| Project/Area Number |
21246026
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
SHINNO Hidenori 東京工業大学, 精密工学研究所, 教授 (40196639)
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| Co-Investigator(Kenkyū-buntansha) |
YOSHIOKA Hayato 東京工業大学, 精密工学研究所, 准教授 (90361758)
SAWANO Hiroshi 東京工業大学, 精密工学研究所, 助教 (40514295)
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| Project Period (FY) |
2009 – 2011
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| Project Status |
Completed (Fiscal Year 2011)
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| Budget Amount *help |
¥42,510,000 (Direct Cost: ¥32,700,000、Indirect Cost: ¥9,810,000)
Fiscal Year 2011: ¥9,620,000 (Direct Cost: ¥7,400,000、Indirect Cost: ¥2,220,000)
Fiscal Year 2010: ¥14,040,000 (Direct Cost: ¥10,800,000、Indirect Cost: ¥3,240,000)
Fiscal Year 2009: ¥18,850,000 (Direct Cost: ¥14,500,000、Indirect Cost: ¥4,350,000)
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| Keywords | ナノ計測 / 三次元計測 / コンパクト構造 / ナノ形状計測 / プローブシステム / トンネル電流 / 原子間力 / ナノ運動制御 / Nano-profiler / Nano-measuring / Nano-motion control / Three-dimensional profile / Scanning Tunneling Microscopy / Nano-geometry / Measuring machine / Probe |
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| Research Abstract |
This research developed a compact type three-dimensional profile measuring system named "Compact Nano-Profiler" which achieve both a measuring range of several 10 mm and a measurement resolution of 1 nm. By combining a compact XY planar nano-motion table system, a vertical nano-motion platform with gravity compensating function and an ultra-fine probing system, the compact nano-profiler with a dynamically and thermally stable structure was newly developed and then the performances of the system were evaluated. As a result, performance evaluation results confirmed that the developed measuring system has both a positioning resolution of 1 nm and high measuring stability. In addition, a series of measuring test results confirmed the developed measuring system has a high reproducibility of nanometer scale measurement. Furthermore, use of an AFM probing system made it possible to effectively measure an insulator such as glass lens, ceramics, etc.
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