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Application of chemical lift-off process to the fabrication of vertical ultra-violet LEDs

Research Project

Project/Area Number 21360001
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionTohoku University

Principal Investigator

YAO Takafumi  東北大学, 学際科学国際高等研究センター, 客員教授 (60230182)

Co-Investigator(Kenkyū-buntansha) GOTO Takenari  東北大学, 学際科学国際高等研究センター, 研究支援者 (10004342)
FUJII Katsushi  東北大学, 学際科学国際高等研究センター, 客員准教授 (80444016)
LEE Hyunjae  東北大学, 学際科学国際高等研究センター, 寄附研究部門研究員 (10584063)
小池 佳代  東北大学, 学際科学国際高等研究センター, 技術補佐員 (80532423)
Project Period (FY) 2009 – 2011
Project Status Completed (Fiscal Year 2011)
Budget Amount *help
¥18,460,000 (Direct Cost: ¥14,200,000、Indirect Cost: ¥4,260,000)
Fiscal Year 2011: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2010: ¥6,370,000 (Direct Cost: ¥4,900,000、Indirect Cost: ¥1,470,000)
Fiscal Year 2009: ¥11,310,000 (Direct Cost: ¥8,700,000、Indirect Cost: ¥2,610,000)
Keywords窒化物半導体 / LED / 紫外LED / ケミカル・リフト・オフ / 発光ダイオード(LED) / GaN / AlGaN / InGaN / CrN / ケミカルリフトオフ / 窒化
Research Abstract

Recently, blue LEDs and white LEDs have been already in the commercial market and are widely used in our daily life. In order to apply the LED technology to general lighting, high-brightness LEDs emitting uv light are highly demanded. To this end, we propose to apply the chemical lift-off (CLO)technique to detach sapphire substrates after growing uv LED structures to fabricate vertical LED structures.
We have demonstrated the fabrication of 385-nm band high-brightness uv LEDs by means of CLO technique. The emitting wavelength can be tuned by adjusting the composition of In in the active InGaN/GaN QW layers. The emission intensity has been greatly improved by adapting proper AlGaN cladding structures. These achievements can be applied to the fabrication of deep uv LEDs.

Report

(4 results)
  • 2011 Annual Research Report   Final Research Report ( PDF )
  • 2010 Annual Research Report
  • 2009 Annual Research Report
  • Research Products

    (26 results)

All 2011 2010 2009 2000 Other

All Journal Article (19 results) (of which Peer Reviewed: 17 results) Presentation (4 results) Book (2 results) Remarks (1 results)

  • [Journal Article] Effects of the inclination direction of vicinal m-plane sapphire substrates on the crystal quality of m-plane GaN film2011

    • Author(s)
      Cho, Y ; Choi, S ; Kil, GS ; Lee, HJ ; Yao, T ; Yoo, J ; Kwon, J ; Chang, J
    • Journal Title

      JOURNAL OF CRYSTAL GROWTH

      Volume: 325 Pages: 85-89

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Misoriented grains with a preferential orientation in a-plane oriented GaN layers2011

    • Author(s)
      Tokumoto, Y ; Lee, HJ ; Ohno, Y ; Yao, T ; Yonenaga, I
    • Journal Title

      JOURNAL OF CRYSTAL GROWTH

      Volume: 334 Pages: 80-83

    • Related Report
      2011 Annual Research Report 2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Suppression of composition modulation in In-rich InxGa1-xN layer with high In content (x similar to 0. 67)2011

    • Author(s)
      Jeong, M ; Lee, HS ; Han, SK ; Shin, EJ ; Hong, SK ; Lee, JY ; Song, JH ; Yao, T
    • Journal Title

      PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

      Volume: 208 Pages: 2737-2740

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Effects of the inclination direction of vicinal m-plane sapphire substrates on the crystal quality of m-plane GaN film2011

    • Author(s)
      Cho, Y; Choi, S; Kil, GS; Lee, HJ; Yao, T; Yoo, J; Kwon, J; Chang, J
    • Journal Title

      JOURNAL OF CRYSTAL GROWTH

      Volume: 325 Issue: 1 Pages: 85-88

    • DOI

      10.1016/j.jcrysgro.2011.04.034

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Suppression of composition modulation in In-rich InxGa1-xN layer with high In content (x similar to 0.67)2011

    • Author(s)
      Jeong, M; Lee, HS; Han, SK; Shin, EJ; Hong, SK; Lee, JY; Song, JH; Yao, T
    • Journal Title

      PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

      Volume: 208 Issue: 12 Pages: 2737-2740

    • DOI

      10.1002/pssa.201127307

    • Related Report
      2011 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Correlation between structural and optical properties of a-plane GaN films grown on r-plane sapphire by metal organic chemical-vapor deposition2010

    • Author(s)
      Jung, M ; Chang, J ; Lee, H ; Ha, JS ; Park, JS ; Park, S ; Fujii, K ; Yao, T ; Kil, GS ; Lee, S ; Cho, M ; Whang, S
    • Journal Title

      JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

      Volume: 28 Pages: 623-626

    • Related Report
      2011 Final Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An empirical equation including the strain effect for optical transition energy of strained and fully relaxed GaN films2010

    • Author(s)
      Lee, SW ; Ha, JS ; Lee, HJ ; Lee, HJ ; Goto, H ; Hanada, T ; Goto, T ; Fujii, K ; Cho, MW ; Yao, T
    • Journal Title

      JOURNAL OF PHYSICS D-APPLIED PHYSICS

      Volume: 43 Pages: 175101-175101

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Use of Polytypes to Control Crystallographic Orientation of GaN2010

    • Author(s)
      Lee, HJ ; Yao, T ; Kim, C ; Chang, J
    • Journal Title

      CRYSTAL GROWTH & DESIGN

      Volume: 10 Pages: 5307-5311

    • Related Report
      2011 Final Research Report 2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article] An empirical equation including the strain effect for optical transition energy of strained and fully relaxed GaN films2010

    • Author(s)
      Lee, SW; Ha, JS; Lee, HJ; Lee, HJ; Goto, H; Hanada, T; Goto, T; Fujii, K; Cho, MW; Yao, T
    • Journal Title

      JOURNAL OF PHYSICS D-APPHED PHYSICS

      Volume: 43 Pages: 175101-175101

    • Related Report
      2010 Annual Research Report
    • Peer Reviewed
  • [Journal Article]2010

    • Author(s)
      八百隆文、藤井克司、神門賢二
    • Journal Title

      発光ダイオード(朝倉書店)

      Pages: 1-352

    • Related Report
      2009 Annual Research Report
  • [Journal Article] Leakage current improvement of nitride-based light emitting diodes using CrN buffer layer and its vertical type application by chemical lift-off process2009

    • Author(s)
      Fujii K, Lee S, Ha JS, Lee HJ, Lee HJ, Lee SH, Kato T, Cho MW, Yao T
    • Journal Title

      Applied Physics Letters

      Volume: 94 Pages: 2420108-2420108

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] X-ray photoelectron spectroscopy study on the CrN surface grown on sapphire substrate to control the polarity of ZnO by plasma-assisted molecular beam epitaxy2009

    • Author(s)
      Chang JH, Jung MN, Park JS, Park SH, Im IH, Lee HJ, Ha JS, Fujii K, Hanada T, Yao T, Murakami Y, Ohtsu N, Kil GS
    • Journal Title

      Applied Surface Science

      Volume: 255 Pages: 8582-8586

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Lattice strain in bulk GaN epilayers grown on CrN/sapphire template2009

    • Author(s)
      Lee SW, Ha JS, Lee HJ, Lee HJ, Goto H, Hanada T, Goto T, Fujii K, Cho MW, Yao T
    • Journal Title

      Applied Physics Letters

      Volume: 94 Pages: 82105-82105

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Hydride vapor phase epitaxy of GaN on the vicinal c-sapphire with a CrN interlayer2009

    • Author(s)
      Lee HJ, Ha JS, Lee HJ, Lee SW, Lee SH, Goto H, Hong SK, Cho MW, Yao T, Fujito K, Shimoyama K, Namita H, Nagao S
    • Journal Title

      Journal of Crystal Growth

      Volume: 311 Pages: 470-473

    • Related Report
      2011 Final Research Report
    • Peer Reviewed
  • [Journal Article] Leakage current improvement of nitride-based light emitting diodes using CrN buffer layer and its vertical type application by chemical lift-off process2009

    • Author(s)
      Fujii K, Lee S, Ha JS, Lee HJ, Lee HJ, Lee SH, Kato T, Cho MW, Yao T
    • Journal Title

      Applied Physics Letters 94

      Pages: 242108-242108

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] X-ray photoelectron spectroscopy study on the CrN surface grown on sapphire substrate to control the polarity of ZnO by plasma-assisted molecular beam epitaxy2009

    • Author(s)
      Chang JH, Jung MN, Park JS, Park SH, Im IH, Lee HJ, Ha JS, Fujii K, Hanada T, Yao T, Murakami Y, Ohtsu N, Kil GS
    • Journal Title

      Applied Surface Science 255

      Pages: 8582-8586

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Lattice strain in bulk GaN epilayers grown on CrN/sapphire template2009

    • Author(s)
      Lee SW, Ha JS, Lee HJ, Lee HJ, Goto H, Hanada T, Goto T, Fujii K. Cho MW. Yao T
    • Journal Title

      Applied Physics Letters 94

      Pages: 82105-82105

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Hydride vapor phase epitaxy of GaN on the vicinal c-sapphire with a CrN interlayer2009

    • Author(s)
      Lee HJ, Ha JS, Lee HJ, Lee SW, Lee SH, Goto H, Hong SK, Cho MW, Yao T, Fujito K, Shimoyama K, Namita H, Nagao S
    • Journal Title

      Journal of Crystal Growth 311

      Pages: 470-473

    • Related Report
      2009 Annual Research Report
    • Peer Reviewed
  • [Journal Article]2000

    • Author(s)
      T.Yao, S.K.Hong
    • Journal Title

      Oxide and Nitride Semiconductors(Springer)

      Pages: 1-517

    • Related Report
      2009 Annual Research Report
  • [Presentation] Photo-electro-chemical properties of GaN2010

    • Author(s)
      Fujii, K., Goto, T., Yao, T.
    • Organizer
      International Workshop on Nitride Semiconductor 2010
    • Place of Presentation
      Tampa、Florida、USA.
    • Year and Date
      2010-09-21
    • Related Report
      2011 Final Research Report
  • [Presentation] Photo-electro-chemical properties of GaN2010

    • Author(s)
      Fujii, K, Goto, T, Yao, T
    • Organizer
      International Workshop on Nitride Semiconductor 2010
    • Place of Presentation
      Tampa、Florida、USA
    • Year and Date
      2010-09-21
    • Related Report
      2010 Annual Research Report
  • [Presentation] Growth of free-standing GaN substrates (Invited)2010

    • Author(s)
      HJ Lee, SW Lee, JS Ha, C Kim, JH Chang, K. Fujii, and T. Yao
    • Organizer
      SPIE Photonics West
    • Place of Presentation
      The Moscone Center, San Francisco, USA
    • Year and Date
      2010-01-25
    • Related Report
      2011 Final Research Report
  • [Presentation] Growth of free-standing GaN substrates(Invited)2010

    • Author(s)
      HJ Lee, SW Lee, JS Ha, C Kim, JH Chang, K Fujii, T Yao
    • Organizer
      SPIE Photonics West
    • Place of Presentation
      The Moscone Center, San Francisco, USA
    • Year and Date
      2010-01-25
    • Related Report
      2009 Annual Research Report
  • [Book] 発光ダイオード2011

    • Author(s)
      八百隆文、藤井克司、神門賢二
    • Total Pages
      352
    • Publisher
      朝倉書店
    • Related Report
      2011 Final Research Report
  • [Book] Oxide and Nitride Semiconductors2009

    • Author(s)
      T. Yao and S. K. Hong
    • Total Pages
      517
    • Publisher
      Springer
    • Related Report
      2011 Final Research Report
  • [Remarks]

    • URL

      http://www.ir.tohoku.ac.jp/yao

    • Related Report
      2011 Final Research Report

URL: 

Published: 2009-04-01   Modified: 2016-04-21  

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