Remote dynamic-strain-distribution measurement system using a nano-scale texture-controlled thin film

• Project/Area Number: 21246021
• Research Category: Grant-in-Aid for Scientific Research (A)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Materials/Mechanics of materials
• Research Institution: Tohoku University
• Principal Investigator: MIURA Hideo 東北大学, 大学院・工学研究科, 教授 (90361112)
• Co-Investigator(Kenkyū-buntansha): SUZUKI Ken 東北大学, 大学院工学研究科, 助教 (40396461)
• Project Period (FY): 2009 – 2012
• Project Status: Completed (Fiscal Year 2012)
• Budget Amount: ¥44,590,000 (Direct Cost: ¥34,300,000、Indirect Cost: ¥10,290,000); Fiscal Year 2012: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000); Fiscal Year 2011: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000); Fiscal Year 2010: ¥15,730,000 (Direct Cost: ¥12,100,000、Indirect Cost: ¥3,630,000); Fiscal Year 2009: ¥14,300,000 (Direct Cost: ¥11,000,000、Indirect Cost: ¥3,300,000)
• Keywords: 材料設計 / 物性 / 評価 / ひずみ / 計測 / 非破壊検査 / カーボンナノチューブ / 分子動力学 / 第一原理 / 電子デバイス・機器 / リモートセンシング / 物性理論 / ナノチューブ・フラーレン / マイクロマシン / 電気伝導

Research Abstract

A two-dimensional strain distribution sensor has been developed by applying multi-walled carbon nanotubes. The spatial resolution of the sensor was 50 mm, and its maximum gauge factor was 600. Dynamic strain was successfully measured at 1 kHz by using a micron wave at 99 GHz. These results clearly indicate that the developed sensor is effective for monitoring the strain on the surface of operating machines for assuring their integrity.

Research Products

• [Journal Article] ANISOTROPIC STRAIN- FIELD-INDUCED CHANGE OF THE ELECTRONIC CONDUCTIVITY OF GRAPHENE SHEETS AND CARBON NANOTUBES (2012)
  • Author(s): Masato Ohnishi, Hiroshi Kawakami, Yusuke Suzuki, Ken Suzuki,Hideo Miura
  • Journal Title: Proc. of ,ASME 2012 International Mechanical Engineering Congress & Exposition, (IMECE2012) Volume: No.87347 Pages: 1-6
  • Peer Reviewed
• [Journal Article] カーボンナノチューブ応用二次元ひずみ分布計測センサの試作 (2012)
  • Author(s): 鈴木悠介,大橋悠輔,大西正人,鈴木研,三浦英生
  • Journal Title: 日本機械学会論文集(A編) Volume: 78巻 Pages: 689-693
  • NAID: 130002050294
  • Peer Reviewed
• [Journal Article] Change of the Electronic Conductivity of CNTs and Graphene Sheets Caused by Three-dimensional Strain Field (2012)
  • Author(s): M.Ohnishi, H.Kawakami, Y.Suzuki, K.Suzuki,H.Miura
  • Journal Title: Proc. of Nanotech 2012 Volume: Vol.1 Pages: 260-263
  • Peer Reviewed
• [Journal Article] カーボンナノチューブ応用二次元ひずみ分布計測センサの試作 (2012)
  • Author(s): 鈴木悠介，大橋悠輔，大西正人， 鈴木研，三浦英生
  • Journal Title: 日本機械学会論文集（A編） Volume: 78 Pages: 689-693
  • NAID: 130002050294
  • Peer Reviewed
• [Journal Article] Change of the Electronic Conductivity of CNTs and Graphene Sheets Caused by Three-dimensional Strain Field (2012)
  • Author(s): M.Ohnishi, H.Kawakami, Y.Suzuki, K.Suzuki, and H.Miura
  • Journal Title: Proc. of IEEE Nanotech 2012 Volume: 1 Pages: 260-263
  • Peer Reviewed
• [Journal Article] ANISOTROPIC STRAIN-FIELD-INDUCED CHANGE OF THE ELECTRONIC CONDUCTIVITY OF GRAPHENE SHEETS AND CARBON NANOTUBES (2012)
  • Author(s): Masato Ohnishi, Hiroshi Kawakami, Yusuke Suzuki, Ken Suzuki, Hideo Miura
  • Journal Title: Proc. of ASME 2012 International Mechanical Engineering Congress & Exposition, (IMECE2012) Volume: 1
  • Peer Reviewed
• [Journal Article] Change of the Electronic Conductivity of CNTs and Graphene Sheets Caused by an Anisotropic Three-dimensional Strain Field (2012)
  • Author(s): Masato Ohnishi, Ken Suzuki and Hideo Miura
  • Journal Title: Proc. of IEEE SISPAD2012 Volume: 1 Pages: 86-89
  • Peer Reviewed
• [Journal Article] Change of the Electronic Conductivity of Carbon Nanotubes and Grapheme Sheets Caused by a Three-Dimensional Strain Field (2011)
  • Author(s): Masato Ohnishi, Ken SuzukiHideo Miura, , Yusuke Suzuki, and Yusuke Ohashi
  • Journal Title: Proc. of ASME InterPACK2011 , Multi Physics Based Reliability Volume: No.52057 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Non-Contact and Remote Measurement Method of the Change of the Electrical Conductivity of Carbon Nanotubes- Dispersed Resin under Strain (2011)
  • Author(s): Yusuke Ohashi, Yusuke Suzuki, Masato Ohnishi, Ken Suzuki,and Hideo Miura
  • Journal Title: Proc. of ASME InterPACK2011 Volume: No.52064 Pages: 1-6
  • Peer Reviewed
• [Journal Article] カーボンナノチューブ電気伝導特性に及ぼすひずみの影響 (2011)
  • Author(s): 鈴木悠介,大西正人,鈴木研,三浦英生
  • Journal Title: 日本機械学会論文集(A編) Volume: 77巻 Pages: 91-95
  • NAID: 130000874066
  • Peer Reviewed
• [Journal Article] Two-Dimensional Strain- Distribution Sensor Using Carbon Nanotube (2011)
  • Author(s): Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Ken Suzuki and Hideo Miura
  • Journal Title: Proc. of International Conference on Advanced Technology in Experimental Mechanics 2011 Volume: No.OS20-3-2 Pages: 1-8
  • NAID: 130002050294
  • Peer Reviewed
• [Journal Article] カーボンナノチューブ電気伝導特性に及ぼすひずみの影響 (2011)
  • Author(s): 鈴木悠介, 大西正人, 鈴木研, 三浦英生
  • Journal Title: 日本機械学会論文集(A編) Volume: 77 Pages: 91-95
  • NAID: 130000874066
  • Peer Reviewed
• [Journal Article] Change of the Electronic Conductivity of Carbon Nanotubes and Grapheme Sheets Caused by a Three-Dimensional Strain Field (2011)
  • Author(s): Masato Ohnishi, Ken Suzuki, Hideo Miura, Yusuke Suzuki, Yusuke Ohashi
  • Journal Title: Proc.of ASME Pacific Rim Technical Conference & Exposition on Packaging and Integration of Electronic and Photonic Systems Volume: IPACK52057 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Non-Contact and Remote Measurement Method of the Change of the Electrical Conductivity of Carbon Nanotubes-Dispersed Resin under strain (2011)
  • Author(s): Yusuke Ohashi, Yusuke Suzuki, Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of ASME Pacific Rim Technical Conference & Exposition on Packaging and Integration of Electronic and Photonic Systems Volume: IPACK52064 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Two-Dimensional Strain-Distribution Sensor Using Carbon Nanotube-dispersed Resin (2011)
  • Author(s): Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of ASME Pacific Rim Technical Conference & Exposition on Packaging and Integration of Electronic and Photonic Systems Volume: IPACK52062 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Development of Two-Dimensional Strain-Distribution Sensor Using Carbon Nanotube-Dispersed Resin (2011)
  • Author(s): Ken Suzuki, Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Hideo Miura
  • Journal Title: Proc.of International Conference on SOLID STATE DEVICES AND MATERIALS 2011 Pages: 504-505
  • Peer Reviewed
• [Journal Article] Two-Dimensional Strain-Distribution Sensor Using Carbon Nanotube (2011)
  • Author(s): Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of International Conference on Advanced Technology in Experimental Mechanics 2011
  • NAID: 130002050294
  • Peer Reviewed
• [Journal Article] Strain Dependence of the Electronic Conductivity of Carbon Nanotubes and Graphene Sheets (2011)
  • Author(s): Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of International Conference on SOLID STATE DEVICES AND MATERIALS 2011 Pages: 508-509
  • Peer Reviewed
• [Journal Article] Remote Strain Sensor using Carbon Nanotube-Dispersed Resin (2011)
  • Author(s): Yusuke Ohashi, Yusuke Suzuki, Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of International Conference on Advanced Technology in Experimental Mechanics 2011
  • Peer Reviewed
• [Journal Article] Nanostructure Dependence of the Electronic Conductivity of Carbon Nanotubes and Grapheme Sheets (2011)
  • Author(s): Masato Ohnishi, Katsuya Ohsaki, Yusuke Suzuki, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of 2010 ASME International Mechanical Engineering Congress and Exposition Volume: IMECE2010-37277 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Nanostructure Dependence of the Electronic Conductivity of Carbon Nanotubes and Grapheme Sheets (2010)
  • Author(s): Masato Ohnishi, Katsuya Ohsaki, Yusuke Suzuki, Ken Suzuki,and Hideo Miura
  • Journal Title: Proc. of 2010 ASME International Mechanical Engineering Congress and Exposition Volume: No.37277 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Quantum Chemical Molecular Dynamics Study of Chemical Reaction Dynamics on Ni-base Alloy Surfaces in Gas-cooled Reactors (2010)
  • Author(s): Ken SUZUKI, Yoichi TAKEDA, Hideo MIURA
  • Journal Title: Journal of Solid Mechanics and Materials Engineering Volume: 4 Pages: 1644-1653
  • NAID: 130000420993
  • Peer Reviewed
• [Journal Article] Effect of the Mechanical Properties of Underfill on the Local Deformation and Residual Stress in a Chip Mounted by Area-Arrayed Flip Chip Structures (2010)
  • Author(s): Kohta Nakahira, Yuki Sato, Hiroki Kishi, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of 11tn International conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro/Nanoelectronics and Systems Pages: 641-646
  • Peer Reviewed
• [Journal Article] Nondestructive Evaluation of the Delamination of Fine Bumps in Three-Dimensionally Stacked Flip Chip Structures (2010)
  • Author(s): Yuhki Sato, Naokazu Murata, Kinji Tamakawa, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of the 60^<th> Electronic Components and Technology Conference Pages: 1951-1956
  • Peer Reviewed
• [Journal Article] Remote Non-contact Strain Sensor Using Carbon Nanotube-dispersed Resin (2010)
  • Author(s): Yusuke Suzuki, Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of IMPACT Conference 2010 Volume: AS015 Pages: 1-4
  • Peer Reviewed
• [Journal Article] NONDESTRUCTIVE DETECTION OF OPEN FAILURES IN THREE-DIMENSIONALLY STACKED CHIPS MOUNTED BY AREA-ARRAYED FINE BUMPS (2010)
  • Author(s): Yuki Sato, Kohta Nakahira, Naokazu Murata, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of 12^<th> International Conference on Electronics Materials and Packaging Pages: 117-123
  • Peer Reviewed
• [Journal Article] REMOTE DYNAMIC STRAIN MEASUREMENT USING VERTICAL CAVITY SURFACE EMITTING LASER (2010)
  • Author(s): Yusuke Ohashi, Aya Kaisumi, Atsushi Kitamura, Ken Suzuki, Hideo Miura
  • Journal Title: Proc.of 12^<th> International Conference on Electronics Materials and Packaging Pages: 131-136
  • Peer Reviewed
• [Journal Article] REMOTE STRAIN MEASUREMENT BY MULTI-WALLED CARBON NANOTUBE- DISPERSED RESIN (2009)
  • Author(s): Katsuya Osaki, Hideki Fuji, Masato Onishi, Ken Suzuki,and Hideo Miura
  • Journal Title: Proceedings of the ASME 2009 Inter PACK Conference Volume: No.89146 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Multi-walled Carbon Nanotube- Dispersed Resin Films for Remote Strain Measurement (2009)
  • Author(s): Katsuya Ohsaki, Hideki Fuji, Masato Ohnishi, Ken Suzuki,and Hideo Miura
  • Journal Title: Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials Pages: 1126-1127
  • Peer Reviewed
• [Journal Article] REMOTE STRAIN MEASUREMENT BY MULTI-WALLED CARBON NANOTUBE-DISPERSED RESIN (2009)
  • Author(s): Katsuya Ohsaki, Hideo Miura
  • Journal Title: Proc.of the ASME 2009 Inter PACK Conference IP09-89146 Pages: 1-6
  • Peer Reviewed
• [Journal Article] IN-LINE EVALUTION METHOD OF THE INTRINSIC STRESS OF THIN FILMS USED FOR TRANSISTOR STRUCTURES (2009)
  • Author(s): Hiroki Kishi, Hideo Miura
  • Journal Title: Proc.of the ASME 2009 Inter PACK Conference IP09-89145 Pages: 1-6
  • Peer Reviewed
• [Journal Article] Degradation of Interface Integrity Between a High-k Dielectric Thin Film and a Gate Electrode Due To Excess Oxygen in the Film (2009)
  • Author(s): Hideo Miura, Ken Suzuki
  • Journal Title: Proc.of 2009 IEEE International Reliability Physics Symposium 4A. 6 Pages: 376-381
  • NAID: 120002070092
  • Peer Reviewed
• [Journal Article] Multi-walled Carbon Nanotube-Dispersed Resin Films for Remote Strain Measurement (2009)
  • Author(s): Katsuya Ohsaki, Hideo Miura
  • Journal Title: Extended Abstracts of the 2009 International Conference on Solid State Devices and Materials E8-5 Pages: 1126-1127
  • Peer Reviewed
• [Journal Article] マイクロスケールひずみセンサを用いた三次元フリップチップ実装構造内局所残留応力測定に関する研究 (2009)
  • Author(s): 佐々木拓也, 三浦英生
  • Journal Title: 日本機械学会論文集(A編) 75 Pages: 831-838
  • Peer Reviewed
• [Presentation] カーボンナノチューブやグラフェンシートの電子バンド構造に及ぼす三次元ひずみ場の影響解析 (2012)
  • Author(s): 鈴木研,大西正人,三浦英生
  • Organizer: 応用物理学会分科会シリコンテクノロジー
  • Place of Presentation: 東京
  • Year and Date: 2012-11-15
• [Presentation] Mechanics, Strengthand Reliability of Materials in Nano-and Micro Scales (2012)
  • Author(s): Hideo Miura
  • Organizer: 2^<nd> Annual World Congress of Nanoscience and Nanotechnology 2012
  • Place of Presentation: Qingdao, China
  • Year and Date: 2012-10-26
• [Presentation] Anisotropic Strain-Field-induced Change of the Electronic Conductivity of Graphene Sheets and Carbon Nanotubes (2012)
  • Author(s): Hideo Miura
  • Organizer: 13^<th> International Conference on Thermal,Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
  • Place of Presentation: Lisbon, Portugal
  • Year and Date: 2012-04-16
• [Presentation] Anisotropic Strain-Field-induced Change of the Electronic Conductivity of Graphene Sheets and Carbon Nanotubes (2012)
  • Author(s): Hideo Miura
  • Organizer: 13th International Conference on Thermal,Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
  • Place of Presentation: LIsbon, Portugal
  • Invited
• [Presentation] Mechanics, Strength and Reliability of Materials in Nano- and Micro Scales (2012)
  • Author(s): Hideo Miura
  • Organizer: 2nd Annual World Congress of Nanoscience and Nanotechnology 2012
  • Place of Presentation: Qingdao, China
  • Invited
• [Presentation] カーボンナノチューブを応用した高感度ひずみ分布検出センサの検討 (2012)
  • Author(s): 川上浩司
  • Organizer: 日本機械学会M&M2012材料力学カンファレンス
  • Place of Presentation: 松山
• [Presentation] Change of the Electronic Conductivity of CNTs Caused by a Three- dimensional Strain Field (2012)
  • Author(s): Masato Ohnishi
  • Organizer: Solid State Devices and Materials 2012 (SSDM 2012)
  • Place of Presentation: Kyoto, japan
• [Presentation] Effect of the local strain distribution on the electronic conductivity of carbon nanotubes (2012)
  • Author(s): M. Ohnishi
  • Organizer: International Computational Mechanics Symposium (ICMS) 2012
  • Place of Presentation: Kobe, Japan
• [Presentation] Highly Sensitive Strain Sensor Using Carbon Nanotube (2012)
  • Author(s): Hiroshi Kawakami
  • Organizer: 14th International Conference on Electronic Materials and Packaging (EMAP 2012)
  • Place of Presentation: Hong Kong
• [Presentation] Masato Ohnishi, Ken Suzuki, and Hideo Miura, "Change of the Electronic Conductivity of CNTs and Graphene Sheets Caused by Three-dimensional Deformation (2011)
  • Author(s): Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Organizer: 13^<th> International Conference on Electronics Materials and Packaging
  • Place of Presentation: Kyoto, Japan
  • Year and Date: 2011-12-15
• [Presentation] Development of Two-Dimensional Strain-Distribution Sensor UsingCarbon Nanotube-Dispersed Resin (2011)
  • Author(s): Ken Suzuki, Yusuke Suzuki, YusukeOhashi, Masato Ohnishi, and Hideo Miura
  • Organizer: International Conference on SOLID STATE DEVICES ANDMATERIALS2011
  • Place of Presentation: Nagoya,Japan
  • Year and Date: 2011-09-29
• [Presentation] Development of Two-Dimensional Strain-Distribution Sensor Using Carbon Nanotube-Dispersed Resin (2011)
  • Author(s): Ken Suzuki, Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Hideo Miura
  • Organizer: International Conference on SOLID STATE DEVICES AND MATERIALS
  • Place of Presentation: Nagoya, Japan
  • Year and Date: 2011-09-29
• [Presentation] Strain Dependence of the Electronic Conductivity of Carbon Nanotubes and Graphene Sheets (2011)
  • Author(s): Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Organizer: International Conference on SOLID STATE DEVICES AND MATERIALS
  • Place of Presentation: Nagoya, Japan
  • Year and Date: 2011-09-29
• [Presentation] Remote Strain Sensor using Carbon Nanotube-Dispersed Resin (2011)
  • Author(s): Yusuke Ohashi, Yusuke Suzuki, Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Organizer: International Conference on Advanced Technology in Experimental Mechanics 2011
  • Place of Presentation: Kobe, Japan
  • Year and Date: 2011-09-21
• [Presentation] Two-Dimensional Strain-Distribution Sensor Using Carbon Nanotube (2011)
  • Author(s): Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Organizer: International Conference on Advanced Technology in Experimental Mechanics 2011
  • Place of Presentation: Kobe, Japan
  • Year and Date: 2011-09-20
• [Presentation] ナノスケールでの材料力学と新材料・最先端デバイスの創成 (2011)
  • Author(s): 三浦英生
  • Organizer: 日本機械学会材料力学カンファレンスM&M2011
  • Place of Presentation: 小倉,福岡(招待講演)
  • Year and Date: 2011-07-18
• [Presentation] ナノ・マイクロスケールの材料力学と強度信頼性 (2011)
  • Author(s): 三浦英生
  • Organizer: 日本機械学会M&M2011
  • Place of Presentation: 福岡
  • Year and Date: 2011-07-17
• [Presentation] ナノ・マイクロスケールの材料力学と強度信頼性 (2011)
  • Author(s): 三浦英生
  • Organizer: 日本機械学会材料力学カンファレンスM&M2011
  • Place of Presentation: 小倉,福岡(招待講演)
  • Year and Date: 2011-07-17
• [Presentation] Non-Contact and Remote Measurement Method of the Change of the Electrical Conductivity of Carbon Nanotubes-Dispersed Resin under Strain (2011)
  • Author(s): Yusuke Ohashi, Yusuke Suzuki, MasatoOhnishi, Ken Suzuki, Hideo Miura
  • Organizer: ASME Inter PACK 2011
  • Place of Presentation: Portland, Oregon, USA
  • Year and Date: 2011-07-11
• [Presentation] Two-Dimensional Strain-Distribution Sensor Using Carbon Nanotube-dispersed Resin (2011)
  • Author(s): Yusuke Suzuki, Yusuke Ohashi, MasatoOhnishi, Ken Suzuki, and Hideo Miura
  • Organizer: ASME InterPACK2011
  • Place of Presentation: Portland,Oregon, USA
  • Year and Date: 2011-07-10
• [Presentation] Two-Dimensional Strain-Distribution Sensor Using Carbon Nanotube-dispersed Resin (2011)
  • Author(s): Yusuke Suzuki, Yusuke Ohashi, Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Organizer: ASME InterPACK2011
  • Place of Presentation: Portland, USA(招待講演)
  • Year and Date: 2011-07-08
• [Presentation] Change of the Electronic Conductivity of Carbon Nanotubes and Grapheme Sheets Caused by a Three-Dimensional Strain Field (2011)
  • Author(s): Masato Ohnishi, Ken Suzuki, Hideo Miura, Yusuke Suzuki, Yusuke Ohashi
  • Organizer: ASME InterPACK2011
  • Place of Presentation: Portland, USA
  • Year and Date: 2011-07-07
• [Presentation] Non-Contact and Remote Measurement Method of the Change of the Electrical Conductivity of Carbon Nanotubes-Dispersed Resin under Strain (2011)
  • Author(s): Yusuke Ohashi, Yusuke Suzuki, Masato Ohnishi, Ken Suzuki, Hideo Miura
  • Organizer: ASME InterPACK2011
  • Place of Presentation: Portland, USA
  • Year and Date: 2011-07-06
• [Presentation] マイクロひずみ分布センサチップによる実装応力(ひずみ)の評価 (2010)
  • Author(s): 三浦英生
  • Organizer: エレクトロニクス実装学会2010ワークショップ
  • Place of Presentation: 静岡
  • Year and Date: 2010-10-29
• [Presentation] マイクロひずみ分布センサチップによる実装応力(ひずみ)の評価 (2010)
  • Author(s): 三浦英生
  • Organizer: エレクトロニクス実装学会2010ワークショップ
  • Place of Presentation: Shizuoka,Japan
  • Year and Date: 2010-10-28
• [Presentation] NONDESTRUCTIVE DETECTION OF OPEN FAILURES IN THREE-DIMENSIONALLY STACKED CHIPS MOUNTED BY AREA-ARRAYED FINE BUMPS (2010)
  • Author(s): Yuki Sato, Kohta Nakahira, Naokazu Murata, Ken Suzuki, Hideo Miura
  • Organizer: 12^<th> International Conference on Electronics Materials and Packaging, Proceedings
  • Place of Presentation: Singapore Singapore
  • Year and Date: 2010-10-27
• [Presentation] Remote Non-contact Strain Sensor Using Carbon Nanotube-dispersed Resin (2010)
  • Author(s): Yusuke Suzuki, Masato Ohnishi, KenSuzuki, and Hideo Miura
  • Organizer: IMPACT Conference 2010
  • Place of Presentation: Taipei Taiwan
  • Year and Date: 2010-10-21
• [Presentation] Mechanical Reliability of 3D Stacked Silicon Chips (2010)
  • Author(s): Hideo Miura
  • Organizer: The 9^<th> International Symposium on Microelectronics and Packaging
  • Place of Presentation: Seoul.Korea
  • Year and Date: 2010-10-04
• [Presentation] Improvement of the Interface Integrity between a High-k Dielectric Film and a Metal Gate Electrode by Controlling Point Defects and Residual Stress (2010)
  • Author(s): Ken Suzuki, Tatsuya Inoue, Hideo Miura
  • Organizer: 15^<th> International Conference on Simulation of Semiconductor Processes and Devices
  • Place of Presentation: Bologna, Italy
  • Year and Date: 2010-09-05
• [Presentation] 異相界面の環境誘起劣化損傷の原子レベルシミュレーション (2010)
  • Author(s): 三浦英生, 鈴木研
  • Organizer: 日本材料学会破壊力学部門公開委員会
  • Place of Presentation: 札幌
  • Year and Date: 2010-05-21
• [Presentation] Dominant Structural Factors of the Local Deformation and Residual Stress of a Silicon Chip Mounted on Area-Arrayed Flip Chip Structures (2010)
  • Author(s): Kohta Nakahira, Naokazu Murata, Yuhki Sato, Ken Suzuki, Hideo Miura
  • Organizer: International Conference on Electronics Packaging 2010
  • Place of Presentation: 札幌
  • Year and Date: 2010-05-13
• [Presentation] Quantum Chemical Molecular Dynamics Simulation of Oxidation Process on Clean Metal Surface in High Temperature Water (2010)
  • Author(s): Ken Suzuki, Hideo Miura
  • Organizer: 第133回破壊力学部門委員会講演会
  • Place of Presentation: 札幌
  • Year and Date: 2010-05-12
• [Presentation] Effect of the Mechanical Properties of Underfill on the Local Deformation and Residual Stress in a Chip Mounted by Area-Arrayed Flip Chip Structures (2010)
  • Author(s): Kohta Nakahira, Yuki Sato, Hiroki Kishi, Ken Suzuki, Hideo Miura
  • Organizer: 11tn International conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Micro/Nanoelectronics and Systems
  • Place of Presentation: Bordeaux, France
  • Year and Date: 2010-04-28
• [Presentation] カーボンナノチューブ電気伝導特性に及ぼす局所ひずみの影響 (2010)
  • Author(s): 大崎克也
  • Organizer: 日本機械学会東北支部第45期総会・講演会
  • Place of Presentation: 仙台
  • Year and Date: 2010-03-12
• [Presentation] カーボンナノチューブ分散ゴムを用いた大変形ひずみ計測の基礎検討 (2010)
  • Author(s): 鈴木悠介
  • Organizer: 日本機械学会東北学生会第40回卒業研究発表会
  • Place of Presentation: 秋田
  • Year and Date: 2010-03-05
• [Presentation] Effect of Micro-Texture of Electroplated Copper Thin-Films on Their Mechanical and Electrical Reliability (2009)
  • Author(s): 三浦英生
  • Organizer: IMPACT Conference 2009 and International 3D IC Conference
  • Place of Presentation: Taipei,台湾
  • Year and Date: 2009-10-23
• [Presentation] Multi-walled Carbon Nanotube-Dispersed Resin Films for Remote Strain Measurement (2009)
  • Author(s): Ken Suzuki,Katsuya Ohsaki, and Hideo Miura
  • Organizer: 2009 International Conference on SolidState Devices and Materials
  • Place of Presentation: Sendai,Japan
  • Year and Date: 2009-10-08
• [Presentation] Multi-walled Carbon Nanotube-Dispersed Resin Films for Remote Strain Measurement (2009)
  • Author(s): 鈴木悠介
  • Organizer: 2009 International Conference on Solid State Devices and Materials
  • Place of Presentation: 仙台
  • Year and Date: 2009-10-08
• [Presentation] 多層カーボンナノチューブ分散ゴムによる大変形計測の検討 (2009)
  • Author(s): 鈴木悠介
  • Organizer: 日本機械学会東北支部第45期秋季講演会
  • Place of Presentation: 福島
  • Year and Date: 2009-09-26
• [Presentation] Strain Dependence of Dielectric Properties and Reliability of High-k Thin Films (2009)
  • Author(s): 鈴木悠介
  • Organizer: 2009 International Conference on Simulation of Semiconductor Processes and Devices
  • Place of Presentation: San Diego,米国
  • Year and Date: 2009-09-12
• [Presentation] MEMSの実装と構造強度信頼性 (2009)
  • Author(s): 三浦英生
  • Organizer: 第39回信頼性・保全シンポジウム
  • Place of Presentation: 東京
  • Year and Date: 2009-07-13
• [Presentation] カーボンナノチューブを応用した高感度ひずみセンサ構造の基礎検討
  • Author(s): 野崎 拓弥
  • Organizer: 日本機械学会東北学生会第43回卒業研究発表講演会
  • Place of Presentation: 一関
• [Remarks]
  • URL: http://www.miura.rift.mech.tohoku.ac.jp
• [Remarks] 東北大学エネルギー安全科学国際研究センター三浦研究室
• [Remarks]
  • URL: http://www.miura.rift.mech.tohoku.ac.jp/home.htm
• [Remarks]
  • URL: http://www.miura.rift.mech.tohoku.ac.jp/home.htm
• [Remarks]
  • URL: http://www.miura.rift.mech.tohoku.ac.jp/home.htm
• [Patent(Industrial Property Rights)] 半導体装置の製造方法 (2009)
  • Inventor(s): 小藤直行, 三浦英生
  • Industrial Property Rights Holder: (株)日立製作所
  • Filing Date: 2009-06-04