Author(s)
      勝本健太
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] 走査型プローブ顕微鏡を用いた単結晶CVDダイヤモンド薄膜の大気下における電気的特性評価2011

    • Author(s)
      大島光
    • Organizer
      第72回応用物理学会学術講演会
    • Place of Presentation
      山形大学(山形県)
    • Year and Date
      2011-08-30
    • Related Report
      2011 Annual Research Report
  • [Presentation] (001)微斜面基板上のホモエピタキシャルCVDダイヤモンド薄膜におけるδ燐ドープ積層構造の作製2011

    • Author(s)
      西尾晴樹
    • Organizer
      第58回応用物理学関係連合講演会(2011年春季)
    • Place of Presentation
      神奈川工科大学, 厚木
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] 移動度の異なる複数のキャリア群を考慮した輸送モデルによる高濃度ホウ素ドープCVDダイヤモンドにおけるHallデータの解析2011

    • Author(s)
      青野雅之
    • Organizer
      第58回応用物理学関係連合講演会(2011年春季)
    • Place of Presentation
      神奈川工科大学, 厚木
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] CVDダイヤモンド薄膜における局所的電気的諸特性の走査型プローブ顕微鏡による大気圧下の微視的評価2011

    • Author(s)
      市川喬啓
    • Organizer
      第58回応用物理学関係連合講演会(2011年春季)
    • Place of Presentation
      神奈川工科大学, 厚木
    • Year and Date
      2011-03-26
    • Related Report
      2010 Annual Research Report
  • [Presentation] CVDダイヤモンド薄膜の局所的電気特性の導電性探針AFMを用いた大気中評価2010

    • Author(s)
      市川喬啓
    • Organizer
      第51回真空に関する連合講演会
    • Place of Presentation
      大阪大学, 吹田
    • Year and Date
      2010-11-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] (001)微斜面基板における燐ドープCVDダイヤモンド薄膜のホモエピタキシャル成長2010

    • Author(s)
      西尾晴樹
    • Organizer
      第51回真空に関する連合講演会
    • Place of Presentation
      大阪大学, 吹田
    • Year and Date
      2010-11-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] (001)微斜面基板におけるCVDダイヤモンド成長の端面効果2010

    • Author(s)
      浮田昂史
    • Organizer
      第51回真空に関する連合講演会
    • Place of Presentation
      大阪大学, 吹田
    • Year and Date
      2010-11-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高品質(001)微斜面CVDダイヤモンド基板における高濃度窒素ドープ2010

    • Author(s)
      石川裕之
    • Organizer
      第51回真空に関する連合講演会
    • Place of Presentation
      大阪大学, 吹田
    • Year and Date
      2010-11-05
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高温高圧合成基板によるホモエピタキシャルCVDダイヤモンド膜への影響評価とその低減2010

    • Author(s)
      毎田修
    • Organizer
      第51回真空に関する連合講演会
    • Place of Presentation
      大阪大学, 吹田
    • Year and Date
      2010-11-04
    • Related Report
      2010 Annual Research Report
  • [Presentation] ホウ素ドープp型CVDダイヤモンド薄膜のナノ構造化による高機能化2010

    • Author(s)
      青野雅之
    • Organizer
      第51回真空に関する連合講演会
    • Place of Presentation
      大阪大学, 吹田
    • Year and Date
      2010-11-04
    • Related Report
      2010 Annual Research Report
  • [Presentation] FIBを用いたCVDダイヤモンド微細電極の形成とその特性評価2010

    • Author(s)
      五十嵐透
    • Organizer
      第51回真空に関する連合講演会
    • Place of Presentation
      大阪大学, 吹田
    • Year and Date
      2010-11-04
    • Related Report
      2010 Annual Research Report
  • [Presentation] Carrier transport property of heavily boron-doped degenerate diamond single-crystalline thin layers etched with hydrogen plasma2010

    • Author(s)
      T. Kuki, O. Maida, T. Ito
    • Organizer
      2012 Intl. Conf. on Solid State Devices and Materials
    • Place of Presentation
      Kyoto. Japan
    • Year and Date
      2010-09-26
    • Related Report
      2012 Final Research Report
  • [Presentation] 微斜面基板におけるCVDダイヤモンド成長の端面効果2010

    • Author(s)
      浮田昂史
    • Organizer
      第71回応用物理学会学術講演会(2010年秋季)
    • Place of Presentation
      長崎大学, 長崎
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] 高品質(001)微斜面CVDダイヤモンド基板における高濃度窒素ドープ2010

    • Author(s)
      石川裕之
    • Organizer
      第71回応用物理学会学術講演会(2010年秋季)
    • Place of Presentation
      長崎大学, 長崎
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] (001)微斜面基板における燐ドープCVDダイヤモンド薄膜のホモエピタキシャル成長2010

    • Author(s)
      西尾晴樹
    • Organizer
      第71回応用物理学会学術講演会(2010年秋季)
    • Place of Presentation
      長崎大学, 長崎
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] ホウ素ドープ層のナノ構造化によるp型CVDダイヤモンドの高機能化II2010

    • Author(s)
      青野雅之
    • Organizer
      第71回応用物理学会学術講演会(2010年秋季)
    • Place of Presentation
      長崎大学, 長崎
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] CVDダイヤモンド放射線検出器の耐放射線性評価2010

    • Author(s)
      佐東秀徳
    • Organizer
      第71回応用物理学会学術講演会(2010年秋季)
    • Place of Presentation
      長崎大学, 長崎
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] FIBを用いたCVDダイヤモンド微細電極の形成とその特性評価2010

    • Author(s)
      五十嵐透
    • Organizer
      第71回応用物理学会学術講演会(2010年秋季)
    • Place of Presentation
      長崎大学, 長崎
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] 導電性探針AFMによるCVDダイヤモンドの局所的電気特性の評価2010

    • Author(s)
      市川喬啓
    • Organizer
      第71回応用物理学会学術講演会(2010年秋季)
    • Place of Presentation
      長崎大学, 長崎
    • Year and Date
      2010-09-15
    • Related Report
      2010 Annual Research Report
  • [Presentation] Fabrication of self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces and its application to the high-energy photon detectors2010

    • Author(s)
      O. Maida, S. Iguchi, T. Igarashi, H. Sato, T. Ito
    • Organizer
      21st European Conf. on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
    • Place of Presentation
      Budapest, Hungary
    • Year and Date
      2010-09-06
    • Related Report
      2012 Final Research Report
  • [Presentation] Investigation of diamond radiation detectors combined with heavy elements2010

    • Author(s)
      H. Sato, A. Yamaguchi, M. Maida, T. Ito
    • Organizer
      21st European Conf. on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
    • Place of Presentation
      Budapest, Hungary
    • Year and Date
      2010-09-06
    • Related Report
      2012 Final Research Report
  • [Presentation] Fabrication of self-standing device-quality single-crystalline diamond films on vicinal (001) surfaces and its application to the high-energy photon detectors2010

    • Author(s)
      O.Maida
    • Organizer
      The 21st European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
    • Place of Presentation
      Budapest, Hungary
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] Hall data analysis of heavily-boron-doped CVD diamond films based on a two-type carrier model and their application to improvement on p-type performance of CVD diamond2010

    • Author(s)
      M.Aono
    • Organizer
      The 21st European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
    • Place of Presentation
      Budapest, Hungary
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] Investigation of diamond radiation detectors combined with heavy elements2010

    • Author(s)
      H.Sato
    • Organizer
      The 21st European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, and Nitrides (Diamond 2010)
    • Place of Presentation
      Budapest, Hungary
    • Year and Date
      2010-09-06
    • Related Report
      2010 Annual Research Report
  • [Presentation] Reduced influ- ences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their UV detector performance2010

    • Author(s)
      O. Maida, S. Iguchi, T. Ito
    • Organizer
      4th Intl. Conf. on New Diamond and Nano Carbons (NDNC2010)
    • Place of Presentation
      Suzhou, China
    • Year and Date
      2010-05-17
    • Related Report
      2012 Final Research Report
  • [Presentation] Growth and characterization of heavily phosphorus-doped homoepitaxial (001) diamond films grown using high-power-density MWPCVD method with a conventional quartz-tube chamber2010

    • Author(s)
      M. Maida, T. Hidaka, T. Ito
    • Organizer
      4th Intl. Conf. on New Diamond and Nano Carbons (NDNC2010)
    • Place of Presentation
      Suzhou, China
    • Year and Date
      2010-05-17
    • Related Report
      2012 Final Research Report
  • [Presentation] Structure optimization of diamond personal dosimeters based on Monte Carlo simulations2010

    • Author(s)
      H.Sato
    • Organizer
      The 4-th International Conference on New Diamond and Nano Carbons (NDNC2010)
    • Place of Presentation
      Suzhou, China
    • Year and Date
      2010-05-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth and characterization of heavily phosphorus-doped homoepitaxial (001) diamond films grown using high-power-density MWPCVD method with a conventional quartz-tube chamber2010

    • Author(s)
      O.Maida
    • Organizer
      The 4-th International Conference on New Diamond and Nano Carbons (NDNC2010)
    • Place of Presentation
      Suzhou, China
    • Year and Date
      2010-05-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] Reduced influences of the HPHT substrates on the electronic quality of homoepitaxial CVD diamond layers and on their UV detector performance2010

    • Author(s)
      O.Maida
    • Organizer
      The 4-th International Conference on New Diamond and Nano Carbons (NDNC2010)
    • Place of Presentation
      Suzhou, China
    • Year and Date
      2010-05-17
    • Related Report
      2010 Annual Research Report
  • [Presentation] リンドープCVDダイヤモンド-電極界面構造のHRTEM解析2010

    • Author(s)
      林尚史
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚市)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] ホウ素ドープ層のナノ構造化によるp型CVDダイヤモンドの高機能化2010

    • Author(s)
      青野雅之
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚市)
    • Year and Date
      2010-03-19
    • Related Report
      2009 Annual Research Report
  • [Presentation] 重元素併用型ダイヤモンド放射線検出器の評価2010

    • Author(s)
      佐東秀徳
    • Organizer
      第57回応用物理学関係連合講演会
    • Place of Presentation
      東海大学(平塚市)
    • Year and Date
      2010-03-18
    • Related Report
      2009 Annual Research Report
  • [Presentation] Effectiveness of (001) vicinal substrates on fabrication of high-quality diamond films using high-power-density microwave-plasma chemical-vapor-deposition method2010

    • Author(s)
      O.Maida
    • Organizer
      The 5th International Workshop on New Group IV Semiconductor Nanoelectronics
    • Place of Presentation
      Tohoku University, Sendai
    • Year and Date
      2010-01-29
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高出力MWPCVD法により作製した高品質ダイヤモンド単結晶自立膜の評価II2009

    • Author(s)
      井口翔太
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山市)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] マイクロ波プラズマCVD法による高品質窒素ドープダイヤモンド厚膜合成とその評価II2009

    • Author(s)
      砂田泰英
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山市)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高濃度燐ドープダイヤモンド薄膜のホモエピタキシャル成長と電気的特性評価II2009

    • Author(s)
      日高輝洋
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山市)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高電力密度マイクロ波プラズマCVD法により作製した高濃度ホウ素ドープダイヤモンド薄膜の評価(II)2009

    • Author(s)
      美濃越裕介
    • Organizer
      第70回応用物理学会学術講演会
    • Place of Presentation
      富山大学(富山市)
    • Year and Date
      2009-09-10
    • Related Report
      2009 Annual Research Report
  • [Presentation] Self-standing high-quality single-crystalline diamond films fabricated using high-power microwave-plasma CVD method2009

    • Author(s)
      S.Iguchi
    • Organizer
      The 10th International Symposium on Sputtering and Plasma Processes
    • Place of Presentation
      Kanazawa Kokusai Hotel, Kanazawa
    • Year and Date
      2009-07-08
    • Related Report
      2009 Annual Research Report
  • [Presentation] 高濃度ホウ素ドープした(001)微斜面基板上のホモエピタキシャルCVDダイヤモンド層の特性評価

    • Author(s)
      森 玲央奈
    • Organizer
      第73回応用物理学会学術講演会(2012年秋季)
    • Place of Presentation
      愛媛大学・松山大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] ホモエピタキシャルCVDダイヤモンド積層構造におけるμmオーダーで相互に分離された縮退p型領域からの正孔拡散

    • Author(s)
      市川 大地
    • Organizer
      第73回応用物理学会学術講演会(2012年秋季)
    • Place of Presentation
      愛媛大学・松山大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高濃度ホウ素ドープ縮退ダイヤモンド単結晶CVD薄膜におけるキャリア輸送特性の水素プラズマ照射時間依存性

    • Author(s)
      九鬼 知博
    • Organizer
      第73回応用物理学会学術講演会(2012年秋季)
    • Place of Presentation
      愛媛大学・松山大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 燐ドープCVDダイヤモンド薄膜におけるオーミック電極形成と高機能化

    • Author(s)
      多田 周平
    • Organizer
      第73回応用物理学会学術講演会(2012年秋季)
    • Place of Presentation
      愛媛大学・松山大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 単結晶CVDダイヤモンド層を用いた位置敏感検出器構造の検討

    • Author(s)
      勝本 健太
    • Organizer
      第73回応用物理学会学術講演会(2012年秋季)
    • Place of Presentation
      愛媛大学・松山大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] CVDダイヤモンド薄膜上に形成した電極の局所的特性に関するケルビンフォース顕微鏡による大気中評価

    • Author(s)
      大島 光
    • Organizer
      第73回応用物理学会学術講演会(2012年秋季)
    • Place of Presentation
      愛媛大学・松山大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 微斜面(001)CVDダイヤモンド薄膜における表面修飾状態の評価とその大気中安定性

    • Author(s)
      内田 直樹
    • Organizer
      第53回真空に関する連合講演会
    • Place of Presentation
      甲南大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 微細柱状構造高品質CVDダイヤモンドの作製プロセスの適正化とデバイス応用

    • Author(s)
      橋本 竜一
    • Organizer
      第53回真空に関する連合講演会
    • Place of Presentation
      甲南大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] CVDダイヤモンドを用いたp-i-p型パワーデバイスの素子構造及び作製プロセスの検討

    • Author(s)
      早川 光
    • Organizer
      第53回真空に関する連合講演会
    • Place of Presentation
      甲南大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高配向多結晶CVDダイヤモンドにおける高濃度ホウ素ドープ層の高品質化

    • Author(s)
      溝端 勇介
    • Organizer
      第53回真空に関する連合講演会
    • Place of Presentation
      甲南大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] マイクロ波プラズマプロセスによる非縮退高濃度ホウ素ドープ単結晶CVDダイヤモンド層の積層構造化とそのキャリア輸送特性

    • Author(s)
      九鬼 知博
    • Organizer
      第60回応用物理学会春季学術講演会(2013年春季)
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] MWPCVDプロセスによるp-i-p型ダイヤモンドFETの構造適正化

    • Author(s)
      早川 光
    • Organizer
      第60回応用物理学会春季学術講演会(2013年春季)
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 高濃度ホウ素ドープCVDダイヤモンドにおける電気化学電極特性の結晶品質依存性

    • Author(s)
      溝端 勇介
    • Organizer
      第60回応用物理学会春季学術講演会(2013年春季)
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Presentation] 縮退p型CVDダイヤモンド層の分離孤立型に基づくホウ素アクセプタの実効的活性化エネルギーの低減

    • Author(s)
      市川 大地
    • Organizer
      第60回応用物理学会春季学術講演会(2013年春季)
    • Place of Presentation
      神奈川工科大学
    • Related Report
      2012 Annual Research Report
  • [Remarks] ホームページ

    • URL

      http://daiyan.eei.eng.osaka-u.ac.jp/

    • Related Report
      2012 Final Research Report
  • [Remarks] 大阪大学工学研究科伊藤研究室

    • URL

      http://daiyan.eei.eng.osaka-u.ac.jp/

    • Related Report
      2012 Annual Research Report
  • [Remarks]

    • URL

      http://daiyan.eei.eng.osaka-u.ac.jp/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://www.eng.osaka-u.ac.jp/ja/department/

    • Related Report
      2011 Annual Research Report
  • [Remarks]

    • URL

      http://daiyan.eei.eng.osaka-u.ac.jp/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://www.eng.osaka-u.ac.jp/ja/department/

    • Related Report
      2010 Annual Research Report
  • [Remarks]

    • URL

      http://daiyan.eei.eng.osaka-u.ac.jp/

    • Related Report
      2009 Annual Research Report

URL: 

Published: 2009-04-01   Modified: 2019-07-29  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi